JPS5179900A - - Google Patents

Info

Publication number
JPS5179900A
JPS5179900A JP50000072A JP7275A JPS5179900A JP S5179900 A JPS5179900 A JP S5179900A JP 50000072 A JP50000072 A JP 50000072A JP 7275 A JP7275 A JP 7275A JP S5179900 A JPS5179900 A JP S5179900A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50000072A
Other languages
Japanese (ja)
Inventor
Katsumi Tokikuchi
Kunyuki Sakumichi
Ichiro Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50000072A priority Critical patent/JPS5179900A/ja
Publication of JPS5179900A publication Critical patent/JPS5179900A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP50000072A 1975-01-06 1975-01-06 Pending JPS5179900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50000072A JPS5179900A (en) 1975-01-06 1975-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50000072A JPS5179900A (en) 1975-01-06 1975-01-06

Publications (1)

Publication Number Publication Date
JPS5179900A true JPS5179900A (en) 1976-07-12

Family

ID=11463961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50000072A Pending JPS5179900A (en) 1975-01-06 1975-01-06

Country Status (1)

Country Link
JP (1) JPS5179900A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02199761A (en) * 1989-01-30 1990-08-08 Nippon Telegr & Teleph Corp <Ntt> Secondary ion mass spectrometry device
JPH03214600A (en) * 1990-01-17 1991-09-19 Nippon Koshuha Kk Microwave heated plasma reaction device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02199761A (en) * 1989-01-30 1990-08-08 Nippon Telegr & Teleph Corp <Ntt> Secondary ion mass spectrometry device
JPH03214600A (en) * 1990-01-17 1991-09-19 Nippon Koshuha Kk Microwave heated plasma reaction device

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