JPS5176968A - KISOSEICHOHO - Google Patents
KISOSEICHOHOInfo
- Publication number
- JPS5176968A JPS5176968A JP14886774A JP14886774A JPS5176968A JP S5176968 A JPS5176968 A JP S5176968A JP 14886774 A JP14886774 A JP 14886774A JP 14886774 A JP14886774 A JP 14886774A JP S5176968 A JPS5176968 A JP S5176968A
- Authority
- JP
- Japan
- Prior art keywords
- kisoseichoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14886774A JPS5176968A (en) | 1974-12-27 | 1974-12-27 | KISOSEICHOHO |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14886774A JPS5176968A (en) | 1974-12-27 | 1974-12-27 | KISOSEICHOHO |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5176968A true JPS5176968A (en) | 1976-07-03 |
Family
ID=15462495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14886774A Pending JPS5176968A (en) | 1974-12-27 | 1974-12-27 | KISOSEICHOHO |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5176968A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60109222A (en) * | 1983-11-18 | 1985-06-14 | Nec Corp | Device for vapor growth of compound semiconductor of iii-v group |
JP2011021278A (en) * | 2003-04-16 | 2011-02-03 | Cree Inc | Method and apparatus for controlling formation of deposit in deposition system and deposition system and method including the same |
-
1974
- 1974-12-27 JP JP14886774A patent/JPS5176968A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60109222A (en) * | 1983-11-18 | 1985-06-14 | Nec Corp | Device for vapor growth of compound semiconductor of iii-v group |
JP2011021278A (en) * | 2003-04-16 | 2011-02-03 | Cree Inc | Method and apparatus for controlling formation of deposit in deposition system and deposition system and method including the same |
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