JPS5152425Y2 - - Google Patents
Info
- Publication number
- JPS5152425Y2 JPS5152425Y2 JP8625472U JP8625472U JPS5152425Y2 JP S5152425 Y2 JPS5152425 Y2 JP S5152425Y2 JP 8625472 U JP8625472 U JP 8625472U JP 8625472 U JP8625472 U JP 8625472U JP S5152425 Y2 JPS5152425 Y2 JP S5152425Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8625472U JPS5152425Y2 (en) | 1972-07-21 | 1972-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8625472U JPS5152425Y2 (en) | 1972-07-21 | 1972-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4943181U JPS4943181U (en) | 1974-04-16 |
| JPS5152425Y2 true JPS5152425Y2 (en) | 1976-12-15 |
Family
ID=27996869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8625472U Expired JPS5152425Y2 (en) | 1972-07-21 | 1972-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5152425Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100246963B1 (en) * | 1996-11-22 | 2000-03-15 | 윤종용 | Stage for wafer holdring of semiconductor device manufacturing apparatus |
-
1972
- 1972-07-21 JP JP8625472U patent/JPS5152425Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100246963B1 (en) * | 1996-11-22 | 2000-03-15 | 윤종용 | Stage for wafer holdring of semiconductor device manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4943181U (en) | 1974-04-16 |