JPS5141585A - Butsutaino hyomentono ketsukantoo kogakutekinikenchisuru hoho - Google Patents

Butsutaino hyomentono ketsukantoo kogakutekinikenchisuru hoho

Info

Publication number
JPS5141585A
JPS5141585A JP11532374A JP11532374A JPS5141585A JP S5141585 A JPS5141585 A JP S5141585A JP 11532374 A JP11532374 A JP 11532374A JP 11532374 A JP11532374 A JP 11532374A JP S5141585 A JPS5141585 A JP S5141585A
Authority
JP
Japan
Prior art keywords
kogakutekinikenchisuru
ketsukantoo
hyomentono
butsutaino
hoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11532374A
Other languages
Japanese (ja)
Other versions
JPS5918656B2 (en
Inventor
Masamichi Yataki
Hideyo Takahata
Tadao Shimomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11532374A priority Critical patent/JPS5918656B2/en
Publication of JPS5141585A publication Critical patent/JPS5141585A/en
Priority to US05/784,328 priority patent/US4097160A/en
Publication of JPS5918656B2 publication Critical patent/JPS5918656B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11532374A 1974-09-06 1974-10-07 Surface inspection method Expired JPS5918656B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11532374A JPS5918656B2 (en) 1974-10-07 1974-10-07 Surface inspection method
US05/784,328 US4097160A (en) 1974-09-06 1977-04-04 Method for inspecting object defection by light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11532374A JPS5918656B2 (en) 1974-10-07 1974-10-07 Surface inspection method

Publications (2)

Publication Number Publication Date
JPS5141585A true JPS5141585A (en) 1976-04-07
JPS5918656B2 JPS5918656B2 (en) 1984-04-28

Family

ID=14659726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11532374A Expired JPS5918656B2 (en) 1974-09-06 1974-10-07 Surface inspection method

Country Status (1)

Country Link
JP (1) JPS5918656B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979844A (en) * 1982-10-29 1984-05-09 Matsushita Electric Works Ltd Apparatus for detecting surface defect
JPH0230582A (en) * 1988-07-21 1990-01-31 Somar Corp Recording film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979844A (en) * 1982-10-29 1984-05-09 Matsushita Electric Works Ltd Apparatus for detecting surface defect
JPH0230582A (en) * 1988-07-21 1990-01-31 Somar Corp Recording film

Also Published As

Publication number Publication date
JPS5918656B2 (en) 1984-04-28

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