JPS51151738A - Apparatus for spin coating - Google Patents
Apparatus for spin coatingInfo
- Publication number
- JPS51151738A JPS51151738A JP7559675A JP7559675A JPS51151738A JP S51151738 A JPS51151738 A JP S51151738A JP 7559675 A JP7559675 A JP 7559675A JP 7559675 A JP7559675 A JP 7559675A JP S51151738 A JPS51151738 A JP S51151738A
- Authority
- JP
- Japan
- Prior art keywords
- spin coating
- liquid
- photo
- spin coater
- uniform coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
PURPOSE: A spin coater for the uniform coating of photo-resist liquid without splashing back of the liquid.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7559675A JPS51151738A (en) | 1975-06-23 | 1975-06-23 | Apparatus for spin coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7559675A JPS51151738A (en) | 1975-06-23 | 1975-06-23 | Apparatus for spin coating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51151738A true JPS51151738A (en) | 1976-12-27 |
Family
ID=13580730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7559675A Pending JPS51151738A (en) | 1975-06-23 | 1975-06-23 | Apparatus for spin coating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51151738A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55163526A (en) * | 1979-11-16 | 1980-12-19 | Sony Corp | Production of screen for projection |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493462B1 (en) * | 1970-10-06 | 1974-01-26 |
-
1975
- 1975-06-23 JP JP7559675A patent/JPS51151738A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493462B1 (en) * | 1970-10-06 | 1974-01-26 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55163526A (en) * | 1979-11-16 | 1980-12-19 | Sony Corp | Production of screen for projection |
JPS586933B2 (en) * | 1979-11-16 | 1983-02-07 | ソニー株式会社 | Method of manufacturing a projection screen |
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