JPS51151082A - Manufacturing method of a vertical connection type field effect transi stor - Google Patents

Manufacturing method of a vertical connection type field effect transi stor

Info

Publication number
JPS51151082A
JPS51151082A JP7591475A JP7591475A JPS51151082A JP S51151082 A JPS51151082 A JP S51151082A JP 7591475 A JP7591475 A JP 7591475A JP 7591475 A JP7591475 A JP 7591475A JP S51151082 A JPS51151082 A JP S51151082A
Authority
JP
Japan
Prior art keywords
manufacturing
field effect
type field
connection type
vertical connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7591475A
Other languages
Japanese (ja)
Other versions
JPS565073B2 (en
Inventor
Kosuke Yasuno
Kosei Kajiwara
Tatsunori Nakajima
Kuni Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7591475A priority Critical patent/JPS51151082A/en
Publication of JPS51151082A publication Critical patent/JPS51151082A/en
Publication of JPS565073B2 publication Critical patent/JPS565073B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To be able to surely control the form with the high impurities density of the channel, not to use the gate contact spreading process from the epitaxial surface, and to make the gate electrode as the same height, and, at the same time, the manufacturing method of the vertical EFT of the easy manufacturing.
COPYRIGHT: (C)1976,JPO&Japio
JP7591475A 1975-06-20 1975-06-20 Manufacturing method of a vertical connection type field effect transi stor Granted JPS51151082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7591475A JPS51151082A (en) 1975-06-20 1975-06-20 Manufacturing method of a vertical connection type field effect transi stor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7591475A JPS51151082A (en) 1975-06-20 1975-06-20 Manufacturing method of a vertical connection type field effect transi stor

Publications (2)

Publication Number Publication Date
JPS51151082A true JPS51151082A (en) 1976-12-25
JPS565073B2 JPS565073B2 (en) 1981-02-03

Family

ID=13590058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7591475A Granted JPS51151082A (en) 1975-06-20 1975-06-20 Manufacturing method of a vertical connection type field effect transi stor

Country Status (1)

Country Link
JP (1) JPS51151082A (en)

Also Published As

Publication number Publication date
JPS565073B2 (en) 1981-02-03

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