JPS51142981A - Production method of semiconductor devices - Google Patents
Production method of semiconductor devicesInfo
- Publication number
- JPS51142981A JPS51142981A JP6655775A JP6655775A JPS51142981A JP S51142981 A JPS51142981 A JP S51142981A JP 6655775 A JP6655775 A JP 6655775A JP 6655775 A JP6655775 A JP 6655775A JP S51142981 A JPS51142981 A JP S51142981A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor devices
- production method
- electrodes
- remainers
- leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To remove silicon remainers between electrodes, in order to make free of leakage and to avoid the appearance trouble in semiconductor devices utilizing aluminum electrodes containing silicon.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655775A JPS51142981A (en) | 1975-06-04 | 1975-06-04 | Production method of semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655775A JPS51142981A (en) | 1975-06-04 | 1975-06-04 | Production method of semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51142981A true JPS51142981A (en) | 1976-12-08 |
Family
ID=13319328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6655775A Pending JPS51142981A (en) | 1975-06-04 | 1975-06-04 | Production method of semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51142981A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160043A (en) * | 1980-05-13 | 1981-12-09 | Mitsubishi Metal Corp | Prevention from contamination for surface of semiconductor wafer |
-
1975
- 1975-06-04 JP JP6655775A patent/JPS51142981A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160043A (en) * | 1980-05-13 | 1981-12-09 | Mitsubishi Metal Corp | Prevention from contamination for surface of semiconductor wafer |
JPH0440857B2 (en) * | 1980-05-13 | 1992-07-06 | Mitsubishi Materiaru Kk |
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