JPS51126083A - Manufacturing method of semi-conductor equpment - Google Patents
Manufacturing method of semi-conductor equpmentInfo
- Publication number
- JPS51126083A JPS51126083A JP4969775A JP4969775A JPS51126083A JP S51126083 A JPS51126083 A JP S51126083A JP 4969775 A JP4969775 A JP 4969775A JP 4969775 A JP4969775 A JP 4969775A JP S51126083 A JPS51126083 A JP S51126083A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- conductor
- equpment
- manufacturing
- lessen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: On the semi-conductor equipment which protects leak current yielding to the semi-conductor base plate and lessen the masking process.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969775A JPS51126083A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969775A JPS51126083A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51126083A true JPS51126083A (en) | 1976-11-02 |
Family
ID=12838360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4969775A Pending JPS51126083A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126083A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5736842A (en) * | 1980-08-15 | 1982-02-27 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5817634A (en) * | 1981-07-24 | 1983-02-01 | Hitachi Ltd | Manufacture of semiconductor device |
JPS6185869A (en) * | 1984-10-04 | 1986-05-01 | Nec Corp | Manufacture of semiconductor device |
JPS62104158A (en) * | 1985-10-31 | 1987-05-14 | Nec Corp | Semiconductor integrated circuit device |
-
1975
- 1975-04-25 JP JP4969775A patent/JPS51126083A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5736842A (en) * | 1980-08-15 | 1982-02-27 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5817634A (en) * | 1981-07-24 | 1983-02-01 | Hitachi Ltd | Manufacture of semiconductor device |
JPS6185869A (en) * | 1984-10-04 | 1986-05-01 | Nec Corp | Manufacture of semiconductor device |
JPH053149B2 (en) * | 1984-10-04 | 1993-01-14 | Nippon Electric Co | |
JPS62104158A (en) * | 1985-10-31 | 1987-05-14 | Nec Corp | Semiconductor integrated circuit device |
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