JPS51117581A - Manufacturing method of mos type semiconductor equipment - Google Patents
Manufacturing method of mos type semiconductor equipmentInfo
- Publication number
- JPS51117581A JPS51117581A JP4249575A JP4249575A JPS51117581A JP S51117581 A JPS51117581 A JP S51117581A JP 4249575 A JP4249575 A JP 4249575A JP 4249575 A JP4249575 A JP 4249575A JP S51117581 A JPS51117581 A JP S51117581A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- type semiconductor
- mos type
- semiconductor equipment
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve on the threshold voltage control of the Si gate MOS device.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4249575A JPS51117581A (en) | 1975-04-07 | 1975-04-07 | Manufacturing method of mos type semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4249575A JPS51117581A (en) | 1975-04-07 | 1975-04-07 | Manufacturing method of mos type semiconductor equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51117581A true JPS51117581A (en) | 1976-10-15 |
Family
ID=12637628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4249575A Pending JPS51117581A (en) | 1975-04-07 | 1975-04-07 | Manufacturing method of mos type semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51117581A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377182A (en) * | 1976-12-20 | 1978-07-08 | Fujitsu Ltd | Production of mos type semiconductor device |
-
1975
- 1975-04-07 JP JP4249575A patent/JPS51117581A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377182A (en) * | 1976-12-20 | 1978-07-08 | Fujitsu Ltd | Production of mos type semiconductor device |
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