JPS51110964A - SOSAGATA DENSHIKENBIKYO - Google Patents

SOSAGATA DENSHIKENBIKYO

Info

Publication number
JPS51110964A
JPS51110964A JP3552075A JP3552075A JPS51110964A JP S51110964 A JPS51110964 A JP S51110964A JP 3552075 A JP3552075 A JP 3552075A JP 3552075 A JP3552075 A JP 3552075A JP S51110964 A JPS51110964 A JP S51110964A
Authority
JP
Japan
Prior art keywords
sosagata
denshikenbikyo
sosagata denshikenbikyo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3552075A
Other languages
Japanese (ja)
Other versions
JPS5344786B2 (en
Inventor
Fumio Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3552075A priority Critical patent/JPS51110964A/en
Publication of JPS51110964A publication Critical patent/JPS51110964A/en
Publication of JPS5344786B2 publication Critical patent/JPS5344786B2/ja
Granted legal-status Critical Current

Links

JP3552075A 1975-03-26 1975-03-26 SOSAGATA DENSHIKENBIKYO Granted JPS51110964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3552075A JPS51110964A (en) 1975-03-26 1975-03-26 SOSAGATA DENSHIKENBIKYO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3552075A JPS51110964A (en) 1975-03-26 1975-03-26 SOSAGATA DENSHIKENBIKYO

Publications (2)

Publication Number Publication Date
JPS51110964A true JPS51110964A (en) 1976-09-30
JPS5344786B2 JPS5344786B2 (en) 1978-12-01

Family

ID=12444015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3552075A Granted JPS51110964A (en) 1975-03-26 1975-03-26 SOSAGATA DENSHIKENBIKYO

Country Status (1)

Country Link
JP (1) JPS51110964A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108735A (en) * 1979-02-13 1980-08-21 Fujitsu Ltd Method for maintenance of electron beam exposure device
JPS57199945U (en) * 1981-06-15 1982-12-18
JPH0233844A (en) * 1988-07-22 1990-02-05 Hitachi Ltd Electronic microscope
JP2007305499A (en) * 2006-05-15 2007-11-22 Hitachi High-Technologies Corp Differential pumping scanning electron microscope
JP2009037966A (en) * 2007-08-03 2009-02-19 Hitachi High-Technologies Corp Scanning electron microscope
EP2329252A1 (en) * 2008-09-28 2011-06-08 B-Nano Ltd. A vacuumed device and a scanning electron microscope
US9431213B2 (en) 2008-07-03 2016-08-30 B-Nano Ltd. Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
US9466458B2 (en) 2013-02-20 2016-10-11 B-Nano Ltd. Scanning electron microscope

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108735A (en) * 1979-02-13 1980-08-21 Fujitsu Ltd Method for maintenance of electron beam exposure device
JPS57199945U (en) * 1981-06-15 1982-12-18
JPS6338523Y2 (en) * 1981-06-15 1988-10-11
JPH0233844A (en) * 1988-07-22 1990-02-05 Hitachi Ltd Electronic microscope
JP2007305499A (en) * 2006-05-15 2007-11-22 Hitachi High-Technologies Corp Differential pumping scanning electron microscope
JP2009037966A (en) * 2007-08-03 2009-02-19 Hitachi High-Technologies Corp Scanning electron microscope
US9431213B2 (en) 2008-07-03 2016-08-30 B-Nano Ltd. Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
EP2329252A1 (en) * 2008-09-28 2011-06-08 B-Nano Ltd. A vacuumed device and a scanning electron microscope
EP2329252A4 (en) * 2008-09-28 2012-04-11 Nano Ltd B A vacuumed device and a scanning electron microscope
US9466458B2 (en) 2013-02-20 2016-10-11 B-Nano Ltd. Scanning electron microscope

Also Published As

Publication number Publication date
JPS5344786B2 (en) 1978-12-01

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