JPS5110761A - - Google Patents
Info
- Publication number
- JPS5110761A JPS5110761A JP49081952A JP8195274A JPS5110761A JP S5110761 A JPS5110761 A JP S5110761A JP 49081952 A JP49081952 A JP 49081952A JP 8195274 A JP8195274 A JP 8195274A JP S5110761 A JPS5110761 A JP S5110761A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49081952A JPS5927075B2 (ja) | 1974-07-17 | 1974-07-17 | 走査型電子顕微鏡 |
| US05/577,989 US4011450A (en) | 1974-07-17 | 1975-05-16 | Scanning electron device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49081952A JPS5927075B2 (ja) | 1974-07-17 | 1974-07-17 | 走査型電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5110761A true JPS5110761A (ja) | 1976-01-28 |
| JPS5927075B2 JPS5927075B2 (ja) | 1984-07-03 |
Family
ID=13760823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49081952A Expired JPS5927075B2 (ja) | 1974-07-17 | 1974-07-17 | 走査型電子顕微鏡 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4011450A (ja) |
| JP (1) | JPS5927075B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5332667A (en) * | 1976-09-07 | 1978-03-28 | Hitachi Ltd | Secondary electron detector |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3235698A1 (de) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung |
| US4680468A (en) * | 1985-08-05 | 1987-07-14 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Particle detector |
| DE3602366A1 (de) * | 1986-01-27 | 1987-07-30 | Siemens Ag | Verfahren und anordnung zum nachweis der auf einer probe von einem primaeren korpuskularstrahl ausgeloesten sekundaerkorpuskeln |
| GB8604181D0 (en) * | 1986-02-20 | 1986-03-26 | Texas Instruments Ltd | Electron beam apparatus |
| US5493116A (en) * | 1993-10-26 | 1996-02-20 | Metrologix, Inc. | Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices |
| US6777675B2 (en) * | 2001-04-18 | 2004-08-17 | Multibeam | Detector optics for electron beam inspection system |
| US7122795B2 (en) * | 2001-04-18 | 2006-10-17 | Multibeam Systems, Inc. | Detector optics for charged particle beam inspection system |
| CZ20022105A3 (cs) * | 2002-06-17 | 2004-02-18 | Tescan, S. R. O. | Detektor sekundárních elektronů, zejména v rastrovacím elektronovém mikroskopu |
| GB2442027B (en) * | 2006-09-23 | 2009-08-26 | Zeiss Carl Smt Ltd | Charged particle beam instrument and method of detecting charged particles |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4834066A (ja) * | 1971-09-06 | 1973-05-15 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3792263A (en) * | 1972-09-13 | 1974-02-12 | Jeol Ltd | Scanning electron microscope with means to remove low energy electrons from the primary electron beam |
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1974
- 1974-07-17 JP JP49081952A patent/JPS5927075B2/ja not_active Expired
-
1975
- 1975-05-16 US US05/577,989 patent/US4011450A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4834066A (ja) * | 1971-09-06 | 1973-05-15 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5332667A (en) * | 1976-09-07 | 1978-03-28 | Hitachi Ltd | Secondary electron detector |
Also Published As
| Publication number | Publication date |
|---|---|
| US4011450A (en) | 1977-03-08 |
| JPS5927075B2 (ja) | 1984-07-03 |