JPS51103879A - IONPUREETEINGUSOCHI - Google Patents

IONPUREETEINGUSOCHI

Info

Publication number
JPS51103879A
JPS51103879A JP2901375A JP2901375A JPS51103879A JP S51103879 A JPS51103879 A JP S51103879A JP 2901375 A JP2901375 A JP 2901375A JP 2901375 A JP2901375 A JP 2901375A JP S51103879 A JPS51103879 A JP S51103879A
Authority
JP
Japan
Prior art keywords
ionpureeteingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2901375A
Other languages
Japanese (ja)
Inventor
Keizo Suzuki
Sadayuki Okudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2901375A priority Critical patent/JPS51103879A/en
Publication of JPS51103879A publication Critical patent/JPS51103879A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2901375A 1975-03-12 1975-03-12 IONPUREETEINGUSOCHI Pending JPS51103879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2901375A JPS51103879A (en) 1975-03-12 1975-03-12 IONPUREETEINGUSOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2901375A JPS51103879A (en) 1975-03-12 1975-03-12 IONPUREETEINGUSOCHI

Publications (1)

Publication Number Publication Date
JPS51103879A true JPS51103879A (en) 1976-09-14

Family

ID=12264515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2901375A Pending JPS51103879A (en) 1975-03-12 1975-03-12 IONPUREETEINGUSOCHI

Country Status (1)

Country Link
JP (1) JPS51103879A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200755A (en) * 1983-04-22 1984-11-14 ホワイト・エンジニアリング・コ−パレイシヤン Ion plating process
JPS6465261A (en) * 1987-05-25 1989-03-10 Takayuki Katsube Vapor deposition method by plasma ionization
WO2014129039A1 (en) * 2013-02-21 2014-08-28 中外炉工業株式会社 Film formation method and film formation device
JP2017061752A (en) * 2013-03-08 2017-03-30 株式会社島津製作所 Arc plasma film deposition apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200755A (en) * 1983-04-22 1984-11-14 ホワイト・エンジニアリング・コ−パレイシヤン Ion plating process
JPS6465261A (en) * 1987-05-25 1989-03-10 Takayuki Katsube Vapor deposition method by plasma ionization
WO2014129039A1 (en) * 2013-02-21 2014-08-28 中外炉工業株式会社 Film formation method and film formation device
JP2014162931A (en) * 2013-02-21 2014-09-08 Chugai Ro Co Ltd Film deposition method and film deposition apparatus
JP2017061752A (en) * 2013-03-08 2017-03-30 株式会社島津製作所 Arc plasma film deposition apparatus

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