JPS5099357A - - Google Patents
Info
- Publication number
- JPS5099357A JPS5099357A JP141574A JP141574A JPS5099357A JP S5099357 A JPS5099357 A JP S5099357A JP 141574 A JP141574 A JP 141574A JP 141574 A JP141574 A JP 141574A JP S5099357 A JPS5099357 A JP S5099357A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP741415A JPS578402B2 (ja) | 1973-12-28 | 1973-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP741415A JPS578402B2 (ja) | 1973-12-28 | 1973-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5099357A true JPS5099357A (ja) | 1975-08-07 |
| JPS578402B2 JPS578402B2 (ja) | 1982-02-16 |
Family
ID=11500836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP741415A Expired JPS578402B2 (ja) | 1973-12-28 | 1973-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578402B2 (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333649A (en) * | 1976-09-09 | 1978-03-29 | Handotai Kenkyu Shinkokai | Method of and apparatus for detecting distance |
| JPS6167513U (ja) * | 1984-10-09 | 1986-05-09 | ||
| JPS63108202A (ja) * | 1986-10-27 | 1988-05-13 | Nippon Telegr & Teleph Corp <Ntt> | 微少隙間の測定方法及びその測定装置 |
| JPS63128218A (ja) * | 1986-11-18 | 1988-05-31 | Toyobo Co Ltd | 距離測定方法 |
| JPH09101460A (ja) * | 1995-10-06 | 1997-04-15 | Yoshinori Hiraiwa | 共焦点走査光学顕微鏡 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
-
1973
- 1973-12-28 JP JP741415A patent/JPS578402B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333649A (en) * | 1976-09-09 | 1978-03-29 | Handotai Kenkyu Shinkokai | Method of and apparatus for detecting distance |
| JPS6167513U (ja) * | 1984-10-09 | 1986-05-09 | ||
| JPS63108202A (ja) * | 1986-10-27 | 1988-05-13 | Nippon Telegr & Teleph Corp <Ntt> | 微少隙間の測定方法及びその測定装置 |
| JPS63128218A (ja) * | 1986-11-18 | 1988-05-31 | Toyobo Co Ltd | 距離測定方法 |
| JPH09101460A (ja) * | 1995-10-06 | 1997-04-15 | Yoshinori Hiraiwa | 共焦点走査光学顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS578402B2 (ja) | 1982-02-16 |