JPS50543U - - Google Patents

Info

Publication number
JPS50543U
JPS50543U JP5083873U JP5083873U JPS50543U JP S50543 U JPS50543 U JP S50543U JP 5083873 U JP5083873 U JP 5083873U JP 5083873 U JP5083873 U JP 5083873U JP S50543 U JPS50543 U JP S50543U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5083873U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5083873U priority Critical patent/JPS50543U/ja
Publication of JPS50543U publication Critical patent/JPS50543U/ja
Pending legal-status Critical Current

Links

JP5083873U 1973-04-30 1973-04-30 Pending JPS50543U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5083873U JPS50543U (en) 1973-04-30 1973-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5083873U JPS50543U (en) 1973-04-30 1973-04-30

Publications (1)

Publication Number Publication Date
JPS50543U true JPS50543U (en) 1975-01-07

Family

ID=28194988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5083873U Pending JPS50543U (en) 1973-04-30 1973-04-30

Country Status (1)

Country Link
JP (1) JPS50543U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS489370U (en) * 1971-06-15 1973-02-01
JP2001230056A (en) * 2000-02-15 2001-08-24 Bridgestone Corp Electrode for heater and apparatus for producing semiconductor
JP2002124364A (en) * 2000-10-17 2002-04-26 Bridgestone Corp Heater and semiconductor manufacturing apparatus
JP2011040343A (en) * 2009-08-18 2011-02-24 National Institute Of Advanced Industrial Science & Technology Porous heating device, and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS489370U (en) * 1971-06-15 1973-02-01
JP2001230056A (en) * 2000-02-15 2001-08-24 Bridgestone Corp Electrode for heater and apparatus for producing semiconductor
JP4521083B2 (en) * 2000-02-15 2010-08-11 株式会社ブリヂストン Heater electrode and semiconductor manufacturing apparatus
JP2002124364A (en) * 2000-10-17 2002-04-26 Bridgestone Corp Heater and semiconductor manufacturing apparatus
JP2011040343A (en) * 2009-08-18 2011-02-24 National Institute Of Advanced Industrial Science & Technology Porous heating device, and manufacturing method thereof

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