JPS50543U - - Google Patents
Info
- Publication number
- JPS50543U JPS50543U JP5083873U JP5083873U JPS50543U JP S50543 U JPS50543 U JP S50543U JP 5083873 U JP5083873 U JP 5083873U JP 5083873 U JP5083873 U JP 5083873U JP S50543 U JPS50543 U JP S50543U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5083873U JPS50543U (en) | 1973-04-30 | 1973-04-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5083873U JPS50543U (en) | 1973-04-30 | 1973-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50543U true JPS50543U (en) | 1975-01-07 |
Family
ID=28194988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5083873U Pending JPS50543U (en) | 1973-04-30 | 1973-04-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50543U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS489370U (en) * | 1971-06-15 | 1973-02-01 | ||
JP2001230056A (en) * | 2000-02-15 | 2001-08-24 | Bridgestone Corp | Electrode for heater and apparatus for producing semiconductor |
JP2002124364A (en) * | 2000-10-17 | 2002-04-26 | Bridgestone Corp | Heater and semiconductor manufacturing apparatus |
JP2011040343A (en) * | 2009-08-18 | 2011-02-24 | National Institute Of Advanced Industrial Science & Technology | Porous heating device, and manufacturing method thereof |
-
1973
- 1973-04-30 JP JP5083873U patent/JPS50543U/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS489370U (en) * | 1971-06-15 | 1973-02-01 | ||
JP2001230056A (en) * | 2000-02-15 | 2001-08-24 | Bridgestone Corp | Electrode for heater and apparatus for producing semiconductor |
JP4521083B2 (en) * | 2000-02-15 | 2010-08-11 | 株式会社ブリヂストン | Heater electrode and semiconductor manufacturing apparatus |
JP2002124364A (en) * | 2000-10-17 | 2002-04-26 | Bridgestone Corp | Heater and semiconductor manufacturing apparatus |
JP2011040343A (en) * | 2009-08-18 | 2011-02-24 | National Institute Of Advanced Industrial Science & Technology | Porous heating device, and manufacturing method thereof |