JPS5037348A - - Google Patents
Info
- Publication number
- JPS5037348A JPS5037348A JP8755073A JP8755073A JPS5037348A JP S5037348 A JPS5037348 A JP S5037348A JP 8755073 A JP8755073 A JP 8755073A JP 8755073 A JP8755073 A JP 8755073A JP S5037348 A JPS5037348 A JP S5037348A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8755073A JPS5037348A (ko) | 1973-08-06 | 1973-08-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8755073A JPS5037348A (ko) | 1973-08-06 | 1973-08-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5037348A true JPS5037348A (ko) | 1975-04-08 |
Family
ID=13918083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8755073A Pending JPS5037348A (ko) | 1973-08-06 | 1973-08-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5037348A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5226160A (en) * | 1975-08-22 | 1977-02-26 | Wacker Chemitronic | Method of eliminating intrinsic crystal defect from semiconductor wafer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4839167A (ko) * | 1971-09-22 | 1973-06-08 |
-
1973
- 1973-08-06 JP JP8755073A patent/JPS5037348A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4839167A (ko) * | 1971-09-22 | 1973-06-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5226160A (en) * | 1975-08-22 | 1977-02-26 | Wacker Chemitronic | Method of eliminating intrinsic crystal defect from semiconductor wafer |