JPS5024081A - - Google Patents
Info
- Publication number
- JPS5024081A JPS5024081A JP49054628A JP5462874A JPS5024081A JP S5024081 A JPS5024081 A JP S5024081A JP 49054628 A JP49054628 A JP 49054628A JP 5462874 A JP5462874 A JP 5462874A JP S5024081 A JPS5024081 A JP S5024081A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
- H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/913—Active solid-state devices, e.g. transistors, solid-state diodes with means to absorb or localize unwanted impurities or defects from semiconductors, e.g. heavy metal gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/91—Controlling charging state at semiconductor-insulator interface
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US375295A US3887994A (en) | 1973-06-29 | 1973-06-29 | Method of manufacturing a semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5024081A true JPS5024081A (ja) | 1975-03-14 |
JPS5323067B2 JPS5323067B2 (ja) | 1978-07-12 |
Family
ID=23480293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5462874A Expired JPS5323067B2 (ja) | 1973-06-29 | 1974-05-17 |
Country Status (10)
Country | Link |
---|---|
US (1) | US3887994A (ja) |
JP (1) | JPS5323067B2 (ja) |
AU (1) | AU474451B2 (ja) |
CA (1) | CA1032658A (ja) |
CH (1) | CH568655A5 (ja) |
DE (1) | DE2425185C3 (ja) |
FR (1) | FR2235485B1 (ja) |
GB (1) | GB1466679A (ja) |
IT (1) | IT1010166B (ja) |
NL (1) | NL7408711A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56114159A (en) * | 1980-02-15 | 1981-09-08 | Pioneer Electronic Corp | Disc insertion detecting mechanism of autoloading player |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4230504B1 (en) * | 1978-04-27 | 1997-03-04 | Texas Instruments Inc | Method of making implant programmable N-channel rom |
US4290184A (en) * | 1978-03-20 | 1981-09-22 | Texas Instruments Incorporated | Method of making post-metal programmable MOS read only memory |
US4268950A (en) * | 1978-06-05 | 1981-05-26 | Texas Instruments Incorporated | Post-metal ion implant programmable MOS read only memory |
JPS55140986U (ja) * | 1979-03-28 | 1980-10-08 | ||
DE3217026A1 (de) * | 1981-05-06 | 1982-12-30 | Mitsubishi Denki K.K., Tokyo | Halbleitervorrichtung |
US4439261A (en) * | 1983-08-26 | 1984-03-27 | International Business Machines Corporation | Composite pallet |
US4584026A (en) * | 1984-07-25 | 1986-04-22 | Rca Corporation | Ion-implantation of phosphorus, arsenic or boron by pre-amorphizing with fluorine ions |
GB2165692B (en) * | 1984-08-25 | 1989-05-04 | Ricoh Kk | Manufacture of interconnection patterns |
GB8729652D0 (en) * | 1987-12-19 | 1988-02-03 | Plessey Co Plc | Semi-conductive devices fabricated on soi wafers |
JPH0750697B2 (ja) * | 1989-02-20 | 1995-05-31 | 株式会社東芝 | 半導体装置の製造方法 |
US5468974A (en) * | 1994-05-26 | 1995-11-21 | Lsi Logic Corporation | Control and modification of dopant distribution and activation in polysilicon |
US5432128A (en) * | 1994-05-27 | 1995-07-11 | Texas Instruments Incorporated | Reliability enhancement of aluminum interconnects by reacting aluminum leads with a strengthening gas |
US6093936A (en) * | 1995-06-07 | 2000-07-25 | Lsi Logic Corporation | Integrated circuit with isolation of field oxidation by noble gas implantation |
JPH09260374A (ja) * | 1995-09-27 | 1997-10-03 | Texas Instr Inc <Ti> | 集積回路の相互接続および方法 |
US6391754B1 (en) | 1996-09-27 | 2002-05-21 | Texas Instruments Incorporated | Method of making an integrated circuit interconnect |
US6613671B1 (en) | 2000-03-03 | 2003-09-02 | Micron Technology, Inc. | Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby |
DE102015120848B4 (de) * | 2015-12-01 | 2017-10-26 | Infineon Technologies Ag | Herstellen einer Kontaktschicht auf einem Halbleiterkörper |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836981A (ja) * | 1971-09-13 | 1973-05-31 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3515956A (en) * | 1967-10-16 | 1970-06-02 | Ion Physics Corp | High-voltage semiconductor device having a guard ring containing substitutionally active ions in interstitial positions |
US3600797A (en) * | 1967-12-26 | 1971-08-24 | Hughes Aircraft Co | Method of making ohmic contacts to semiconductor bodies by indirect ion implantation |
JPS4837232B1 (ja) * | 1968-12-04 | 1973-11-09 | ||
BE759057A (ja) * | 1969-11-19 | 1971-05-17 | Philips Nv | |
US3682729A (en) * | 1969-12-30 | 1972-08-08 | Ibm | Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby |
US3756861A (en) * | 1972-03-13 | 1973-09-04 | Bell Telephone Labor Inc | Bipolar transistors and method of manufacture |
-
1973
- 1973-06-29 US US375295A patent/US3887994A/en not_active Expired - Lifetime
-
1974
- 1974-04-24 GB GB1782374A patent/GB1466679A/en not_active Expired
- 1974-04-29 IT IT21997/74A patent/IT1010166B/it active
- 1974-05-03 AU AU68568/74A patent/AU474451B2/en not_active Expired
- 1974-05-17 JP JP5462874A patent/JPS5323067B2/ja not_active Expired
- 1974-05-21 FR FR7418493A patent/FR2235485B1/fr not_active Expired
- 1974-05-24 DE DE2425185A patent/DE2425185C3/de not_active Expired
- 1974-06-04 CA CA201,600A patent/CA1032658A/en not_active Expired
- 1974-06-06 CH CH772274A patent/CH568655A5/xx not_active IP Right Cessation
- 1974-06-27 NL NL7408711A patent/NL7408711A/xx not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836981A (ja) * | 1971-09-13 | 1973-05-31 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56114159A (en) * | 1980-02-15 | 1981-09-08 | Pioneer Electronic Corp | Disc insertion detecting mechanism of autoloading player |
JPH0123866B2 (ja) * | 1980-02-15 | 1989-05-09 | Pioneer Electronic Corp |
Also Published As
Publication number | Publication date |
---|---|
DE2425185A1 (de) | 1975-01-16 |
CH568655A5 (ja) | 1975-10-31 |
GB1466679A (en) | 1977-03-09 |
FR2235485B1 (ja) | 1976-12-24 |
AU474451B2 (en) | 1976-07-22 |
DE2425185B2 (de) | 1977-11-10 |
NL7408711A (ja) | 1974-12-31 |
DE2425185C3 (de) | 1978-07-06 |
FR2235485A1 (ja) | 1975-01-24 |
JPS5323067B2 (ja) | 1978-07-12 |
IT1010166B (it) | 1977-01-10 |
CA1032658A (en) | 1978-06-06 |
AU6856874A (en) | 1975-11-06 |
US3887994A (en) | 1975-06-10 |