JPS50159268A - - Google Patents
Info
- Publication number
- JPS50159268A JPS50159268A JP49066753A JP6675374A JPS50159268A JP S50159268 A JPS50159268 A JP S50159268A JP 49066753 A JP49066753 A JP 49066753A JP 6675374 A JP6675374 A JP 6675374A JP S50159268 A JPS50159268 A JP S50159268A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6675374A JPS563618B2 (en) | 1974-06-11 | 1974-06-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6675374A JPS563618B2 (en) | 1974-06-11 | 1974-06-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50159268A true JPS50159268A (en) | 1975-12-23 |
JPS563618B2 JPS563618B2 (en) | 1981-01-26 |
Family
ID=13324946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6675374A Expired JPS563618B2 (en) | 1974-06-11 | 1974-06-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS563618B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000306818A (en) * | 1999-04-23 | 2000-11-02 | Nec Kansai Ltd | Exposure method of stripe pattern |
JP2007164085A (en) * | 2005-11-15 | 2007-06-28 | Nsk Ltd | Proximity exposure method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852479A (en) * | 1971-11-05 | 1973-07-23 |
-
1974
- 1974-06-11 JP JP6675374A patent/JPS563618B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852479A (en) * | 1971-11-05 | 1973-07-23 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000306818A (en) * | 1999-04-23 | 2000-11-02 | Nec Kansai Ltd | Exposure method of stripe pattern |
JP2007164085A (en) * | 2005-11-15 | 2007-06-28 | Nsk Ltd | Proximity exposure method |
Also Published As
Publication number | Publication date |
---|---|
JPS563618B2 (en) | 1981-01-26 |