JPS50109184A - - Google Patents
Info
- Publication number
- JPS50109184A JPS50109184A JP49014889A JP1488974A JPS50109184A JP S50109184 A JPS50109184 A JP S50109184A JP 49014889 A JP49014889 A JP 49014889A JP 1488974 A JP1488974 A JP 1488974A JP S50109184 A JPS50109184 A JP S50109184A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1488974A JPS5527149B2 (fr) | 1974-02-07 | 1974-02-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1488974A JPS5527149B2 (fr) | 1974-02-07 | 1974-02-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50109184A true JPS50109184A (fr) | 1975-08-28 |
JPS5527149B2 JPS5527149B2 (fr) | 1980-07-18 |
Family
ID=11873567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1488974A Expired JPS5527149B2 (fr) | 1974-02-07 | 1974-02-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5527149B2 (fr) |
-
1974
- 1974-02-07 JP JP1488974A patent/JPS5527149B2/ja not_active Expired
Non-Patent Citations (1)
Title |
---|
IBM TECHNICAL DISCLOSURE BULLETIN#N8=1968 * |
Also Published As
Publication number | Publication date |
---|---|
JPS5527149B2 (fr) | 1980-07-18 |