JPS498188A - - Google Patents
Info
- Publication number
- JPS498188A JPS498188A JP4551972A JP4551972A JPS498188A JP S498188 A JPS498188 A JP S498188A JP 4551972 A JP4551972 A JP 4551972A JP 4551972 A JP4551972 A JP 4551972A JP S498188 A JPS498188 A JP S498188A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4551972A JPS498188A (xx) | 1972-05-10 | 1972-05-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4551972A JPS498188A (xx) | 1972-05-10 | 1972-05-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS498188A true JPS498188A (xx) | 1974-01-24 |
Family
ID=12721651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4551972A Pending JPS498188A (xx) | 1972-05-10 | 1972-05-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS498188A (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5957450A (ja) * | 1982-09-27 | 1984-04-03 | Nec Corp | 半導体装置の素子分離方法 |
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1972
- 1972-05-10 JP JP4551972A patent/JPS498188A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5957450A (ja) * | 1982-09-27 | 1984-04-03 | Nec Corp | 半導体装置の素子分離方法 |