JPS4947077A - - Google Patents
Info
- Publication number
- JPS4947077A JPS4947077A JP9120372A JP9120372A JPS4947077A JP S4947077 A JPS4947077 A JP S4947077A JP 9120372 A JP9120372 A JP 9120372A JP 9120372 A JP9120372 A JP 9120372A JP S4947077 A JPS4947077 A JP S4947077A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Furnace Details (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9120372A JPS4947077A (ja) | 1972-09-13 | 1972-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9120372A JPS4947077A (ja) | 1972-09-13 | 1972-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4947077A true JPS4947077A (ja) | 1974-05-07 |
Family
ID=14019858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9120372A Pending JPS4947077A (ja) | 1972-09-13 | 1972-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4947077A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244822A (en) * | 1975-06-13 | 1977-04-08 | Heraeus Quarzschmelze | Tube of vitreous matertal having nonncircular flow section and its production method |
| JPS5366394A (en) * | 1976-07-23 | 1978-06-13 | Kobishi Electric Co Ltd | Gong for alarm bell |
| JPS59145028U (ja) * | 1983-03-17 | 1984-09-28 | 日本電気ホームエレクトロニクス株式会社 | 半導体熱処理装置 |
| JPS62256966A (ja) * | 1986-04-30 | 1987-11-09 | Kyocera Corp | 成膜装置 |
| JPS62278272A (ja) * | 1986-05-24 | 1987-12-03 | Kyocera Corp | 量産型成膜装置 |
| JPS63108712A (ja) * | 1986-10-15 | 1988-05-13 | アドバンテージ・プロダクション・テクノロジー・コーポレーション | 半導体基板加熱方法及び装置 |
-
1972
- 1972-09-13 JP JP9120372A patent/JPS4947077A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244822A (en) * | 1975-06-13 | 1977-04-08 | Heraeus Quarzschmelze | Tube of vitreous matertal having nonncircular flow section and its production method |
| JPS5366394A (en) * | 1976-07-23 | 1978-06-13 | Kobishi Electric Co Ltd | Gong for alarm bell |
| JPS59145028U (ja) * | 1983-03-17 | 1984-09-28 | 日本電気ホームエレクトロニクス株式会社 | 半導体熱処理装置 |
| JPS62256966A (ja) * | 1986-04-30 | 1987-11-09 | Kyocera Corp | 成膜装置 |
| JPS62278272A (ja) * | 1986-05-24 | 1987-12-03 | Kyocera Corp | 量産型成膜装置 |
| JPS63108712A (ja) * | 1986-10-15 | 1988-05-13 | アドバンテージ・プロダクション・テクノロジー・コーポレーション | 半導体基板加熱方法及び装置 |