JPS493227B1 - - Google Patents
Info
- Publication number
- JPS493227B1 JPS493227B1 JP44097924A JP9792469A JPS493227B1 JP S493227 B1 JPS493227 B1 JP S493227B1 JP 44097924 A JP44097924 A JP 44097924A JP 9792469 A JP9792469 A JP 9792469A JP S493227 B1 JPS493227 B1 JP S493227B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78696268A | 1968-12-26 | 1968-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS493227B1 true JPS493227B1 (ja) | 1974-01-25 |
Family
ID=25140054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP44097924A Pending JPS493227B1 (ja) | 1968-12-26 | 1969-12-08 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3590372A (ja) |
JP (1) | JPS493227B1 (ja) |
DE (1) | DE1964522A1 (ja) |
FR (1) | FR2027114A1 (ja) |
GB (1) | GB1294477A (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4123706A (en) * | 1975-03-03 | 1978-10-31 | Electroglas, Inc. | Probe construction |
DE2628428C3 (de) * | 1976-06-24 | 1979-02-15 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Adapter zum Verbinden von Anschluß- und/oder Prüfpunkten einer Baugruppe mit einer Mefischaltung |
FR2418466A1 (fr) * | 1978-02-24 | 1979-09-21 | Telecommunications Sa | Appareil pour etablir des prises de contact temporaires sur des circuits electriques |
US4365195A (en) * | 1979-12-27 | 1982-12-21 | Communications Satellite Corporation | Coplanar waveguide mounting structure and test fixture for microwave integrated circuits |
US4757255A (en) * | 1986-03-03 | 1988-07-12 | National Semiconductor Corporation | Environmental box for automated wafer probing |
US4806856A (en) * | 1987-12-02 | 1989-02-21 | Northern Telecom Limited | Adjustable quick-mount test probe assembly |
KR0152260B1 (ko) * | 1988-07-08 | 1998-12-15 | 고다까 토시오 | 프로우브 장치 |
US4876430A (en) * | 1988-07-25 | 1989-10-24 | General Electric Company | Preweld test method |
EP0419725A1 (de) * | 1989-09-29 | 1991-04-03 | Hugo Dr. Moschüring | Messplatz für Mikrowellenbauelemente |
US5369372A (en) * | 1990-12-13 | 1994-11-29 | Interuniversitair Micro Elektronica Centrum Vzw | Method for resistance measurements on a semiconductor element with controlled probe pressure |
US5585734A (en) * | 1990-07-09 | 1996-12-17 | Interuniversitair Micro Elektronica Centrum Vzw | Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope |
US5691648A (en) * | 1992-11-10 | 1997-11-25 | Cheng; David | Method and apparatus for measuring sheet resistance and thickness of thin films and substrates |
US5723981A (en) * | 1994-08-29 | 1998-03-03 | Imec Vzw | Method for measuring the electrical potential in a semiconductor element |
US5818235A (en) * | 1996-10-24 | 1998-10-06 | Trw Inc. | Electrostatic discharge testing |
CN104528637B (zh) * | 2015-01-16 | 2016-06-08 | 长春理工大学 | 一种三探针机器人纳米操纵***及方法 |
CN106076891B (zh) * | 2016-08-31 | 2018-11-09 | 上海昭程整流子科技有限公司 | 一种微动开关特性的自动检查机 |
CN107942236B (zh) * | 2017-12-25 | 2024-05-24 | 南京栖霞科技产业发展有限公司 | 基于电机模拟的fct探针测试仪 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1426620A (en) * | 1919-10-10 | 1922-08-22 | Charles E Vawter | Rail-bond tester |
US1823471A (en) * | 1926-03-08 | 1931-09-15 | Roller Smith Company | Rail bond tester |
GB506173A (en) * | 1937-11-23 | 1939-05-23 | Evershed Vignoles Ltd | Improvements relating to the measurement of electrical resistance |
US2677106A (en) * | 1950-12-02 | 1954-04-27 | Bell Telephone Labor Inc | Testing of semiconductors |
US2659862A (en) * | 1951-11-01 | 1953-11-17 | Branson Instr | Apparatus for electrical measurement of thickness using current ratios |
US2765440A (en) * | 1954-06-10 | 1956-10-02 | Adelman Milton | Photoemissive tube tester |
US3264556A (en) * | 1961-12-29 | 1966-08-02 | Bell Telephone Labor Inc | Probe positioning device for use in measuring and checking semiconductor specimens |
GB1011134A (en) * | 1962-01-17 | 1965-11-24 | Philips Electronic Associated | Testing semiconductor bodies for inherent mechanical faults |
US3345567A (en) * | 1964-02-26 | 1967-10-03 | Kulicke And Soffa Mfg Company | Multipoint probe apparatus for electrically testing multiple surface points within small zones |
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1968
- 1968-12-26 US US786962A patent/US3590372A/en not_active Expired - Lifetime
-
1969
- 1969-12-04 FR FR6941854A patent/FR2027114A1/fr not_active Withdrawn
- 1969-12-08 JP JP44097924A patent/JPS493227B1/ja active Pending
- 1969-12-23 GB GB62507/69A patent/GB1294477A/en not_active Expired
- 1969-12-23 DE DE19691964522 patent/DE1964522A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2027114A1 (ja) | 1970-09-25 |
US3590372A (en) | 1971-06-29 |
DE1964522A1 (de) | 1970-07-09 |
GB1294477A (en) | 1972-10-25 |