JPS493227B1 - - Google Patents

Info

Publication number
JPS493227B1
JPS493227B1 JP44097924A JP9792469A JPS493227B1 JP S493227 B1 JPS493227 B1 JP S493227B1 JP 44097924 A JP44097924 A JP 44097924A JP 9792469 A JP9792469 A JP 9792469A JP S493227 B1 JPS493227 B1 JP S493227B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44097924A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS493227B1 publication Critical patent/JPS493227B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP44097924A 1968-12-26 1969-12-08 Pending JPS493227B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78696268A 1968-12-26 1968-12-26

Publications (1)

Publication Number Publication Date
JPS493227B1 true JPS493227B1 (ja) 1974-01-25

Family

ID=25140054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44097924A Pending JPS493227B1 (ja) 1968-12-26 1969-12-08

Country Status (5)

Country Link
US (1) US3590372A (ja)
JP (1) JPS493227B1 (ja)
DE (1) DE1964522A1 (ja)
FR (1) FR2027114A1 (ja)
GB (1) GB1294477A (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4123706A (en) * 1975-03-03 1978-10-31 Electroglas, Inc. Probe construction
DE2628428C3 (de) * 1976-06-24 1979-02-15 Siemens Ag, 1000 Berlin Und 8000 Muenchen Adapter zum Verbinden von Anschluß- und/oder Prüfpunkten einer Baugruppe mit einer Mefischaltung
FR2418466A1 (fr) * 1978-02-24 1979-09-21 Telecommunications Sa Appareil pour etablir des prises de contact temporaires sur des circuits electriques
US4365195A (en) * 1979-12-27 1982-12-21 Communications Satellite Corporation Coplanar waveguide mounting structure and test fixture for microwave integrated circuits
US4757255A (en) * 1986-03-03 1988-07-12 National Semiconductor Corporation Environmental box for automated wafer probing
US4806856A (en) * 1987-12-02 1989-02-21 Northern Telecom Limited Adjustable quick-mount test probe assembly
KR0152260B1 (ko) * 1988-07-08 1998-12-15 고다까 토시오 프로우브 장치
US4876430A (en) * 1988-07-25 1989-10-24 General Electric Company Preweld test method
EP0419725A1 (de) * 1989-09-29 1991-04-03 Hugo Dr. Moschüring Messplatz für Mikrowellenbauelemente
US5369372A (en) * 1990-12-13 1994-11-29 Interuniversitair Micro Elektronica Centrum Vzw Method for resistance measurements on a semiconductor element with controlled probe pressure
US5585734A (en) * 1990-07-09 1996-12-17 Interuniversitair Micro Elektronica Centrum Vzw Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
US5723981A (en) * 1994-08-29 1998-03-03 Imec Vzw Method for measuring the electrical potential in a semiconductor element
US5818235A (en) * 1996-10-24 1998-10-06 Trw Inc. Electrostatic discharge testing
CN104528637B (zh) * 2015-01-16 2016-06-08 长春理工大学 一种三探针机器人纳米操纵***及方法
CN106076891B (zh) * 2016-08-31 2018-11-09 上海昭程整流子科技有限公司 一种微动开关特性的自动检查机
CN107942236B (zh) * 2017-12-25 2024-05-24 南京栖霞科技产业发展有限公司 基于电机模拟的fct探针测试仪

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1426620A (en) * 1919-10-10 1922-08-22 Charles E Vawter Rail-bond tester
US1823471A (en) * 1926-03-08 1931-09-15 Roller Smith Company Rail bond tester
GB506173A (en) * 1937-11-23 1939-05-23 Evershed Vignoles Ltd Improvements relating to the measurement of electrical resistance
US2677106A (en) * 1950-12-02 1954-04-27 Bell Telephone Labor Inc Testing of semiconductors
US2659862A (en) * 1951-11-01 1953-11-17 Branson Instr Apparatus for electrical measurement of thickness using current ratios
US2765440A (en) * 1954-06-10 1956-10-02 Adelman Milton Photoemissive tube tester
US3264556A (en) * 1961-12-29 1966-08-02 Bell Telephone Labor Inc Probe positioning device for use in measuring and checking semiconductor specimens
GB1011134A (en) * 1962-01-17 1965-11-24 Philips Electronic Associated Testing semiconductor bodies for inherent mechanical faults
US3345567A (en) * 1964-02-26 1967-10-03 Kulicke And Soffa Mfg Company Multipoint probe apparatus for electrically testing multiple surface points within small zones

Also Published As

Publication number Publication date
FR2027114A1 (ja) 1970-09-25
US3590372A (en) 1971-06-29
DE1964522A1 (de) 1970-07-09
GB1294477A (en) 1972-10-25

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