JPS4913313B1 - - Google Patents
Info
- Publication number
- JPS4913313B1 JPS4913313B1 JP2878770A JP2878770A JPS4913313B1 JP S4913313 B1 JPS4913313 B1 JP S4913313B1 JP 2878770 A JP2878770 A JP 2878770A JP 2878770 A JP2878770 A JP 2878770A JP S4913313 B1 JPS4913313 B1 JP S4913313B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electric Cable Installation (AREA)
- Laying Of Electric Cables Or Lines Outside (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2878770A JPS4913313B1 (en) | 1970-04-04 | 1970-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2878770A JPS4913313B1 (en) | 1970-04-04 | 1970-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4913313B1 true JPS4913313B1 (en) | 1974-03-30 |
Family
ID=12258123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2878770A Pending JPS4913313B1 (en) | 1970-04-04 | 1970-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4913313B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160078917A (en) | 2014-12-25 | 2016-07-05 | 도쿄엘렉트론가부시키가이샤 | Electrostatic chucking method and substrate processing apparatus |
-
1970
- 1970-04-04 JP JP2878770A patent/JPS4913313B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160078917A (en) | 2014-12-25 | 2016-07-05 | 도쿄엘렉트론가부시키가이샤 | Electrostatic chucking method and substrate processing apparatus |
| KR20220034761A (en) | 2014-12-25 | 2022-03-18 | 도쿄엘렉트론가부시키가이샤 | Electrostatic chucking method and substrate processing apparatus |