JPS4890539A - - Google Patents
Info
- Publication number
- JPS4890539A JPS4890539A JP2169972A JP2169972A JPS4890539A JP S4890539 A JPS4890539 A JP S4890539A JP 2169972 A JP2169972 A JP 2169972A JP 2169972 A JP2169972 A JP 2169972A JP S4890539 A JPS4890539 A JP S4890539A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2169972A JPS4890539A (de) | 1972-03-01 | 1972-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2169972A JPS4890539A (de) | 1972-03-01 | 1972-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4890539A true JPS4890539A (de) | 1973-11-26 |
Family
ID=12062302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2169972A Pending JPS4890539A (de) | 1972-03-01 | 1972-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4890539A (de) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147738A (de) * | 1974-05-17 | 1975-11-27 | ||
| JPS53148460A (en) * | 1977-05-31 | 1978-12-25 | Ricoh Co Ltd | Corrector of modulated light beam spacings |
| JPS57142623A (en) * | 1981-02-27 | 1982-09-03 | Canon Inc | Thin film waveguide type optical deflector |
| JP2002072160A (ja) * | 2000-06-19 | 2002-03-12 | Leica Microsystems Heidelberg Gmbh | 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡 |
| JP2002169118A (ja) * | 2000-12-04 | 2002-06-14 | Asahi Optical Co Ltd | レーザビーム描画装置における音響光学素子定常化システム |
-
1972
- 1972-03-01 JP JP2169972A patent/JPS4890539A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147738A (de) * | 1974-05-17 | 1975-11-27 | ||
| JPS53148460A (en) * | 1977-05-31 | 1978-12-25 | Ricoh Co Ltd | Corrector of modulated light beam spacings |
| JPS57142623A (en) * | 1981-02-27 | 1982-09-03 | Canon Inc | Thin film waveguide type optical deflector |
| JP2002072160A (ja) * | 2000-06-19 | 2002-03-12 | Leica Microsystems Heidelberg Gmbh | 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡 |
| JP4564206B2 (ja) * | 2000-06-19 | 2010-10-20 | ライカ ミクロジュステムス ツェーエムエス ゲーエムベーハー | 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡 |
| JP2002169118A (ja) * | 2000-12-04 | 2002-06-14 | Asahi Optical Co Ltd | レーザビーム描画装置における音響光学素子定常化システム |
| JP4585684B2 (ja) * | 2000-12-04 | 2010-11-24 | 株式会社オーク製作所 | レーザビーム描画装置における音響光学素子定常化システム |