JPS48833U - - Google Patents
Info
- Publication number
- JPS48833U JPS48833U JP4469071U JP4469071U JPS48833U JP S48833 U JPS48833 U JP S48833U JP 4469071 U JP4469071 U JP 4469071U JP 4469071 U JP4469071 U JP 4469071U JP S48833 U JPS48833 U JP S48833U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4469071U JPS48833U (en) | 1971-05-25 | 1971-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4469071U JPS48833U (en) | 1971-05-25 | 1971-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS48833U true JPS48833U (en) | 1973-01-08 |
Family
ID=27919476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4469071U Pending JPS48833U (en) | 1971-05-25 | 1971-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS48833U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341068U (en) * | 1976-09-13 | 1978-04-10 | ||
| JPS546467A (en) * | 1977-06-16 | 1979-01-18 | Matsushita Electric Ind Co Ltd | Equipment and method for applying resin film |
| JPS5863744U (en) * | 1981-10-23 | 1983-04-28 | 富士通株式会社 | spin coater |
| JPS58144830U (en) * | 1982-03-24 | 1983-09-29 | 富士通株式会社 | spin coater |
| JPS63198330A (en) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | Method and apparatus for coating resist |
-
1971
- 1971-05-25 JP JP4469071U patent/JPS48833U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341068U (en) * | 1976-09-13 | 1978-04-10 | ||
| JPS546467A (en) * | 1977-06-16 | 1979-01-18 | Matsushita Electric Ind Co Ltd | Equipment and method for applying resin film |
| JPS5863744U (en) * | 1981-10-23 | 1983-04-28 | 富士通株式会社 | spin coater |
| JPS58144830U (en) * | 1982-03-24 | 1983-09-29 | 富士通株式会社 | spin coater |
| JPS63198330A (en) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | Method and apparatus for coating resist |