JPS4847890A - - Google Patents
Info
- Publication number
- JPS4847890A JPS4847890A JP46081642A JP8164271A JPS4847890A JP S4847890 A JPS4847890 A JP S4847890A JP 46081642 A JP46081642 A JP 46081642A JP 8164271 A JP8164271 A JP 8164271A JP S4847890 A JPS4847890 A JP S4847890A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46081642A JPS4847890A (ja) | 1971-10-18 | 1971-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46081642A JPS4847890A (ja) | 1971-10-18 | 1971-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4847890A true JPS4847890A (ja) | 1973-07-06 |
Family
ID=13751980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46081642A Pending JPS4847890A (ja) | 1971-10-18 | 1971-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4847890A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725654A (en) * | 1980-07-21 | 1982-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Method of forming ions |
| US7064491B2 (en) | 2000-11-30 | 2006-06-20 | Semequip, Inc. | Ion implantation system and control method |
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1971
- 1971-10-18 JP JP46081642A patent/JPS4847890A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725654A (en) * | 1980-07-21 | 1982-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Method of forming ions |
| JPS638577B2 (ja) * | 1980-07-21 | 1988-02-23 | Nippon Telegraph & Telephone | |
| US7064491B2 (en) | 2000-11-30 | 2006-06-20 | Semequip, Inc. | Ion implantation system and control method |
| US7528550B2 (en) | 2000-11-30 | 2009-05-05 | Semequip, Inc. | Ion implantation system and control method |
| US7609003B2 (en) | 2000-11-30 | 2009-10-27 | Semequip, Inc. | Ion implantation system and control method |