JPS48103086A - - Google Patents
Info
- Publication number
- JPS48103086A JPS48103086A JP3690472A JP3690472A JPS48103086A JP S48103086 A JPS48103086 A JP S48103086A JP 3690472 A JP3690472 A JP 3690472A JP 3690472 A JP3690472 A JP 3690472A JP S48103086 A JPS48103086 A JP S48103086A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3690472A JPS5331829B2 (en) | 1972-04-14 | 1972-04-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3690472A JPS5331829B2 (en) | 1972-04-14 | 1972-04-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS48103086A true JPS48103086A (en) | 1973-12-24 |
JPS5331829B2 JPS5331829B2 (en) | 1978-09-05 |
Family
ID=12482749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3690472A Expired JPS5331829B2 (en) | 1972-04-14 | 1972-04-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5331829B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52113379A (en) * | 1976-03-19 | 1977-09-22 | Hitachi Ltd | Vacuum evaporation |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109797372B (en) * | 2019-03-28 | 2021-04-20 | 京东方科技集团股份有限公司 | Coating detection device, coating equipment and detection piece switching method |
-
1972
- 1972-04-14 JP JP3690472A patent/JPS5331829B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52113379A (en) * | 1976-03-19 | 1977-09-22 | Hitachi Ltd | Vacuum evaporation |
JPS5527624B2 (en) * | 1976-03-19 | 1980-07-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS5331829B2 (en) | 1978-09-05 |