JPS4731057U - - Google Patents
Info
- Publication number
- JPS4731057U JPS4731057U JP3087471U JP3087471U JPS4731057U JP S4731057 U JPS4731057 U JP S4731057U JP 3087471 U JP3087471 U JP 3087471U JP 3087471 U JP3087471 U JP 3087471U JP S4731057 U JPS4731057 U JP S4731057U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3087471U JPS4731057U (ja) | 1971-04-20 | 1971-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3087471U JPS4731057U (ja) | 1971-04-20 | 1971-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4731057U true JPS4731057U (ja) | 1972-12-08 |
Family
ID=27893567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3087471U Pending JPS4731057U (ja) | 1971-04-20 | 1971-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4731057U (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5262315U (ja) * | 1975-10-31 | 1977-05-09 | ||
| JPS5262316U (ja) * | 1975-10-31 | 1977-05-09 | ||
| JP2017084537A (ja) * | 2015-10-26 | 2017-05-18 | 東方晶源微電子科技（北京）有限公司 | 電子ビーム検査・測長装置用の電子ビーム径制御方法及び電子ビーム径制御装置、並びに電子ビーム検査・測長装置 |
| WO2021117182A1 (ja) * | 2019-12-12 | 2021-06-17 | 株式会社日立ハイテク | 荷電粒子線絞りへの入射角調整機構、および荷電粒子線装置 |
-
1971
- 1971-04-20 JP JP3087471U patent/JPS4731057U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5262315U (ja) * | 1975-10-31 | 1977-05-09 | ||
| JPS5262316U (ja) * | 1975-10-31 | 1977-05-09 | ||
| JP2017084537A (ja) * | 2015-10-26 | 2017-05-18 | 東方晶源微電子科技（北京）有限公司 | 電子ビーム検査・測長装置用の電子ビーム径制御方法及び電子ビーム径制御装置、並びに電子ビーム検査・測長装置 |
| WO2021117182A1 (ja) * | 2019-12-12 | 2021-06-17 | 株式会社日立ハイテク | 荷電粒子線絞りへの入射角調整機構、および荷電粒子線装置 |
| JPWO2021117182A1 (ja) * | 2019-12-12 | 2021-06-17 |