JPS4430971Y1 - - Google Patents

Info

Publication number
JPS4430971Y1
JPS4430971Y1 JP9223265U JP9223265U JPS4430971Y1 JP S4430971 Y1 JPS4430971 Y1 JP S4430971Y1 JP 9223265 U JP9223265 U JP 9223265U JP 9223265 U JP9223265 U JP 9223265U JP S4430971 Y1 JPS4430971 Y1 JP S4430971Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9223265U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9223265U priority Critical patent/JPS4430971Y1/ja
Publication of JPS4430971Y1 publication Critical patent/JPS4430971Y1/ja
Expired legal-status Critical Current

Links

JP9223265U 1965-11-12 1965-11-12 Expired JPS4430971Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9223265U JPS4430971Y1 (en) 1965-11-12 1965-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9223265U JPS4430971Y1 (en) 1965-11-12 1965-11-12

Publications (1)

Publication Number Publication Date
JPS4430971Y1 true JPS4430971Y1 (en) 1969-12-20

Family

ID=31828528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9223265U Expired JPS4430971Y1 (en) 1965-11-12 1965-11-12

Country Status (1)

Country Link
JP (1) JPS4430971Y1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074614U (en) * 1973-11-12 1975-06-30
WO2013129209A1 (en) * 2012-03-01 2013-09-06 株式会社日立ハイテクノロジーズ Charged particle beam device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074614U (en) * 1973-11-12 1975-06-30
JPS5618485Y2 (en) * 1973-11-12 1981-04-30
WO2013129209A1 (en) * 2012-03-01 2013-09-06 株式会社日立ハイテクノロジーズ Charged particle beam device
US9330883B2 (en) 2012-03-01 2016-05-03 Hitachi High-Technologies Corporation Charged particle beam device

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