JPH1192113A - Ozone adsorbing and desorbing device - Google Patents
Ozone adsorbing and desorbing deviceInfo
- Publication number
- JPH1192113A JPH1192113A JP9251612A JP25161297A JPH1192113A JP H1192113 A JPH1192113 A JP H1192113A JP 9251612 A JP9251612 A JP 9251612A JP 25161297 A JP25161297 A JP 25161297A JP H1192113 A JPH1192113 A JP H1192113A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- container
- adsorbing
- heating
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、発生したオゾンを
吸着して蓄積し、この蓄積したオゾンを脱着して放出す
るオゾン吸脱着装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone adsorbing / desorbing apparatus for adsorbing and accumulating generated ozone and desorbing and releasing the accumulated ozone.
【０００２】[0002]
【従来の技術】紙やパルプ等の漂白用として環境への悪
影響がないオゾンの使用が広まってきている。オゾンは
放電や紫外線照射、または電気分解などの方法により酸
素を原料としてオゾン発生器によって生成される。この
ようにして生成したオゾンは一旦吸着筒に吸着させて蓄
積し濃縮される。吸着は低温加圧下で行われる。次に供
給先への供給を行うため、まず大気圧とし、さらに常温
にして脱着させ、窒素や乾燥空気などのキャリアガスと
共に供給先へ送られる。2. Description of the Prior Art The use of ozone for bleaching paper, pulp and the like, which has no adverse effect on the environment, has been widespread. Ozone is generated by an ozone generator using oxygen as a raw material by a method such as electric discharge, ultraviolet irradiation, or electrolysis. The ozone thus generated is once adsorbed on the adsorption column, accumulated and concentrated. The adsorption is performed under low temperature pressure. Next, in order to supply the gas to the supply destination, the pressure is first set to the atmospheric pressure, further desorbed at normal temperature, and sent to the supply destination together with a carrier gas such as nitrogen or dry air.
【０００３】オゾン吸着筒は、例えば特公昭６２−５９
０４５に開示されているように筒として一般的なプロポ
ーションを持つ吸着筒にオゾン吸着剤としてシリカゲル
を充填し、筒の周囲に冷却管を巻いたものが使用されて
いる。オゾン吸着剤は使用している内に水分などを吸着
してしまいオゾンに対する吸着能力が低下する。ある程
度低下すると、オゾン吸着筒より取り出して加熱して水
分を除去する再生処理が行われる。An ozone adsorption cylinder is disclosed in, for example, Japanese Patent Publication No. 62-59.
As disclosed in US Pat. No. 045, an adsorption cylinder having a general proportion as a cylinder is filled with silica gel as an ozone adsorbent, and a cooling tube is wound around the cylinder. While the ozone adsorbent is used, it adsorbs moisture and the like, and the adsorbing ability for ozone is reduced. When the temperature drops to some extent, a regeneration process is performed in which the water is removed from the ozone adsorption cylinder and heated to remove water.
【０００４】[0004]
【発明が解決しようとする課題】オゾン吸着剤に金属や
有機物が付着した状態でオゾンが高濃度となると爆発の
可能性がある。吸着能力の低下したオゾン吸着剤をオゾ
ン吸着筒より取り出して加熱再生処理を行い、吸着筒に
再び戻す作業を行なう過程で金属や有機物の付着により
汚染される可能性が高いという問題が生じていた。When the concentration of ozone becomes high in a state where a metal or an organic substance is attached to the ozone adsorbent, there is a possibility of explosion. There was a problem that the ozone adsorbent with reduced adsorption capacity was taken out of the ozone adsorption cylinder, heated and regenerated, and returned to the adsorption cylinder, and it was highly likely that the ozone adsorbent would be contaminated by the adhesion of metals and organic substances. .
【０００５】本発明は、上述の問題点に鑑みてなされた
もので、オゾン吸着剤を金属や有機物で汚染させないで
再生を行なうオゾン吸脱着装置を提供することを目的と
する。The present invention has been made in view of the above problems, and has as its object to provide an ozone adsorbing / desorbing apparatus for performing regeneration without contaminating an ozone adsorbent with metals or organic substances.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、請求項１の発明は、ガス入口とガス出口を有しオゾ
ン吸着物質を充填した容器と、この容器内を蛇行もしく
はらせん状に設けられ、前記オゾン吸着物質を冷却する
冷媒配管及び前記オゾン物質を加熱するヒータと、を備
える。In order to achieve the above object, the present invention is directed to a container having a gas inlet and a gas outlet and filled with an ozone adsorbing substance, and the container is provided with a meandering or spiral shape. A refrigerant pipe for cooling the ozone adsorbing substance and a heater for heating the ozone substance.
【０００７】ガス入口よりオゾンを含むキャリアガスを
流入しオゾン吸着物質を通して所定の圧力で冷却すると
オゾン吸着物質にオゾンが吸着される。また大気圧とし
常温にするとオゾンは脱着されキャリアガスとともに外
部に放出される。ヒータで加熱するとオゾン吸着物質に
付着している水分を除去することができる。オゾン吸着
物質はその容器から取り出さないので、金属や有機物で
汚染される可能性は少ない。When a carrier gas containing ozone flows in from a gas inlet and is cooled at a predetermined pressure through an ozone adsorbing substance, ozone is adsorbed on the ozone adsorbing substance. When the temperature is set to atmospheric pressure and the temperature is set to normal temperature, ozone is desorbed and released to the outside together with the carrier gas. By heating with a heater, moisture adhering to the ozone adsorbing substance can be removed. Since the ozone adsorbing substance is not taken out of the container, there is little possibility that the ozone adsorbing substance is contaminated with metals and organic substances.
【０００８】請求項２の発明では、液体状の熱媒質を充
満した容器と、この容器内を蛇行もしくはらせん状に配
置した管の内部にオゾン吸着物質を充填したオゾン吸着
管と、前記容器内に設けられ熱媒質を冷却する冷却管及
び熱媒質を加熱するヒータと、を備える。According to the second aspect of the present invention, a container filled with a liquid heat medium, an ozone adsorbing tube filled with an ozone adsorbing substance inside a tube arranged inside the container in a meandering or spiral shape, A cooling pipe for cooling the heat medium and a heater for heating the heat medium.
【０００９】オゾン吸着管にオゾンを含むキャリアガス
を流入しオゾン吸着物質を通して所定の圧力で冷却管に
より液体状の熱媒質を冷却してオゾン吸着物質を冷却す
ると、オゾン吸着物質にオゾンが吸着される。またオゾ
ン吸着管内を大気圧とし常温にするとオゾンは脱着され
キャリアガスとともに外部に放出される。ヒータで加熱
すると液体状の熱媒質が加熱されオゾン吸着物質を加熱
するのでこれに付着している水分を除去することができ
る。オゾン吸着物質はオゾン吸着管から取り出さないの
で、金属や有機物で汚染される可能性は少ない。When a carrier gas containing ozone flows into the ozone adsorbing tube and the liquid heat medium is cooled by the cooling tube at a predetermined pressure through the ozone adsorbing material to cool the ozone adsorbing material, the ozone is adsorbed on the ozone adsorbing material. You. When the inside of the ozone adsorption tube is set to atmospheric pressure and at normal temperature, ozone is desorbed and released to the outside together with the carrier gas. When heated by the heater, the liquid heat medium is heated to heat the ozone adsorbing substance, so that the water adhering to the ozone adsorbing substance can be removed. Since the ozone adsorbing substance is not taken out from the ozone adsorbing tube, there is little possibility that the ozone adsorbing substance is contaminated with metals or organic substances.
【００１０】請求項３の発明では、前記液体状の熱媒質
がオイルまたはエチルグリコールである。[0010] In the third aspect of the present invention, the liquid heat medium is oil or ethyl glycol.
【００１１】オイルまたはエチルグリコールは液体状で
熱を伝達する媒質として優れているので、冷却管の冷
熱、ヒータの加熱をオゾン吸着物質に伝えるのに適して
いる。Since oil or ethyl glycol is excellent as a medium for transmitting heat in a liquid state, it is suitable for transmitting the cold heat of the cooling pipe and the heating of the heater to the ozone adsorbing substance.
【００１２】請求項４の発明では、前記ヒータで加熱す
る場合、パージガスを前記容器またはオゾン吸着管内を
流すようにする。According to the fourth aspect of the invention, when heating is performed by the heater, a purge gas is caused to flow through the container or the ozone adsorption tube.
【００１３】パージガスの流量をコントロールしながら
オゾン吸着物質をヒータで加熱すると、オゾン吸着物質
からの水分の除去が制御でき、短時間で再生する必要が
あれば多くの流量を流すことで達成でき、比較的長時間
かけて再生してよければ、小流量のパージガスで効率良
く再生が行える。When the ozone-adsorbing substance is heated by the heater while controlling the flow rate of the purge gas, the removal of water from the ozone-adsorbing substance can be controlled. If the regeneration is performed over a relatively long time, the regeneration can be efficiently performed with a small flow rate of the purge gas.
【００１４】請求項５の発明では、前記オゾン吸収物質
がシリカゲルで、前記ヒータは８０℃以上２００℃未満
の加熱を行なう。According to the invention of claim 5, the ozone absorbing material is silica gel, and the heater performs heating at a temperature of 80 ° C. or more and less than 200 ° C.
【００１５】シリカゲルの場合、８０℃以上に加熱する
と付着した水分の除去が行われる。ただし、２００℃以
上となるとシリカゲルの変質が生じるので、２００℃未
満とする。In the case of silica gel, when heated to 80 ° C. or higher, attached water is removed. However, if the temperature is higher than 200 ° C., the silica gel is deteriorated.
【００１６】[0016]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。図１は本実施の形態が用い
られるオゾン供給装置の構成を示すブロック図である。
オゾン発生器１は放電等により酸素Ｏ2 よりオゾンＯ3
を発生し、酸素と共に排出する。ポンプ２はこのオゾン
と酸素の混合ガスをオゾン吸着容器３に供給する。オゾ
ン吸着容器３はこの混合ガスの内オゾンを吸着する。ま
たこの吸着したオゾンを脱着して放出する。冷凍機４ａ
はオゾン吸着容器３がオゾンを吸着するときオゾン吸着
剤を冷却する冷媒（ブライン）を供給する。加熱装置４
ｂはヒータが加熱管である場合は蒸気を供給し、電気ヒ
ータである場合は電気を供給する。希釈タンク５は脱着
したオゾンを所定濃度に希釈するタンクであり、反応塔
６はオゾンを使用して、漂白や殺菌などの処理を行う装
置である。止め弁７ａ，７ｂはオゾン吸着作用を行うル
ープを形成する時、開とし、オゾン脱着作用を行う時閉
となる。止め弁８ａ，８ｂ，８ｃはオゾンを脱着し、希
釈して反応塔６へ供給するときのラインを構成する止め
弁で、オゾン脱着時開となり、オゾン吸着時閉となる。
流量制御弁９ａ，９ｂはキャリアガスとしての窒素Ｎ2
またはドライエアの流量を調整し、流量制御弁９ｃはオ
ゾンとキャリアガスの混合気体の流量を制御する。圧力
調整弁１０は脱着したオゾンとキャリアガスの圧力を調
整する。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram illustrating a configuration of an ozone supply device according to the present embodiment.
The ozone generator 1 discharges ozone O 3 from oxygen O 2 by discharging or the like.
And emits it with oxygen. The pump 2 supplies the mixed gas of ozone and oxygen to the ozone adsorption container 3. The ozone adsorption container 3 adsorbs ozone in the mixed gas. The adsorbed ozone is desorbed and released. Refrigerator 4a
Supplies a refrigerant (brine) that cools the ozone adsorbent when the ozone adsorption container 3 adsorbs ozone. Heating device 4
b supplies steam when the heater is a heating tube, and supplies electricity when the heater is an electric heater. The dilution tank 5 is a tank for diluting the desorbed ozone to a predetermined concentration, and the reaction tower 6 is a device for performing processing such as bleaching and sterilization using ozone. The stop valves 7a and 7b are opened when forming a loop for performing ozone adsorption, and are closed when performing ozone desorption. The stop valves 8a, 8b, 8c are stop valves constituting a line for desorbing, diluting and supplying ozone to the reaction tower 6, and are opened when desorbing ozone and closed when ozone is adsorbed.
Flow rate control valves 9a and 9b are provided with nitrogen N 2
Alternatively, the flow rate of the dry air is adjusted, and the flow rate control valve 9c controls the flow rate of the mixed gas of the ozone and the carrier gas. The pressure regulating valve 10 regulates the pressure of the desorbed ozone and the carrier gas.
【００１７】オゾンを発生させオゾン吸着容器３のオゾ
ン吸着剤に吸着されるオゾン吸着作用の場合、止め弁７
ａ，７ｂを開とし、止め弁８ａ，８ｂ，８ｃを閉として
オゾン発生器１から発生したオゾンと未反応の酸素の混
合ガスを排出し、これをポンプ２でオゾン吸着容器３へ
送り、オゾン吸着容器３ではオゾンを吸着して酸素はオ
ゾン発生器１へ戻す。In the case of the ozone adsorbing action in which ozone is generated and adsorbed by the ozone adsorbent of the ozone adsorbing container 3, the stop valve 7
a, 7b are opened, the stop valves 8a, 8b, 8c are closed to discharge a mixed gas of ozone and unreacted oxygen generated from the ozone generator 1, and the mixed gas is sent to the ozone adsorption vessel 3 by the pump 2, The adsorption container 3 adsorbs ozone and returns oxygen to the ozone generator 1.
【００１８】オゾンをオゾン吸着容器３から取り出し反
応塔６へ供給するオゾン脱着作用の場合は、止め弁７
ａ，７ｂを閉とし、止め弁８ａ，８ｂ，８ｃを開とす
る。オゾン脱着時は窒素またはドライエアなどをオゾン
吸着容器３に送り、オゾン吸着剤から脱着したオゾンと
キャリアガスを希釈タンク５に入れる。希釈タンク５で
はさらにキャリアガスで所定の濃度にオゾンを希釈し反
応塔６に送出する。In the case of an ozone desorbing operation in which ozone is taken out of the ozone adsorption vessel 3 and supplied to the reaction tower 6, a stop valve 7 is provided.
a, 7b are closed, and the stop valves 8a, 8b, 8c are opened. At the time of ozone desorption, nitrogen or dry air is sent to the ozone adsorption container 3, and ozone and carrier gas desorbed from the ozone adsorbent are put into the dilution tank 5. The dilution tank 5 further dilutes ozone to a predetermined concentration with a carrier gas and sends it to the reaction tower 6.
【００１９】図２は第１実施形態のオゾン吸着容器の詳
細図である。オゾン吸着容器３は、細長で長さ方向を上
下方向にし、下部にガス入口１２、頂部にガス出口１３
を有する円筒容器１１で、この円筒容器１１内に冷媒管
１４と加熱管１５が蛇行して配置されている。円筒容器
１１内には上下にガスの拡散、収縮スペースを残してオ
ゾン吸着剤としてシリカゲル１６が充填されている。FIG. 2 is a detailed view of the ozone adsorption container of the first embodiment. The ozone adsorption container 3 is slender and has a vertical direction in a length direction, a gas inlet 12 at a lower portion, and a gas outlet 13 at a top portion.
The refrigerant tube 14 and the heating tube 15 are arranged in a meandering manner in the cylindrical container 11. The cylindrical container 11 is filled with silica gel 16 as an ozone adsorbent, leaving a space for gas diffusion and contraction up and down.
【００２０】オゾン吸着時は冷媒管１４に冷媒が流れシ
リカゲル１６を冷却し、オゾンを含むキャリアガスがガ
ス入口１２より流入しシリカゲル１６にオゾンを吸着さ
れてガス出口１３より排出される。オゾン脱着時は円筒
容器１１内を常温とした後、窒素またはドライエアなど
のキャリアガスをオゾン吸着容器３に送り、シリカゲル
１６からオゾンを脱着しキャリアガスとともにガス出口
１３より排出する。When ozone is adsorbed, the refrigerant flows through the refrigerant pipe 14 to cool the silica gel 16, and a carrier gas containing ozone flows in from the gas inlet 12, adsorbs ozone on the silica gel 16, and is discharged from the gas outlet 13. At the time of desorption of ozone, after the inside of the cylindrical container 11 is at room temperature, a carrier gas such as nitrogen or dry air is sent to the ozone adsorption container 3, and ozone is desorbed from the silica gel 16 and discharged from the gas outlet 13 together with the carrier gas.
【００２１】シリカゲル再生時（シリカゲル１６より水
分を除去する時）は加熱管１５に蒸気を通しシリカゲル
１６を８０℃より２００℃未満に加熱する。この場合キ
ャリアガスをシリカゲル１６に通すことにより水分除去
が加速され短時間に再生が行われる。８０℃となるとシ
リカゲル１６に含まれる水分の除去が行われ、１５０〜
１８０℃で最も活発になるが２００℃を越えるとシリカ
ゲルが変質するので、２００℃未満とする。従来のよう
にシリカゲルを取り出して外部で再生処理をしないの
で、金属や有機物で汚染されることがなくオゾン吸着剤
の清浄度を高く維持できる。At the time of silica gel regeneration (when moisture is removed from the silica gel 16), steam is passed through the heating tube 15 to heat the silica gel 16 from 80 ° C. to less than 200 ° C. In this case, the removal of water is accelerated by passing the carrier gas through the silica gel 16, and the regeneration is performed in a short time. When the temperature reaches 80 ° C., the water contained in the silica gel 16 is removed, and
It becomes the most active at 180 ° C, but if it exceeds 200 ° C, the silica gel will be degraded. Since the silica gel is taken out and is not subjected to a regeneration treatment outside as in the conventional case, the ozone adsorbent can be maintained at a high cleanliness without being contaminated by metals or organic substances.
【００２２】図３は第２実施形態のオゾン吸着容器の詳
細図である。オゾン吸着容器３は、細長で長さ方向を上
下方向にした円筒容器２１で、この円筒容器２１内部
に、下部に入口２３、上部に出口２４を有し上下方向に
蛇行し内部にシリカゲル２５を充填したオゾン吸着管２
２が設けられている。この円筒容器２１内には冷媒管２
７と加熱管２８が水平方向に蛇行して設けられ、円筒容
器２１内に充填されたオイル２６を冷却または加熱す
る。FIG. 3 is a detailed view of the ozone adsorption container of the second embodiment. The ozone adsorption container 3 is a cylindrical container 21 which is elongated and has a vertical direction in the length direction. The cylindrical container 21 has an inlet 23 at a lower part and an outlet 24 at an upper part. Filled ozone adsorption tube 2
2 are provided. In this cylindrical container 21, the refrigerant pipe 2
7 and a heating pipe 28 are provided in a meandering manner in the horizontal direction to cool or heat the oil 26 filled in the cylindrical container 21.
【００２３】オゾン吸着時は冷媒管２７に冷媒が流れオ
イル２６を冷却しさらにシリカゲル２５を冷却する。オ
ゾンを含むキャリアガスがガス入口２３より流入しシリ
カゲル２５にオゾンを吸着されてガス出口２４より排出
される。オゾン脱着時はオイル２６を常温とした後、窒
素またはドライエアなどのキャリアガスをオゾン吸着管
２２に送り、シリカゲル２５からオゾンを脱着しキャリ
アガスとともにガス出口２４より排出する。At the time of ozone adsorption, a refrigerant flows through the refrigerant pipe 27 to cool the oil 26 and further cool the silica gel 25. The carrier gas containing ozone flows in from the gas inlet 23, the ozone is adsorbed by the silica gel 25, and is discharged from the gas outlet 24. At the time of desorption of ozone, after the oil 26 is brought to a normal temperature, a carrier gas such as nitrogen or dry air is sent to the ozone adsorption tube 22 to desorb ozone from the silica gel 25 and discharge it from the gas outlet 24 together with the carrier gas.
【００２４】シリカゲル再生時は加熱管２８に蒸気を通
し（電気ヒータの場合は電気を供給）、シリカゲル２５
を８０℃より２００℃未満に加熱する。この場合キャリ
アガスをシリカゲル２５に通すことにより水分除去が加
速され短時間に再生が行われる。８０℃となるとシリカ
ゲル２５に含まれる水分の除去が行われ、１５０〜１８
０℃で最も活発になるが２００℃を越えるとシリカゲル
が変質するので、２００℃未満とする。従来のようにシ
リカゲルを取り出して外部で再生処理をしないので金属
や有機物で汚染されることがなくオゾン吸着剤の清浄度
を高く維持できる。At the time of silica gel regeneration, steam is passed through the heating tube 28 (in the case of an electric heater, electricity is supplied).
Is heated from 80 ° C to less than 200 ° C. In this case, the removal of water is accelerated by passing the carrier gas through the silica gel 25, and the regeneration is performed in a short time. When the temperature reaches 80 ° C., the moisture contained in the silica gel 25 is removed, and 150 to 18
It becomes the most active at 0 ° C., but if it exceeds 200 ° C., the silica gel is deteriorated. Since the silica gel is not taken out and subjected to a regeneration treatment outside as in the conventional case, the ozone adsorbent can be maintained at a high cleanliness without being contaminated by metals or organic substances.
【００２５】[0025]
【発明の効果】以上の説明より明らかなように、本発明
は加熱装置を設けてオゾン吸着剤を加熱することによ
り、水分を除去して再生することができるので、従来の
ように再生時汚染される恐れがなく、オゾン吸着剤の清
浄度を高く維持できる。また再生時パージガスをコント
ロールしながらオゾン吸着剤に流すことにより再生時間
を任意に制御することができる。As is apparent from the above description, according to the present invention, by providing a heating device and heating the ozone adsorbent, it is possible to remove water and regenerate it. And the cleanliness of the ozone adsorbent can be kept high. Further, the regeneration time can be arbitrarily controlled by flowing the ozone adsorbent while controlling the purge gas during regeneration.
【図１】オゾン吸着容器を含むオゾン供給設備の構成を
示すブロック図である。FIG. 1 is a block diagram showing a configuration of an ozone supply facility including an ozone adsorption container.
【図２】第１実施形態のオゾン吸着容器の詳細図であ
る。FIG. 2 is a detailed view of the ozone adsorption container of the first embodiment.
【図３】第２実施形態のオゾン吸着容器の詳細図であ
る。FIG. 3 is a detailed view of an ozone adsorption container according to a second embodiment.
【符号の説明】 １ オゾン発生器 ２ ポンプ ３ オゾン吸着容器 ４ａ 冷凍機 ４ｂ 加熱装置 ５ 希釈タンク ６ 反応塔 ７ａ，７ｂ，８ａ，８ｂ，８ｃ 止め弁 ９ａ，９ｂ，９ｃ 流量制御弁 １０ 圧力調整弁 １１，２１円筒容器 １２，２３ ガス入口 １３，２４ ガス出口 １４，２７ 冷媒管 １５，２８ 加熱管 １６，２５ シリカゲル ２２ オゾン吸着管 ２６ オイル[Description of Signs] 1 Ozone generator 2 Pump 3 Ozone adsorption container 4a Refrigerator 4b Heating device 5 Dilution tank 6 Reaction tower 7a, 7b, 8a, 8b, 8c Stop valve 9a, 9b, 9c Flow control valve 10 Pressure control valve 11, 21 cylindrical container 12, 23 gas inlet 13, 24 gas outlet 14, 27 refrigerant tube 15, 28 heating tube 16, 25 silica gel 22 ozone adsorption tube 26 oil
Claims (5)
質を充填した容器と、この容器内を蛇行もしくはらせん
状に設けられ、前記オゾン吸着物質を冷却する冷媒配管
及び前記オゾン物質を加熱するヒータと、を備えたこと
を特徴とするオゾン吸脱着装置。1. A container having a gas inlet and a gas outlet and filled with an ozone-adsorbing substance, a meandering or spiral-shaped interior of the container, a refrigerant pipe for cooling the ozone-adsorbing substance, and heating the ozone substance. An ozone adsorbing / desorbing device comprising: a heater.
容器内を蛇行もしくはらせん状に配置した管の内部にオ
ゾン吸着物質を充填したオゾン吸着管と、前記容器内に
設けられ熱媒質を冷却する冷却管及び熱媒質を加熱する
ヒータと、を備えたことを特徴とするオゾン吸脱着装
置。2. A container filled with a liquid heat medium, an ozone adsorbing tube filled with an ozone adsorbing substance in a meandering or spiral tube inside the container, and a heat medium provided in the container. An ozone adsorbing / desorbing device, comprising: a cooling pipe for cooling the heat exchanger; and a heater for heating the heat medium.
ルグリコールであることを特徴とする請求項１または２
に記載のオゾン吸脱着装置。3. The liquid heating medium according to claim 1, wherein the heating medium is oil or ethyl glycol.
The ozone adsorbing / desorbing device according to the above.
を前記容器または前記オゾン吸着管内を流すようにした
ことを特徴とする請求項１または２に記載のオゾン吸脱
着装置。4. The ozone adsorbing / desorbing apparatus according to claim 1, wherein when heating is performed by the heater, a purge gas flows through the container or the ozone adsorption tube.
記ヒータは８０℃以上２００℃未満の加熱を行なうこと
を特徴とする請求項１ないし４のいずれかに記載のオゾ
ン吸脱着装置。5. The ozone adsorbing / desorbing apparatus according to claim 1, wherein the ozone absorbing substance is silica gel, and the heater performs heating at 80 ° C. or more and less than 200 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25161297A JP4003097B2 (en) | 1997-09-17 | 1997-09-17 | Ozone adsorption / desorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25161297A JP4003097B2 (en) | 1997-09-17 | 1997-09-17 | Ozone adsorption / desorption device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1192113A true JPH1192113A (en) | 1999-04-06 |
| JP4003097B2 JP4003097B2 (en) | 2007-11-07 |
Family
ID=17225418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25161297A Expired - Fee Related JP4003097B2 (en) | 1997-09-17 | 1997-09-17 | Ozone adsorption / desorption device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4003097B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009137812A (en) * | 2007-12-10 | 2009-06-25 | Meidensha Corp | Ozone supply method and device therefor |
| JP2011167629A (en) * | 2010-02-18 | 2011-09-01 | Sumitomo Seika Chem Co Ltd | Method and apparatus for separating hydrogen gas |
-
1997
- 1997-09-17 JP JP25161297A patent/JP4003097B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009137812A (en) * | 2007-12-10 | 2009-06-25 | Meidensha Corp | Ozone supply method and device therefor |
| JP2011167629A (en) * | 2010-02-18 | 2011-09-01 | Sumitomo Seika Chem Co Ltd | Method and apparatus for separating hydrogen gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4003097B2 (en) | 2007-11-07 |
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