JPH1158658A - Method and apparatus for laminating film - Google Patents
Method and apparatus for laminating filmInfo
- Publication number
- JPH1158658A JPH1158658A JP9224557A JP22455797A JPH1158658A JP H1158658 A JPH1158658 A JP H1158658A JP 9224557 A JP9224557 A JP 9224557A JP 22455797 A JP22455797 A JP 22455797A JP H1158658 A JPH1158658 A JP H1158658A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- arc
- convex
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、プリント配線板
用基板あるいは液晶表示装置、プラズマ表示装置のガラ
ス基板に例示される基板の表面にフィルムを張付けるた
めのフィルム張付方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for attaching a film to a surface of a substrate such as a glass substrate of a printed wiring board, a liquid crystal display, or a plasma display.
【０００２】[0002]
【従来の技術】コンピュータ等の電子機器に使用される
プリント配線板の製造過程において、プリント配線板用
基板の表面の導電層に、透光性支持フィルム（通常はポ
リエステルに代表される透光性樹脂フィルム）上に直接
又は介在層を介して感光性樹脂層が形成され、且つ、こ
れがカバーフィルムによって覆われた積層体フィルム
を、カバーフィルムを剥して張付ける。そして、この
後、配線パターンフィルムを重ね、この配線パターンフ
ィルム及び前記透光性支持フィルムを通して、感光性樹
脂層を所定時間露光する。次いで、透光性支持フィルム
を剥した後、露光された感光性樹脂層を現像してエッチ
ングマスクパターンを形成し、この後、前記導電層の不
必要部分をエッチングにより除去し、これにより、所定
の配線パターンを有するプリント配線板が形成される。
又、液晶表示装置、プラズマ表示装置のガラス基板に表
示セルを形成する工程で同様の積層体フィルムが張付け
られる。2. Description of the Related Art In the process of manufacturing a printed wiring board used for an electronic device such as a computer, a light-transmitting support film (usually a light-transmitting film represented by polyester) is formed on a conductive layer on the surface of the printed wiring board substrate. A laminate film in which a photosensitive resin layer is formed directly on the resin film) or through an intervening layer and which is covered with a cover film is peeled off and pasted on the cover film. After that, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Next, after the light-transmitting support film is peeled off, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching. A printed wiring board having the above wiring pattern is formed.
Further, in the step of forming a display cell on a glass substrate of a liquid crystal display device or a plasma display device, a similar laminate film is stuck.
【０００３】上記のような積層体フィルムを張り付ける
ためのフィルム張付装置としては、フィルムロールから
連続フィルムを巻き出し、これを、基板搬送面上を搬送
手段により間欠的に順次搬送されてくる複数の基板のフ
ィルム張付面に沿って、その感光性樹脂層が該フィルム
張付面側になるようにして、両者を重ねた状態でラミネ
ーションロール間に通し、フィルムを複数の基板に連続
的に圧着しつつ基板を搬送するようにした、いわゆる連
続張りタイプのものがある。As a film sticking apparatus for sticking a laminate film as described above, a continuous film is unwound from a film roll, and the film is intermittently conveyed on a substrate conveying surface by a conveying means. Along the film-attached surface of a plurality of substrates, with the photosensitive resin layer on the film-attached surface side, the two are passed through a lamination roll in a stacked state, and the film is continuously applied to the plurality of substrates. There is a so-called continuous tension type in which a substrate is transported while being pressed.
【０００４】又、フィルムロールから巻き出した積層体
フィルムを、対応する基板の長さに応じて切断し、切断
された各積層体フィルムの先端を基板の先端に仮付けし
て、ラミネーションロール間に通して積層体フィルムを
基板に張り付けるようにしたものがある。[0004] Further, the laminated film unwound from the film roll is cut in accordance with the length of the corresponding substrate, and the leading end of each cut laminated film is temporarily attached to the leading end of the substrate. Through which the laminated film is attached to the substrate.
【０００５】ここで、近年、液晶表示装置あるいはプラ
ズマ表示装置は非常に大型化し、特にプラズマ表示装置
の場合、５０インチサイズのパネルが主力となってい
る。[0005] In recent years, liquid crystal display devices or plasma display devices have become very large, and in the case of plasma display devices in particular, 50-inch size panels have become the mainstay.
【０００６】このように、基板が大きくなると、当然ラ
ミネーションロールのスパンも大きくなり、基板をフィ
ルムと共に挟み込むべく該ラミネーションロールを圧下
させると、その軸方向中間部が撓み易くなる。As described above, when the size of the substrate is increased, the span of the lamination roll is naturally increased. When the lamination roll is pressed down so as to sandwich the substrate together with the film, the intermediate portion in the axial direction is easily bent.
【０００７】[0007]
【発明が解決しようとする課題】スパンの長いラミネー
ションロールの軸方向中間部に撓みが生じると、積層体
フィルムを基板に押圧する圧力が低減し、積層体フィル
ムを基板に張り付けた状態で、基板送り方向のしわや気
泡が発生して、これが、パターンを焼き付けたときのパ
ータン不良を生じてしまうという問題点がある。When the lamination roll having a long span bends in the axially intermediate portion, the pressure for pressing the laminated film against the substrate is reduced, and the lamination roll is adhered to the substrate. There is a problem that wrinkles and bubbles are generated in the feeding direction, and this causes a pattern failure when a pattern is printed.
【０００８】更に、このように、ラミネーションロール
の撓みを防止するため、該ラミネーションロールの剛性
を高めるべく直径を大きくしたりすると、ラミネーショ
ンロールを加熱するための熱がラミネーションロール軸
方向中間部に過剰に蓄積され、これが積層体フィルムに
悪い影響を与えてしまうという新たな問題点を生じる。Further, as described above, when the diameter of the lamination roll is increased to increase the rigidity of the lamination roll in order to prevent the lamination roll from bending, heat for heating the lamination roll becomes excessive in the axially intermediate portion of the lamination roll. And this has a new problem that this has a bad influence on the laminated film.
【０００９】又、積層体フィルムを基板に張り付ける際
に、該積層体フィルムにある程度の張力を加えた状態で
ラミネーションロールによって基板に押圧しなければな
らないが、積層体フィルムを対応する基板の長さに応じ
て切断してから張り付ける場合、該積層体フィルムの先
端及び後端はこれに引張力を付与するための、例えば負
圧による吸着装置を、ラミネーションロールに一定以上
接近させることができないので、積層体フィルムの前後
端はどうしても引張力不足となり、基板に張り付けた状
態でしわや気泡が発生し易いという問題点がある。Further, when the laminated film is attached to the substrate, the laminated film must be pressed against the substrate by a lamination roll while applying a certain amount of tension to the laminated film. In the case where the laminated film is cut and adhered, the leading end and the trailing end of the laminated film cannot be brought closer to the lamination roll by more than a predetermined pressure, for example, a suction device for applying a tensile force to the laminated film. Therefore, there is a problem that the front and rear ends of the laminated film are inevitably insufficient in tensile force, and wrinkles and bubbles are easily generated in a state of being attached to the substrate.
【００１０】この発明は上記従来の問題点に鑑みてなさ
れたものであって、大型の基板に積層体フィルムを張り
付ける場合に、ラミネーションロールを大型化すること
なく、基板幅方向中央部分でフィルムにしわや気泡が発
生しないようにしたフィルム張付方法及び装置を提供す
ることを目的とする。The present invention has been made in view of the above-mentioned conventional problems. When a laminated film is stuck on a large-sized substrate, the lamination roll is not enlarged and the film is formed at the central portion in the substrate width direction. It is an object of the present invention to provide a method and an apparatus for sticking a film in which wrinkles and bubbles are not generated.
【００１１】又、積層体フィルムを対応する基板の長さ
に応じて切断してから基板に張り付ける場合において
も、該積層体フィルムの先端部及び後端部に必要な引張
力を付与して、しわ等が生じることなく基板に張り付け
ることができるようにしたフィルム張付方法及び装置を
提供することを目的とする。Also, when the laminated film is cut in accordance with the length of the corresponding substrate and then attached to the substrate, a necessary tensile force is applied to the leading end and the rear end of the laminated film. It is an object of the present invention to provide a method and an apparatus for attaching a film which can be attached to a substrate without wrinkles or the like.
【００１２】[0012]
【課題を解決するための手段】本方法発明は、基板搬送
面に沿って搬送されてくる基板にフィルムを張り付ける
方法において、基板に転がり接触可能な凸円弧状面を備
えた円弧状面部材を、該凸円弧状面の背後から、該凸円
弧状面に対して、基板送り方向と反対方向に相対的に移
動する押圧部材を押し付けて、前記凸円弧状面を基板表
面に転がり接触させ、該凸円弧状面と基板との間のフィ
ルムを該基板に圧着することを特徴とするフィルム張付
方法により、上記目的を達成するものである。According to the present invention, there is provided a method for attaching a film to a substrate conveyed along a substrate conveying surface, comprising: an arc-shaped surface member having a convex arc-shaped surface capable of rolling contact with the substrate. Is pressed from behind the convex arcuate surface against the convex arcuate surface with a pressing member that moves relatively in the direction opposite to the substrate feeding direction, thereby bringing the convex arcuate surface into rolling contact with the substrate surface. The above object is attained by a film sticking method characterized in that a film between the convex arcuate surface and the substrate is pressure-bonded to the substrate.
【００１３】請求項２のように、前記円弧状面部材の表
面には複数の凸円弧状面が環状に配置され、前記押圧部
材は該環状の内側を、凸円弧状面の円弧中心線と平行に
貫通して配置され、該環状の複数の凸円弧状面を基板送
り方向に順次回転させつつ、押圧部材により基板に押圧
するようにしてもよい。A plurality of convex arc-shaped surfaces are annularly arranged on the surface of the arc-shaped surface member, and the pressing member is configured such that an inner side of the annular shape and an arc center line of the convex arc-shaped surface are aligned with each other. It may be arranged so as to penetrate in parallel and press the substrate by the pressing member while rotating the plurality of annular convex arc-shaped surfaces sequentially in the substrate feeding direction.
【００１４】又、請求項３のように、前記凸円弧状面の
基板送り方向両端部外側位置で、前記フィルムを保持し
つつ、該フィルムを基板に圧着するようにしてもよい。Further, the film may be pressed against the substrate while holding the film at positions outside both ends of the convex arc-shaped surface in the substrate feeding direction.
【００１５】更に、請求項４のように、前記フィルム保
持位置で後行フィルムの基板送り方向下流側端部と先行
フィルムの上流側端との間を切断するようにしてもよ
い。Further, as in the fourth aspect, a cut may be made between the downstream end of the following film in the substrate feeding direction and the upstream end of the preceding film at the film holding position.
【００１６】又、請求項５のように、前記押圧部材を、
その軸線廻りに回転させることにより、凸円弧状面を背
後から押圧するようにしてもよい。Further, as in claim 5, the pressing member is
By rotating around the axis, the convex arc-shaped surface may be pressed from behind.
【００１７】更に、請求項６のように、前記押圧部材
を、前記凸円弧状面の背後位置で、該凸円弧状面を基板
と同方向に送るように回転させるようにしてもよい。Further, the pressing member may be rotated at a position behind the convex arc surface so as to feed the convex arc surface in the same direction as the substrate.
【００１８】又、請求項７のように、前記押圧部材を押
し付けて基板にフィルムを圧着する際に、該基板を、前
記押圧部材と対向して配置されたラミネーションロール
により、前記凸円弧状面と反対側から挟み込みつつ基板
に送りをかけるようにしてもよい。Further, when the pressing member is pressed to press the film against the substrate as described in claim 7, the substrate is held on the convex arc-shaped surface by a lamination roll arranged opposite to the pressing member. Alternatively, the substrate may be fed while being sandwiched from the opposite side.
【００１９】本装置発明は、請求項８のように、基板搬
送面に沿って搬送されてくる基板に転がり接触する複数
の凸円弧状面を備え、各凸円弧状面はその円弧の長さが
前記基板の搬送方向の長さと略等しく、円弧中心軸線が
基板の幅方向となるように配置され、且つ、該円弧中心
軸線方向の長さが基板の幅と略等しくされた円弧状面部
材と、この円弧状面部材における前記凸円弧状面の背面
側に、前記円弧中心軸線と平行に配置され、該背面に・
押圧接触しつつ、凸円弧状面に対して基板搬送面と平
行、且つ、基板搬送方向と相対的反対方向に移動自在な
押圧部材と、を有してなり、前記押圧部材の、凸円弧状
面に対する相対移動時に、凸円弧状面と基板との間のフ
ィルムを、該基板に圧着することを特徴とするフィルム
張付装置により、上記目的を達成するものである。The present invention comprises a plurality of convex arcuate surfaces which are in rolling contact with the substrate conveyed along the substrate conveying surface, and each convex arcuate surface has the length of the arc. Are substantially equal to the length of the substrate in the transport direction, are arranged such that the arc center axis is in the width direction of the substrate, and the length of the arc center axis direction is substantially equal to the width of the substrate. And on the back side of the convex arc-shaped surface of the arc-shaped surface member, disposed in parallel with the arc center axis,
A pressing member which is movable in a direction parallel to the substrate transport surface with respect to the convex arc surface and in the direction opposite to the substrate transport direction while being in contact with the pressing member, and wherein the pressing member has a convex arc shape. The above object is achieved by a film sticking apparatus characterized in that a film between a convex arc-shaped surface and a substrate is pressed against the substrate during relative movement with respect to the surface.
【００２０】又、請求項９のように、前記凸円弧状面は
複数であって、前記円弧状面部材の表面に環状に配置さ
れ、該円弧状面部材は、前記複数の凸円弧状面が順次基
板搬送面に対面する位置となるように、基板搬送方向に
回転自在とすると共に、前記押圧部材は、前記環状の凸
円弧状面の内側位置で前記円弧状面部材を貫通して配置
するようにしてもよい。Further, as in claim 9, the plurality of convex arc-shaped surfaces are annularly arranged on the surface of the arc-shaped surface member, and the arc-shaped surface member is provided with the plurality of convex arc-shaped surfaces. Are sequentially rotatable in the substrate transport direction so as to face the substrate transport surface, and the pressing member is disposed through the arc-shaped surface member at a position inside the annular convex arc-shaped surface. You may make it.
【００２１】請求項１０のように、前記基板搬送面を介
して、前記押圧部材の反対側に配置され、該押圧部材と
共に前記基板フィルム及び凸円弧状部を挾持しつつ、こ
れらに基板搬送方向の送りをかけるようラミネーション
ロールを設けてもよい。According to a tenth aspect of the present invention, the substrate film and the convex arc-shaped portion are arranged on the opposite side of the pressing member with the substrate conveying surface interposed therebetween. May be provided with a lamination roll.
【００２２】この発明においては、円弧状面部材におけ
る凸円弧状面の背後からこれを押圧部材によって押し付
け、フィルムを基板に張り付けるので、円弧状面部材を
大型化しても、その軸方向中間部に撓みが生じることが
ない。従って、フィルムを基板に確実に圧着することが
できる。In the present invention, since the convex arc-shaped surface of the arc-shaped surface member is pressed from behind by the pressing member and the film is stuck to the substrate, even if the arc-shaped surface member is enlarged in size, the axially intermediate portion thereof can be formed. Does not bend. Therefore, the film can be securely pressed onto the substrate.
【００２３】又、円弧状面部材における凸円弧状面の両
端においてフィルムを吸着することによって、該フィル
ムに常時引張力を付与した状態で基板に張り付けること
ができ、従って、フィルムの前端又は後端に気泡やしわ
が発生することがない。Further, by adsorbing the film at both ends of the convex arc-shaped surface of the arc-shaped surface member, the film can be stuck to the substrate while constantly applying a tensile force to the film. No bubbles or wrinkles are generated at the edges.
【００２４】[0024]
【発明の実施の形態】以下本発明の実施の形態の例を図
面を参照して詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００２５】図１に示されるように、本発明に係るフィ
ルム張付装置１０は、基板搬送面１２Ａに沿って搬送さ
れてくる基板１４に転がり接触する３個の凸円弧状面１
６Ａ〜１６Ｃを備え、各凸円弧状面１６Ａ〜１６Ｃは、
その円弧の長さが前記基板１４の搬送方向の長さと略等
しく、円弧中心軸線が基板１４の幅方向となるように配
置され、且つ、該円弧中心軸線方向の長さが基板１４の
幅と略等しくされた中空の略三角形状の円弧状面部材１
８と、この円弧状面部材１８における前記凸円弧状面１
６Ａ〜１６Ｃの背面側を貫通して、前記円弧中心軸線と
平行に配置され、該背面である内周面１７Ａ〜１７Ｃに
接触しつつ、凸円弧状面１６Ａ〜１６Ｃを基板搬送方向
に送るように回転される押圧バー２０と、前記凸円弧状
面１６Ａ〜１６Ｃのいずれか及び前記基板搬送面１２Ａ
を介して前記押圧バー２０と対向して、図１において下
側位置に配置され、該押圧バー２０と共に前記いずれか
の凸円弧状面を挟持するラミネーションロール２２と、
を備えて構成され、前記押圧バー２０及びラミネーショ
ンロール２２により円弧状面部材１８を図１において反
時計方向に回転移動させ、且つ基板１４を基板搬送面１
２Ａに沿って図１において右方向に送りつつ、凸円弧状
面１６Ａ〜１６Ｃのいずれかと基板１４の上面との間の
積層体フィルム２４を該基板１４に圧着するようにした
ものである。As shown in FIG. 1, a film sticking apparatus 10 according to the present invention comprises three convex arc-shaped surfaces 1 which are in rolling contact with a substrate 14 conveyed along a substrate conveying surface 12A.
6A to 16C, and each of the convex arc-shaped surfaces 16A to 16C is
The length of the arc is substantially equal to the length of the substrate 14 in the transport direction, the arc center axis is arranged to be in the width direction of the substrate 14, and the length of the arc center axis direction is equal to the width of the substrate 14. A hollow, substantially triangular, arc-shaped surface member 1 made substantially equal
8 and the convex circular surface 1 of the circular surface member 18.
6A to 16C, the convex arc-shaped surfaces 16A to 16C are arranged in parallel with the central axis of the circular arc, and are sent to the substrate transport direction while contacting the inner peripheral surfaces 17A to 17C as the rear surface. Press bar 20 which is rotated to any one of the convex arcuate surfaces 16A to 16C and the substrate transfer surface 12A
A lamination roll 22 that is disposed at a lower position in FIG. 1, facing the pressing bar 20 via
The press bar 20 and the lamination roll 22 rotate the arcuate surface member 18 in the counterclockwise direction in FIG.
The laminate film 24 between one of the convex arc-shaped surfaces 16A to 16C and the upper surface of the substrate 14 is pressed onto the substrate 14 while being fed rightward in FIG. 1 along 2A.
【００２６】前記積層体フィルム２４は、図１に示され
るように、供給源であるフィルムロール２６から巻き出
され、該積層体フィルム２４を構成するカバーフィルム
２４Ｃ（後述）をカバーフィルム剥離装置２８によって
剥離した後、ガイドロール２９を経て前記円弧状面部材
１８に供給されるものである。As shown in FIG. 1, the laminate film 24 is unwound from a film roll 26 as a supply source, and a cover film 24C (described later) constituting the laminate film 24 is removed by a cover film peeling device 28. After being peeled off by this, it is supplied to the arcuate surface member 18 via the guide roll 29.
【００２７】前記積層体フィルム２４は、図２に示され
るように、透光性支持フィルム２４Ａ、この透光性支持
フィルム２４Ａに積層された感光性樹脂層２４Ｂ、及
び、この感光性樹脂層２４Ｂを被って積層されたカバー
フィルム２４Ｃからなり、帯状に巻かれたフィルムロー
ル２６から連続的に巻き出されるようになっている。こ
こで、透光性支持フィルム２４Ａにおける「透光性」と
は、感光性樹脂層２４Ｂを露光させる光あるいはビー
ム、即ち、可視光線、紫外光、Ｘ線、電子線等を透過で
きることを意味する。As shown in FIG. 2, the laminated film 24 includes a translucent support film 24A, a photosensitive resin layer 24B laminated on the translucent support film 24A, and a photosensitive resin layer 24B. And a cover film 24C laminated so as to be unwound continuously from a film roll 26 wound in a belt shape. Here, “translucent” in the translucent support film 24A means that light or a beam for exposing the photosensitive resin layer 24B, that is, visible light, ultraviolet light, X-ray, electron beam, or the like can be transmitted. .
【００２８】前記基板搬送面１２Ａは基板搬送装置１２
における、複数の搬送ローラの上面によって構成され
る、前記ラミネーションロール２２の上端に接して通過
するように配置されている。The substrate transfer surface 12A is connected to the substrate transfer device 12
The lamination roll 22, which is constituted by the upper surfaces of a plurality of conveyance rollers, is disposed so as to contact and pass through the upper end of the lamination roll 22.
【００２９】前記円弧状面部材１８は、いわゆるロータ
リピストンエンジンにおけるローターに類似した形状で
あって、略三角形の各辺に前記凸円弧状面１６Ａ〜１６
Ｃが形成され、且つ中心側は該凸円弧状面１６Ａ〜１６
Ｃと平行な内周面１７Ａ〜１７Ｃを備えた中空形状であ
り、該中空部を、前記押圧バー２０が貫通して配置され
ている。The arcuate surface member 18 has a shape similar to that of a rotor in a so-called rotary piston engine, and the convex arcuate surfaces 16A to 16A are provided on each side of a substantially triangular shape.
C is formed, and the center side is the convex arc-shaped surface 16A-16
It has a hollow shape having inner peripheral surfaces 17A to 17C parallel to C, and the pressing bar 20 is disposed through the hollow portion.
【００３０】この押圧バー２０は、前記内周面１７Ａ〜
１７Ｃを押圧する状態のとき、摩擦回転接触により円弧
状面部材１８を図１において反時計方向に回転駆動でき
るように、例えば耐熱性硬質ゴム等によって被覆される
と共に、モータ（図示省略）によって、図１において反
時計方向に回転されるようになっている。The pressing bar 20 is provided with the inner peripheral surfaces 17A to 17A.
In a state where 17C is pressed, the arcuate surface member 18 is coated with, for example, a heat-resistant hard rubber so as to be able to be driven to rotate counterclockwise in FIG. In FIG. 1, it is rotated counterclockwise.
【００３１】ここで、前記ラミネーションロール２２
も、図１において時計方向に駆動され、このラミネーシ
ョンロール２２による基板１４の搬送速度及び押圧バー
２０による円弧状面部材１８の凸円弧状面１６Ａ〜１６
Ｃにおける基板搬送方向の速度が同期するようにされて
いる。Here, the lamination roll 22
1 is also driven clockwise in FIG. 1, and the conveying speed of the substrate 14 by the lamination roll 22 and the convex arcuate surfaces 16A to 16 of the arcuate surface member 18 by the pressing bar 20.
The speed in the substrate transport direction at C is synchronized.
【００３２】前記押圧バー２０の図１において上方に
は、該押圧バー２０と平行に円弧状面部材１８を貫通
し、且つ、内周面１７Ａ〜１７に摩擦回転して円弧状面
部材１８を反時計方向に回転駆動する駆動ロール３０が
設けられている。The upper part of the pressing bar 20 in FIG. 1 penetrates the arc-shaped surface member 18 in parallel with the pressing bar 20, and the frictional rotation of the arc-shaped surface member 18 to the inner peripheral surfaces 17A to 17 causes the arc-shaped surface member 18 to move. A drive roll 30 that rotates and rotates counterclockwise is provided.
【００３３】この駆動ロール３０は、前記凸円弧状面１
６Ａ〜１６Ｃのいずれかが押圧バー２０とラミネーショ
ンロール２２の間の位置で基板１４に外接していると
き、その凸円弧状面の円弧中心となる位置に配置されて
いる。なお、凸円弧状面１６Ａ〜１６Ｃの曲率半径は、
その円弧中心が内周面１７Ａ〜１７Ｃの内側近傍となる
ように設定しておく。The driving roll 30 is provided on the convex arc-shaped surface 1.
When any one of 6A to 16C circumscribes the substrate 14 at a position between the pressing bar 20 and the lamination roll 22, it is arranged at a position which is the center of the arc of the convex arc surface. The radii of curvature of the convex arc-shaped surfaces 16A to 16C are:
The center of the arc is set so as to be near the inside of the inner peripheral surfaces 17A to 17C.
【００３４】図の符号３２及び３４は、前記押圧バー２
０及び駆動ロール３０を中心とする円弧状面部材１８
の、図１おいて反時計方向の揺動角度を検出する揺動角
度センサを示す。Reference numerals 32 and 34 in the figure denote the pressing bar 2.
0 and the arcuate surface member 18 centered on the drive roll 30
FIG. 1 shows a swing angle sensor for detecting a counterclockwise swing angle.
【００３５】前記円弧状面部材１８の外周面における、
各凸円弧状面１６Ａ〜１６Ｃ間の部分には、前記円弧状
面部材１８における図形中心を中心とする円の接線方向
になる吸着面４０Ａ〜４０Ｃが形成されている。On the outer peripheral surface of the arc-shaped surface member 18,
Adsorption surfaces 40A to 40C that are tangential to a circle centered on the center of the figure in the arc-shaped surface member 18 are formed in portions between the convex arc-shaped surfaces 16A to 16C.
【００３６】この吸着面４０Ａ〜４０Ｃは、図３に示さ
れるように、各々後端側吸着面４２及び先端側吸着面４
１に２分割され、それぞれには、円弧状面部材１８の軸
方向両端外側に配置された負圧供給源４４から切換弁４
６を介して負圧が供給されるようになっている。As shown in FIG. 3, the suction surfaces 40A to 40C are respectively composed of a rear end suction surface 42 and a front end suction surface 4A.
1 are respectively divided from a negative pressure supply source 44 disposed outside both ends of the arcuate surface member 18 in the axial direction.
Negative pressure is supplied via 6.
【００３７】前記切換弁４６は、前記揺動角度センサ３
２、３４による円弧状面部材１８の揺動角度に応じて、
制御装置４８により制御されるものであり、凸円弧状面
１６Ａ〜１６Ｃのいずれかで積層体フィルム２４を基板
１４に圧着する際に、積層体フィルム２４の先端側には
圧着開始直前まで、後端側には圧着終了時まで負圧を印
加させるようになっている。The switching valve 46 is connected to the swing angle sensor 3.
According to the swing angle of the arcuate surface member 18 due to 2, 34,
When the laminated film 24 is pressure-bonded to the substrate 14 at any one of the convex arc-shaped surfaces 16A to 16C, the control device 48 controls the front end side of the laminated film 24 until immediately before the start of pressure bonding. A negative pressure is applied to the end side until the end of crimping.
【００３８】前記切換弁４６は、揺動接続部材４７に接
続され、この揺動接続部材４７は、積層体フィルム２４
が吸着面４０Ａ〜４０Ｃのいずれかに吸着され、基板１
４への張付けが終了するまで円弧状面部材１８と共に揺
動しつつ、その軸方向両端面から先端及び後端吸着面４
１、４２に負圧を供給するようにされている。The switching valve 46 is connected to an oscillating connection member 47, which oscillates the laminated film 24.
Is adsorbed on any of the adsorption surfaces 40A to 40C, and the substrate 1
4 while swinging together with the arc-shaped surface member 18 until the attachment to the end surface 4 is completed.
Negative pressure is supplied to 1, 42.
【００３９】又、前記先端吸着面４１と後端吸着面４２
との間には、切断用スリット４３が形成され、吸着面４
０Ａ〜４０Ｃが、ラミネーションロール２２の入側位置
で基板搬送面１２Ａと略直交する状態となったとき、積
層体フィルム２４を介して対向して配置されたカッター
５０の刃先が食い込んで、吸着面に吸着されている積層
体フィルム２４を、先端吸着面４１側と後端吸着面４２
側とに分割できるようにされている。Further, the front end suction surface 41 and the rear end suction surface 42
And a slit 43 for cutting, and the suction surface 4
When 0A to 40C are substantially perpendicular to the substrate transport surface 12A at the entry side of the lamination roll 22, the blade edge of the cutter 50 arranged opposite to the substrate 50 through the laminated film 24 cuts into the suction surface. The laminated film 24 adsorbed on the front end adsorbing surface 41 and the rear end adsorbing surface 42
It is made to be divided into sides and.
【００４０】図１の符号５３Ａ、５３Ｂは、ラミネーシ
ョンロール２２の出側で積層体フィルム１４及び基板２
０を挟み込むことができるようにされたピンチロールを
示す。上側のピンチロール５３Ａは、下側のピンチロー
ル５３Ｂに対して離接自在とされている。Reference numerals 53A and 53B in FIG. 1 denote the laminate film 14 and the substrate 2 on the exit side of the lamination roll 22.
1 shows a pinch roll adapted to be able to sandwich a zero. The upper pinch roll 53A is configured to be able to freely contact and separate from the lower pinch roll 53B.
【００４１】次に、上記フィルム張付装置１０によっ
て、積層体フィルム２４を基板１４に連続的に張り付け
る工程について説明する。Next, a process of continuously laminating the laminated film 24 to the substrate 14 by the film laminating apparatus 10 will be described.
【００４２】まず、フィルムロール１２から積層体フィ
ルム２４の先端を巻き出し、その先端からカバーフィル
ム２４Ｃを剥離して、分離部材２８Ａを介して巻き取り
ロール２８Ｂに巻き取り可能な状態にセットする。First, the leading end of the laminated film 24 is unwound from the film roll 12, the cover film 24C is peeled off from the leading end, and the laminate film 24 is set to a state where it can be taken up by the take-up roll 28B via the separating member 28A.
【００４３】一方、カバーフィルム２４Ｃを剥離した透
光性支持フィルム２４Ａは、円弧状面部材１８におけ
る、基板搬送面１２Ａと直交する位置の吸着面４０Ａに
その先端を吸着させる（図５（Ａ）参照）。On the other hand, the tip of the translucent support film 24A from which the cover film 24C has been peeled is adsorbed to the adsorbing surface 40A of the arcuate surface member 18 at a position orthogonal to the substrate transport surface 12A (FIG. 5A). reference).
【００４４】次に、押圧バー２０を図において反時計方
向に回転させることによって積層体フィルム２４を引張
りつつ、該円弧状面部材１８を反時計方向に回転させる
（図５Ａ（Ｂ）参照）。Next, the arcuate surface member 18 is rotated counterclockwise while the laminated film 24 is pulled by rotating the pressing bar 20 counterclockwise in the figure (see FIG. 5A (B)).
【００４５】回転が所定位置、即ち、凸円弧状面１６Ａ
の反時計方向先端側の吸着面４０Ａが基板搬送面１２Ａ
と平行になる位置まできたとき、揺動回転センサ３４か
らの信号に基づいて、制御装置４８が、押圧バー２０の
回転を停止し、次に、基板１４の先端が進行してきたと
き、そのタイミングで押圧バー２０の回転を開始し、フ
ィルム２４の先端部と基板１４とを、ラミネーションロ
ール２２との間に挟み込む（図１参照）。The rotation is at a predetermined position, that is, the convex circular surface 16A.
The suction surface 40A on the counterclockwise tip side of the
When the control device 48 stops the rotation of the pressing bar 20 based on the signal from the swing rotation sensor 34 when it comes to a position parallel to , The rotation of the pressing bar 20 is started, and the leading end of the film 24 and the substrate 14 are sandwiched between the lamination rolls 22 (see FIG. 1).
【００４６】この状態で、フィルム張付装置１０の運転
を開始し、ラミネーションロール２２及び押圧バー２０
を、両者間に挟持されている基板１４と積層体フィルム
２４を、厚さ方向に押圧しつつ図１において右方向に送
る。In this state, the operation of the film sticking apparatus 10 is started, and the lamination roll 22 and the pressing bar 20 are operated.
Is sent rightward in FIG. 1 while pressing the substrate 14 and the laminated film 24 sandwiched therebetween in the thickness direction.
【００４７】このとき、円弧状面部材１８の内周面１７
Ａは凸円弧状面１６Ａと平行であり、凸円弧状面１６Ａ
は常に積層体フィルム２４を介して基板１４の図におい
て上面に外接するようにして、且つ、凸円弧状面１６Ａ
の円弧中心位置にある駆動ロール３０を中心として揺動
する。At this time, the inner peripheral surface 17 of the arcuate surface member 18
A is parallel to the convex arcuate surface 16A and the convex arcuate surface 16A
Is always circumscribed on the upper surface in the drawing of the substrate 14 via the laminated film 24, and the convex arc-shaped surface 16A
Swing around the drive roll 30 located at the center position of the arc.
【００４８】なお、前記押圧バー２０を回転させる直前
に、次の吸着面４０Ｂに積層体フィルム２４を吸着させ
ると共に、カッター５０によって吸着面４０Ｂに吸着さ
れている積層体フィルム２４を先端吸着面４１側と後端
吸着面４２側に分離する。Immediately before the pressing bar 20 is rotated, the laminated film 24 is sucked to the next suction surface 40B, and the laminated film 24 sucked to the suction surface 40B by the cutter 50 is moved to the tip suction surface 41. Side and the rear end suction surface 42 side.
【００４９】凸円弧状面１６Ａがその回転方向前端から
後端までラミネーションロール２２の上方位置を転がり
接触しながら通過すると、最初の基板１４に対する積層
体フィルム２４の張付けが終了する。張付けの終了は、
前記揺動角度センサ３４によって検出され、この揺動角
度センサ３４からの張付終了信号によって、制御装置４
８は、吸着面４０Ｂにおける後端吸着面４２の負圧を解
除する。なお、吸着面４０Ａにおける先端吸着面４１に
おける負圧は、吸着面４０Ａが押圧バー２０を通過する
際に解除する。When the convex arcuate surface 16A passes through the upper position of the lamination roll 22 from the front end to the rear end in the rotation direction while rolling and contacting, the lamination film 24 to the first substrate 14 is finished. End of the paste
The sticking end signal from the swing angle sensor 34 is detected by the swing angle sensor 34, and the control device 4
8 releases the negative pressure on the rear end suction surface 42 of the suction surface 40B. Note that the negative pressure on the tip suction surface 41 of the suction surface 40A is released when the suction surface 40A passes through the pressing bar 20.
【００５０】従って、積層体フィルム２４は凸円弧状面
１６Ａから離れて基板１４上にその全体が張り付けられ
ることになる。Therefore, the laminated film 24 is entirely attached to the substrate 14 apart from the convex arc-shaped surface 16A.
【００５１】次に、制御装置４８によって、押圧バー２
０の回転を停止し、駆動ロール３０の回転を開始する。Next, the control device 48 causes the pressing bar 2
Then, the rotation of the drive roll 30 is started.
【００５２】これにより、円弧状面部材１８は図５
（Ｃ）に示されるように押圧バー２０を中心として反時
計方向に揺動する。円弧状面部材１８が図１の状態まで
揺動すると、前述と同様に凸円弧状面１６Ｂによる積層
体フィルム２４の張付け作業を開始する。以下上記と同
様の工程を繰り返し、凸円弧状面１６Ａ〜１６Ｃをこの
順で基板１４に押しつけて、基板１４に順次積層体フィ
ルム２４を張り付けていく。As a result, the arc-shaped surface member 18 is
As shown in FIG. 3C, the swinging bar swings counterclockwise about the pressing bar 20. When the arcuate surface member 18 swings to the state shown in FIG. 1, the operation of attaching the laminate film 24 to the convex arcuate surface 16B is started in the same manner as described above. Thereafter, the same steps as above are repeated, and the convex arc-shaped surfaces 16A to 16C are pressed against the substrate 14 in this order, and the laminated film 24 is sequentially attached to the substrate 14.
【００５３】上記フィルム張付装置１０において、押圧
バー２０により内周面１７Ａ〜１７Ｃをラミネーション
ロール２２方向に押圧する際に、該押圧バー２０の軸方
向両端を、図において下方に押すことになるが、このよ
うにすると押圧バー２０の軸方向中間部が基板搬送面１
２Ａから離間する方向に撓むことが考えられる。In the film sticking apparatus 10, when the pressing bar 20 presses the inner peripheral surfaces 17A to 17C toward the lamination roll 22, both ends in the axial direction of the pressing bar 20 are pressed downward in the drawing. However, in this case, the axially intermediate portion of the pressing bar 20 is positioned on the substrate transfer surface 1.
It is conceivable to bend in a direction away from 2A.
【００５４】このような場合、図６に示されるように、
押圧バー２０の軸方向中間部分２０Ａを両端側部分より
も太径にすれば、撓みが生じても凸円弧状面１６Ａ〜１
６Ｃを均一に押圧することができる。 又、積層体フィ
ルム２４の、凸円弧状面１６Ａ〜１６Ｃの両端外側位置
で、吸着面４０Ａ〜４０Ｃにより積層体フィルムの送り
方向両端に引張力を与えた状態で吸着保持できるので、
該積層体フィルム２４を基板１４に張り付けたとき、し
わや気泡が発生することを防止できる。In such a case, as shown in FIG.
If the axial middle portion 20A of the pressing bar 20 is made thicker than the both end portions, the convex arc-shaped surfaces 16A to 1A even if the bending occurs.
6C can be pressed uniformly. In addition, since the laminated film 24 can be attracted and held in a state where a tensile force is applied to both ends in the feed direction of the laminated film by the attracting surfaces 40A to 40C at the positions outside both ends of the convex arc-shaped surfaces 16A to 16C,
When the laminate film 24 is adhered to the substrate 14, generation of wrinkles and bubbles can be prevented.
【００５５】なお、上記実施の形態の例では、吸着面４
０Ａ〜４０Ｃに吸着した積層体フィルム２４を、カッタ
ー５０によって切断するようにしているが、本発明はこ
れに限定されるものでなく、いわゆる連続張りタイプの
フィルム張付装置にも適用され得るものである。In the above embodiment, the suction surface 4
Although the laminated film 24 adsorbed at 0A to 40C is cut by the cutter 50, the present invention is not limited to this, and may be applied to a so-called continuous-tension type film sticking device. It is.
【００５６】その場合、上記と同様にフィルム張付装置
１０を運転させるが、カッター５０による積層体フィル
ム２４の切断工程を省略する。又、吸着面４０Ａ〜４０
Ｃに、フィルム吸着をしない場合もある。In this case, the film sticking apparatus 10 is operated in the same manner as described above, but the step of cutting the laminated film 24 by the cutter 50 is omitted. Also, the suction surfaces 40A-40
C may not absorb the film.
【００５７】又、連続張りの場合、図７に示されるよう
に、ラミネーションロール２２入側近傍にガイドロール
５２を設け、積層体フィルム２４を基板１４の上面に接
触することなく、且つ接近して凸円弧状面とラミネーシ
ョンロール２２間に送り込むようにしてもよい。In the case of continuous stretching, as shown in FIG. 7, a guide roll 52 is provided in the vicinity of the lamination roll 22 entry side, and the laminated film 24 is brought into close contact with the upper surface of the substrate 14 without coming into contact therewith. You may send it between a convex arc-shaped surface and the lamination roll 22.
【００５８】更に、図８のように、ラミネーションロー
ル２２出側位置で、出側カッター５４により、各基板１
４、１４間の隙間を通って下方から積層体フィルム２４
を切断して各基板を順次分離するようにしてもよい。Further, as shown in FIG. 8, at the exit side of the lamination roll 22, each substrate 1 is moved by the exit side cutter 54.
4 and 14 from below through the gap between the laminated films 24
May be cut to separate each substrate sequentially.
【００５９】なお、上記のフィルム張付装置１０におけ
る円弧状面部材１８は、３つの凸円弧状面１６Ａ〜１６
Ｃをロータリーエンジンにおける略三角形状のローター
と同様な構成としたものであるが、これは、複数の凸円
弧状面を備えるものであればよく、従って、例えば図９
（Ａ）に示されるように、２つの凸円弧状面５６Ａ、５
６Ｂを備えた円弧状面部材５８、あるいは図９（Ｂ）に
示されるように、４つの凸円弧状面６０Ａ〜６０Ｄを備
えた円弧状面部材６２としてもよい。The arcuate surface member 18 in the film sticking apparatus 10 has three convex arcuate surfaces 16A to 16A.
C has a configuration similar to that of a substantially triangular rotor in a rotary engine, but may be any as long as it has a plurality of convex arc-shaped surfaces.
As shown in (A), two convex arc-shaped surfaces 56A, 5A
An arcuate surface member 58 having 6B, or an arcuate surface member 62 having four convex arcuate surfaces 60A to 60D as shown in FIG.
【００６０】又、上記フィルム張付装置１０において、
押圧バー２０は円弧状面部材１８の内周面１７Ａ〜１７
Ｃに対して摩擦接触することにより、これを回転するよ
うにされているが、これは、例えば内周面１７Ａ〜１７
Ｃに内歯歯車を形成し、押圧バーはこの内歯歯車に噛み
合うピニオンとしてもよい。In the film sticking apparatus 10,
The pressing bar 20 is provided on the inner peripheral surfaces 17A to 17 of the arc-shaped surface member 18.
C is rotated by frictional contact with C.
An internal gear may be formed on C, and the pressing bar may be a pinion that meshes with the internal gear.
【００６１】更に、上記フィルム張付装置１０は、押圧
バー２０及びラミネーションロール２２の両方を回転す
ることによって、円弧状面部材１８、基板１４及び積層
体フィルム２４に送りを掛けるようにしているが、これ
は、押圧バー２０とラミネーションロール２２の一方の
みによって送りを形成するようにしてもよい。Further, the film sticking apparatus 10 is configured to feed the arc-shaped surface member 18, the substrate 14, and the laminated film 24 by rotating both the pressing bar 20 and the lamination roll 22. Alternatively, the feed may be formed by only one of the pressing bar 20 and the lamination roll 22.
【００６２】又、上記のように、駆動ロール３０を凸円
弧状面の円弧中心に設けて、円弧状面部材１８の揺動を
規制しているが、これは押圧バー２０により内周面を押
圧することにより自動的に調心されるので必ずしも設け
なくてもよい。但し、１回の張付け終了後に次の張付け
位置まで円弧状面部材１８を揺動させる他の手段が必要
となる。この場合、円弧状面部材１８を押圧バー２０に
よって揺動させてもよい。As described above, the drive roll 30 is provided at the center of the circular arc of the convex circular surface to restrict the swing of the circular surface member 18. It is not always necessary to provide it because the center is automatically adjusted by pressing. However, another means for swinging the arc-shaped surface member 18 to the next attaching position after one attaching operation is required. In this case, the arcuate surface member 18 may be swung by the pressing bar 20.
【００６３】なお、押圧バーは、いわゆるバーに限定さ
れるものではなく、形状、構造にかかわらず凸円弧状面
をその背面側から押圧する押圧部材であればよい。The pressing bar is not limited to a so-called bar, but may be any pressing member that presses the convex arc-shaped surface from the back side regardless of the shape and structure.
【００６４】[0064]
【発明の効果】本発明は上記のように構成したので、基
板が大型になっても、フィルムを張り付ける際に、基板
幅方向中心部位置でも確実にフィルムを押圧して、気泡
やしわが発生することを防止することができるという優
れた効果を有する。According to the present invention, as described above, even when the substrate becomes large, when the film is stuck, the film is surely pressed even at the center position in the substrate width direction to prevent bubbles and wrinkles. It has an excellent effect that generation can be prevented.
【図１】本発明の実施の形態の例に係るフィルム張付装
置を示す略示側面図FIG. 1 is a schematic side view showing a film sticking apparatus according to an embodiment of the present invention.
【図２】同フィルム張付装置によって基板に張り付けら
れる積層体フィルムを拡大して示す断面図FIG. 2 is an enlarged cross-sectional view showing a laminated film attached to a substrate by the film attaching apparatus.
【図３】同フィルム張付装置における円弧状面部材の吸
着面及びカッターを拡大して示す側面図FIG. 3 is an enlarged side view showing a suction surface and a cutter of an arc-shaped surface member in the film sticking apparatus.
【図４】同フィルム張付装置における制御系を示すブロ
ック図FIG. 4 is a block diagram showing a control system in the film sticking apparatus.
【図５】同フィルム張付装置により積層体フィルムを基
板に張り付ける過程を示す略示側面図FIG. 5 is a schematic side view showing a process of attaching a laminated film to a substrate by the film attaching device.
【図６】本発明の他の実施の形態の例に係る円弧状面部
材及び押圧バーを示す略示斜視図FIG. 6 is a schematic perspective view showing an arc-shaped surface member and a pressing bar according to another embodiment of the present invention.
【図７】本発明の更に他の実施の形態の例に係るフィル
ム張付装置の要部を示す略示側面図FIG. 7 is a schematic side view showing a main part of a film sticking apparatus according to still another embodiment of the present invention.
【図８】前記本発明における他のフィルム切断過程を示
す略示側面図FIG. 8 is a schematic side view showing another film cutting process in the present invention.
【図９】本発明の円弧状面部材の他の実施の形態の例を
示す略示側面図FIG. 9 is a schematic side view showing another embodiment of the arc-shaped surface member of the present invention.
１０…フィルム張付装置 １２…基板搬送装置 １２Ａ…基板搬送面 １４…基板 １６Ａ〜１６Ｃ、５６Ａ、５６Ｂ、６０Ａ〜６０Ｄ…凸
円弧状面 １７Ａ〜１７Ｃ…内周面 １８、５８、６２…円弧状面部材 ２０…押圧バー ２２…ラミネーションロール ２４…積層体フィルム ３０…駆動ロール ４０Ａ〜４０Ｃ…吸着面 ４１…先端吸着面 ４２…後端吸着面 ４４…負圧供給源 ４８…制御装置 ５０、５４…カッターDESCRIPTION OF SYMBOLS 10 ... Film sticking apparatus 12 ... Substrate conveying apparatus 12A ... Substrate conveying surface 14 ... Substrate 16A-16C, 56A, 56B, 60A-60D ... Convex arc-shaped surface 17A-17C ... Inner peripheral surface 18, 58, 62 ... Arc-shaped Surface member 20 ... Pressing bar 22 ... Lamination roll 24 ... Laminate film 30 ... Drive roll 40A-40C ... Suction surface 41 ... Suction surface 42 ... Suction surface 44 ... Negative pressure supply source 48 ... Control devices 50, 54 ... cutter
Claims (10)
フィルムを張り付ける方法において、基板に転がり接触
可能な凸円弧状面を備えた円弧状面部材を、該凸円弧状
面の背後から、該凸円弧状面に対して、基板送り方向と
反対方向に相対的に移動する押圧部材を押し付けて、前
記凸円弧状面を基板表面に転がり接触させ、該凸円弧状
面と基板との間のフィルムを該基板に圧着することを特
徴とするフィルム張付方法。In a method of attaching a film to a substrate conveyed along a substrate conveying surface, an arcuate surface member having a convex arcuate surface capable of rolling contact with the substrate is provided on the back of the convex arcuate surface. From, pressing the pressing member that moves relatively in the direction opposite to the substrate feeding direction against the convex arc surface, makes the convex arc surface rolling contact with the substrate surface, and the convex arc surface and the substrate A film sticking method, wherein the film is pressed against the substrate.
面には複数の凸円弧状面が環状に配置され、前記押圧部
材は該環状の内側を、凸円弧状面の円弧中心線と平行に
貫通して配置され、該環状の複数の凸円弧状面を基板送
り方向に順次回転させつつ押圧部材により基板に押圧す
ることを特徴とするフィルム張付方法。2. The arcuate surface member according to claim 1, wherein a plurality of convex arcuate surfaces are annularly arranged on the surface of the arcuate surface member, and the pressing member is configured such that an inner side of the annular shape and an arc center line of the convex arcuate surface are aligned. A film sticking method, wherein the pressing is performed on a substrate by a pressing member while sequentially rotating the plurality of annular convex arc-shaped surfaces in a substrate feeding direction.
の基板送り方向両端部外側位置で、前記フィルムを保持
しつつ、該フィルムを基板に圧着することを特徴とする
フィルム張付方法。3. The film sticking method according to claim 1, wherein the film is pressed against the substrate while holding the film at positions outside both ends of the convex arc-shaped surface in the substrate feeding direction. .
で後行フィルムの基板送り方向下流側端部と先行フィル
ムの上流側端との間を切断することを特徴とするフィル
ム張付方法。4. A film sticking method according to claim 3, further comprising cutting the downstream end of the subsequent film in the substrate feeding direction and the upstream end of the preceding film at the film holding position.
押圧部材を、その軸線廻りに回転させることにより、凸
円弧状面を背後から押圧することを特徴とするフィルム
張付方法。5. The film sticking method according to claim 1, wherein the convex member is pressed from behind by rotating the pressing member about its axis.
凸円弧状面の背後位置で、該凸円弧状面を基板と同方向
に送るように回転させることを特徴とするフィルム張付
方法。6. The film sticking method according to claim 5, wherein the pressing member is rotated at a position behind the convex arc surface so as to feed the convex arc surface in the same direction as the substrate. .
押圧部材を押し付けて基板にフィルムを圧着する際に、
該基板を、前記押圧部材と対向して配置されたラミネー
ションロールにより、前記凸円弧状面と反対側から挟み
込みつつ基板に送りをかけることを特徴とするフィルム
張付方法。7. The method according to claim 1, wherein when the pressing member is pressed to press the film against the substrate,
A film sticking method, wherein the substrate is fed to a substrate while being sandwiched by a lamination roll facing the pressing member from a side opposite to the convex arc-shaped surface.
転がり接触する複数の凸円弧状面を備え、各凸円弧状面
はその円弧の長さが前記基板の搬送方向の長さと略等し
く、円弧中心軸線が基板の幅方向となるように配置さ
れ、且つ、該円弧中心軸線方向の長さが基板の幅と略等
しくされた円弧状面部材と、この円弧状面部材における
前記凸円弧状面の背面側を貫通して前記円弧中心軸線と
平行に配置され、該背面に接触・押圧しつつ、凸円弧状
面に対して基板搬送面と平行、且つ、基板搬送方向と相
対的反対方向に移動自在な押圧部材と、を有してなり、
前記押圧部材の、凸円弧状面に対する相対移動時に、凸
円弧状面と基板との間のフィルムを、該基板に圧着する
ことを特徴とするフィルム張付装置。8. A plurality of convex arcuate surfaces which are in rolling contact with a substrate conveyed along a substrate conveyance surface, and each of the convex arcuate surfaces has a length of the arc substantially equal to a length of the substrate in the conveyance direction. An arc-shaped surface member which is arranged so that the arc center axis is in the width direction of the substrate, and whose length in the arc center axis direction is substantially equal to the width of the substrate; The arc-shaped surface is arranged in parallel with the central axis of the arc while penetrating the back side thereof, and is in contact with and pressed against the back surface, while being parallel to the substrate conveyance surface with respect to the convex arc-shaped surface, and relative to the substrate conveyance direction. And a pressing member movable in the opposite direction,
When the pressing member moves relative to the convex circular surface, the film between the convex circular surface and the substrate is pressed against the substrate.
であって、前記円弧状面部材の表面に環状に配置され、
該円弧状面部材は、前記複数の凸円弧状面が順次基板搬
送面に対面する位置となるように、基板搬送方向に回転
自在とすると共に、前記押圧部材は、前記環状の凸円弧
状面の内側位置で前記円弧状面部材を貫通して配置され
たことを特徴とするフィルム張付装置。9. The method according to claim 8, wherein the plurality of convex arc-shaped surfaces are arranged in a ring on the surface of the arc-shaped surface member.
The arc-shaped surface member is rotatable in the substrate transfer direction such that the plurality of convex arc-shaped surfaces sequentially face the substrate transfer surface, and the pressing member is formed of the annular convex arc-shaped surface. A film sticking device, wherein the film sticking device is disposed at an inner position of the arc-shaped surface member.
面を介して、前記押圧部材の反対側に配置され、該押圧
部材と共に前記基板フィルム及び凸円弧状部を挾持しつ
つ、これらに基板搬送方向の送りをかけるようラミネー
ションロールを設けたことを特徴とするフィルム張付装
置。10. A substrate according to claim 8, wherein said substrate film and said convex arc-shaped portion are arranged on said opposite side of said pressing member via said substrate transfer surface and sandwich said substrate and said pressing member together with said pressing member. A film sticking device provided with a lamination roll for feeding in the transport direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22455797A JP3805863B2 (en) | 1997-08-21 | 1997-08-21 | Film pasting method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22455797A JP3805863B2 (en) | 1997-08-21 | 1997-08-21 | Film pasting method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1158658A true JPH1158658A (en) | 1999-03-02 |
| JP3805863B2 JP3805863B2 (en) | 2006-08-09 |
Family
ID=16815655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22455797A Expired - Fee Related JP3805863B2 (en) | 1997-08-21 | 1997-08-21 | Film pasting method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3805863B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007002127A (en) * | 2005-06-24 | 2007-01-11 | Just:Kk | Laminating apparatus |
| JP2011053503A (en) * | 2009-09-03 | 2011-03-17 | Fuk:Kk | Plate member sticking apparatus |
| US9067371B2 (en) | 2011-11-23 | 2015-06-30 | Airbus Operations Limited | Wrinkle control method and tool therefor |
-
1997
- 1997-08-21 JP JP22455797A patent/JP3805863B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007002127A (en) * | 2005-06-24 | 2007-01-11 | Just:Kk | Laminating apparatus |
| JP2011053503A (en) * | 2009-09-03 | 2011-03-17 | Fuk:Kk | Plate member sticking apparatus |
| US9067371B2 (en) | 2011-11-23 | 2015-06-30 | Airbus Operations Limited | Wrinkle control method and tool therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3805863B2 (en) | 2006-08-09 |
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