JPH11356025A - Vacuum motor structure - Google Patents

Vacuum motor structure

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Publication number
JPH11356025A
JPH11356025A JP10159358A JP15935898A JPH11356025A JP H11356025 A JPH11356025 A JP H11356025A JP 10159358 A JP10159358 A JP 10159358A JP 15935898 A JP15935898 A JP 15935898A JP H11356025 A JPH11356025 A JP H11356025A
Authority
JP
Japan
Prior art keywords
rotor
magnetic sensor
sensor body
vacuum
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10159358A
Other languages
Japanese (ja)
Other versions
JP4046303B2 (en
Inventor
Shigeo Seki
重夫 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP15935898A priority Critical patent/JP4046303B2/en
Publication of JPH11356025A publication Critical patent/JPH11356025A/en
Application granted granted Critical
Publication of JP4046303B2 publication Critical patent/JP4046303B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To enable the simplification of the structure and the enhancement of the reliability, by constituting a vacuum motor so that the inner end of a magnetic sensor body is positioned on the vacuum side and the outer end is positioned on the atmosphere side. SOLUTION: A rotor 1 is installed rotatably in a motor case 20 through a bearing 21, and a magnetic sensor body 11 is tightly fit and secured in a mounting hole 20a, formed in part of the motor case 20, through an O-ring 8. A rotor magnet 10 is placed on the circumference of the rotor 1, and a magnetic gear 12, made of magnetic material and functioning as a detector rotor, is placed on the circumference of an end 1a. The magnetic sensor body 11 is opposed to the gear 12a. The rotor 1, the magnetic gear 12 and the inner end 11Ba of the magnetic sensor body 11 are positioned on the vacuum side, and the stator 2 and the outer end 11Bc of the magnetic sensor body 11 are positioned on the atmosphere side. As a result, leakage from the vacuum side to the atmosphere side is eliminated, and wiring on the vacuum side is obviated. Therefore, the structure can be simplified, and the reliability can be enhanced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、真空モータ構造に
関し、特に、ロータに磁性歯車を設けてモータケースに
磁気センサ体を設けることにより、真空側に配置する光
源、エンコーダディスク及び受光素子を不要とし、構造
の簡略化及び信頼性の向上を得るための新規な改良に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum motor structure, and more particularly, to a structure in which a magnetic gear is provided on a rotor and a magnetic sensor body is provided on a motor case, so that a light source, an encoder disk and a light receiving element arranged on the vacuum side are unnecessary. The present invention relates to a novel improvement for obtaining a simplified structure and improved reliability.

【０００２】[0002]

【従来の技術】従来、用いられていたこの種の真空モー
タ構造としては、図３に示す光学式エンコーダを内蔵し
た構成が採用されていた。すなわち、図３において符号
１で示されるものは、ステータコア２ａとステータ巻線
２ｂとからなるステータ２を有するモータケース２０に
軸受２１を介して回転自在に設けられたロータであり、
このモータケース２０の一部に形成された取付孔２０ａ
にはＯリング８を介してコネクタ７が設けられている。
このロータ１の外周には、ロータマグネット１０が設け
られている。2. Description of the Related Art Conventionally, as a structure of this kind of vacuum motor used, a structure incorporating an optical encoder shown in FIG. 3 has been adopted. That is, what is indicated by reference numeral 1 in FIG. 3 is a rotor rotatably provided via a bearing 21 on a motor case 20 having a stator 2 including a stator core 2a and a stator winding 2b,
A mounting hole 20a formed in a part of the motor case 20
Is provided with a connector 7 via an O-ring 8.
A rotor magnet 10 is provided on the outer periphery of the rotor 1.

【０００３】前記モータケース２０内には、光源５及び
受光素子６が互いに離間しかつ対向して固定配設されて
いると共に、前記ロータ１の端部１ａにはエンコーダデ
ィスク４が設けられ、このエンコーダディスク４は前記
光源５と受光素子６の間に位置している。従って、前述
のロータ１、光源５、エンコーダディスク４及び受光素
子６は真空側に位置し、モータケース２０と一体の隔壁
３によってステータ２は大気側に位置している。なお、
光源５、受光素子６及びエンコーダディスク４により光
学式の回転検出器４０を構成している。In the motor case 20, a light source 5 and a light receiving element 6 are fixedly arranged facing each other at a distance from each other, and an encoder disk 4 is provided at an end 1a of the rotor 1. The encoder disk 4 is located between the light source 5 and the light receiving element 6. Therefore, the rotor 1, the light source 5, the encoder disk 4 and the light receiving element 6 are located on the vacuum side, and the stator 2 is located on the atmosphere side by the partition wall 3 integrated with the motor case 20. In addition,
The light source 5, the light receiving element 6, and the encoder disk 4 constitute an optical rotation detector 40.

【０００４】[0004]

【発明が解決しようとする課題】従来の真空モータ構造
は、以上のように構成されているため、次のような課題
が存在していた。すなわち、内蔵のエンコーダが光学式
であるため、光源と受光素子との間には隔壁を設けるこ
とができず、光源及び受光素子のリード線をコネクタを
介して外部に引出さなくてはならず、コネクタ内側の真
空側とコネクタ外側の大気側とを完全に維持すること
は、コネクタの構造上からも難しく、真空モータを使用
する場合のネックとなっていた。Since the conventional vacuum motor structure is configured as described above, there are the following problems. That is, since the built-in encoder is of an optical type, a partition cannot be provided between the light source and the light receiving element, and the lead wires of the light source and the light receiving element must be drawn out through the connector. However, it is difficult to completely maintain the vacuum side inside the connector and the atmosphere side outside the connector from the viewpoint of the structure of the connector, and this has been a bottleneck when using a vacuum motor.

【０００５】本発明は、以上のような課題を解決するた
めになされたもので、特に、ロータに磁性歯車を設けて
モータケースに磁気センサ体を設けることにより、真空
側に配置する光源、エンコーダディスク及び受光素子を
不要とし、構造の簡略化及び信頼性の向上を得るように
した真空モータ構造を提供することを目的とする。The present invention has been made to solve the above problems, and in particular, a light source and an encoder arranged on a vacuum side by providing a magnetic gear on a rotor and a magnetic sensor body on a motor case. It is an object of the present invention to provide a vacuum motor structure in which a disk and a light receiving element are not required, and the structure is simplified and the reliability is improved.

【０００６】[0006]

【課題を解決するための手段】本発明による真空モータ
構造は、ステータを有するモータケースに軸受を介して
ロータを回転自在に有し、前記ロータに回転検出器の検
出器ロータを設け、前記ロータと検出器ロータとは真空
側に位置するようにした真空モータ構造において、前記
検出器ロータは磁性材で形成された磁性歯車よりなり、
前記モータケースには前記磁性歯車に対応して磁気セン
サ体が設けられ、前記磁気センサ体の内端は真空側に、
前記磁気センサ体の外端は大気側に位置するようにした
構成であり、さらに、前記磁気センサ体は、全体がカッ
プ型をなし鍔部を有するカバーと、前記カバー内に設け
られ表側に磁気センサを有するプリント基板と、前記プ
リント基板の裏側に設けられたバイアス用マグネット
と、前記カバー内に充填され前記プリント基板の保持を
するための樹脂充填材とよりなり、前記鍔部が前記モー
タケースの外面側に固定され、前記カバーの前記内端が
前記モータケースの内側に位置している構成である。A vacuum motor structure according to the present invention comprises a motor case having a stator and a rotor rotatably via a bearing via a bearing. The rotor is provided with a detector rotor of a rotation detector. In the vacuum motor structure in which the detector rotor is located on the vacuum side, the detector rotor is made of a magnetic gear formed of a magnetic material,
The motor case is provided with a magnetic sensor body corresponding to the magnetic gear, and the inner end of the magnetic sensor body is on the vacuum side,
The outer end of the magnetic sensor body is configured to be located on the atmosphere side.Furthermore, the magnetic sensor body has a cup-shaped cover as a whole and a flange, A printed circuit board having a sensor, a bias magnet provided on the back side of the printed circuit board, and a resin filler filled in the cover to hold the printed circuit board, wherein the flange portion is the motor case. , And the inner end of the cover is located inside the motor case.

【０００７】[0007]

【発明の実施の形態】以下、図面と共に本発明による真
空モータ構造の好適な実施の形態について説明する。な
お、従来例と同一又は同等部分については同一符号を用
いて説明する。図１において符号１で示されるものは、
ステータコア２ａとステータ巻線２ｂとからなるステー
タ２を有するモータケース２０に軸受２１を介して回転
自在に設けられたロータであり、このモータケース２０
の一部に形成された取付孔２０ａにはＯリング８を介し
て磁気センサ体１１が密合して固定されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a vacuum motor structure according to the present invention will be described below with reference to the drawings. Note that the same or equivalent parts as those in the conventional example will be described using the same reference numerals. In FIG. 1, what is indicated by reference numeral 1 is
A rotor rotatably provided via a bearing 21 on a motor case 20 having a stator 2 composed of a stator core 2a and a stator winding 2b.
The magnetic sensor body 11 is tightly fixed via an O-ring 8 to a mounting hole 20a formed in a part of the magnetic sensor body.

【０００８】前記ロータ１の外周には、ロータマグネッ
ト１０が設けられていると共に、このロータ１の端部１
ａの外周には磁性材料よりなると共に検出器ロータであ
る磁性歯車１２が設けられている。この磁性歯車１２の
歯車１２ａに対向して前記磁気センサ体１１が位置して
いる。なお、この磁性歯車１２と磁気センサ体１１によ
って磁気式の回転検出器４０を構成している。A rotor magnet 10 is provided on the outer periphery of the rotor 1 and an end 1 of the rotor 1 is provided.
A magnetic gear 12 which is made of a magnetic material and is a detector rotor is provided on the outer periphery of a. The magnetic sensor body 11 is located opposite the gear 12a of the magnetic gear 12. The magnetic gear 12 and the magnetic sensor body 11 constitute a magnetic rotation detector 40.

【０００９】前記磁気センサ体１１は、図２で示される
ように構成されており、この磁気センサ体１１のカップ
型をなすと共に鍔部１１Ａを有するカバー１１Ｂの内端
１１Ｂａ側の段部１１Ｂｂには表側に周知の磁気センサ
１１ａを有するプリント基板１１ｂが設けられ、このプ
リント基板１１ｂの裏側にはバイアスマグネット１１ｃ
が設けられている。前記カバー１１Ｂの内部には樹脂充
填材１１ｅが充填され、この樹脂充填材１１ｅによって
プリント基板１１ｂが段部１１Ｂｂに保持されている。
従って、前記磁気センサ体１１の内端１１Ｂａがモータ
ケース２０の内側に位置し、モータケース２０の延長部
である隔壁３によってステータ２が大気側に位置してい
る。The magnetic sensor body 11 is configured as shown in FIG. 2. The magnetic sensor body 11 is formed in a cup shape and has a step 11Bb on the inner end 11Ba side of a cover 11B having a flange 11A. A printed board 11b having a well-known magnetic sensor 11a is provided on the front side, and a bias magnet 11c is provided on the back side of the printed board 11b.
Is provided. The inside of the cover 11B is filled with a resin filler 11e, and the printed board 11b is held on the step portion 11Bb by the resin filler 11e.
Accordingly, the inner end 11Ba of the magnetic sensor body 11 is located inside the motor case 20, and the stator 2 is located on the atmosphere side by the partition wall 3 which is an extension of the motor case 20.

【００１０】前述の構成により、前記ロータ１、磁性歯
車１２及び磁気センサ体１１の内端１１Ｂａが真空側に
位置し、ステータ２及び磁気センサ体１１の外端１１Ｂ
ｃが大気側に位置している。なお、この磁気センサ１１
ａが設けられたプリント基板１１ｂに接続されたリード
線３０はこの樹脂充填材１１ｅを経て外部に導出されて
いる。また、前述の磁気センサ体１１の内部構造は、図
２に示す構成は１例であり、周知の他のセンサ構造を用
いることもできる。With the above-described structure, the inner end 11Ba of the rotor 1, the magnetic gear 12, and the magnetic sensor body 11 is located on the vacuum side, and the outer end 11B of the stator 2 and the magnetic sensor body 11 is located.
c is located on the atmosphere side. The magnetic sensor 11
The lead wire 30 connected to the printed board 11b provided with a is led out through the resin filler 11e. The internal structure of the magnetic sensor body 11 described above is an example of the configuration shown in FIG. 2, and another known sensor structure can be used.

【００１１】[0011]

【発明の効果】本発明による真空モータ構造は、以上の
ように構成されているため、次のような効果を得ること
ができる。すなわち、真空モータに内蔵されたエンコー
ダを従来の光学式から磁気式に変更したことによりモー
タケースには磁気センサ体を直接設けるのみとなり、真
空側から大気側への漏れがなくなり、かつ、真空側での
配線も不要となり、構造の簡略化と信頼性の向上を得る
ことができた。Since the vacuum motor structure according to the present invention is constructed as described above, the following effects can be obtained. In other words, by changing the encoder built in the vacuum motor from the conventional optical type to the magnetic type, only the magnetic sensor body is directly provided on the motor case, so that there is no leakage from the vacuum side to the atmosphere side, and This eliminates the need for wiring, thereby simplifying the structure and improving reliability.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明による真空モータ構造を示す断面図であ
る。FIG. 1 is a sectional view showing a vacuum motor structure according to the present invention.

【図２】図１の磁気センサ体を示す拡大断面図である。FIG. 2 is an enlarged sectional view showing the magnetic sensor body of FIG.

【図３】従来の真空モータ構造を示す断面図である。FIG. 3 is a cross-sectional view showing a conventional vacuum motor structure.

【符号の説明】[Explanation of symbols]

１ ロータ ２ ステータ １２ 検出器ロータ（磁性歯車） １１ 磁気センサ体 １１Ｂａ 内端 １１Ｂｃ 外端 １１Ａ 鍔部 １１Ｂ カバー １１ａ 磁気センサ １１ｂ プリント基板 １１ｅ 樹脂充填材 ２０ モータケース Reference Signs List 1 rotor 2 stator 12 detector rotor (magnetic gear) 11 magnetic sensor body 11Ba inner end 11Bc outer end 11A flange 11B cover 11a magnetic sensor 11b printed circuit board 11e resin filler 20 motor case

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 ステータ(2)を有するモータケース(20)
に軸受(21)を介してロータ(1)を回転自在に有し、前記
ロータ(1)に回転検出器(40)の検出器ロータ(12)を設
け、前記ロータ(1)と検出器ロータ(12)とは真空側に位
置するようにした真空モータ構造において、前記検出器
ロータ(12)は磁性材で形成された磁性歯車よりなり、前
記モータケース(20)には前記磁性歯車(12)に対応して磁
気センサ体(11)が設けられ、前記磁気センサ体(11)の内
端(11Ba)は真空側に、前記磁気センサ体(11)の外端(11B
c)は大気側に位置するように構成したことを特徴とする
真空モータ構造。1. A motor case (20) having a stator (2).
The rotor (1) is rotatably provided via a bearing (21), and the rotor (1) is provided with a detector rotor (12) of a rotation detector (40), and the rotor (1) and the detector rotor are provided. (12) is a vacuum motor structure positioned on the vacuum side, wherein the detector rotor (12) is made of a magnetic gear formed of a magnetic material, and the motor case (20) is provided with the magnetic gear (12). ), A magnetic sensor body (11) is provided, an inner end (11Ba) of the magnetic sensor body (11) is on the vacuum side, and an outer end (11B) of the magnetic sensor body (11).
c) A vacuum motor structure characterized by being located on the atmosphere side. 【請求項２】 前記磁気センサ体(11)は、全体がカップ
型をなし鍔部(11A)を有するカバー(11B)と、前記カバー
(11B)内に設けられ表側に磁気センサ(11a)を有するプリ
ント基板(11b)と、前記プリント基板(11b)の裏側に設け
られたバイアス用マグネット(11c)と、前記カバー(11B)
内に充填され前記プリント基板(11b)の保持をするため
の樹脂充填材(11e)とよりなり、前記鍔部(11A)が前記モ
ータケース(20)の外面側に固定され、前記カバー(11B)
の前記内端(11Ba)が前記モータケース(20)の内側に位置
していることを特徴とする請求項１記載の真空モータ構
造。2. A cover (11B) having a cup-shaped flange (11A) as a whole and a cover (11B),
A printed board (11b) provided in (11B) and having a magnetic sensor (11a) on the front side, a bias magnet (11c) provided on the back side of the printed board (11b), and the cover (11B)
And a resin filler (11e) for holding the printed circuit board (11b) filled therein.The flange (11A) is fixed to the outer surface side of the motor case (20), and the cover (11B )
The vacuum motor structure according to claim 1, wherein said inner end (11Ba) is located inside said motor case (20).
JP15935898A 1998-06-08 1998-06-08 Vacuum motor structure Expired - Fee Related JP4046303B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15935898A JP4046303B2 (en) 1998-06-08 1998-06-08 Vacuum motor structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15935898A JP4046303B2 (en) 1998-06-08 1998-06-08 Vacuum motor structure

Publications (2)

Publication Number Publication Date
JPH11356025A true JPH11356025A (en) 1999-12-24
JP4046303B2 JP4046303B2 (en) 2008-02-13

Family

ID=15692108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15935898A Expired - Fee Related JP4046303B2 (en) 1998-06-08 1998-06-08 Vacuum motor structure

Country Status (1)

Country Link
JP (1) JP4046303B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001320858A (en) * 2000-05-09 2001-11-16 Tamagawa Seiki Co Ltd Sensor for vacuum motor
JP2001339920A (en) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd Vacuum motor
WO2002075904A1 (en) * 2001-03-16 2002-09-26 Kabushiki Kaisha Yaskawa Denki Method and apparatus for detecting vacuum position in vacuum motor
JP2004163202A (en) * 2002-11-12 2004-06-10 Yaskawa Electric Corp Position detector for vacuum
CN1299423C (en) * 2001-12-25 2007-02-07 乐金电子(天津)电器有限公司 Vacuum cleaner motor with structure for mounting overheat prevention device
JP2013024572A (en) * 2011-07-15 2013-02-04 Sanyo Denki Co Ltd Encoder
JP2013038965A (en) * 2011-08-09 2013-02-21 Ulvac Japan Ltd Partition structure attached to motor and vacuum motor
JP2013038964A (en) * 2011-08-09 2013-02-21 Ulvac Japan Ltd Position sensor and vacuum motor
JP2017063204A (en) * 2011-09-16 2017-03-30 パーシモン テクノロジーズ コーポレイションＰｅｒｓｉｍｍｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｃｏｒｐ． Robot drive with passive rotor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6951691B2 (en) 2019-11-14 2021-10-20 株式会社安川電機 Vacuum robots, vacuum motors, vacuum motor encoders,

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152808U (en) * 1974-10-17 1976-04-22
JPH063158A (en) * 1992-06-23 1994-01-11 Toshiba Corp Detector
JPH09247887A (en) * 1996-03-06 1997-09-19 Yaskawa Electric Corp Can device for vacuum motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152808U (en) * 1974-10-17 1976-04-22
JPH063158A (en) * 1992-06-23 1994-01-11 Toshiba Corp Detector
JPH09247887A (en) * 1996-03-06 1997-09-19 Yaskawa Electric Corp Can device for vacuum motor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001320858A (en) * 2000-05-09 2001-11-16 Tamagawa Seiki Co Ltd Sensor for vacuum motor
JP2001339920A (en) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd Vacuum motor
WO2002075904A1 (en) * 2001-03-16 2002-09-26 Kabushiki Kaisha Yaskawa Denki Method and apparatus for detecting vacuum position in vacuum motor
CN1299423C (en) * 2001-12-25 2007-02-07 乐金电子(天津)电器有限公司 Vacuum cleaner motor with structure for mounting overheat prevention device
JP2004163202A (en) * 2002-11-12 2004-06-10 Yaskawa Electric Corp Position detector for vacuum
JP2013024572A (en) * 2011-07-15 2013-02-04 Sanyo Denki Co Ltd Encoder
JP2013038965A (en) * 2011-08-09 2013-02-21 Ulvac Japan Ltd Partition structure attached to motor and vacuum motor
JP2013038964A (en) * 2011-08-09 2013-02-21 Ulvac Japan Ltd Position sensor and vacuum motor
JP2017063204A (en) * 2011-09-16 2017-03-30 パーシモン テクノロジーズ コーポレイションＰｅｒｓｉｍｍｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｃｏｒｐ． Robot drive with passive rotor

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