JPH11345498A - Nondefective code write method in mgm test - Google Patents

Nondefective code write method in mgm test

Info

Publication number
JPH11345498A
JPH11345498A JP10151054A JP15105498A JPH11345498A JP H11345498 A JPH11345498 A JP H11345498A JP 10151054 A JP10151054 A JP 10151054A JP 15105498 A JP15105498 A JP 15105498A JP H11345498 A JPH11345498 A JP H11345498A
Authority
JP
Japan
Prior art keywords
defective
code
test
area
nondefective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10151054A
Other languages
Japanese (ja)
Inventor
Sachiko Yamaoka
佐知子 山岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10151054A priority Critical patent/JPH11345498A/en
Publication of JPH11345498A publication Critical patent/JPH11345498A/en
Withdrawn legal-status Critical Current

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  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)

Abstract

PROBLEM TO BE SOLVED: To simultaneously measure many pieces, to shorten a time and to improve efficiency by parallel writing a nondefective code in all measurement devices, successively writing the nondefective code in its whole area of respective measurement devices and serially deciding whether or not respective areas of respective measurement devices are a nondefective area for all measurement devices. SOLUTION: The nondefective code is written simultaneously in addresses(ADD) Y of a device under test(DUT) in a test of a semiconductor memory(MGM) having nondefective component, and whether or not the test is advanced to a final ADD is decided. When the test is ended to the final ADD, whether or not the ADD of the DUT is the nondefective is decided, and when the nondefective area, the test is advanced to a next step, and when no, the nondefective code written in the control area of the ADD of the DUT is erased. Since the time parallel writing the nondefective code in all DUT is the same as the time writing it in a piece of DUT that all areas are nondefective, the time is shortened.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】この発明は、部品良品である
半導体メモリ（以下、ＭＧＭという。ＭＧＭ＝Mostly G
ood Memory）のテストにおける良品コード書込方法に関
し、特に測定デバイス（以下、ＤＵＴという）の良品領
域に良品コードを書込む工程を多数個同時測定時に短時
間で効率よく実施することができるＭＧＭテストにおけ
る良品コード書込方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor memory (hereinafter, referred to as MGM, MGM = Mostly G) which is a good part.
In particular, the present invention relates to a non-defective code writing method in a ood memory test, and particularly to an MGM test capable of efficiently executing a process of writing a non-defective code in a non-defective region of a measuring device (hereinafter, referred to as a DUT) in a short time when simultaneously measuring a plurality of non-defective devices. In the non-defective code writing method.

【０００２】[0002]

【従来の技術】ＭＧＭのテストにおいては、多数のＤＵ
Ｔをテストし、各ＤＵＴのセクタ毎にそれが良品である
場合、対応する管理領域に良品コードを書込む工程を有
している。従来、ＭＧＭのテストにおいて、ＤＵＴの良
品領域に対応する管理領域に良品コードを書込む工程を
多数個同時測定で実施する際、各々のＤＵＴの良品領域
が異なるため、全ＤＵＴに対してシリアルに実施してい
た。すなわち、良品コード書込みの工程がスタートする
と、第１番目のＤＵＴについて、最初のセクタから最終
セクタまで、順次良品領域かどうかを判定し、良品領域
であればそのセクタの管理領域に良品コードを書込み、
同様に第２番目のＤＵＴから最終のＤＵＴまでシリアル
に実施していた。2. Description of the Related Art In MGM testing, a large number of DUs are used.
T is tested, and if it is non-defective for each sector of each DUT, a non-defective code is written into a corresponding management area. Conventionally, in a MGM test, when a process of writing a non-defective code to a control area corresponding to a non-defective area of a DUT is performed by simultaneous measurement of a large number of non-defective areas, the non-defective areas of each DUT are different, so that all DUTs are serially connected. Had been implemented. That is, when the non-defective code writing process starts, it is determined whether or not the first DUT is a non-defective area from the first sector to the last sector. If the non-defective area, the non-defective code is written to the management area of the sector. ,
Similarly, the processing is performed serially from the second DUT to the last DUT.

【０００３】図３は、従来のＭＧＭテストにおいて、多
数のＤＵＴを対象とする場合の、各ＤＵＴの良品セクタ
の管理領域への良品コード書込方法を示すフローチャー
トである。図において、ステップＳ２１でまずＤＵＴ
Ｘのアドレス（以下、ＡＤＤという）Ｙが良品かどうか
判定する。良品領域ならステップＳ２２で良品コード書
込みを実施し、ＰＡＳＳ／ＦＡＩＬにかかわらずステッ
プＳ２３へ進む。ステップＳ２１で良品領域でない場合
は直接ステップＳ２３へ進む。FIG. 3 is a flowchart showing a method of writing a good code in a management area of a good sector of each DUT when a large number of DUTs are targeted in a conventional MGM test. In the figure, first in step S21, the DUT
It is determined whether the address X (hereinafter referred to as ADD) Y is a non-defective product. If it is a non-defective area, the non-defective code is written in step S22, and the process proceeds to step S23 regardless of PASS / FAIL. If it is not a non-defective area in step S21, the process directly proceeds to step S23.

【０００４】ステップＳ２３では、最終ＡＤＤまで実施
したかどうかを判定し、最終ＡＤＤでなければ、ステッ
プＳ２４でＡＤＤを１インクリメントしてステップＳ２
１へ戻る。最終ＡＤＤまで完了すればステップＳ２５へ
進み、全ＤＵＴの良品コード書込みを実施したかどうか
を判定し、全ＤＵＴ完了していなければステップＳ２６
でＤＵＴ番号を１インクリメントしてステップＳ２１へ
戻り、全ＤＵＴ完了していれば終了する。In step S23, it is determined whether or not the processing has been performed up to the final ADD. If not, the ADD is incremented by one in step S24, and the operation proceeds to step S2.
Return to 1. If the process is completed up to the final ADD, the process proceeds to step S25, and it is determined whether or not the non-defective code has been written in all the DUTs.
The DUT number is incremented by 1, and the process returns to step S21. If all the DUTs have been completed, the process ends.

【０００５】上述のように、従来の方法では、ＭＧＭの
テストにおいて、良品領域に良品コードを書込む工程を
多数個同時測定で実施する際、全ＤＵＴに対してシリア
ルに、また各ＤＵＴについては順次アドレスごとに良品
領域かどうかを判定し良品コードの書き込みを行ってお
り、全ＤＵＴに対してパラレルに処理することが出来な
かった。As described above, in the conventional method, in the MGM test, when a process of writing a non-defective code in a non-defective region is performed by a large number of simultaneous measurements, serially for all DUTs, and for each DUT, The non-defective area is sequentially determined for each address and the non-defective code is written, so that it is not possible to process all DUTs in parallel.

【０００６】[0006]

【発明が解決しようとする課題】従来のＭＧＭテストで
は、多数のデバイスを同時測定し、良品領域に良品コー
ドを書込む場合、１個ずつシリアルに書込みを実施する
必要があるため、テスト時間が長くなるという問題があ
った。この発明は上記課題を解決するためになされたも
ので、その目的は多数個同時測定時に短時間で効率よく
良品領域への良品コード書込みを実現するＭＧＭテスト
における良品コード書込方法を提供することである。In the conventional MGM test, when a large number of devices are measured at the same time and a good code is written in a good product area, it is necessary to write serially one by one. There was a problem of becoming long. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a good code writing method in an MGM test for efficiently writing a good code in a good area in a short time at the time of simultaneous measurement of many devices. It is.

【０００７】[0007]

【課題を解決するための手段】この発明の請求項１のＭ
ＧＭテストにおける良品コード書込方法は、測定デバイ
スの良品領域に良品コードを書込む場合、全測定デバイ
スに対してパラレルに、かつ各測定デバイスについては
その全領域に対して順次に、良品コードを書込んだ後、
全測定デバイスに対してシリアルに、各測定デバイスの
各領域が良品領域かどうかを判定し、良品領域でない場
合はその領域の良品コードを消去することを特徴とする
ものである。SUMMARY OF THE INVENTION
A good code writing method in the GM test is as follows. When a good code is written in a good area of a measuring device, a good code is written in parallel to all measuring devices and sequentially to all areas of each measuring device. After writing,
It is characterized by serially determining whether each area of each measuring device is a non-defective area for all the measuring devices, and deleting the non-defective code in that area if the area is not a non-defective area.

【０００８】また、この発明の請求項２のＭＧＭテスト
における良品コード書込方法は、良品領域に良品コード
を書込む場合、全測定デバイスに対してパラレルに、か
つ各測定デバイスについてはその全領域に対して順次
に、各アドレスにおいて全測定デバイスが良品領域であ
るかどうかを判定し、良品領域であるアドレスの場合
は、全測定デバイスに同時に良品コードを書込み、また
１デバイスでも良品領域でないデバイスがあるアドレス
の場合は、その良品領域でないデバイスを一時的に試験
対象から外して、残りの全測定デバイスに同時に良品コ
ードを書込んだ後、一時的に試験対象から外した上記デ
バイスを試験対象に戻すことを特徴とするものである。According to a second aspect of the present invention, there is provided a non-defective code writing method in an MGM test, wherein a non-defective code is written in a non-defective area in parallel with respect to all measurement devices, and the entire area of each measurement device. Is sequentially determined at each address whether or not all the measuring devices are in the non-defective area. If the address is in the non-defective area, the non-defective area is written to the non-defective area at the same time as the non-defective area. If there is a certain address, temporarily remove the device that is not in the non-defective area from the test target, write the non-defective code simultaneously to all the remaining measurement devices, and then temporarily remove the device from the test target. It is characterized by returning to.

【０００９】[0009]

【発明の実施の形態】以下、図面を参照してこの発明の
実施の形態について説明する。図において、ＹはＤＵＴ
におけるＡＤＤ番号、ＸはＤＵＴ番号とする。実施の形
態１．図１はこの発明の実施の形態１であるＭＧＭテス
トにおける良品コード書込方法を示すフローチャートで
ある。図において、ステップＳ１でまず全ＤＵＴのＡＤ
Ｄ Ｙ（スタート時にはＹ＝０）に同時に良品コード書
込みを実施し、ＰＡＳＳ／ＦＡＩＬにかかわらずステッ
プＳ２へ進む。ここで最終ＡＤＤまで実施したかどうか
を判定し、最終ＡＤＤでなければステップＳ３でＡＤＤ
を１インクリメントしてステップＳ１へ戻る。Embodiments of the present invention will be described below with reference to the drawings. In the figure, Y is DUT
Is an ADD number and X is a DUT number. Embodiment 1 FIG. FIG. 1 is a flowchart showing a non-defective code writing method in an MGM test according to the first embodiment of the present invention. In the figure, first in step S1, the ADs of all DUTs are read.
The non-defective code is simultaneously written to DY (Y = 0 at the start), and the process proceeds to step S2 regardless of PASS / FAIL. Here, it is determined whether or not the processing has been performed up to the final ADD.
Is incremented by 1 and the process returns to step S1.

【００１０】最終ＡＤＤまで完了すればステップＳ４へ
進み、ＤＵＴ ＸのＡＤＤ Ｙが良品領域かどうか判定
する。良品領域でない場合はステップＳ５でＤＵＴ Ｘ
のＡＤＤ Ｙの管理領域に書込まれている良品コード消
去を実施し、ＰＡＳＳ／ＦＡＩＬにかかわらずステップ
Ｓ６に進む。ステップＳ４で良品領域であれば直接ステ
ップＳ６へ進む。ステップＳ６では最終ＡＤＤまで実施
したかどうかを判定し、最終ＡＤＤでなければステップ
Ｓ７でＡＤＤを１インクリメントしてステップＳ４へ戻
る。最終ＡＤＤまで完了すればステップＳ８へ進み、全
ＤＵＴの良品領域でない領域の良品コード消去を実施し
たかどうかを判定し、全ＤＵＴ完了していなければステ
ップＳ９でＤＵＴ番号を１インクリメントしてステップ
Ｓ４へ戻り、全ＤＵＴ完了していれば終了する。If the process is completed up to the final ADD, the process proceeds to step S4, and it is determined whether or not ADD Y of DUT X is a non-defective region. If the area is not a non-defective area, DUT X in step S5
The non-defective code written in the management area of ADDY is erased, and the process proceeds to step S6 regardless of PASS / FAIL. If it is a non-defective region in step S4, the process directly proceeds to step S6. In step S6, it is determined whether or not the processing has been performed up to the final ADD. If not, the ADD is incremented by one in step S7 and the process returns to step S4. If the process is completed up to the final ADD, the process proceeds to step S8, and it is determined whether or not the non-defective code in the non-defective region of all the DUTs has been erased. If not, the DUT number is incremented by one in step S9 and the step S4 is performed. Returning to step, if all DUTs have been completed, the processing ends.

【００１１】ＭＧＭテストにおける測定対象ＤＵＴの多
数は良品であり、各ＤＵＴについても不良セクタの数は
極めて少ないのが通常である。そして、１セクタ当たり
の良品コード書込みに要する時間と良品コードを消去す
る時間が同じであるとすると、この実施の形態１では、
ステップＳ１で全ＤＵＴに対しパラレルに良品コードを
書込む時間は、全領域が良品の１個のＤＵＴに対する書
込みの時間と同じである。ステップＳ４からＳ９では良
品領域でない場合の良品コードの消去をシリアルに実施
しているが、その数が少ないため従来の良品コード書込
みの場合に比べて極めて少ない時間で済む。このよう
に、全ＤＵＴの全ＡＤＤに同時に良品コード書込みを実
施してから、１ＤＵＴずつシリアルに良品領域でない領
域の良品コード消去を実施すれば、多数個同時測定の
際、テスト時間を短縮できるというメリットがある。Many of the DUTs to be measured in the MGM test are non-defective, and the number of defective sectors is usually very small for each DUT. Assuming that the time required for writing a good code per sector is the same as the time for erasing a good code,
The time for writing the non-defective code in parallel to all the DUTs in step S1 is the same as the time for writing the single non-defective DUT in the entire area. In steps S4 to S9, the non-defective area is erased in a non-defective area serially. However, since the number of the non-defective areas is small, the time required for writing the non-defective area is very short as compared with the conventional non-defective code writing. As described above, if the good code is written to all ADDs of all the DUTs at the same time and then the good code is erased serially for each DUT in an area that is not a good area, the test time can be reduced in the simultaneous measurement of a large number of DUTs. There are benefits.

【００１２】実施の形態２．図２はこの発明の実施の形
態２を示すＭＧＭテストにおける良品コード書込方法の
フローチャートである。図においてステップＳ１１でま
ず全ＤＵＴについてそれらのＡＤＤ Ｙが良品領域かど
うかを判定する。全ＤＵＴについて、ＡＤＤ Ｙが良品
領域であればＳ１２で全ＤＵＴのＡＤＤ Ｙに同時に良
品コード書込みを実施し、ＰＡＳＳ／ＦＡＩＬにかかわ
らずステップＳ１６へ進む。Embodiment 2 FIG. FIG. 2 is a flowchart of a non-defective code writing method in an MGM test according to the second embodiment of the present invention. In the figure, in step S11, it is first determined whether or not the ADD Y of all the DUTs is a non-defective area. If the ADD Y is a non-defective area for all DUTs, the non-defective code is simultaneously written to the ADD Y of all DUTs in S12, and the process proceeds to step S16 regardless of PASS / FAIL.

【００１３】ステップＳ１１で同一アドレスについて少
なくとも１個のＤＵＴに良品領域でないものがある場合
はステップＳ１３へ進み、ＡＤＤ Ｙが良品領域でない
ＤＵＴを一時的に試験対象から外して、ステップＳ１４
へ進む。ステップＳ１４で試験対象ＤＵＴのみＡＤＤ
Ｙの管理領域に良品コード書込みを実施し、ＰＡＳＳ／
ＦＡＩＬにかかわらずステップＳ１５へ進む。ステップ
Ｓ１５ではステップＳ１３で試験対象から一時的に外し
たＤＵＴを試験対象に戻し、ステップＳ１６に進む。ス
テップＳ１６では最終ＡＤＤまで実施したかどうかを判
定し、最終ＡＤＤでなければステップＳ１７でＡＤＤを
１インクリメントしてステップＳ１１へ戻り、最終ＡＤ
Ｄまで完了していれば終了する。If it is determined in step S11 that at least one DUT for the same address is not in the non-defective area, the process proceeds to step S13, in which the DUT whose ADD Y is not in the non-defective area is temporarily excluded from the test target, and step S14 is performed.
Proceed to. Only the DUT to be tested is ADD in step S14
Write a good code in the management area of Y
The process proceeds to step S15 regardless of FAIL. In step S15, the DUT temporarily removed from the test target in step S13 is returned to the test target, and the process proceeds to step S16. In step S16, it is determined whether or not the processing has been performed up to the final ADD. If not, the ADD is incremented by one in step S17, and the process returns to step S11.
If the process has been completed up to D, the process ends.

【００１４】このように、全ＤＵＴについてパラレル
に、かつ各ＤＵＴについてはＡＤＤ順に判定するように
し、全ＤＵＴが良品領域であるＡＤＤの時には、全ＤＵ
Ｔ同時に良品コード書込みを実施し、１ＤＵＴでも良品
領域でないＤＵＴがあるＡＤＤの場合は、その良品領域
でないＤＵＴを一時的に試験対象から外して、残りの全
ＤＵＴに同時に良品コード書込みを実施した後、一時的
に試験対象から外した上記ＤＵＴを試験対象に戻すよう
にすることにより、全ＤＵＴをパラレル処理したのと同
様、多数個同時測定の際、テスト時間を短縮できるとい
うメリットがある。As described above, all DUTs are determined in parallel, and each DUT is determined in the order of ADD. When all DUTs are ADD, which is a non-defective area, all DUs are determined.
In the case of an ADD in which a non-defective area is included in an ADD even if 1 DUT has a non-defective area, the non-defective area is temporarily excluded from the test target, and a non-defective code is simultaneously written in all remaining DUTs. By returning the DUT temporarily excluded from the test target to the test target, there is an advantage that the test time can be reduced when simultaneously measuring a large number of DUTs in the same manner as when all DUTs are processed in parallel.

【００１５】[0015]

【発明の効果】この発明は、以上説明したように構成さ
れているので、以下のような効果を奏する。この発明の
請求項１、２に記載のＭＧＭテストにおける良品コード
書込方法によれば、ＭＧＭテストにおいて多数のデバイ
スを同時測定の際、各デバイスの良品セクタ管理領域へ
の良品コードを書込む工程に要する時間を短縮すること
ができ、したがって、テスト時間を短縮できるという効
果がある。The present invention is configured as described above, and has the following effects. According to the method for writing a good code in the MGM test according to the first and second aspects of the present invention, a step of writing a good code in a good sector management area of each device when simultaneously measuring a large number of devices in the MGM test. And the test time can be shortened.

【図面の簡単な説明】[Brief description of the drawings]

【図１】 この発明の実施の形態１を示すフローチャー
ト。FIG. 1 is a flowchart showing a first embodiment of the present invention.

【図２】 この発明の実施の形態２を示すフローチャー
ト。FIG. 2 is a flowchart showing a second embodiment of the present invention.

【図３】 従来の良品コード書込み方法を示すフローチ
ャート。FIG. 3 is a flowchart showing a conventional non-defective code writing method.

【符号の説明】[Explanation of symbols]

Ｓ１〜Ｓ９ 実施の形態１における動作ステップ、 Ｓ
１１〜１７ 実施の形態２における動作ステップ、 Ｓ
２１〜Ｓ２６ 従来の方法における動作ステップ。S1 to S9 Operation steps in the first embodiment, S
11 to 17 Operation Steps in Second Embodiment, S
21 to S26 Operation steps in a conventional method.

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 ＭＧＭテストにおいて測定デバイスの良
品領域に良品コードを書込む場合、全測定デバイスに対
してパラレルに、かつ各測定デバイスについてはその全
領域に対して順次に、良品コードを書き込んだ後、全測
定デバイスに対してシリアルに、各測定デバイスの各領
域が良品領域かどうかを判定し、良品領域でない場合は
その領域の良品コードを消去することを特徴とするＭＧ
Ｍテストにおける良品コード書込方法。When writing a non-defective code in a non-defective area of a measuring device in an MGM test, a non-defective code is written in parallel to all measuring devices and sequentially for all measuring devices. Thereafter, it is determined whether or not each area of each measurement device is a non-defective area, and if it is not a non-defective area, the non-defective code of the area is deleted.
Non-defective code writing method in M test. 【請求項２】 ＭＧＭテストにおいて測定デバイスの良
品領域に良品コードを書込む場合、全測定デバイスに対
してパラレルに、かつ各測定デバイスについてはその全
領域に対して順次に、各アドレスにおいて全測定デバイ
スが良品領域であるかどうかを判定し、良品領域である
アドレスの場合は、全測定デバイスに同時に良品コード
を書き込み、また１デバイスでも良品領域でないデバイ
スがあるアドレスの場合は、その良品領域でないデバイ
スを一時的に試験対象から外して、残りの全測定デバイ
スに同時に良品コードを書込んだ後、一時的に試験対象
から外した上記デバイスを試験対象に戻すことを特徴と
するＭＧＭテストにおける良品コード書込方法。2. When writing a non-defective code in a non-defective area of a measurement device in an MGM test, all measurements are performed at all addresses in parallel with respect to all the measurement devices and sequentially with respect to the entire area of each measurement device. It is determined whether or not the device is a non-defective region. If the address is a non-defective region, a non-defective region is written at the same time to a non-defective region. A non-defective product in the MGM test, wherein the device is temporarily removed from the test object, a non-defective code is simultaneously written in all remaining measurement devices, and then the device temporarily excluded from the test object is returned to the test object. Code writing method.
JP10151054A 1998-06-01 1998-06-01 Nondefective code write method in mgm test Withdrawn JPH11345498A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10151054A JPH11345498A (en) 1998-06-01 1998-06-01 Nondefective code write method in mgm test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10151054A JPH11345498A (en) 1998-06-01 1998-06-01 Nondefective code write method in mgm test

Publications (1)

Publication Number Publication Date
JPH11345498A true JPH11345498A (en) 1999-12-14

Family

ID=15510296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10151054A Withdrawn JPH11345498A (en) 1998-06-01 1998-06-01 Nondefective code write method in mgm test

Country Status (1)

Country Link
JP (1) JPH11345498A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615495B2 (en) * 2005-11-17 2009-11-10 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615495B2 (en) * 2005-11-17 2009-11-10 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
US8344379B2 (en) 2005-11-17 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same

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