JPH11344467A - Method for measuring concentration of nox gas - Google Patents
Method for measuring concentration of nox gasInfo
- Publication number
- JPH11344467A JPH11344467A JP10169245A JP16924598A JPH11344467A JP H11344467 A JPH11344467 A JP H11344467A JP 10169245 A JP10169245 A JP 10169245A JP 16924598 A JP16924598 A JP 16924598A JP H11344467 A JPH11344467 A JP H11344467A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- chamber
- gas
- concentration
- nox
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、含酸素成分ガス濃
度測定方法に関し、特にＮＯｘガス濃度測定方法に関す
る。The present invention relates to a method for measuring the concentration of an oxygen-containing component gas, and more particularly to a method for measuring the concentration of a NOx gas.
【０００２】[0002]
【従来の技術】近年、排ガス規制の強化に伴い、エンジ
ン等の排ガス中のＮＯｘを直接測定し、エンジンの制御
や触媒のコントロールを行う研究が行われている。特
に、ＺｒＯ2等の酸素イオン伝導体を用い、この酸素イ
オン伝導体を介した酸素イオンポンプセルを用いて酸素
を汲み出すことによりＮＯｘを分解し、この分解を電流
として検知する形式のＮＯｘガスセンサは、ＨＣ、ＣＯ
等の妨害ガスの影響を受けずにＮＯｘガス濃度が測定で
きる、と考えられることから、近年広く研究が行われて
いる。2. Description of the Related Art In recent years, with the tightening of exhaust gas regulations, studies have been made to directly measure NOx in exhaust gas from engines and the like to control engines and catalysts. In particular, a NOx gas sensor of the type that uses an oxygen ion conductor such as ZrO 2 and decomposes NOx by pumping oxygen using an oxygen ion pump cell via the oxygen ion conductor and detects the decomposition as an electric current Means HC, CO
In recent years, studies have been widely conducted because it is considered that the NOx gas concentration can be measured without being affected by interfering gases such as the above.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、酸素イ
オン伝導性の固体電解質体を用いた含酸素成分ガス、特
に、ＮＯｘガス濃度測定の精度は、必ずしも十分ではな
く、高くともおよそ５０ｐｐｍ程度にとどまっている。However, the accuracy of oxygen-containing component gas, particularly NOx gas concentration measurement using an oxygen ion-conductive solid electrolyte is not always sufficient, and is at most about 50 ppm. I have.
【０００４】本発明は、精度の高い測定が可能となる新
規なＮＯｘガス濃度測定方法、ＮＯｘガスセンサ、及び
ＮＯｘガス濃度測定装置を提供することを目的とする。An object of the present invention is to provide a novel NOx gas concentration measuring method, a NOx gas sensor, and a NOx gas concentration measuring device that enable highly accurate measurement.
【０００５】さらに、別に、含酸素成分ガス濃度測定方
法、含酸素成分ガスセンサ、及び含酸素成分ガス濃度測
定装置の提供を目的とする。Another object of the present invention is to provide an oxygen-containing gas concentration measuring method, an oxygen-containing gas sensor, and an oxygen-containing gas concentration measuring device.
【０００６】[0006]
【課題を解決するための手段】本発明は、第１の視点に
おいて、第１室に被測定ガスが拡散し、前記第１室に拡
散したガス中の酸素を解離し、生成した酸素イオンをポ
ンピングしてガス中の酸素濃度を制御し、第２室及び第
３室に前記制御された酸素濃度を有するガスが拡散し、
前記第２室に拡散したガスに含有される少なくとも酸素
を選択的に解離して、生成した酸素イオンをポンピング
し、前記第３室に拡散したガスに含有される少なくとも
酸素及びＮＯｘを選択的に解離し、前記酸素及びＮＯｘ
が分解して解離した酸素イオンをポンピングし、前記第
２室側からポンピングされた酸素と、前記第３室側から
ポンピングされた酸素と、に基づいて、ＮＯｘガスの濃
度を求める。According to the present invention, in a first aspect, a gas to be measured is diffused into a first chamber, and oxygen in the gas diffused into the first chamber is dissociated. Controlling the oxygen concentration in the gas by pumping, the gas having the controlled oxygen concentration diffuses into the second chamber and the third chamber,
At least oxygen contained in the gas diffused into the second chamber is selectively dissociated to pump generated oxygen ions, and at least oxygen and NOx contained in the gas diffused into the third chamber are selectively removed. Dissociates the oxygen and NOx
Pumps the oxygen ions decomposed and dissociated, and obtains the concentration of the NOx gas based on the oxygen pumped from the second chamber side and the oxygen pumped from the third chamber side.
【０００７】本発明は、第２の視点において、被測定ガ
ス空間から第１の拡散律速層を介して第１室に測定ガス
を導入し、前記第１室の酸素濃度が所定の濃度範囲内に
収まるように該第１室内の酸素濃度を調整し、前記第１
室内のガスの一部を、第２の拡散律速層を介して第１分
流路を通じて第２室に導入し、前記第１室内のガスの他
部を第２の拡散律速層を介して第２分流路を通じて第３
室に導入し、前記第２室内の酸素濃度を少なくとも第９
１室の酸素濃度より低くなる程度に調整し、前記第３室
内の酸素濃度をＮＯｘガスが分解されるように調整し、
前記第２室内における調整量と前記第３室内における調
整量に基づいて測定ガス中の含酸素ガス濃度を求める。According to a second aspect of the present invention, in a second aspect, a measurement gas is introduced from a gas space to be measured into a first chamber via a first diffusion-controlling layer, and the oxygen concentration in the first chamber is within a predetermined concentration range. Adjusting the oxygen concentration in the first chamber so that
Part of the gas in the chamber is introduced into the second chamber through the first branch channel through the second diffusion-controlling layer, and the other part of the gas in the first chamber is transferred to the second chamber through the second diffusion-controlling layer. Third through the diversion channel
Into the second chamber and adjust the oxygen concentration in the second chamber to at least the ninth
Adjusting the oxygen concentration to be lower than the oxygen concentration in the first chamber, and adjusting the oxygen concentration in the third chamber so that the NOx gas is decomposed;
An oxygen-containing gas concentration in the measurement gas is determined based on the adjustment amount in the second chamber and the adjustment amount in the third chamber.
【０００８】本発明は、第３の視点において、ＮＯｘに
代えて、含酸素成分のガス濃度を測定する。In the third aspect of the present invention, the gas concentration of the oxygen-containing component is measured instead of NOx.
【０００９】本発明は、第４の視点において、被測定ガ
ス空間から第１の拡散律速層を介して第１室に測定ガス
を導入し、前記第１室の酸素濃度が所定の濃度範囲内に
収まるように該第１室内の酸素濃度を調整し、前記第１
室内のガスの一部を、第２の拡散律速層を介して第１分
流路を通じて第２室に導入し、前記第１室内のガスの他
部を第２の拡散律速層を介して第２分流路を通じて第３
室に導入し、前記第２室内の酸素濃度を少なくとも第１
室の酸素濃度より低くなる程度に調整し、前記第３室内
の酸素濃度を含酸素成分ガスが分解されるように調整
し、前記第２室内における調整量と前記第３室内におけ
る調整量に基づいて測定ガス中の含酸素成分ガス濃度を
算出する。According to a fourth aspect of the present invention, in a fourth aspect, a measurement gas is introduced from a gas space to be measured into a first chamber via a first diffusion-controlling layer, and the oxygen concentration in the first chamber is within a predetermined concentration range. Adjusting the oxygen concentration in the first chamber so that
Part of the gas in the chamber is introduced into the second chamber through the first branch channel through the second diffusion-controlling layer, and the other part of the gas in the first chamber is transferred to the second chamber through the second diffusion-controlling layer. Third through the diversion channel
And introducing oxygen into the second chamber at least to the first level.
The oxygen concentration in the third chamber is adjusted to be lower than the oxygen concentration in the chamber, and the oxygen concentration in the third chamber is adjusted so that the oxygen-containing component gas is decomposed. To calculate the concentration of the oxygen-containing component gas in the measurement gas.
【００１０】本発明は、第５の視点において、被測定ガ
スが導入される第１室と、前記第１室から第２室及び第
３室に前記酸素濃度が制御されたガスを拡散する通路
と、前記第１室に拡散したガス中の酸素を解離し、生成
した酸素イオンをポンピングしてガス中の酸素濃度を制
御する手段と、前記第２室に拡散したガスに含有される
少なくとも酸素を選択的に解離し、生成した酸素イオン
をポンピングする手段と、前記第３室に拡散したガスに
含有される少なくとも酸素及びＮＯｘを選択的に解離
し、前記酸素及びＮＯｘが解離して、生成した酸素イオ
ンをポンピングする手段と、を有する。According to a fifth aspect of the present invention, in a fifth aspect, a first chamber into which a gas to be measured is introduced, and a passage for diffusing the gas whose oxygen concentration is controlled from the first chamber to a second chamber and a third chamber. Means for dissociating oxygen in the gas diffused into the first chamber and controlling the oxygen concentration in the gas by pumping generated oxygen ions; and at least oxygen contained in the gas diffused into the second chamber. Means for selectively dissociating and pumping generated oxygen ions, and selectively dissociating at least oxygen and NOx contained in the gas diffused into the third chamber, and dissociating the oxygen and NOx to form Pumping oxygen ions.
【００１１】本発明は、第６の視点において、被測定ガ
スが導入される第１室と、前記第１室に拡散したガス中
の酸素を解離し、生成した酸素イオンをポンピングして
ガス中の酸素濃度を制御する手段と、前記第１室から第
２室及び第３室に前記酸素濃度が制御されたガスを拡散
する手段と、前記第２室に拡散したガスに含有される少
なくとも酸素を選択的に、解離し生成した酸素イオンを
ポンピングする手段と、前記第３室に拡散したガスに含
有される少なくとも酸素及びＮＯｘを選択的に解離し、
前記酸素及びＮＯｘが解離し生成した酸素イオンをポン
ピングする手段と、前記第２室側からポンピングされた
酸素と、前記第３室側からポンピングされた酸素と、を
測定し、ＮＯｘガスの濃度を求める手段と、を有する。According to a sixth aspect of the present invention, in a sixth aspect, a first chamber into which a gas to be measured is introduced, dissociates oxygen in the gas diffused into the first chamber, and pumps generated oxygen ions to form Means for controlling the oxygen concentration of the gas, means for diffusing the gas whose oxygen concentration is controlled from the first chamber to the second chamber and the third chamber, and at least oxygen contained in the gas diffused to the second chamber. Selectively pumping oxygen ions generated by dissociation, and selectively dissociate at least oxygen and NOx contained in the gas diffused into the third chamber,
Means for pumping oxygen ions generated by the dissociation of oxygen and NOx, oxygen pumped from the second chamber side, and oxygen pumped from the third chamber side, and the NOx gas concentration is measured. Means for seeking.
【００１２】本発明は、第７の視点において、下記
（ａ）から（ｇ）のプロセスによって被測定ガス中のＮ
Ｏｘガスを含む酸素含有ガスの量又は濃度を決定する方
法；ａ）酸素を分解ないし解離）させる第１の陰電極が
内壁に形成されてなり、かつ、該第１の陰電極から酸素
イオンを外部に形成された第１の陽電極に向かって移動
可能な酸素イオン伝導体によって画成された第１室の内
部へ、被測定ガスを第１の拡散制限律速を受けさせなが
ら、導入するプロセス、ｂ） 前記第１室に導入された
被測定ガスの酸素分圧を、該第１室に導入される前の酸
素分圧よりも低くなるように該第１室中の酸素を酸素イ
オンとして前記第１の陰電極から前記第１の陽電極に向
けて排出することによって第１の内部ガスを生成するプ
ロセス、ｃ） 前記第１の内部ガスを第２室及び第３室
へ、第２の拡散制限律速を受けさせながら分岐して分流
された該第１の内部ガスをそれぞれ導入させるプロセ
ス、ｄ） 酸素を分解ないし解離させる第２の陰電極が
内壁に形成されてなり、かつ、該第２の陰電極から酸素
イオンを外部に形成された第２の陽電極に向かって移動
可能な酸素イオン伝導体によって画成された前記第２室
において、前記プロセス（ｃ）によって分岐されて分流
してきた第１の内部ガスを前記第２の陰電極に接触させ
て該第２室内の酸素を分解ないし解離させることにより
酸素イオンを生成させ、該酸素イオンを該第２陰電極か
ら該第２陽電極に向けて移動させることにより、第２電
流を測定するプロセス、ｅ） 酸素及びＮＯｘを含む前
記酸素含有ガスを分解ないし解離させる第３の陰電極が
内壁に形成されてなり、かつ、該第３の陰電極から酸素
イオンを外部に形成された第３の陽電極に向かって移動
可能な酸素イオン伝導体によって画成された前記第３室
において、前記プロセス（ｃ）によって分岐されて分流
してきた第１の内部ガスを該第３の陰電極に接触させて
該第３室内の酸素及び酸素含有ガスの両方を分解ないし
解離させることにより、正負のイオンを生成し、このう
ちの酸素イオンを該第３陰電極から該第３陽電極に向け
て移動させることにより、第３電流を測定するプロセ
ス、ｆ） 前記第２電流と前記第３電流の電流値の差を
測定するプロセス、ｇ） 前記電流差から被測定ガス中
の酸素含有ガスを算出するプロセス。According to a seventh aspect of the present invention, there is provided a method for measuring N in a gas to be measured by the following processes (a) to (g).
A method for determining the amount or concentration of an oxygen-containing gas containing an Ox gas; a) a first negative electrode for decomposing or dissociating oxygen is formed on an inner wall, and oxygen ions are removed from the first negative electrode. A process for introducing a gas to be measured into a first chamber defined by an oxygen ion conductor movable toward a first positive electrode formed outside while subjecting the gas to be measured to a first diffusion-limited rate. B) converting the oxygen in the first chamber into oxygen ions so that the oxygen partial pressure of the gas to be measured introduced into the first chamber is lower than the oxygen partial pressure before being introduced into the first chamber; A process of generating a first internal gas by discharging from the first negative electrode to the first positive electrode; c) transferring the first internal gas to a second chamber and a third chamber; The first inside which is branched and diverted while being subjected to the diffusion limiting A) a second positive electrode having a second negative electrode formed on the inner wall thereof for decomposing or dissociating oxygen, and a second positive electrode having oxygen ions formed outside from the second negative electrode; In the second chamber defined by the oxygen ion conductor movable toward the first internal gas, the first internal gas branched and divided by the process (c) is brought into contact with the second negative electrode, A process of measuring a second current by generating oxygen ions by decomposing or dissociating oxygen in the second chamber and moving the oxygen ions from the second negative electrode to the second positive electrode; e. A third positive electrode having an inner wall formed with a third negative electrode for decomposing or dissociating the oxygen-containing gas containing oxygen and NOx, and having an oxygen ion formed from the third negative electrode to the outside. To In the third chamber defined by the movable oxygen ion conductor, the first internal gas branched and diverted by the process (c) is brought into contact with the third cathode to form the third internal gas. By decomposing or dissociating both the oxygen and the oxygen-containing gas in the three chambers, positive and negative ions are generated, and by moving the oxygen ions from the third negative electrode toward the third positive electrode, A process of measuring a third current, f) a process of measuring a difference between the current values of the second current and the third current, and g) a process of calculating an oxygen-containing gas in the gas to be measured from the current difference.
【００１３】[0013]
【発明の実施の形態】以下、本発明の好ましい実施の形
態を説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described.
【００１４】本発明の好ましい実施の形態によれば、前
段に酸素濃度を低くなるよう制御する第１室、後段に前
記第１室に拡散抵抗を介して連通する第２室、第３室を
並列（対称）に設けた酸素センサ素子を用いて、ＮＯｘ
ガス濃度の測定を行う。According to a preferred embodiment of the present invention, the first chamber for controlling the oxygen concentration to be low is provided in the first stage, and the second and third chambers communicating with the first chamber via the diffusion resistance are provided in the second stage. NOx using oxygen sensor elements provided in parallel (symmetric)
Measure the gas concentration.
【００１５】第２室、第３室へ拡散するガス中の酸素濃
度を低く制御するために、第１室に面して第１酸素イオ
ンポンピング電極対を設ける。一の実施形態では、第１
酸素イオンポンピング電極対に印加される電圧を一定と
する。本発明によれば、第２室、第３室へ拡散するガス
中の酸素濃度を一定に制御しなくてもよく、ある範囲に
収まっていれば十分である。To control the concentration of oxygen in the gas diffused into the second and third chambers low, a first oxygen ion pumping electrode pair is provided facing the first chamber. In one embodiment, the first
The voltage applied to the oxygen ion pumping electrode pair is constant. According to the present invention, the oxygen concentration in the gas diffused into the second and third chambers does not have to be controlled to be constant, but it is sufficient if the oxygen concentration is within a certain range.
【００１６】他の実施形態では、第１酸素イオンポンピ
ング電極対に印加される電圧を可変制御する。In another embodiment, the voltage applied to the first oxygen ion pumping electrode pair is variably controlled.
【００１７】第１室に面して、酸素濃度検知電極対を設
け、この電極対の酸素濃度検知出力（例えば、濃淡電池
起電力）に基づいて、前記第１酸素ポンピング電極対に
流れる電流ないし印加電圧を制御してもよい。この場
合、第２室、第３室に拡散するガス中の酸素濃度を可及
的に低くすることができ、第１酸素イオンポンピング電
極対に限界電流が流れるほど、酸素濃度を低くできる。An oxygen concentration detection electrode pair is provided facing the first chamber, and a current or a current flowing through the first oxygen pumping electrode pair is determined based on an oxygen concentration detection output (eg, concentration cell electromotive force) of the electrode pair. The applied voltage may be controlled. In this case, the oxygen concentration in the gas diffused into the second chamber and the third chamber can be made as low as possible, and the oxygen concentration can be made lower as the limit current flows through the first oxygen ion pumping electrode pair.
【００１８】酸素濃度などの影響を相殺するために、第
２室に面して第２酸素イオンポンピング電極対、第３室
に面して第３酸素イオンポンピング電極対を設ける。一
の実施形態では、第２，第３酸素イオンポンピング電極
対に印可される電圧を一定とする。In order to offset the influence of oxygen concentration and the like, a second oxygen ion pumping electrode pair is provided facing the second chamber, and a third oxygen ion pumping electrode pair is provided facing the third chamber. In one embodiment, the voltage applied to the second and third oxygen ion pumping electrode pairs is constant.
【００１９】他の実施形態では、第２，第３酸素イオン
ポンピング電極対に印可される電圧を可変制御する。こ
の実施形態において、好ましくは、第２室、第３室にそ
れぞれ面して、酸素濃度検知電極対をそれぞれ設け、こ
れらの電極対の酸素濃度検知出力（例えば、濃淡電池起
電力）に基づいて、前記第２，第３酸素イオンポンピン
グ電極対に流れる電流ないし印加電圧を制御してもよ
い。この場合、第２室においては、ＮＯｘが少なくても
第１室の酸素濃度より低くなる程度に、厳密に第２室内
の雰囲気を設定することができる。第３室においては、
ＮＯｘが分解する酸素濃度に、厳密に第３室内の雰囲気
を設定することができる。In another embodiment, the voltage applied to the second and third oxygen ion pumping electrode pairs is variably controlled. In this embodiment, preferably, an oxygen concentration detection electrode pair is respectively provided facing the second chamber and the third chamber, and based on the oxygen concentration detection output (for example, electromotive force of the concentration cell) of these electrode pairs. The current or applied voltage flowing through the second and third oxygen ion pumping electrode pairs may be controlled. In this case, in the second chamber, the atmosphere in the second chamber can be set strictly to such an extent that the NOx becomes lower than the oxygen concentration in the first chamber at least. In the third room,
The atmosphere in the third chamber can be strictly set to the oxygen concentration at which NOx is decomposed.
【００２０】例えば、第１酸素イオンポンピング電極対
に印可する電圧を２００〜３００ｍＶ、第２酸素イオン
ポンピング電極対に印可する電圧を３００〜４００ｍＶ
未満、第３酸素イオンポンピング電極対に印可する電圧
を４００超〜５００ｍＶとする。For example, the voltage applied to the first oxygen ion pumping electrode pair is 200 to 300 mV, and the voltage applied to the second oxygen ion pumping electrode pair is 300 to 400 mV.
, The voltage applied to the third oxygen ion pumping electrode pair is more than 400 to 500 mV.
【００２１】第１酸素イオンポンピング電極対の第１室
内電極は、ＮＯｘなどが分解されないように、Ａｇ、Ａ
ｕなどのＮＯｘ解離触媒能を抑制する成分を含有するこ
とが好ましい。第２酸素イオンポンピング電極対の第２
室内電極は、ＮＯｘなどが分解されないように、Ａｇな
どのＮＯｘ解離触媒能が抑制する成分を含有することが
好ましい。第３酸素イオンポンピング電極対の第３室内
電極は、ＮＯｘなどが分解されるように、Ｐｔ、Ｒｈな
どのＮＯｘ解離触媒能が高いＰｔ電極から構成すること
が好ましい。このように、各電極の触媒能（特に、第
２，第３室内電極）を調整することにより、第２，第３
酸素イオンポンピング電極対に印加する電圧を等しくす
ることが可能である。The first indoor electrode of the first oxygen ion pumping electrode pair is made of Ag, A so that NOx and the like are not decomposed.
It is preferable to include a component that suppresses the NOx dissociation catalytic ability, such as u. Second oxygen ion pumping electrode pair
The indoor electrode preferably contains a component such as Ag that suppresses the NOx dissociation catalytic ability so that NOx and the like are not decomposed. The third indoor electrode of the third oxygen ion pumping electrode pair is preferably formed of a Pt electrode having a high NOx dissociation catalytic ability such as Pt and Rh so that NOx and the like are decomposed. Thus, by adjusting the catalytic ability of each electrode (particularly, the second and third indoor electrodes), the second and third
It is possible to equalize the voltage applied to the oxygen ion pumping electrode pair.
【００２２】場合によっては、第１室及び又は第２室
で、ＮＯｘの一部が分解されてもよい。第１，第２酸素
ポンピング電極対などに流れる第１，第２酸素ポンピン
グ電流に基づいて、第１室及び／又は第２室におけるＮ
Ｏｘの分解量を補償し、正確なＮＯｘガス濃度を求める
ことが可能である。In some cases, part of the NOx may be decomposed in the first chamber and / or the second chamber. Based on the first and second oxygen pumping currents flowing through the first and second oxygen pumping electrode pairs and the like, N in the first and / or second chambers
It is possible to compensate for the amount of decomposition of Ox and obtain an accurate NOx gas concentration.
【００２３】[0023]
【実施例】図面を参照して、本発明の一実施例を説明す
る。図１は、本発明の第１の実施例に係るＮＯｘ濃度測
定装置及びその方法を説明するための図である。An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram for explaining a NOx concentration measuring device and a method therefor according to a first embodiment of the present invention.
【００２４】図１を参照して、本発明の第１の実施例に
おいて用いられるＮＯｘセンサ素子は、酸素イオン伝導
性の固体電解質体から構成される。固体電解質体は、酸
素イオン伝導性を有する物質ならば何でもよく、例えば
ＺｒＯ2があげられる。固体電解質体は、互いに平行な
第１層１、第２層２、第３層３と、これらの層１、２、
３に直交する方向に延在する外壁層と、固体電解質体の
内部において第２層２と第３層３の間に、これらの層
２，３に直交する方向に延在する隔壁９から構成され
る。Referring to FIG. 1, the NOx sensor element used in the first embodiment of the present invention is formed of an oxygen ion conductive solid electrolyte. The solid electrolyte body may be any substance having oxygen ion conductivity, such as ZrO 2 . The solid electrolyte body includes a first layer 1, a second layer 2, and a third layer 3 that are parallel to each other, and these layers 1, 2,
An outer wall layer extending in a direction perpendicular to the third layer, and a partition wall extending between the second layer and the third layer inside the solid electrolyte body in a direction perpendicular to the layers. Is done.
【００２５】前記固体電界質体は、その内部前段に、第
１層１，第２層２，及び外壁層に囲まれた第１室６を有
し、さらに、その内部後段に並置され、第２層，第３
層，外壁層及び隔壁９に囲まれた第２室７、第３室８を
有する。第１室６は、第１層１の中間部に設けられた第
１拡散律速層４を通じて被測定ガスの雰囲気に連通す
る。第２層２と、隔壁９の間には、第２層の中間部を貫
通して第２拡散律速層５が形成されている。第２拡散律
速層５の一方は第１室６内に開口し、他方は第１分流路
５ａ，第２分流路５ｂを通じて、第２室７，第３室８に
それぞれ開口している。The solid electrolyte body has a first chamber 6 surrounded by a first layer 1, a second layer 2, and an outer wall layer at an inner front stage thereof, and is further juxtaposed at an inner rear stage thereof. 2 layers, 3rd
It has a second chamber 7 and a third chamber 8 surrounded by layers, outer wall layers and partition walls 9. The first chamber 6 communicates with the atmosphere of the gas to be measured through a first diffusion-controlling layer 4 provided at an intermediate portion of the first layer 1. A second diffusion-controlling layer 5 is formed between the second layer 2 and the partition 9 so as to penetrate an intermediate portion of the second layer. One of the second diffusion-controlling layers 5 opens into the first chamber 6, and the other opens into the second chamber 7 and the third chamber 8 through the first branch channel 5a and the second branch channel 5b, respectively.
【００２６】第１層１には、第１層を挟んで、第１室６
の室内外に、第１酸素イオンポンピング電極対１２，１
３が形成されている。第１酸素イオンポンピング電極対
１２，１３には、電極１３側が正となるように、一定の
電圧Ｖｐ１が印加される。これによって、通常、第１室
６内から外へ向かって、酸素イオンがポンピングされ、
ポンピングされる酸素イオンに比例した第１ポンピング
電流Ｉｐ１が電流計Ａ１に流れる。The first layer 1 has a first chamber 6 with the first layer interposed therebetween.
Of the first oxygen ion pumping electrode pair 12, 1
3 are formed. A constant voltage Vp1 is applied to the first oxygen ion pumping electrode pair 12, 13 so that the electrode 13 side becomes positive. As a result, oxygen ions are generally pumped from the inside of the first chamber 6 to the outside,
A first pumping current Ip1 proportional to the oxygen ions to be pumped flows through the ammeter A1.
【００２７】第３層３には、第３層３を挟んで、第２室
７の室内外に、第２酸素イオンポンピング電極対２２，
２３が形成されている。第２酸素イオンポンピング電極
対には、電極２２側が正となるように、一定の電圧Ｖｐ
２が印加される。これによって、通常、第２室７内から
外へ向かって、酸素イオンがポンピングされ、ポンピン
グされる酸素イオンに比例した第２ポンピング電流Ｉｐ
２が電流計Ａ２に流れる。In the third layer 3, the second oxygen ion pumping electrode pair 22,
23 are formed. A constant voltage Vp is applied to the second oxygen ion pumping electrode pair so that the electrode 22 side is positive.
2 is applied. As a result, oxygen ions are generally pumped outward from the inside of the second chamber 7, and the second pumping current Ip proportional to the oxygen ions to be pumped is generated.
2 flows to the ammeter A2.
【００２８】また、第３層３には、第３層３を挟んで、
第３室８の室内外に、第３酸素イオンポンピング電極対
３２，３３が形成されている。第３酸素イオンポンピン
グ電極対３２，３３には、電極３２側が正となるよう
に、一定の電圧Ｖｐ３が印加される。これによって、通
常、第３室８内から外へ向かって、酸素イオンがポンピ
ングされ、ポンピングされる酸素イオンに比例した第３
ポンピング電流Ｉｐ３が電流計Ａ３に流れる。In the third layer 3, the third layer 3 is sandwiched.
Third oxygen ion pumping electrode pairs 32 and 33 are formed inside and outside the third chamber 8. A constant voltage Vp3 is applied to the third oxygen ion pumping electrode pair 32, 33 so that the electrode 32 side is positive. As a result, oxygen ions are generally pumped outward from the inside of the third chamber 8, and the third ions are proportional to the oxygen ions to be pumped.
Pumping current Ip3 flows to ammeter A3.
【００２９】このように、第１層１と第１酸素イオンポ
ンピング電極対１２，１３から第１セルが構成され、第
３層３と第２酸素イオンポンピング電極対２２，２３か
ら第２セルが構成され、第３層３と第３酸素イオンポン
ピング電極対３２，３３から第３セルが構成される。As described above, the first cell is constituted by the first layer 1 and the first oxygen ion pumping electrode pair 12 and 13, and the second cell is constituted by the third layer 3 and the second oxygen ion pumping electrode pair 22 and 23. The third cell is constituted by the third layer 3 and the third pair of oxygen ion pumping electrodes 32 and 33.
【００３０】但し、第１酸素イオンポンピング電極対１
２，１３の内、少なくとも内側電極１３は、測定対象ガ
スであるＮＯｘを解離する触媒能が抑制される材料から
形成する。第２酸素イオンポンピング電極対２２，２３
の内、少なくとも内側電極２３は、測定対象ガスである
ＮＯｘを解離する触媒能が抑制される材料から形成す
る。第３酸素イオンポンピング電極対３２，３３の内、
内側電極３３は、測定対象ガスであるＮＯｘを解離する
触媒能を有する材料から形成する。However, the first oxygen ion pumping electrode pair 1
At least the inner electrode 13 of the inner electrodes 2 and 13 is formed of a material whose catalytic ability to dissociate NOx as a measurement target gas is suppressed. Second oxygen ion pumping electrode pair 22, 23
Of these, at least the inner electrode 23 is formed of a material whose catalytic ability to dissociate NOx as a measurement target gas is suppressed. Of the third oxygen ion pumping electrode pair 32, 33,
The inner electrode 33 is formed of a material having a catalytic ability to dissociate NOx, which is a measurement target gas.
【００３１】さらに、電圧Ｖｐ１は、内側電極１３によ
って、ＮＯｘの全部が分解されないような比較的低い電
圧とする。電圧Ｖｐ２は、内側電極２３によって、酸素
は十分に分解されるがＮＯｘの全てが分解されないよう
な範囲の電圧とする。電圧Ｖｐ３は、内側電極３３によ
って、ＮＯｘが分解されるような範囲の電圧とする。例
えば、Ｖｐ１＝２００ｍＶ、Ｖｐ２＝３５０ｍＶ、Ｖｐ
３＝４５０ｍＶとする。Further, the voltage Vp1 is set to a relatively low voltage so that all of the NOx is not decomposed by the inner electrode 13. The voltage Vp2 is set to a voltage in such a range that oxygen is sufficiently decomposed by the inner electrode 23 but not all of NOx is decomposed. The voltage Vp3 is a voltage in a range where NOx is decomposed by the inner electrode 33. For example, Vp1 = 200 mV, Vp2 = 350 mV, Vp
3 = 450 mV.
【００３２】次に、以上説明したＮＯｘガス濃度測定装
置の動作を説明する。まず、被測定ガスが、第１拡散律
速層を介して、第１室６内へが拡散する。第１酸素イオ
ンポンピング電極対１２，１３に電圧Ｖｐ１が印加され
ていることにより、第１室６内の酸素が解離し生成され
た酸素イオンが第１層１を伝導し、酸素が外部へポンピ
ングされる。これによって、第１室７内の酸素濃度が所
定濃度以下に制御される。Next, the operation of the above-described NOx gas concentration measuring device will be described. First, the gas to be measured diffuses into the first chamber 6 via the first diffusion-controlling layer. Since the voltage Vp1 is applied to the first oxygen ion pumping electrode pair 12, 13, oxygen in the first chamber 6 is dissociated, and the generated oxygen ions are conducted through the first layer 1, and the oxygen is pumped to the outside. Is done. Thereby, the oxygen concentration in the first chamber 7 is controlled to a predetermined concentration or less.
【００３３】次に、酸素濃度を制御したガスが、第２拡
散律速層５、第１分流路５ａを介して、第２室７へ拡散
する。同様に、酸素濃度を制御したガスが、第２拡散律
速層５、第１分流路５ｂを介して、第３室８へ拡散す
る。Next, the gas whose oxygen concentration is controlled diffuses into the second chamber 7 via the second diffusion-controlling layer 5 and the first branch channel 5a. Similarly, the gas whose oxygen concentration is controlled diffuses into the third chamber 8 via the second diffusion-controlling layer 5 and the first branch channel 5b.
【００３４】第２室７においては、第２酸素イオンポン
ピング電極対２２，２３に電圧Ｖｐ２が印加されている
ことにより、第２室７内の酸素が解離し、生成した酸素
イオンが第３層３を伝導し、酸素が外部へポンピングさ
れる。これによって、第２室７内の酸素濃度が第１室６
内よりもさらに低濃度に制御される。また、第２ポンピ
ング電流Ａ２は、第２室７からポンピングされる酸素、
すなわち第２室７の酸素濃度に比例する（拡散律速状
態）。In the second chamber 7, since the voltage Vp2 is applied to the second oxygen ion pumping electrode pair 22, 23, oxygen in the second chamber 7 is dissociated, and the generated oxygen ions are transferred to the third layer. 3 and oxygen is pumped out. As a result, the oxygen concentration in the second chamber 7 becomes
The concentration is controlled to be even lower than inside. In addition, the second pumping current A2 is the oxygen pumped from the second chamber 7,
That is, it is proportional to the oxygen concentration in the second chamber 7 (diffusion controlled state).
【００３５】第３室８においては、第３酸素イオンポン
ピング電極対３２，３３に電圧Ｖｐ３が印加されている
ことにより、第３室８内の酸素及びＮＯｘも解離し生成
した酸素イオンが第３層３を伝導し、酸素が外部へポン
ピングされる。斯くして、第３ポンピング電流Ａ３は、
第２室７からポンピングされる酸素に比例する。すなわ
ち、第３室７の酸素濃度とＮＯｘ濃度の和に比例する
（拡散律速状態）。In the third chamber 8, since the voltage Vp3 is applied to the third pair of oxygen ion pumping electrodes 32, 33, oxygen and NOx in the third chamber 8 are also dissociated to generate oxygen ions in the third chamber 8. Conduction through layer 3 causes oxygen to be pumped out. Thus, the third pumping current A3 is
It is proportional to the oxygen pumped from the second chamber 7. That is, it is proportional to the sum of the oxygen concentration and the NOx concentration in the third chamber 7 (diffusion-controlled state).
【００３６】よって、第３ポンピング電流（酸素濃度と
ＮＯｘ濃度の和に比例）と第２ポンピング電流（酸素濃
度に比例）の差より、第３室８内のＮＯｘ濃度が求めら
れる。そして、予め、ＮＯｘガス濃度が既知の被測定ガ
スをＮＯｘガスセンサに投入して、ＮＯｘガス濃度と、
第３ポンピング電流（酸素濃度とＮＯｘ濃度の和に比
例）と第２ポンピング電流（酸素濃度に比例）の差の関
係を求めておくことにより、ＮＯｘガス濃度が不明の被
測定ガス中のＮＯｘガス濃度が求められる。Therefore, the NOx concentration in the third chamber 8 is determined from the difference between the third pumping current (proportional to the sum of the oxygen concentration and the NOx concentration) and the second pumping current (proportional to the oxygen concentration). Then, a gas to be measured whose NOx gas concentration is known in advance is supplied to the NOx gas sensor, and the NOx gas concentration and
By obtaining the relationship between the third pumping current (proportional to the sum of the oxygen concentration and the NOx concentration) and the second pumping current (proportional to the oxygen concentration), the NOx gas in the measured gas whose NOx gas concentration is unknown is determined. A concentration is required.
【００３７】図２は、図１に示したＮＯｘガス濃度測定
装置を用いた測定原理を説明するための図である。FIG. 2 is a diagram for explaining the measurement principle using the NOx gas concentration measuring device shown in FIG.
【００３８】図１及び図２を参照して、第１酸素イオン
ポンピング電極対１２，１３間には、電圧Ｖｐ１が印加
され、電極対１２，１３間には、酸素のイオン分解によ
るイオンポンピング電流が流れ、第１室６における拡散
制限律速下において、酸素の限界電流である第１酸素イ
オンポンピング電流Ｉｐ１に到達する。第２酸素イオン
ポンピング電極対２２，２３間には、電圧Ｖｐ２（Ｖｐ
２＞Ｖｐ１）が印加され、電極対２２，２３間には、第
２室７における拡散制限律速下で酸素の限界電流である
第２酸素イオンポンピング電流Ｉｐ２が流れる。第３酸
素イオンポンピング電極対３２，３３間には、電圧Ｖｐ
３（Ｖｐ３＞Ｖｐ２）が印加され、電極対３２，３３間
には、第３室８における拡散制限律速下でＮＯｘの限界
電流である第３酸素イオンポンピング電流Ｉｐ３が流れ
る。Referring to FIGS. 1 and 2, a voltage Vp1 is applied between the first pair of oxygen ion pumping electrodes 12 and 13, and an ion pumping current due to ion decomposition of oxygen is applied between the pair of electrodes 12 and 13. Flows, and reaches the first oxygen ion pumping current Ip1, which is the limiting current of oxygen, under the diffusion limiting rate control in the first chamber 6. A voltage Vp2 (Vp2) is applied between the second oxygen ion pumping electrode pair 22 and 23.
2> Vp1) is applied, and a second oxygen ion pumping current Ip2, which is a limiting current of oxygen, flows under the diffusion-limited rate in the second chamber 7 between the electrode pairs 22 and 23. The voltage Vp is applied between the third oxygen ion pumping electrode pair 32, 33.
3 (Vp3> Vp2) is applied, and a third oxygen ion pumping current Ip3, which is a limiting current of NOx, flows between the electrode pairs 32 and 33 under the diffusion limiting rate in the third chamber 8.
【００３９】すなわち、第２ポンピング電流Ｉｐ２は酸
素濃度を示し、第３ポンピング電流Ｉｐ３は酸素濃度と
ＮＯｘ濃度の和を示している。従って、ＮＯｘ濃度をＩ
ｐ３とＩｐ２の差より求めることができる。That is, the second pumping current Ip2 indicates the oxygen concentration, and the third pumping current Ip3 indicates the sum of the oxygen concentration and the NOx concentration. Therefore, the NOx concentration is set to I
It can be obtained from the difference between p3 and Ip2.
【００４０】なお、第２ポンピング電流Ｉｐ２には、酸
素濃度に起因する以外の電流成分、第３ポンピング電流
Ｉｐ３には酸素濃度及びＮＯｘ濃度に起因する以外の電
流成分が含まれている場合がある。例えば、第２室７，
第８室８内の残留酸素濃度（オフセット）、固体電解質
体に流れるリーク電流などが、電流成分として含まれて
いる場合がある。本実施例によれば、第２室７や第２酸
素イオンポンピング電極対２２，２３と、第３室８や第
３酸素イオンポンピング電極対３２，３３と、が対称的
に並置され、さらに第３ポンピング電流と第２ポンピン
グ電流の差をとることにより、これらの妨害電流成分を
除去することができ、ＮＯｘガス濃度測定の精度が飛躍
的に向上する。In some cases, the second pumping current Ip2 includes a current component other than the oxygen concentration and the third pumping current Ip3 includes a current component other than the oxygen concentration and the NOx concentration. . For example, the second room 7,
The residual oxygen concentration (offset) in the eighth chamber 8, the leak current flowing through the solid electrolyte body, and the like may be included as current components. According to the present embodiment, the second chamber 7 and the second oxygen ion pumping electrode pair 22 and 23 and the third chamber 8 and the third oxygen ion pumping electrode pair 32 and 33 are symmetrically juxtaposed, and By taking the difference between the third pumping current and the second pumping current, these interfering current components can be removed, and the accuracy of NOx gas concentration measurement is dramatically improved.
【００４１】図３は、本発明の第２の実施例に係るＮＯ
ｘ濃度測定装置及びその方法を説明するための図であ
る。以下、前記第１の実施例と相違する点について説明
し、同様の点は前記第１の実施例から明らかである。FIG. 3 is a block diagram showing a second embodiment of the present invention.
It is a figure for explaining an x concentration measuring device and its method. Hereinafter, points different from the first embodiment will be described, and the same points will be apparent from the first embodiment.
【００４２】図３を参照して、第１室６、第２室７、第
３室８に面して、それぞれ酸素濃度検知電極（Ｖｓ１、
Ｖｓ２、Ｖｓ３で示す）が設けられている。基準となる
電位を得るための基準電極は、固体電解質体に内蔵さ
れ、一定電位を生じるようにされている（例えば、酸素
基準電極の周囲を一定酸素濃度雰囲気とする、あるいは
微少電流を加えて自己生成基準電極としてもよい）。Referring to FIG. 3, facing the first chamber 6, the second chamber 7, and the third chamber 8, the oxygen concentration detecting electrodes (Vs1,
Vs2 and Vs3). A reference electrode for obtaining a reference potential is built in the solid electrolyte body so as to generate a constant potential (for example, a constant oxygen concentration atmosphere around the oxygen reference electrode, or a small current is applied. It may be a self-generated reference electrode).
【００４３】そして、第１酸素イオンポンピング電極対
１２，１３、第２酸素イオンポンピング電極対２２，２
３、第３酸素イオンポンピング電極対３２，３３に印加
される電圧（ないし電流）が、前記３つの酸素濃度検知
電極が発生する酸素濃淡起電力に基づいて、可変に制御
される構成とされている。Then, the first oxygen ion pumping electrode pair 12 and 13 and the second oxygen ion pumping electrode pair 22 and 2
3. The voltage (or current) applied to the third oxygen ion pumping electrode pair 32, 33 is variably controlled based on the oxygen concentration electromotive force generated by the three oxygen concentration detection electrodes. I have.
【００４４】詳細には、前記３つの酸素濃度検知電極が
発生する酸素濃淡起電力が所定値（所定電位）となるよ
うに、第１酸素イオンポンピング電極対１２，１３、第
２酸素イオンポンピング電極対２２，２３、第３酸素イ
オンポンピング電極対３２，３３に印加される電圧（な
いし電流）を可変に制御する。More specifically, the first oxygen ion pumping electrode pair 12, 13 and the second oxygen ion pumping electrode are so set that the oxygen concentration electromotive force generated by the three oxygen concentration detecting electrodes becomes a predetermined value (predetermined potential). The voltage (or current) applied to the pair 22, 23 and the third oxygen ion pumping electrode pair 32, 33 is variably controlled.
【００４５】好ましくは、第１ポンピング電流Ｉｐ１が
第１室６における酸素の限界電流、第２ポンピング電流
Ｉｐ２が第２室７における酸素の限界電流、第３ポンピ
ング電流Ｉｐ３が第３室８におけるＮＯｘの限界電流と
なるように、Ｖｓ１、Ｖｓ２、Ｖｓ３の目標電位を設定
する。Preferably, the first pumping current Ip1 is the limiting current of oxygen in the first chamber 6, the second pumping current Ip2 is the limiting current of oxygen in the second chamber 7, and the third pumping current Ip3 is NOx in the third chamber 8. The target potentials of Vs1, Vs2, and Vs3 are set so as to achieve the limit current of.
【００４６】斯くして、図２を参照して説明した測定原
理に従い、ＮＯｘガス濃度を測定することができる。Thus, the NOx gas concentration can be measured according to the measurement principle described with reference to FIG.
【００４７】図４は、本発明の第３の実施例に係るＮＯ
ｘ濃度測定装置及びその方法を説明するための図であ
る。以下、前記第１の実施例と相違する点について説明
し、同様の点は前記第１の実施例から明らかである。FIG. 4 is a block diagram showing a third embodiment of the present invention.
It is a figure for explaining an x concentration measuring device and its method. Hereinafter, points different from the first embodiment will be described, and the same points will be apparent from the first embodiment.
【００４８】図４を参照して、第１，第２拡散律速通路
４、５、は、前記第１の実施例は、充填された多孔質体
（例えばアルミナ多孔質）としたが、本実施例において
は、拡散律速通路とし、第１分流路５ａ，第２分流路５
ｂも、同様に、拡散律速通路とする。Referring to FIG. 4, the first and second diffusion-controlling passages 4 and 5 are filled porous bodies (for example, alumina porous) in the first embodiment. In the example, the diffusion control path is used, and the first branch 5a and the second branch 5 are used.
b is also a diffusion-controlled path.
【００４９】また、第１酸素イオンポンピング電極対１
２，１３、第２酸素イオンポンピング電極対２２，２
３、第３酸素イオンポンピング電極対３２，３３には、
可変制御される。好ましくは、図３を参照して説明した
前記第２の実施例のように、各室６，７，８に面して酸
素濃度検知電極を設け、これらの電極によって検査され
た各室６，７，８の酸素濃度に従って、第１酸素イオン
ポンピング電極対１２，１３、第２酸素イオンポンピン
グ電極対２２，２３、第３酸素イオンポンピング電極対
３２，３３に印加される電圧などを制御し、図２に示し
たような電流が各電極間に流れるようにする。The first oxygen ion pumping electrode pair 1
2,13, second oxygen ion pumping electrode pair 22,2
3. The third oxygen ion pumping electrode pair 32, 33 includes:
Variable control. Preferably, as in the second embodiment described with reference to FIG. 3, an oxygen concentration detection electrode is provided facing each of the chambers 6, 7, 8 and each of the chambers 6, 6 inspected by these electrodes. Voltages applied to the first oxygen ion pumping electrode pair 12, 13, the second oxygen ion pumping electrode pair 22, 23, and the third oxygen ion pumping electrode pair 32, 33 are controlled according to the oxygen concentrations of 7, 8; The current as shown in FIG. 2 is caused to flow between the electrodes.
【００５０】斯くして、図２を参照して説明した測定原
理に従い、ＮＯｘガス濃度を測定することができる。Thus, the NOx gas concentration can be measured according to the measurement principle described with reference to FIG.
【００５１】図５は、本発明の第４の実施例に係るＮＯ
ｘ濃度測定装置及びその方法を説明するための図であ
る。以下、前記第１の実施例と相違する点について説明
し、同様の点は前記第１の実施例から明らかである。FIG. 5 is a view showing a NO according to a fourth embodiment of the present invention.
It is a figure for explaining an x concentration measuring device and its method. Hereinafter, points different from the first embodiment will be described, and the same points will be apparent from the first embodiment.
【００５２】図５を参照して、一点鎖線から一側（図中
上方）が被測定雰囲気とされ、他側（図中下方）が基準
酸素濃度雰囲気（例えば、大気）とされている。そし
て、各室６，７，８に面して、それぞれ酸素濃度検知電
極（Ｖｓ１，Ｖｓ２，Ｖｓ３）が設けられ、これらの酸
素濃度検知電極に対して基準となる電位を生じるそれぞ
れの酸素濃度基準電極は、前記基準酸素濃度雰囲気に面
している。Referring to FIG. 5, one side (upper side in the figure) from the dashed line is the atmosphere to be measured, and the other side (lower side in the figure) is the reference oxygen concentration atmosphere (for example, the atmosphere). Oxygen concentration detection electrodes (Vs1, Vs2, Vs3) are respectively provided facing the chambers 6, 7, and 8, and the respective oxygen concentration reference electrodes that generate a reference potential for these oxygen concentration detection electrodes are provided. The electrode faces the reference oxygen concentration atmosphere.
【００５３】このように、それぞれの酸素濃度基準電極
が安定した酸素濃度雰囲気に面していることにより、各
室６，７，８の酸素濃度を正確に検知することができ、
例えば、第１室６や第２室で、大部分のＮＯｘが解離し
てしまうようなことが防止される。As described above, since each oxygen concentration reference electrode faces a stable oxygen concentration atmosphere, the oxygen concentration in each of the chambers 6, 7, and 8 can be accurately detected.
For example, dissociation of most of the NOx in the first chamber 6 and the second chamber is prevented.
【００５４】本実施例においても、上述したように、図
２を参照して説明した測定原理に従い、ＮＯｘガス濃度
を測定することができる。Also in this embodiment, as described above, the NOx gas concentration can be measured according to the measurement principle described with reference to FIG.
【００５５】[0055]
【発明の効果】本発明によれば、被測定ガス中に含まれ
る酸素や、妨害電流成分の影響を相殺することにより、
きわめて精度が高くＮＯｘガスなど、含酸素成分ガスの
濃度を測定することができる。According to the present invention, by canceling out the influence of oxygen contained in the gas to be measured and the interference current component,
The concentration of oxygen-containing gas such as NOx gas can be measured with extremely high accuracy.
【図１】本発明の第１の実施例に係るＮＯｘ濃度測定装
置及びその方法を説明するための図である。FIG. 1 is a diagram for explaining a NOx concentration measuring device and a method thereof according to a first embodiment of the present invention.
【図２】図２は、図１、図３〜図５に示したＮＯｘガス
濃度測定装置を用いたＮＯｘガス濃度測定原理を説明す
るための図である。FIG. 2 is a diagram for explaining the principle of NOx gas concentration measurement using the NOx gas concentration measurement device shown in FIG. 1 and FIGS. 3 to 5;
【図３】本発明の第２の実施例に係るＮＯｘ濃度測定装
置及びその方法を説明するための図である。FIG. 3 is a diagram for explaining a NOx concentration measuring device and a method therefor according to a second embodiment of the present invention.
【図４】本発明の第３の実施例に係るＮＯｘ濃度測定装
置及びその方法を説明するための図である。FIG. 4 is a diagram for explaining a NOx concentration measuring device and a method thereof according to a third embodiment of the present invention.
【図５】本発明の第４の実施例に係るＮＯｘ濃度測定装
置及びその方法を説明するための図である。FIG. 5 is a view for explaining a NOx concentration measuring device and a method therefor according to a fourth embodiment of the present invention.
１ 第１層 ２ 第２層 ３ 第３層 ４ 第１拡散律速層 ５ 第２拡散律速層 ６ 第１室 ７ 第２室 ８ 第３室 ９ 隔壁 １１ 第１セル １２，１３ 第１酸素イオンポンピング電極対（１２
第１の陰電極、１３第２の陽電極） ２１ 第２セル ２２，２３ 第２酸素イオンポンピング電極対（２２
第２の陽電極、２３第２の陰電極） ３１ 第３セル ３２，３３ 第３酸素イオンポンピング電極対（３２
第３の陽電極、３３第３の陰電極）DESCRIPTION OF SYMBOLS 1 1st layer 2 2nd layer 3 3rd layer 4 1st diffusion control layer 5 2nd diffusion control layer 6 1st chamber 7 2nd chamber 8 3rd chamber 9 Partition 11 First cell 12,13 First oxygen ion pumping Electrode pairs (12
(First negative electrode, 13 second positive electrode) 21 second cell 22, 23 second oxygen ion pumping electrode pair (22
2nd positive electrode, 23 2nd negative electrode) 31 3rd cell 32, 33 3rd oxygen ion pumping electrode pair (32
Third positive electrode, 33rd negative electrode)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 早川 暢博 名古屋市瑞穂区高辻町14番18号 日本特殊 陶業株式会社内 (72)発明者 安藤 雅史 名古屋市瑞穂区高辻町14番18号 日本特殊 陶業株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Nobuhiro Hayakawa 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi Inside Japan Specialty Ceramics Co., Ltd. (72) Inventor Masafumi Ando 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi Inside the corporation
Claims (29)
に拡散したガス中の酸素を解離し、生成した酸素イオン
をポンピングしてガス中の酸素濃度を制御し、第２室及
び第３室に前記制御された酸素濃度を有するガスが拡散
し、前記第２室に拡散したガスに含有される少なくとも
酸素を選択的に解離して、生成した酸素イオンをポンピ
ングし、前記第３室に拡散したガスに含有される少なく
とも酸素及びＮＯｘを選択的に解離し、前記酸素及びＮ
Ｏｘが分解して解離した酸素イオンをポンピングし、 前記第２室側からポンピングされた酸素と、前記第３室
側からポンピングされた酸素と、に基づいて、ＮＯｘガ
スの濃度を求めることを特徴とするＮＯｘガス濃度測定
方法。A gas to be measured is diffused into the first chamber, oxygen in the gas diffused into the first chamber is dissociated, and generated oxygen ions are pumped to control the oxygen concentration in the gas; The gas having the controlled oxygen concentration diffuses into the chamber and the third chamber, selectively dissociates at least oxygen contained in the gas diffused into the second chamber, and pumps generated oxygen ions, At least oxygen and NOx contained in the gas diffused into the third chamber are selectively dissociated, and the oxygen and N
Pumping oxygen ions decomposed and dissociated by Ox, and obtaining the concentration of NOx gas based on oxygen pumped from the second chamber side and oxygen pumped from the third chamber side. NOx gas concentration measurement method.
離され、前記酸素を解離し、生成した酸素イオンをポン
ピングし、 前記第３室側において、少なくともＮＯｘと酸素を解離
し、生成した酸素イオンをポンピングすることを特徴と
するＮＯｘガス濃度測定方法。2. In the second chamber side, oxygen is selectively dissociated, dissociating the oxygen and pumping generated oxygen ions, and dissociating at least NOx and oxygen in the third chamber side to produce A method for measuring the concentration of NOx gas, comprising pumping oxygen ions.
と、前記第２室側からポンピングされた酸素との差に基
づき、ＮＯｘガスの濃度を求めることを特徴とする請求
項１記載のＮＯｘガス濃度測定方法。3. The NOx concentration according to claim 1, wherein a NOx gas concentration is determined based on a difference between oxygen pumped from said third chamber side and oxygen pumped from said second chamber side. Gas concentration measurement method.
は酸素イオン伝導体を通じて室外へポンピングされ、 前記第２室側で解離された酸素イオンによって、前記酸
素イオン伝導体を介して流れる電流（以下「第２ポンピ
ング電流」という）と、前記第３室側で解離された酸素
イオンによって、前記酸素イオン伝導体を介して流れる
ポンピング電流（以下「第３ポンピング電流」という）
と、に基づいてＮＯｘガス濃度を求めることを特徴とす
る請求項１記載のＮＯｘガス濃度測定方法。4. The oxygen ions from the second and third chambers are pumped outside through an oxygen ion conductor and flow through the oxygen ion conductor by oxygen ions dissociated on the second chamber side. A current (hereinafter, referred to as “second pumping current”) and a pumping current (hereinafter, referred to as “third pumping current”) flowing through the oxygen ion conductor due to oxygen ions dissociated in the third chamber.
The NOx gas concentration measuring method according to claim 1, wherein the NOx gas concentration is obtained based on the following.
酸素濃度が、所定の濃度範囲に収まるように、前記第１
室から酸素が解離し、生成した酸素イオンをポンピング
されることを特徴とする請求項１〜４のいずれか一に記
載のＮＯｘガス濃度測定方法。5. The method according to claim 1, wherein the oxygen concentration in the gas diffused into the second chamber and the third chamber is within a predetermined concentration range.
5. The NOx gas concentration measuring method according to claim 1, wherein oxygen is dissociated from the chamber and generated oxygen ions are pumped.
の酸素濃度とした場合に流れる前記第２ポンピング電流
と、第３ポンピング電流を予め測定し、 ＮＯｘガス濃度の測定時、前記第２ポンピング電流に対
する前記第３ポンピング電流の比「Ｋ」と、測定した前
記第２ポンピング電流及び１前記第３ポンピング電流を
用いて、下記の式からＮＯｘガス濃度を求めることを特
徴とする請求項１記載のＮＯｘガス濃度測定方法； ＮＯｘガス濃度＝第３ポンピング電流−Ｋ×第２ポンピ
ング電流。6. The second pumping current and the third pumping current flowing when the oxygen concentration in the gas to be measured is zero and a known oxygen concentration is measured in advance, and when the NOx gas concentration is measured, the second pumping current is measured. The NOx gas concentration is obtained from the following equation using the ratio "K" of the third pumping current to the second pumping current, the measured second pumping current, and the third pumping current. NOx gas concentration measuring method described in 1; NOx gas concentration = third pumping current−K × second pumping current.
に拡散したガス中の酸素が解離し、生成した酸素イオン
をポンピングしてガス中の酸素濃度を制御し、第２室及
び第３室に前記制御された酸素濃度を有するガスが拡散
し、前記第２室に拡散したガスに含有される少なくとも
酸素を選択的に解離して生成した酸素イオンをポンピン
グし、前記第３室に拡散したガスに含有される少なくと
も酸素及び含酸素成分ガスを選択的に解離し、前記酸素
及び含酸素成分ガスが解離し生成した酸素イオをポンピ
ングし、 前記第２室側からポンピングされた酸素と、前記第３室
側からポンピングされた酸素と、に基づいて、含酸素成
分ガスの濃度を求めることを特徴とする含酸素成分ガス
濃度測定方法。7. The gas to be measured diffuses into the first chamber, oxygen in the gas diffused into the first chamber is dissociated, and the generated oxygen ions are pumped to control the oxygen concentration in the gas. The gas having the controlled oxygen concentration is diffused into the chamber and the third chamber, and the oxygen ions generated by selectively dissociating at least oxygen contained in the gas diffused into the second chamber are pumped. At least oxygen and the oxygen-containing component gas contained in the gas diffused into the three chambers are selectively dissociated, and the oxygen and the oxygen-containing component gas are dissociated to pump out the generated oxygen ions, and are pumped from the second chamber side. A method for measuring the concentration of the oxygen-containing component gas based on the obtained oxygen and the oxygen pumped from the third chamber side.
して第１室に測定ガスを導入し、前記第１室の酸素濃度
が所定の濃度範囲内に収まるように該第１室内の酸素濃
度を調整し、前記第１室内のガスの一部を、第２の拡散
律速層を介して第１分流路を通じて第２室に導入し、前
記第１室内のガスの他部を第２の拡散律速層を介して第
２分流路を通じて第３室に導入し、前記第２室内の酸素
濃度を少なくとも第９１室の酸素濃度より低くなる程度
に調整し、前記第３室内の酸素濃度をＮＯｘガスが分解
されるように調整し、前記第２室内における調整量と前
記第３室内における調整量に基づいて測定ガス中の含酸
素ガス濃度を求めることを特徴とするＮＯｘガス濃度測
定方法。8. A measurement gas is introduced into a first chamber from a gas space to be measured via a first diffusion-controlling layer, and the first chamber is controlled so that the oxygen concentration in the first chamber falls within a predetermined concentration range. And a part of the gas in the first chamber is introduced into the second chamber through the first branch channel through the second diffusion-controlling layer, and the other part of the gas in the first chamber is changed to the second chamber. The oxygen concentration in the third chamber is introduced into the third chamber through the second branch channel through the second diffusion-controlling layer, and the oxygen concentration in the second chamber is adjusted to be at least lower than the oxygen concentration in the 91st chamber. Is adjusted so that NOx gas is decomposed, and the oxygen-containing gas concentration in the measurement gas is determined based on the adjustment amount in the second chamber and the adjustment amount in the third chamber. .
内における調整量に基づいてＮＯｘガス濃度を求めるこ
とを特徴とする請求項８記載のＮＯｘガス濃度測定方
法。9. The NOx gas concentration measuring method according to claim 8, wherein the NOx gas concentration is obtained based on the adjustment amount in the second chamber and the adjustment amount in the third chamber.
することを特徴とする請求項８記載のＮＯｘガス濃度測
定方法。10. The method according to claim 8, wherein the oxygen concentration in the second chamber is reduced as much as possible.
酸素イオンをポンピングすることにより、該第１室内の
酸素濃度を調整することを特徴とする請求項８記載のＮ
Ｏｘガス濃度測定方法。11. The N concentration according to claim 8, wherein the oxygen concentration in said first chamber is adjusted by dissociating oxygen in said first chamber and pumping generated oxygen ions.
Ox gas concentration measurement method.
酸素イオンをポンピングすることにより、該第２室内の
酸素濃度を調整することを特徴とする請求項８記載のＮ
Ｏｘガス濃度測定方法。12. The N concentration according to claim 8, wherein oxygen in the second chamber is dissociated and oxygen ions generated in the second chamber are pumped to adjust the oxygen concentration in the second chamber.
Ox gas concentration measurement method.
酸素イオンをポンピングすることにより、該第３室内の
酸素濃度を調整することを特徴とする請求項８記載のＮ
Ｏｘガス濃度測定方法。13. The N concentration according to claim 8, wherein oxygen in the third chamber is dissociated and oxygen ions generated in the third chamber are pumped to adjust the oxygen concentration in the third chamber.
Ox gas concentration measurement method.
前記第３室からポンピングされた内における酸素に基づ
いてＮＯｘ測定ガス中の含酸素ガス濃度を求めることを
特徴とする請求項８記載のＮＯｘガス濃度測定方法。14. The oxygen-containing gas concentration in the NOx measurement gas is obtained based on oxygen pumped from the second chamber and oxygen pumped from the third chamber. NOx gas concentration measurement method.
素に基づいて、求められたＮＯｘガス濃度を補正するこ
とを特徴とする請求項８及び１１記載のＮＯｘガス濃度
測定方法。15. The method according to claim 8, wherein the determined NOx gas concentration is corrected based on the oxygen pumped in the first chamber.
素濃度を、前記第１室の隔壁を介して第１ポンピング電
極対間に流れる第１ポンピング電流に基づいて求めるこ
とを特徴とする請求項８記載のＮＯｘガス濃度測定方
法。16. The concentration of oxygen pumped in said first chamber is determined based on a first pumping current flowing between a first pair of pumping electrodes via a partition of said first chamber. The NOx gas concentration measurement method described in the above.
素濃度を、前記第２室の隔壁を介して第２ポンピング電
極対に流れる第２ポンピング電流に基づいて求めること
を特徴とする請求項８又は１６記載のＮＯｘガス濃度測
定方法。17. The method according to claim 8, wherein the concentration of oxygen pumped in the second chamber is determined based on a second pumping current flowing to a second pair of pumping electrodes through a partition of the second chamber. 16. The method for measuring a NOx gas concentration according to item 16.
素濃度を、前記第３室の隔壁の両面に設けられた第３ポ
ンピング電極対に流れる第３ポンピング電流に基づいて
求めることを特徴とする請求項８、１６又は１７記載の
ＮＯｘガス濃度測定方法。18. The method according to claim 18, wherein the concentration of oxygen pumped in the third chamber is determined based on a third pumping current flowing through a third pair of pumping electrodes provided on both surfaces of the partition wall of the third chamber. Item 18. The NOx gas concentration measuring method according to Item 8, 16 or 17.
ンピング電流の差に基づいて、前記ＮＯｘガス濃度を求
めることを特徴とする請求項１８記載のＮＯｘガス濃度
測定方法。19. The NOx gas concentration measuring method according to claim 18, wherein the NOx gas concentration is obtained based on a difference between the third pumping current and the second pumping current.
濃度が既知である被測定ガスを用いて、前記第２ポンピ
ング電流に対する前記第３ポンピング電流の比「Ｋ」を
求め、 実測時、測定した前記第２ポンピング電流と前記第３ポ
ンピング電流と、さらに前記比「Ｋ」と、を用いて、下
記の式からＮＯｘガス濃度を求めることを特徴とする請
求項１９記載のＮＯｘガス濃度測定方法； ＮＯｘガス濃度＝（第３ポンピング電流−Ｋ×第２ポン
ピング電流）×Ｇ 但し、Ｇ：比例定数［ｐｐｍ／Ａ］。20. The ratio "K" of the third pumping current to the second pumping current is determined in advance using a gas to be measured whose NOx gas concentration is zero and whose oxygen concentration is known. 20. The NOx gas concentration measuring method according to claim 19, wherein the NOx gas concentration is determined from the following equation using the second pumping current, the third pumping current, and the ratio "K". NOx gas concentration = (third pumping current−K × second pumping current) × G where G: proportional constant [ppm / A].
濃度を測定することを特徴とする請求項１〜２０記載の
ＮＯｘガス濃度測定方法。21. The NOx gas concentration measuring method according to claim 1, wherein a gas concentration of an oxygen-containing component is measured instead of said NOx.
介して第１室に測定ガスを導入し、前記第１室の酸素濃
度が所定の濃度範囲内に収まるように該第１室内の酸素
濃度を調整し、前記第１室内のガスの一部を、第２の拡
散律速層を介して第１分流路を通じて第２室に導入し、
前記第１室内のガスの他部を第２の拡散律速層を介して
第２分流路を通じて第３室に導入し、前記第２室内の酸
素濃度を少なくとも第１室の酸素濃度より低くなる程度
に調整し、前記第３室内の酸素濃度を含酸素成分ガスが
分解されるように調整し、前記第２室内における調整量
と前記第３室内における調整量に基づいて測定ガス中の
含酸素成分ガス濃度を算出することを特徴とする含酸素
成分ガス濃度測定方法。22. A measuring gas is introduced from a gas space to be measured into a first chamber through a first diffusion-controlling layer, and the first chamber is controlled so that the oxygen concentration in the first chamber falls within a predetermined concentration range. Adjusting the oxygen concentration of the first chamber, introducing a part of the gas in the first chamber into the second chamber through the first branch channel through the second diffusion-controlling layer;
The other part of the gas in the first chamber is introduced into the third chamber through the second branch channel through the second diffusion-controlling layer, and the oxygen concentration in the second chamber is at least lower than the oxygen concentration in the first chamber. And adjusting the oxygen concentration in the third chamber so that the oxygen-containing component gas is decomposed. Based on the adjustment amount in the second chamber and the adjustment amount in the third chamber, the oxygen-containing component in the measurement gas is adjusted. A method for measuring the concentration of an oxygen-containing component gas, comprising calculating a gas concentration.
ｘ、ＳＯｘ、Ｈ2Ｏのいずれかであることを特徴とする
請求項２２記載の含酸素成分ガス濃度測定方法。23. The oxygen-containing component gas comprises NOx, CO
x, SOx, oxygen-containing component gas concentration measuring method according to claim 22, wherein a is either H 2 O.
されたガスを拡散する通路と、 前記第１室に拡散したガス中の酸素を解離し、生成した
酸素イオンをポンピングしてガス中の酸素濃度を制御す
る手段と、 前記第２室に拡散したガスに含有される少なくとも酸素
を選択的に解離し、生成した酸素イオンをポンピングす
る手段と、 前記第３室に拡散したガスに含有される少なくとも酸素
及びＮＯｘを選択的に解離し、前記酸素及びＮＯｘが解
離して、生成した酸素イオンをポンピングする手段と、
を有するＮＯｘセンサ。24. A first chamber into which a gas to be measured is introduced, a passage for diffusing the gas whose oxygen concentration is controlled from the first chamber to a second chamber and a third chamber, and a diffusion chamber for diffusing the gas whose oxygen concentration is controlled. Means for dissociating the oxygen in the gas and controlling the oxygen concentration in the gas by pumping the generated oxygen ions; and selectively dissociating at least the oxygen contained in the gas diffused into the second chamber. Means for pumping the generated oxygen ions, means for selectively dissociating at least oxygen and NOx contained in the gas diffused into the third chamber, and means for dissociating the oxygen and NOx to pump generated oxygen ions. ,
NOx sensor having:
酸素イオンをポンピングしてガス中の酸素濃度を制御す
る手段と、 前記第１室から第２室及び第３室に前記酸素濃度が制御
されたガスを拡散する手段と、 前記第２室に拡散したガスに含有される少なくとも酸素
を選択的に、解離し生成した酸素イオンをポンピングす
る手段と、 前記第３室に拡散したガスに含有される少なくとも酸素
及びＮＯｘを選択的に解離し、前記酸素及びＮＯｘが解
離し生成した酸素イオンをポンピングする手段と、 前記第２室側からポンピングされた酸素と、前記第３室
側からポンピングされた酸素と、を測定し、ＮＯｘガス
の濃度を求める手段と、を有することを特徴とするＮＯ
ｘガス濃度測定装置。25. A first chamber into which a gas to be measured is introduced, and means for controlling oxygen concentration in the gas by dissociating oxygen in the gas diffused into the first chamber and pumping generated oxygen ions. Means for diffusing the gas whose oxygen concentration is controlled from the first chamber to the second and third chambers; and selectively dissociating and producing at least oxygen contained in the gas diffused into the second chamber. Means for pumping the oxygen ions thus obtained; means for selectively dissociating at least oxygen and NOx contained in the gas diffused into the third chamber, and means for pumping oxygen ions generated by dissociation of the oxygen and NOx; NO comprising: means for measuring the oxygen pumped from the second chamber side and the oxygen pumped from the third chamber side to obtain the concentration of NOx gas.
x gas concentration measurement device.
て被測定ガス中のＮＯｘガスを含む酸素含有ガスの量又
は濃度を決定する方法； ａ） 酸素を分解ないし解離）させる第１の陰電極が内
壁に形成されてなり、かつ、該第１の陰電極から酸素イ
オンを外部に形成された第１の陽電極に向かって移動可
能な酸素イオン伝導体によって画成された第１室の内部
へ、被測定ガスを第１の拡散制限律速を受けさせなが
ら、導入するプロセス、 ｂ） 前記第１室に導入された被測定ガスの酸素分圧
を、該第１室に導入される前の酸素分圧よりも低くなる
ように該第１室中の酸素を酸素イオンとして前記第１の
陰電極から前記第１の陽電極に向けて排出することによ
って第１の内部ガスを生成するプロセス、 ｃ） 前記第１の内部ガスを第２室及び第３室へ、第２
の拡散制限律速を受けさせながら分岐して分流された該
第１の内部ガスをそれぞれ導入させるプロセス、 ｄ） 酸素を分解ないし解離させる第２の陰電極が内壁
に形成されてなり、かつ、該第２の陰電極から酸素イオ
ンを外部に形成された第２の陽電極に向かって移動可能
な酸素イオン伝導体によって画成された前記第２室にお
いて、 前記プロセス（ｃ）によって分岐されて分流してきた第
１の内部ガスを前記第２の陰電極に接触させて該第２室
内の酸素を分解ないし解離させることにより酸素イオン
を生成させ、該酸素イオンを該第２陰電極から該第２陽
電極に向けて移動させることにより、第２電流を測定す
るプロセス、 ｅ） 酸素及びＮＯｘを含む前記酸素含有ガスを分解な
いし解離させる第３の陰電極が内壁に形成されてなり、
かつ、該第３の陰電極から酸素イオンを外部に形成され
た第３の陽電極に向かって移動可能な酸素イオン伝導体
によって画成された前記第３室において、前記プロセス
（ｃ）によって分岐されて分流してきた第１の内部ガス
を該第３の陰電極に接触させて該第３室内の酸素及び酸
素含有ガスの両方を分解ないし解離させることにより、
正負のイオンを生成し、このうちの酸素イオンを該第３
陰電極から該第３陽電極に向けて移動させることによ
り、第３電流を測定するプロセス、 ｆ） 前記第２電流と前記第３電流の電流値の差を測定
するプロセス、 ｇ） 前記電流差から被測定ガス中の酸素含有ガスを算
出するプロセス。26. A method for determining the amount or concentration of an oxygen-containing gas containing a NOx gas in a gas to be measured by the following processes (a) to (g): a) First method for decomposing or dissociating oxygen. An electrode is formed on an inner wall of the first chamber, the first chamber being defined by an oxygen ion conductor capable of moving oxygen ions from the first negative electrode to a first positive electrode formed outside. A process of introducing the gas to be measured into the inside while subjecting the gas to be measured to the first diffusion-limited rate; b) the oxygen partial pressure of the gas to be measured introduced into the first chamber before the gas is introduced into the first chamber; Generating a first internal gas by discharging oxygen in the first chamber as oxygen ions from the first negative electrode toward the first positive electrode so as to be lower than the oxygen partial pressure of the first chamber. C) distributing said first internal gas to a second chamber and a third chamber; To, the second
A process of introducing each of the first internal gases branched and diverted while being subjected to the diffusion limiting rate control of d), a second negative electrode for decomposing or dissociating oxygen is formed on an inner wall, and In the second chamber defined by an oxygen ion conductor capable of moving oxygen ions from a second negative electrode toward a second positive electrode formed outside, the second chamber is branched and divided by the process (c). The first internal gas thus produced is brought into contact with the second negative electrode to decompose or dissociate oxygen in the second chamber to generate oxygen ions, and the oxygen ions are transferred from the second negative electrode to the second negative electrode. A process of measuring a second current by moving toward the positive electrode; e) forming a third negative electrode on the inner wall that decomposes or dissociates the oxygen-containing gas including oxygen and NOx;
And branching by the process (c) in the third chamber defined by an oxygen ion conductor capable of moving oxygen ions from the third negative electrode toward a third positive electrode formed outside. By contacting the first internal gas that has been separated and diverted to the third negative electrode to decompose or dissociate both oxygen and the oxygen-containing gas in the third chamber,
Positive and negative ions are generated, of which oxygen ions are converted to the third ions.
A process of measuring a third current by moving from the negative electrode to the third positive electrode; f) a process of measuring a difference between the current values of the second current and the third current; g) the current difference Calculating the oxygen-containing gas in the gas to be measured from
第２の陰陽電極間及び前記第３の陰陽電極間の電位差よ
りも低く、前記第２の陰陽電極間の電位差は前記第３の
陰陽電極間の電位差よりも低いことを特徴とする請求項
２６記載のＮＯｘガスを含む酸素含有ガスの量又は濃度
を決定する方法。27. A potential difference between said first and second electrodes is lower than a potential difference between said second and third electrodes and said third electrode and said third electrode has a potential difference between said third and third electrodes. The method for determining the amount or concentration of an oxygen-containing gas containing NOx gas according to claim 26, wherein the potential difference is lower than the potential difference between the negative and positive electrodes.
２、第３の陰陽電極間電位差よりも低く、又前記第２、
第３の陰陽電極間の電位差はほぼ同じであることを特徴
とする請求項２６記載のＮＯｘガスを含む酸素含有ガス
の量又は濃度を決定する方法。28. A potential difference between the first and the negative and positive electrodes is lower than a potential difference between the second and the third negative and positive electrodes.
The method for determining the amount or concentration of an oxygen-containing gas containing NOx gas according to claim 26, wherein the potential difference between the third and the negative electrodes is substantially the same.
含む含酸素含有ガスの分解ないし解離対する触媒能を調
整し、前記第２、第３の陰陽電極に印加する電圧を同じ
とすることを特徴とする請求項２６記載のＮＯｘガスを
含む酸素含有ガスの量又は濃度を決定する方法。29. The catalyst of the second and third cathodes for decomposing or dissociating an oxygen-containing gas containing NOx is adjusted, and the voltage applied to the second and third cathodes is the same. The method for determining the amount or concentration of an oxygen-containing gas containing NOx gas according to claim 26, wherein
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16924598A JP3561149B2 (en) | 1998-06-02 | 1998-06-02 | NOx gas concentration measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16924598A JP3561149B2 (en) | 1998-06-02 | 1998-06-02 | NOx gas concentration measurement method |
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| Publication Number | Publication Date |
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| JPH11344467A true JPH11344467A (en) | 1999-12-14 |
| JP3561149B2 JP3561149B2 (en) | 2004-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16924598A Expired - Fee Related JP3561149B2 (en) | 1998-06-02 | 1998-06-02 | NOx gas concentration measurement method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003503734A (en) * | 1999-07-02 | 2003-01-28 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Electrochemical gas sensor and gas component identification method |
| CN107764885A (en) * | 2017-12-04 | 2018-03-06 | 深圳市森世泰科技有限公司 | The apparatus and method for measuring gas concentration |
| CN110320261A (en) * | 2018-03-29 | 2019-10-11 | 日本碍子株式会社 | The control method of gas sensor and gas sensor |
| CN107764885B (en) * | 2017-12-04 | 2024-06-07 | 深圳市森世泰科技有限公司 | Apparatus and method for measuring gas concentration |
-
1998
- 1998-06-02 JP JP16924598A patent/JP3561149B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003503734A (en) * | 1999-07-02 | 2003-01-28 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Electrochemical gas sensor and gas component identification method |
| CN107764885A (en) * | 2017-12-04 | 2018-03-06 | 深圳市森世泰科技有限公司 | The apparatus and method for measuring gas concentration |
| CN107764885B (en) * | 2017-12-04 | 2024-06-07 | 深圳市森世泰科技有限公司 | Apparatus and method for measuring gas concentration |
| CN110320261A (en) * | 2018-03-29 | 2019-10-11 | 日本碍子株式会社 | The control method of gas sensor and gas sensor |
| CN110320261B (en) * | 2018-03-29 | 2023-05-02 | 日本碍子株式会社 | Gas sensor and control method for gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3561149B2 (en) | 2004-09-02 |
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