JPH1133746A - Joining method of metallic member - Google Patents
Joining method of metallic memberInfo
- Publication number
- JPH1133746A JPH1133746A JP18487497A JP18487497A JPH1133746A JP H1133746 A JPH1133746 A JP H1133746A JP 18487497 A JP18487497 A JP 18487497A JP 18487497 A JP18487497 A JP 18487497A JP H1133746 A JPH1133746 A JP H1133746A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- members
- metallic glass
- glass member
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、２以上の金属部材
を接合する方法に関する。The present invention relates to a method for joining two or more metal members.
【０００２】[0002]
【従来の技術】金属部材の接合においては、過冷却液体
域を有する非晶質合金（金属ガラス）を使用することが
従来よりなされている。特開平５−１３１２７９号公報
に開示された従来の方法は、接合する金属の間に金属ガ
ラスを介在させ、この金属ガラスが過冷却液体域△Ｔｘ
（△Ｔｘ＝Ｔｘ（結晶化開始温度）−Ｔｇ（ガラス遷移
温度）で定義される温度領域）で変形抵抗が減少する粘
性流動を生じる温度に加熱するものである。そして、こ
の加熱後、接合する金属を介して金属ガラスを加圧する
ことにより、金属ガラス表面のミクロな凹凸が接合する
金属表面の凹凸に応じて変形する。この変形により、金
属と金属ガラスとが面接触の状態となり、この状態をそ
のまま保持することにより、低温で拡散を進行させ、金
属と金属ガラスとを接合する。2. Description of the Related Art Conventionally, in joining metal members, an amorphous alloy (metallic glass) having a supercooled liquid region has been used. In the conventional method disclosed in Japanese Patent Application Laid-Open No. 5-131279, a metallic glass is interposed between metals to be joined, and the metallic glass is in a supercooled liquid region ΔTx.
(ΔTx = Tx (crystallization start temperature) −Tg (glass transition temperature)) and heats to a temperature at which a viscous flow occurs in which the deformation resistance decreases. Then, after this heating, by pressing the metallic glass through the metal to be joined, the micro unevenness on the surface of the metallic glass is deformed according to the unevenness on the surface of the metal to be joined. Due to this deformation, the metal and the metallic glass are brought into a state of surface contact. By maintaining this state as it is, diffusion proceeds at a low temperature and the metal and the metallic glass are joined.
【０００３】[0003]
【発明が解決しようとする課題】上述した方法では接合
メカニズムとして拡散を積極的に利用しているため、過
冷却液体域に加熱した後、金属ガラスを比較的長時間
（数１００分程度）保持する必要がある。ところが、こ
のように過冷却液体域に比較的長時間、等温保持された
金属ガラスは、温度や合金組成によっても異なるが、概
ね数十分で結晶化する。In the above-mentioned method, since diffusion is actively used as a bonding mechanism, the metallic glass is held for a relatively long time (about several hundred minutes) after heating to a supercooled liquid region. There is a need to. However, the metallic glass kept isothermally for a relatively long time in the supercooled liquid region as described above generally crystallizes in several tens of minutes, though it varies depending on the temperature and the alloy composition.
【０００４】一般的に、金属ガラスは、結晶粒界が存在
しないため、同組成の結晶合金よりはるかに高い機械的
強度を示す。このため、結晶化すると金属ガラスは、機
械的強度が低下し、高強度、高破壊靭性等の特徴が失わ
れる。従って、拡散現象を進行させるために接合する金
属間に挿入され、長時間、過冷却液体域に加熱・等温保
持された金属ガラスは、結晶化によってそれ自体が脆弱
な接合中間層となり、接合強度が低下する問題が生じ
る。In general, metallic glasses exhibit much higher mechanical strength than crystalline alloys of the same composition due to the absence of grain boundaries. For this reason, when crystallized, the metallic glass loses its mechanical strength and loses characteristics such as high strength and high fracture toughness. Therefore, the metallic glass inserted between the metals to be joined in order to progress the diffusion phenomenon and heated and kept isothermally in the supercooled liquid region for a long time itself becomes a brittle joining intermediate layer by crystallization, and the joining strength Is reduced.
【０００５】本発明は、上記問題点に鑑みてなされたも
のであり、金属ガラスを使用し、金属ガラスの高い強度
を保ったまま、金属ガラス部材同士、或いは金属ガラス
部材と他の金属部材との接合を行うことが可能な金属部
材の接合方法を提供することを目的とする。The present invention has been made in view of the above problems, and uses metallic glass and maintains the high strength of metallic glass while maintaining the high strength of metallic glass with each other or between metallic glass members and other metallic members. It is an object of the present invention to provide a joining method of a metal member capable of joining the metal members.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、請求項１の発明は、少なくとも一体が過冷却液体域
を有する非晶質合金からなる金属ガラス部材である二体
以上の金属部材を重ね合わせる工程と、重ね合わせた金
属部材を前記金属ガラス部材の過冷却液体域まで加熱す
る工程と、重ね合わせた金属部材の内、少なくとも金属
ガラス部材を押圧手段により押圧して金属部材を相互に
接合する工程と、接合した金属部材を冷却する工程と、
を有することを特徴とする。In order to achieve the above object, an object of the present invention is to provide two or more metal members which are metal glass members at least integrally formed of an amorphous alloy having a supercooled liquid region. The step of superimposing, the step of heating the superimposed metal member to a supercooled liquid region of the metal glass member, and pressing at least the metal glass member of the superimposed metal members by pressing means to mutually move the metal members. Joining, and cooling the joined metal members,
It is characterized by having.
【０００７】請求項２の発明は、少なくとも二体の金属
部材を接合する金属部材の接合方法において、過冷却液
体域を有する非晶質合金からなる金属ガラス部材である
一方の金属部材を他方の金属部材と重ね合わせる工程
と、金属ガラス部材である一方の金属部材に所定の温度
に加熱された加熱手段を接触させることにより、重ね合
わせた金属部材を前記金属ガラス部材の過冷却液体域ま
で加熱する工程と、他方の金属部材側から押圧手段によ
り押圧して金属部材を相互に接合する工程と、接合した
金属部材を冷却する工程と、を有することを特徴とす
る。According to a second aspect of the present invention, there is provided a method of joining metal members for joining at least two metal members, wherein one of the metallic glass members made of an amorphous alloy having a supercooled liquid region is replaced with the other metallic member. Heating the superposed metal member to a supercooled liquid region of the metal glass member by bringing the heating means heated to a predetermined temperature into contact with the one metal member which is the metal glass member; And bonding the metal members to each other by pressing from the other metal member side by pressing means, and cooling the bonded metal members.
【０００８】請求項３の発明は、請求項１又は２記載の
発明であって、前記金属ガラス部材と接合する金属部材
は、金属ガラス部材と接する側に凹凸部が形成されてい
ることを特徴とする。A third aspect of the present invention is the invention according to the first or second aspect, wherein the metal member to be joined to the metallic glass member has an uneven portion on a side in contact with the metallic glass member. And
【０００９】請求項４の発明は、異なる過冷却液体域を
有する少なくとも二体の非晶質合金からなる金属ガラス
部材を結晶化開始温度順に重ね合わせる工程と、最も高
い結晶化開始温度を有する金属ガラス部材側から順に金
属ガラス部材の過冷却液体域まで加熱する工程と、最も
低い結晶化開始温度を有する金属ガラス部材側から押圧
手段によって押圧し、重ね合わせた金属ガラス部材を接
合する工程と、接合した金属部材を冷却する工程と、を
有することを特徴とする。According to a fourth aspect of the present invention, there is provided a method of superposing metallic glass members made of at least two amorphous alloys having different supercooled liquid regions in the order of crystallization start temperature, A step of heating the supercooled liquid region of the metallic glass member in order from the glass member side, and a step of pressing the metallic glass member having the lowest crystallization start temperature from the metallic glass member side by pressing means, and joining the superposed metallic glass members, Cooling the joined metal members.
【００１０】請求項１〜３の発明では、互いに接合する
二体以上の金属部材の内、少なくとも一体の部材が金属
ガラス（金属ガラス部材）によって構成されている。金
属ガラスは、過冷却液体域まで加熱されると１０8 〜１
０10Ｐａ・ｓ程度の粘性流動を示し、数ＭＰａ程度の低
圧力で塑性変形が可能である。According to the first to third aspects of the present invention, at least one of the two or more metal members joined to each other is formed of metallic glass (metallic glass member). When the metallic glass is heated to the supercooled liquid region, it is 10 8 to 1.
It shows a viscous flow of about 0 10 Pa · s and can be plastically deformed at a low pressure of about several MPa.
【００１１】従って、適当な加熱温度、押圧力、雰囲気
等の押圧条件を選定し、金属ガラス部材を他方の金属部
材の少なくとも接合面と共に、その過冷却液体域まで加
熱し、金属ガラス部材と他方の金属部材とを押圧手段に
よって押圧することにより、少なくとも金属ガラス部材
には、粘性流動に起因する極めて大きな塑性変形が生じ
る。この塑性変形によって少なくとも金属ガラス部材の
表面は、酸化膜などが破壊されて新生面が露出し、他方
の金属部材の接合面と密着する。Accordingly, appropriate pressing conditions such as heating temperature, pressing force, atmosphere and the like are selected, and the metallic glass member is heated up to the supercooled liquid region together with at least the joining surface of the other metallic member, and the metallic glass member and the other metallic member are heated. By pressing the metal member with the pressing means, at least the metal glass member undergoes extremely large plastic deformation due to viscous flow. At least the surface of the metallic glass member is destroyed by an oxide film or the like due to the plastic deformation, and a new surface is exposed, so that the metallic glass member comes into close contact with the joining surface of the other metallic member.
【００１２】一般に、新生面のような清浄な状態の金属
部材の表面は極めて活性であり、この状態で金属部材の
表面が他方の金属部材の表面に密着すると、接触界面で
原子間の凝着が生じて接合が行われる。特に、少なくと
も一方の金属部材が金属ガラス部材であると、過冷却液
体域で大きな粘性流動が生じるため、他方の金属部材の
接合面に原子オーダで密着し、互いの新生面の接合が促
進される。In general, the surface of a metal member in a clean state such as a new surface is extremely active. In this state, if the surface of the metal member comes into close contact with the surface of the other metal member, adhesion between atoms at the contact interface will occur. The resulting bonding occurs. In particular, if at least one of the metal members is a metal glass member, a large viscous flow occurs in the supercooled liquid region, so that the metal members adhere to the bonding surface of the other metal member in the atomic order, and the bonding of the new surfaces to each other is promoted. .
【００１３】本発明では、金属ガラスの粘性流動によっ
て新生面が露出することにより、活性な金属ガラス部材
の表面と他方の金属部材の表面との金属原子同士が結合
することを応用している。接合に要する時間は、接合に
用いる金属ガラスおよび他方の金属の組成、接合温度、
押圧力によって異なるが、上述したように接合界面の極
めて限られた範囲での接合メカニズムであるため、拡散
現象を主に利用した従来の接合法に比べ、数十秒〜数分
の短い時間で接合が完了する。The present invention uses the fact that the surface of the active metallic glass member and the surface of the other metallic member are bonded to each other by exposing the new surface by viscous flow of the metallic glass. The time required for joining depends on the composition of the metallic glass and the other metal used for joining, the joining temperature,
Although it depends on the pressing force, as described above, since it is a bonding mechanism in a very limited range of the bonding interface, it takes several tens of seconds to several minutes compared to the conventional bonding method mainly using the diffusion phenomenon. Joining is completed.
【００１４】さらに接合後、接合された金属部材を冷却
するにより、金属ガラスの結晶化、脆化を防止して金属
ガラス本来の高強度、硬度を低下させずに接合を完了す
る。特に、接合に伴う金属ガラスの結晶化が生じても、
結晶化率を７０％以下に抑制することにより、金属ガラ
ス部材の極端な機械的強度の低下を防止することができ
る。After the joining, the joined metal members are cooled to prevent crystallization and embrittlement of the metallic glass, thereby completing the joining without lowering the original high strength and hardness of the metallic glass. In particular, even if crystallization of metallic glass due to joining occurs,
By suppressing the crystallization ratio to 70% or less, it is possible to prevent an extreme decrease in mechanical strength of the metallic glass member.
【００１５】重ね合わされた金属部材を過冷却液体域ま
で加熱し、押圧する手段としては、金属ガラス部材側に
配置されたモータとボールネジとからなる直動機構等の
公知の駆動手段に接続された加熱部材を、抵抗ヒータ、
輻射ヒータ等の公知の加熱手段により金属ガラス部材の
過冷却液体域＋５０Ｋを上限とする温度に加熱し、駆動
手段によって加熱部材を金属ガラス部材に接触させ、加
熱部材からの熱伝導により金属ガラス部材を加熱するこ
とによって行うことができる。これにより、金属ガラス
部材は過冷却液体域の所定の接合温度まで速やかに加熱
され、ガラス遷移温度から接合温度までの加熱に要する
時間を最小とすることができ、過冷却液体域における加
熱、接合による結晶化を最小限とすることができる。こ
のため、金属ガラス部材の結晶化による強度低下を防止
できる。As means for heating and pressing the superposed metal member to the supercooled liquid region, it is connected to a known driving means such as a linear motion mechanism comprising a motor and a ball screw disposed on the metal glass member side. Heating member, resistance heater,
A known heating means such as a radiant heater is used to heat the metal glass member to a temperature having an upper limit of +50 K in the supercooled liquid region, and the driving member brings the heating member into contact with the metal glass member. Can be performed by heating. As a result, the metallic glass member is quickly heated to the predetermined joining temperature in the supercooled liquid region, and the time required for heating from the glass transition temperature to the joining temperature can be minimized. Crystallization can be minimized. For this reason, a decrease in strength due to crystallization of the metallic glass member can be prevented.
【００１６】金属ガラス部材が過冷却液体域の接合温度
に加熱された後、他方の金属部材側に配置された押圧手
段により、金属部材と金属ガラス部材とを押圧成形し、
接合する。金属ガラス部材を押圧成形して接合した後、
加熱部材を駆動手段によって金属ガラス部材から退避さ
せることにより、速やかに金属ガラス部材を冷却するこ
とができるため、金属ガラス部材の結晶化を防止するこ
とができる。After the metal glass member is heated to the joining temperature of the supercooled liquid region, the metal member and the metal glass member are pressed and formed by pressing means disposed on the other metal member side,
Join. After pressing and joining metal glass members,
By retreating the heating member from the metallic glass member by the driving means, the metallic glass member can be cooled quickly, so that crystallization of the metallic glass member can be prevented.
【００１７】請求項３の発明では、接合される金属部材
の金属ガラス部材と接する面に凹凸部が形成されてい
る。即ち、金属ガラス部材と重ね合わせられる金属部材
の接合面の形状を、過冷却液体域に加熱して生じる金属
ガラス部材の粘性流動を利用して押圧により充填される
凹凸部とするものであり、これにより、機械的な締結作
用を行うことができる。このように、機械的な締結作用
を利用することにより、接合できる部材の材質選択を大
幅に広げることができる。According to the third aspect of the present invention, the metal member to be joined has an uneven portion on the surface in contact with the metal glass member. That is, the shape of the joining surface of the metal member to be superimposed on the metal glass member is to be an uneven portion filled by pressing utilizing the viscous flow of the metal glass member generated by heating the supercooled liquid region, Thereby, a mechanical fastening operation can be performed. As described above, by utilizing the mechanical fastening action, the selection of materials for the members that can be joined can be greatly expanded.
【００１８】請求項４の発明では、過冷却液体域の温度
域が異なる金属ガラス部材同士を接合している。過冷却
液体域の温度域が異なる金属ガラス部材同士を接合する
際、各金属ガラス部材を結晶化開始温度の順に重ね合わ
せ、結晶化開始温度が最も高い金属ガラス部材側に加熱
手段を配置する。加熱手段としては輻射加熱、高周波加
熱、抵抗加熱など公知の加熱手段が用いられる。そし
て、各部材の厚さおよび加熱速度、加熱雰囲気を適当に
調整することにより、加熱の温度勾配を生じさせ、各金
属ガラス部材を同時に過冷却液体域に加熱した後、最も
結晶化開始温度の低い金属ガラス部材側に配置された押
圧手段によって押圧することにより金属ガラス部材を接
合する。According to the fourth aspect of the invention, the metallic glass members having different temperature ranges of the supercooled liquid region are joined to each other. When joining metal glass members having different temperature ranges of the supercooled liquid region, the metal glass members are superimposed in the order of the crystallization start temperature, and the heating means is arranged on the side of the metal glass member having the highest crystallization start temperature. Known heating means such as radiation heating, high-frequency heating, and resistance heating are used as the heating means. Then, by appropriately adjusting the thickness, heating rate, and heating atmosphere of each member, a heating temperature gradient is generated, and after simultaneously heating each metallic glass member to the supercooled liquid region, the crystallization start temperature is the highest. The metallic glass members are joined by being pressed by a pressing means arranged on the lower metallic glass member side.
【００１９】[0019]
【発明の実施の形態】 （実施の形態１）図１及び図２は、本発明の実施の形態
１の接合に使用される装置を示し、固定治具４、４が左
右に離れた状態で真空チャンバー７内に配置されてい
る。固定治具４、４の対向する側の上面には段部４ａ、
４ａが形成されていると共に、それぞれの固定治具４、
４の上面には押え板３、３が重ねられるようになってい
る。固定治具４、４の段部４ａ、４ａには、重ね合わさ
れた板状の金属部材２、５の両端部が支持され、この支
持状態でネジ３ａ、３ａによって押え板３、３を固定す
ることにより、金属部材２、５を固定部材４、４及び押
さえ板３、３で挟持することができる。(Embodiment 1) FIGS. 1 and 2 show an apparatus used for bonding according to Embodiment 1 of the present invention, in which fixing jigs 4, 4 are separated from each other left and right. It is arranged in a vacuum chamber 7. On the upper surface on the opposite side of the fixing jigs 4, 4, a step 4a,
4a are formed, and each fixing jig 4,
Pressing plates 3 and 3 are arranged on the upper surface of 4. The stepped portions 4a, 4a of the fixing jigs 4, 4 support both ends of the superposed plate-shaped metal members 2, 5, and fix the holding plates 3, 3 by screws 3a, 3a in this supported state. Thus, the metal members 2 and 5 can be sandwiched between the fixing members 4 and 4 and the holding plates 3 and 3.
【００２０】上側の金属部材２の上方には、押圧手段と
しての押圧ポンチ１が配置されている。押圧ポンチ１
は、図示を省略したサーボモータとボールネジからなる
直動機構及びロードセルに接続されており、真空チャン
バー７の上部を貫通して垂下することにより金属部材２
の上方に臨んでいる。A pressing punch 1 as a pressing means is disposed above the upper metal member 2. Pressing punch 1
Is connected to a linear motion mechanism including a servomotor and a ball screw (not shown) and a load cell, and penetrates through the upper portion of the vacuum chamber 7 to hang down.
Facing upwards.
【００２１】これに対し、下側の金属部材５の下方に
は、加熱手段としての輻射ヒータ６が配置されている。
輻射ヒータ６は、金属部材５の下面に接触する熱電対８
を有したＰＩＤ温度調節器９に接続されており、熱電対
８とＰＩＤ温度調節器９とによって加熱温度が制御され
る。これにより、金属部材５の表面温度を所定の範囲に
制御することができる。On the other hand, below the lower metal member 5, a radiation heater 6 as heating means is disposed.
The radiant heater 6 includes a thermocouple 8 in contact with the lower surface of the metal member 5.
The heating temperature is controlled by the thermocouple 8 and the PID temperature controller 9. Thereby, the surface temperature of the metal member 5 can be controlled within a predetermined range.
【００２２】この実施の形態では、上側の金属部材２と
して、ガラス遷移温度（Ｔｇ）が４２０℃、結晶化開始
温度（Ｔｘ）が５０４℃、過冷却液体域（△Ｔｘ）が８
４℃のＺｒ系金属ガラスＺｒ55Ｃｕ30Ａｌ10Ｎｉ5 （添
字は原子％）が使用されている。以下、金属部材２を金
属ガラス部材２と記する。この金属ガラス部材２の寸法
は、３０×１５×１ｍｍの板状となっている。一方、下
側の金属部材５として、寸法３０×１５×２ｍｍの板状
のＡｌ合金Ａ２７０１が使用される。In this embodiment, the upper metal member 2 has a glass transition temperature (Tg) of 420 ° C., a crystallization start temperature (Tx) of 504 ° C., and a supercooled liquid region (ΔTx) of 8
4 ° C. Zr-based metallic glass Zr 55 Cu 30 Al 10 Ni 5 (subscript: atomic%) is used. Hereinafter, the metal member 2 is referred to as a metal glass member 2. The size of the metallic glass member 2 is a plate of 30 × 15 × 1 mm. On the other hand, as the lower metal member 5, a plate-shaped Al alloy A2701 having a size of 30 × 15 × 2 mm is used.
【００２３】図１に示すように、合金からなる金属部材
５を下にして、これらの部材２，５を重ね合わせ、固定
治具４，４の段部４ａ，４ａに載置する。そして、金属
ガラス部材２の上面を押え板３，３で押え、ネジ３ａ、
３ａを螺合させることにより、これらを挟持して固定す
る。そして、加熱時の各部材の酸化を防止するため、図
示しない排気装置により真空チャンバー７内の雰囲気を
１０-2Ｐａ程度の真空とする。As shown in FIG. 1, these members 2 and 5 are superposed on each other with the metal member 5 made of an alloy facing downward, and placed on the steps 4 a and 4 a of the fixing jigs 4 and 4. Then, the upper surface of the metallic glass member 2 is pressed by the holding plates 3 and 3, and the screws 3a and
By screwing 3a, these are pinched and fixed. Then, in order to prevent oxidation of each member at the time of heating, the atmosphere in the vacuum chamber 7 is evacuated to about 10 −2 Pa by an exhaust device (not shown).
【００２４】チャンバー７内が上述した真空度に達した
後、輻射ヒータ６により金属部材５を、平均加熱速度１
５℃／分で温度４７０℃まで加熱した。金属部材５の温
度が４７０℃±２℃に安定した後、押圧ポンチ１を下降
させ、重ね合わせた部材２、５を１００秒間、押圧す
る。この時、金属ガラス部材２の温度は過冷却液体域内
の４５０℃であった。After the inside of the chamber 7 reaches the above-mentioned degree of vacuum, the metal member 5 is heated by the radiation heater 6 at an average heating rate of 1 mm.
Heated to 470 ° C at 5 ° C / min. After the temperature of the metal member 5 is stabilized at 470 ° C. ± 2 ° C., the pressing punch 1 is lowered, and the stacked members 2 and 5 are pressed for 100 seconds. At this time, the temperature of the metallic glass member 2 was 450 ° C. in the supercooled liquid region.
【００２５】過冷却液体域に加熱された金属ガラス部材
２はニュートン粘性流動特性を示し、金属部材５も加熱
により軟化しているため、図２に示すように凹形状に変
形する。特に、金属ガラス部材２は、押圧ポンチ１の押
圧力と金属部材５の弾性力により圧縮変形し、押圧ポン
チ１との当接部を中心に金属金部材５に密着する。さら
に、金属ガラス部材２および金属部材５が変形すること
により、これらが当接している接触界面では、酸化膜な
どが寸断され新生面が露出する。この新生面が圧縮変形
で密着することにより、金属原子の相互の凝着力により
接合される。The metallic glass member 2 heated to the supercooled liquid region has a Newtonian viscous flow characteristic, and the metallic member 5 is also softened by heating, so that it is deformed into a concave shape as shown in FIG. In particular, the metal glass member 2 is compressed and deformed by the pressing force of the pressing punch 1 and the elastic force of the metal member 5, and is brought into close contact with the metal metal member 5 around the contact portion with the pressing punch 1. Furthermore, when the metallic glass member 2 and the metallic member 5 are deformed, an oxide film or the like is cut off at a contact interface where they are in contact, and a new surface is exposed. When this new surface comes into close contact by compression deformation, it is joined by mutual adhesion of metal atoms.
【００２６】本実施の形態の場合、ポンチストロークを
７ｍｍすなわち押圧ポンチ１を金属ガラス部材２と接触
した位置から７ｍｍ下降した位置で押圧力が一定となる
ようにロードセルで制御し、この状態で５０℃／分の初
期冷却速度で冷却後、真空チャンバー７から取り出し
た。金属ガラス部材２の結晶化率は２０％以下であり、
接合された部材の接合面の剪断強度は金属部材５の８０
％程度であった。In the case of the present embodiment, the punch stroke is controlled by a load cell so that the pressing force is constant at a position of 7 mm, that is, a position at which the pressing punch 1 is lowered by 7 mm from a position where the pressing punch 1 comes into contact with the metallic glass member 2. After cooling at an initial cooling rate of ° C./min, it was taken out of the vacuum chamber 7. The crystallization ratio of the metallic glass member 2 is 20% or less,
The shear strength of the joining surface of the joined members is 80
%.
【００２７】このように本実施の形態では、金属ガラス
自体を金属部材として、他方の金属部材と共に過冷却液
体域まで加熱後、短時間で押圧接合するため、金属ガラ
ス部材の結晶化を防止でき、金属部材の強固な接合が可
能となっている。As described above, in the present embodiment, since the metallic glass itself is used as the metallic member and the other metallic member is heated to the supercooled liquid region and then pressed and joined in a short time, the crystallization of the metallic glass member can be prevented. Thus, the metal member can be firmly joined.
【００２８】（実施の形態２）図３及び図４は、実施の
形態２に使用する装置を示し、図１及び図２と同一の要
素は同一の符号を付して対応させてある。この装置にお
いては、下側の金属部材１５の下方に、ＳＵＳ４２０Ｊ
２によってブロック状に成形された加熱体１２が加熱手
段として配置されている。加熱体１２は、ＰＩＤ温度調
節器９にそれぞれ接続されている抵抗加熱ヒータ１３及
び熱電対８を内蔵しており、熱電対８及びＰＩＤ温度調
節器９によって抵抗加熱ヒータ１３の温度を調整するこ
とにより、加熱体１２の温度が制御可能となっている。(Embodiment 2) FIGS. 3 and 4 show an apparatus used in Embodiment 2, and the same elements as those in FIGS. 1 and 2 are denoted by the same reference numerals and correspond to each other. In this device, SUS420J is provided below the lower metal member 15.
The heating element 12 formed into a block shape by the heating unit 2 is disposed as a heating unit. The heating element 12 has a built-in resistance heater 13 and a thermocouple 8 connected to the PID temperature controller 9, respectively. The temperature of the resistance heater 13 is adjusted by the thermocouple 8 and the PID temperature controller 9. Thereby, the temperature of the heating body 12 can be controlled.
【００２９】さらに、加熱体１２は、断熱シャフト１４
によって支持されている。断熱シャフト１４は、図示を
省略したサーボモータ及びボールネジからなる直動機構
に接続されて上下動し、この上下動によって加熱体１２
が上下動して金属部材１５に対して接近及び離反するこ
とができる。Further, the heating element 12 includes a heat insulating shaft 14.
Supported by The heat insulating shaft 14 is connected to a linear motion mechanism including a servomotor and a ball screw (not shown) and moves up and down.
Can move up and down to approach and separate from the metal member 15.
【００３０】この実施の形態では、重ね合わされる金属
部材１１、１５の双方を金属ガラスとするものであり、
下側の金属部材１５としては、ガラス遷移温度（Ｔｇ）
が４２０℃、結晶化開始温度（Ｔｘ）が５０４℃、過冷
却液体域（△Ｔｘ）が８４℃のＺｒ系金属ガラスＺｒ55
Ｃｕ30Ａｌ10Ｎｉ5 （添字は原子％）からなる３０×１
５×１ｍｍの寸法の板材が使用されている。又、上側の
金属部材１１としては、ガラス遷移温度（Ｔｇ）が３６
７℃、結晶化開始温度（Ｔｘ）が４６７℃、過冷却液体
域（△Ｔｘ）が１００℃のＺｒ系金属ガラスＺｒ65Ｃｕ
27.5Ａｌ7.5 （添字は原子％）からなる３０×１５×１
ｍｍの寸法の板材が使用されている。以下、金属部材１
１、１５を金属ガラス部材１１、１５と記する。In this embodiment, both the metal members 11 and 15 to be superposed are made of metallic glass.
As the lower metal member 15, the glass transition temperature (Tg)
Zr-based metallic glass Zr 55 having a temperature of 420 ° C., a crystallization start temperature (Tx) of 504 ° C., and a supercooled liquid region (ΔTx) of 84 ° C.
30 × 1 made of Cu 30 Al 10 Ni 5 (subscript is atomic%)
A plate having a size of 5 × 1 mm is used. The upper metal member 11 has a glass transition temperature (Tg) of 36.
Zr-based metallic glass Zr 65 Cu having a temperature of 7 ° C., a crystallization start temperature (Tx) of 467 ° C., and a supercooled liquid region (ΔTx) of 100 ° C.
30 × 15 × 1 made of 27.5 Al 7.5 (subscript is atomic%)
A plate having a size of mm is used. Hereinafter, metal member 1
Reference numerals 1 and 15 are referred to as metallic glass members 11 and 15.
【００３１】図３に示すように、これらの金属ガラス部
材１１、１５を重ね合わせて、固定治４、４の段部４
ａ、４ａに金属ガラス部材１５を下にして載置し、金属
ガラス部材１１の上面を押え板３、３で押え、ネジ３
ａ、３ａを螺合することにより固定治具４、４と押え板
３、３とによって金属ガラス部材１１、１５を挟持した
状態で固定する。そして、加熱時の各部材１１、１５の
酸化を防止するため、図示しない排気装置により、真空
チャンバー７内の雰囲気を１０-2Ｐａ程度の真空とし
た。As shown in FIG. 3, these metallic glass members 11 and 15 are overlapped and
a, 4a, the metallic glass member 15 is placed downward, and the upper surface of the metallic glass member 11 is
The metallic glass members 11 and 15 are clamped and fixed by the fixing jigs 4 and 4 and the holding plates 3 and 3 by screwing a and 3a. Then, in order to prevent the members 11 and 15 from being oxidized during heating, the atmosphere in the vacuum chamber 7 was evacuated to about 10 −2 Pa by an exhaust device (not shown).
【００３２】チャンバー７内が上述した真空度に達した
後、抵抗加熱ヒータ１３により４７０℃まで加熱された
加熱体１２を、断熱シャフト１４を直動機構で上昇させ
ることにより、下側の金属ガラス部材１５の下面に当接
させる。加熱体１２の当接により金属ガラス部材１５は
急速に過冷却液体域まで加熱されるが、加熱体１２と金
属ガラス部材１５との熱伝導抵抗により、金属ガラス部
材１５の温度は約４５０℃で安定する。After the inside of the chamber 7 reaches the above-mentioned degree of vacuum, the heating element 12 heated to 470 ° C. by the resistance heater 13 is raised by the linear motion mechanism of the heat insulating shaft 14, so that the lower metallic glass It is brought into contact with the lower surface of the member 15. The metallic glass member 15 is rapidly heated to the supercooled liquid region by the contact of the heating body 12, but the temperature of the metallic glass member 15 is about 450 ° C. due to the heat conduction resistance between the heating body 12 and the metallic glass member 15. Stabilize.
【００３３】さらに金属ガラス部材１５の上面に重ね合
わせた金属ガラス部材１１は、同じく金属ガラス部材１
５との熱伝導抵抗と、金属ガラス部材１５内に生じる熱
勾配により、約４３０℃で安定する。そして、各金属ガ
ラス部材１１，１５の温度が安定した後、押圧ポンチ１
を下降させ、重ね合わせた金属ガラス部材１１，１５を
押圧する。さらに、ロードセルにより押圧ポンチ１の押
圧力が一定となるように制御しながら、一定形状に重ね
た部材を成形できるように断熱シャフト１４を下降させ
る。Further, the metallic glass member 11 superposed on the upper surface of the metallic glass member 15
5 and a thermal gradient generated in the metallic glass member 15, the temperature is stabilized at about 430 ° C. After the temperatures of the metallic glass members 11 and 15 are stabilized, the pressing punch 1
Is lowered, and the superposed metallic glass members 11 and 15 are pressed. Further, while controlling the pressing force of the pressing punch 1 to be constant by the load cell, the heat insulating shaft 14 is lowered so that the members stacked in a predetermined shape can be formed.
【００３４】これにより過冷却液体域に加熱された金属
ガラス部材１５，１１は、図４に示すように凹形状に変
形する。この圧縮変形により押圧ポンチ１の当接部を中
心に、金属ガラス部材１５，１１が密着する。さらに、
重ね合わせた金属ガラス部材１１，１５が変形すること
により、これらが当接している接触界面では、酸化膜等
が寸断されて新生面が露出される。この新生面が圧縮変
形によって相互に密着することにより、金属原子の相互
の凝着力により接合される。Thus, the metallic glass members 15, 11 heated to the supercooled liquid region are deformed into a concave shape as shown in FIG. Due to the compression deformation, the metallic glass members 15 and 11 are brought into close contact with each other around the contact portion of the pressing punch 1. further,
When the superposed metallic glass members 11 and 15 are deformed, an oxide film or the like is cut off at the contact interface where they are in contact, and a new surface is exposed. The new surfaces come into close contact with each other by compressive deformation, and are joined by mutual adhesion of metal atoms.
【００３５】本実施の形態の場合、押圧圧力３０ＭＰａ
で、毎秒０．１ｍｍの速度で断熱シャフト１４を押圧ポ
ンチ１の押圧方向すなわち下方向に駆動しながら、１０
０秒間押圧後、５０℃／分の初期冷却速度で冷却後、真
空チャンバー７から取り出した。金属ガラス部材１５お
よび１１の結晶化率は２０％以下であり、接合された部
材の接合面の剪断強度は金属ガラス部材１５の母材の７
０％程度であった。In the case of this embodiment, the pressing pressure is 30 MPa
While driving the heat insulating shaft 14 at a speed of 0.1 mm per second in the pressing direction of the pressing punch 1, that is, in the downward direction,
After pressing for 0 second, the mixture was cooled at an initial cooling rate of 50 ° C./min, and then taken out of the vacuum chamber 7. The crystallization ratio of the metallic glass members 15 and 11 is not more than 20%, and the shear strength of the joining surface of the joined members is 7% of the base material of the metallic glass member 15.
It was about 0%.
【００３６】このような実施の形態では、押圧ポンチ１
と加熱体１２とにより、接合する部材に押圧力を加える
ため、金属ガラス部材同士の接合など、接合時の変形抵
抗が小さく、充分な押圧力を接合する部材に作用させる
ことができない場合に有効である。また、加熱体を金型
として使用することにより、接合した部材の両面を所定
の形状に成形することができるメリットがある。In such an embodiment, the pressing punch 1
Since the pressing force is applied to the members to be joined by the heating member 12 and the heating member 12, it is effective when the deformation resistance at the time of joining is small and sufficient pressing force cannot be applied to the members to be joined, such as when joining metallic glass members. It is. Further, by using the heating element as a mold, there is an advantage that both surfaces of the joined members can be formed into a predetermined shape.
【００３７】本実施の形態では、結晶化開始温度が異な
る２体の金属ガラス部材の接合について説明したが、３
体以上の結晶化開始温度が異なる金属ガラス部材を同様
にして接合することができる。例えば過冷却液体域の温
度領域が適度に異なるＺｒ系金属ガラスＺｒ55Ｃｕ30Ａ
ｌ10Ｎｉ5 （添字は原子％、ガラス遷移温度（Ｔｇ）４
２０℃、結晶化開始温度（Ｔｘ）５０４℃、過冷却液体
域（△Ｔｘ）８４℃）と、Ｚｒ65Ｃｕ27.5Ａｌ7.5 （添
字は原子％、ガラス遷移温度（Ｔｇ）３６７℃、結晶化
開始温度（Ｔｘ，４６７℃、過冷却液体域（△Ｔｘ）１
００℃）と、Ｐｄ系非晶質合金Ｐｄ40Ｃｕ30Ｎｉ10Ｐ20
（添字は原子％、ガラス遷移温度（Ｔｇ）３０２℃、結
晶化開始温度（Ｔｘ）３９７℃、過冷却液体域（△Ｔ
ｘ）９５℃とからなる金属ガラス部材も同様にして接合
できる。In this embodiment, the joining of two metallic glass members having different crystallization start temperatures has been described.
Metallic glass members having different crystallization initiation temperatures higher than the body can be similarly joined. For example, a Zr-based metallic glass Zr 55 Cu 30 A in which the temperature region of the supercooled liquid region is appropriately different.
l 10 Ni 5 (subscript is atomic%, glass transition temperature (Tg) 4
20 ° C., crystallization start temperature (Tx) 504 ° C., supercooled liquid region (ΔTx) 84 ° C.), Zr 65 Cu 27.5 Al 7.5 (subscripts are atomic%, glass transition temperature (Tg) 367 ° C., crystallization start) Temperature (Tx, 467 ° C, supercooled liquid area (△ Tx) 1
00 ° C.) and a Pd-based amorphous alloy Pd 40 Cu 30 Ni 10 P 20
(Subscripts are atomic%, glass transition temperature (Tg) 302 ° C., crystallization onset temperature (Tx) 397 ° C., supercooled liquid region (ΔT
x) A metallic glass member having a temperature of 95 ° C. can be similarly joined.
【００３８】（実施の形態３）図５及び図６は、実施の
形態３に使用される装置を示し、図３及び図４と同一の
装置となっている。この実施の形態では、金属部材１５
及び２０を接合するものであり、下側の金属部材１５と
しては、ガラス遷移温度（Ｔｇ）が４２０℃、結晶化開
始温度（Ｔｘ）が５０４℃、過冷却液体域（△Ｔｘ）が
８４℃のＺｒ系金属ガラスＺｒ55Ｃｕ30Ａｌ10Ｎｉ
5 （添字は原子％）からなる３０×１５×１ｍｍの寸法
の板材が使用されている（以下、金属ガラス部材と記す
る。）。また、上側の金属部材２０としては、寸法が３
０×１５×１ｍｍのＳＵＳ３０４からなるステンレス鋼
板材が使用されている。この金属部材２０における金属
ガラス部材１５と接する面には、幅０．５ｍｍ、深さ
０．５ｍｍの溝部２０ａが０．５ｍｍピッチで刻まれて
いる。(Embodiment 3) FIGS. 5 and 6 show an apparatus used in Embodiment 3, which is the same apparatus as FIGS. 3 and 4. FIG. In this embodiment, the metal member 15
And the lower metal member 15 has a glass transition temperature (Tg) of 420 ° C., a crystallization start temperature (Tx) of 504 ° C., and a supercooled liquid region (ΔTx) of 84 ° C. the Zr-based metallic glass Zr 55 Cu 30 Al 10 Ni
5 (subscript is atomic%) and a plate material of 30 × 15 × 1 mm is used (hereinafter referred to as a metallic glass member). The upper metal member 20 has a size of 3
A stainless steel plate made of SUS304 having a size of 0 × 15 × 1 mm is used. On the surface of the metal member 20 which is in contact with the metal glass member 15, grooves 20a having a width of 0.5 mm and a depth of 0.5 mm are formed at a pitch of 0.5 mm.
【００３９】これらの部材１５、２０を重ね合わせ、金
属ガラス部材１５を下にして固定治具４，４の段部４
ａ，４ａに載置する。そして、上側の金属部材２０の上
面を押え板３，３で押え、ネジ３ａ、３ａを螺合するこ
とにより、部材１５，２０を固定治具４，４と押え板
３，３とによって挟持した状態で固定する。そして、加
熱時の各部材１５、２０の酸化を防止するため、図示し
ない排気装置により真空チャンバー７内の雰囲気を１０
-2Ｐａ程度の真空とした。The members 15 and 20 are overlapped, and the metal glass member 15 is turned down, and the step portions 4 of the fixing jigs 4 and 4 are placed.
a, 4a. Then, the upper surfaces of the upper metal members 20 are pressed by the holding plates 3 and 3, and the screws 3a and 3a are screwed together, so that the members 15 and 20 are sandwiched between the fixing jigs 4 and 4 and the holding plates 3 and 3. Fix in state. Then, in order to prevent the members 15 and 20 from being oxidized during heating, the atmosphere in the vacuum chamber 7 is reduced to 10 by an exhaust device (not shown).
The vacuum was set to about -2 Pa.
【００４０】この真空度にチャンバー７内が達した後、
抵抗加熱ヒータ１３により４７０℃まで加熱された加熱
体１２を、断熱シャフト１４を直動機構で上昇させるこ
とにより、下側の金属ガラス部材１５の下面に当接させ
る。加熱体１２の当接により金属ガラス部材１５は急速
に過冷却体域まで加熱されるが、加熱体１２と金属ガラ
ス部材１５との熱伝導抵抗により、金属ガラス部材１５
の温度は約４５０℃で安定する。After the inside of the chamber 7 reaches this degree of vacuum,
The heating body 12 heated to 470 ° C. by the resistance heater 13 is brought into contact with the lower surface of the lower metallic glass member 15 by raising the heat insulating shaft 14 by a linear motion mechanism. The metallic glass member 15 is rapidly heated to the supercooled body region by the contact of the heating body 12, but the metallic glass member 15 is heated due to the heat conduction resistance between the heating body 12 and the metallic glass member 15.
Is stable at about 450 ° C.
【００４１】そして、金属ガラス部材１５の温度が安定
した後、押圧ポンチ１を下降させ、重ね合わせた部材２
０，１５を押圧する。さらに、押圧ポンチ１に接続され
たロードセルによって、押圧力が一定となるように押圧
ポンチ１を制御しながら、重ねた部材１５、２０を一定
形状に成形できるように断熱シャフト１４を下降させ
る。これにより過冷却液体域に加熱された金属ガラス部
材１５と、ステンレス鋼からなる金属部材２０は、図６
に示すように凹形状に変形する。After the temperature of the metallic glass member 15 is stabilized, the pressing punch 1 is lowered, and
Press 0,15. Further, while controlling the pressing punch 1 so that the pressing force is constant by the load cell connected to the pressing punch 1, the heat insulating shaft 14 is lowered so that the stacked members 15, 20 can be formed into a predetermined shape. As a result, the metallic glass member 15 heated to the supercooled liquid region and the metallic member 20 made of stainless steel are shown in FIG.
As shown in FIG.
【００４２】この圧縮変形により、押圧ポンチ１の当接
部を中心に、金属ガラス部材１５と、金属部材２０が密
着する。さらに、金属ガラス部材１５および金属部材２
０が変形することにより、金属ガラス部材１５の一部１
５ａが金属部材２０の溝部２０ａに入り込む。この入り
込みでは、機械的な締結作用により主に接合される。By this compressive deformation, the metallic glass member 15 and the metallic member 20 come into close contact with each other around the contact portion of the pressing punch 1. Further, the metallic glass member 15 and the metallic member 2
0 is deformed, so that part 1 of the metallic glass member 15
5a enters the groove 20a of the metal member 20. In this intrusion, they are mainly joined by a mechanical fastening action.
【００４３】本実施の形態の場合、５０ＭＰａの押圧圧
力で断熱シャフト１４を毎秒０．２ｍｍの速度で、押圧
ポンチ１の押圧方向すなわち下方向に駆動しながら６０
秒間押圧後、５０℃／分の初期冷却速度で冷却後、真空
チャンバー７から取り出した。金属ガラス部材１５の結
晶化率は２０％以下であり、接合された部材の接合面の
剪断強度はステンレス鋼部材２０の９５％程度であっ
た。In the case of the present embodiment, the heat insulating shaft 14 is driven at a speed of 0.2 mm per second at a pressing pressure of 50 MPa while being driven in the pressing direction of the pressing punch 1, that is, in the downward direction.
After pressing for 2 seconds, it was cooled at an initial cooling rate of 50 ° C./min, and then taken out of the vacuum chamber 7. The crystallization ratio of the metallic glass member 15 was 20% or less, and the shear strength of the joined surface of the joined members was about 95% of that of the stainless steel member 20.
【００４４】このような本実施の形態では、金属部材２
０に形成した溝部２０ａに金属ガラス部材１５が入り込
むことによる機械的な結合力によって、金属ガラス部材
１５と金属部材２０とが接合される。このため、金属ガ
ラスとの接合性の低い金属材料であっても接合できる。
従って、接合する材料選択の幅が広がる効果がある。In this embodiment, the metal member 2
The metallic glass member 15 and the metallic member 20 are joined by the mechanical coupling force caused by the metallic glass member 15 entering the groove 20a formed at zero. For this reason, it is possible to join even a metal material having a low joining property with the metallic glass.
Therefore, there is an effect that the range of selection of materials to be joined is widened.
【００４５】（実施の形態４）図７〜図１０は、実施の
形態４を示す。図７は、フェースを接合する前のゴルフ
クラブヘッドの正面図であり、６４チタン合金を鋳造お
よび機械加工により加工した金属部材である成形部材の
構造を示し、図８は、図７のＡ−Ａ断面図である。(Fourth Embodiment) FIGS. 7 to 10 show a fourth embodiment. FIG. 7 is a front view of the golf club head before the face is joined, and shows the structure of a molded member that is a metal member obtained by casting and machining a 64 titanium alloy. FIG. It is A sectional drawing.
【００４６】図７において、６４チタン合金製のゴルフ
クラブヘッド成形部材３０は、ロストワックス法により
鋳造された部材に、機械加工によってフェース取り付け
面３１と、溝部３２を機械加工した。図８に示すように
溝部３２は、断面が楔形状に加工されており、加工に用
いる異形フライスは、図７に示すように導入部３２ａか
らフェース取り付け面３１内部に導入し、機械加工を施
した。In FIG. 7, a golf club head molding member 30 made of a 64 titanium alloy is formed by machining a face mounting surface 31 and a groove 32 by machining a member cast by a lost wax method. As shown in FIG. 8, the groove 32 has a wedge-shaped cross section, and a deformed milling cutter used for processing is introduced into the face mounting surface 31 from the introduction portion 32a as shown in FIG. did.
【００４７】図９及び図１０は、この実施の形態に使用
される装置であり、図３及び図４と同一の要素は同一の
符号により対応させてある。図９における金属ガラス部
材３４は、ゴルフクラブヘッドのフェースを構成するも
のであり、図７に示すゴルフクラブヘッド成形部材３０
のフェース取り付け面３１に対応するような厚さ３ｍｍ
の板状に機械加工されている。この金属ガラス部材３４
の材質しては、ガラス遷移温度（Ｔｇ）が４２０℃、結
晶化開始温度（Ｔｘ）が５０４℃、過冷却液体域（△Ｔ
ｘ）が８４℃であるＺｒ系金属ガラスＺｒ55Ｃｕ30Ａｌ
10Ｎｉ5 が使用されている。FIGS. 9 and 10 show an apparatus used in this embodiment, and the same elements as those in FIGS. 3 and 4 are assigned the same reference numerals. The metal glass member 34 in FIG. 9 constitutes the face of the golf club head, and the golf club head forming member 30 shown in FIG.
3mm thick corresponding to the face mounting surface 31 of
It is machined into a plate shape. This metallic glass member 34
The glass transition temperature (Tg) is 420 ° C., the crystallization start temperature (Tx) is 504 ° C., and the supercooled liquid region (ΔT
x) Zr-based metallic glass Zr 55 Cu 30 Al having a temperature of 84 ° C.
10 Ni 5 is used.
【００４８】フェース取り付け面３１を下にして金属ガ
ラス部材３４に当接させる成形部材３０の上方すなわち
金属部材側には、図示しないサーボモータとボールネジ
とから直動機構およびロードセルに接続された押圧手段
としての押圧ポンチ１が配置されている。押圧ポンチ１
の下端には、成形部材３０を保持するための固定治具３
５が取り付けられている。A pressing means connected to a linear motion mechanism and a load cell from a servo motor and a ball screw (not shown) is provided above the forming member 30 which is brought into contact with the metal glass member 34 with the face mounting surface 31 down. The pressing punch 1 is arranged. Pressing punch 1
A fixing jig 3 for holding the molded member 30 is provided at the lower end of the
5 is attached.
【００４９】金属ガラス部材３４の下方には、抵抗加熱
ヒータ１３および熱電対８を内蔵した加熱手段としての
ＳＵＳ４２０Ｊ２製の加熱体３３が配置されている。加
熱体３３の上面には、成形部材３０のフェース取り付け
面３１の形状に対応した溝状の受け部３６が形成されて
いると共に、金属ガラス部材３４を保持するための複数
のプランジャ３７，３７が設けられている。プランジャ
３７内には図示しない弾性部材としてのスプリングが設
けられており、常にプランジャ３７の先端に上向きの力
が作用するようになっている。Below the metallic glass member 34, a heater 33 made of SUS420J2 is disposed as heating means incorporating the resistance heater 13 and the thermocouple 8. On the upper surface of the heating body 33, a groove-shaped receiving portion 36 corresponding to the shape of the face mounting surface 31 of the molding member 30 is formed, and a plurality of plungers 37 for holding the metal glass member 34 are provided. Is provided. A spring (not shown) as an elastic member is provided in the plunger 37 so that an upward force always acts on the tip of the plunger 37.
【００５０】なお、抵抗加熱ヒータ１３および熱電対８
が、ＰＩＤ温度調節器９にそれぞれ接続されることによ
り、加熱体３３の温度制御が可能となっている。又、加
熱体３３は、図示しないサーボモータとボールネジとか
らなる直動機構に接続されたセラミック製の断熱シャフ
ト１４に保持されることにより、上下動可能となってい
る。図９の状態では、加熱時の各部材の酸化を防止する
ために、図示しない排気装置により真空チャンバー７内
の雰囲気を１０-2Ｐａ程度の真空とした。The resistance heater 13 and the thermocouple 8
Are connected to the PID temperature controller 9, respectively, so that the temperature of the heating body 33 can be controlled. The heating body 33 can be moved up and down by being held by a ceramic heat insulating shaft 14 connected to a linear motion mechanism composed of a servo motor and a ball screw (not shown). In the state of FIG. 9, the atmosphere in the vacuum chamber 7 is evacuated to about 10 −2 Pa by an exhaust device (not shown) in order to prevent oxidation of each member during heating.
【００５１】この真空度にチャンバー７内が達した後、
抵抗加熱ヒータ１３により４７０℃まで加熱された加熱
体３３を、断熱シャフト１４を直動機構で上昇させるこ
とにより、金属ガラス部材３４の下面に当接させる。こ
のとき、プランジャ３７内のスプリングが圧縮され、加
熱体３３の受け部３６が金属ガラス部材３４の下面に当
接する。After the inside of the chamber 7 reaches this degree of vacuum,
The heating body 33 heated to 470 ° C. by the resistance heater 13 is brought into contact with the lower surface of the metallic glass member 34 by raising the heat insulating shaft 14 by a linear motion mechanism. At this time, the spring in the plunger 37 is compressed, and the receiving portion 36 of the heating element 33 contacts the lower surface of the metallic glass member 34.
【００５２】加熱体３３の当接により、金属ガラス部材
３４は急速に過冷却体域まで加熱されるが、加熱体３３
と金属ガラス部材３４との熱伝導抵抗により、金属ガラ
ス部材３４の温度は約４５０℃で安定する。そして、金
属ガラス部材３４の温度が安定した後、押圧ポンチ１を
下降させ、固定治具３５を介して成形部材３０を過冷却
体域に加熱されている金属ガラス部材３４に押圧する。The metal glass member 34 is rapidly heated to the supercooled body region by the contact of the heating body 33.
The temperature of the metal glass member 34 is stabilized at about 450 ° C. due to the heat conduction resistance between the metal glass member 34 and the metal glass member 34. Then, after the temperature of the metal glass member 34 is stabilized, the pressing punch 1 is lowered, and the forming member 30 is pressed via the fixing jig 35 against the metal glass member 34 heated in the supercooled body region.
【００５３】この圧縮変形により、金属ガラス部材３４
に当接した成形部材３０のフェース部３１が、金属ガラ
ス部材３４に押圧されて成形され、溝部３２に金属ガラ
ス部材３４が噛み合うことにより、強固な機械的結合が
行われる。この時、加熱体３３の受け部３６は、金属ガ
ラス部材３４が押圧されて成形される際にフェース取り
付け面３１からはみ出すことを防止すると共に、フェー
スである金属ガラス部材３４のフェイス面３８の周囲の
外観を同時に成形する。By this compression deformation, the metallic glass member 34
The face portion 31 of the molding member 30 that is in contact with the metal member is pressed and molded by the metallic glass member 34, and the metallic glass member 34 is engaged with the groove portion 32, whereby a strong mechanical connection is performed. At this time, the receiving portion 36 of the heating body 33 prevents the metal glass member 34 from protruding from the face mounting surface 31 when the metal glass member 34 is pressed and formed, and also surrounds the face surface 38 of the metal glass member 34 as a face. Molding at the same time.
【００５４】フェイス面３８が成形部材３０と接合され
て成形された後、断熱シャフト１４を下方に駆動して、
フェイス面３８から加熱体３３を分離し、金属ガラス部
材３４を急速に冷却する。After the face surface 38 is joined to the molding member 30 and molded, the heat insulating shaft 14 is driven downward to
The heating body 33 is separated from the face surface 38, and the metallic glass member 34 is rapidly cooled.
【００５５】本実施の形態の場合、フェース取り付け面
３１での換算押圧力を５０ＭＰａとして２００秒間押圧
後、５０℃／分の初期冷却速度で１００℃まで冷却後、
真空チャンバー７から取り出した。金属ガラス部材３４
の結晶化率は２０％以下であった。In the case of the present embodiment, pressing is performed for 200 seconds at a converted pressing force of 50 MPa on the face mounting surface 31, and after cooling to 100 ° C. at an initial cooling rate of 50 ° C./min,
It was taken out of the vacuum chamber 7. Metal glass member 34
Was 20% or less.
【００５６】このような本実施の形態では、成形された
比較的複雑な形状を有する部材と、金属ガラス部材との
接合を行うことができ、ゴルフクラブヘッドのような中
空の部品を製造することができる。In the present embodiment, a molded member having a relatively complicated shape can be joined to a metallic glass member, and a hollow component such as a golf club head can be manufactured. Can be.
【００５７】以上の実施の形態から、本発明の金属部材
の接合方法では、金属ガラスを使用した接合手段を用い
ることにより、金属ガラスの高い強度を保ったまま、金
属ガラス部材同士又は金属ガラス部材と他の金属部材と
の接合を行うことができ、しかも、強度に優れ、形状精
度の良好な接合金属部材を成形することができる。さら
には、金属ガラスが有している高耐食性、高反発力、高
硬度などの機能を他の金属部材に付加することが可能の
ため、各種の機能性材料を製造できる。なお、金属ガラ
スとしては、実施の形態以外の他の金属ガラス、例えば
Ｌａ55Ａｌ25Ｎｉ20（ガラス遷移点（Ｔｇ）＝２００
℃、結晶化開始温度（Ｔｘ）＝２７５℃）、その他のも
のを用いることができる。According to the above embodiments, in the method for joining metal members of the present invention, by using the joining means using metallic glass, it is possible to maintain the high strength of metallic glass while maintaining the high strength of metallic glass members or metallic glass members. And other metal members can be joined, and a joined metal member having excellent strength and good shape accuracy can be formed. Furthermore, since various functions, such as high corrosion resistance, high repulsion, and high hardness, of the metal glass can be added to other metal members, various functional materials can be manufactured. In addition, as the metallic glass, other metallic glass than the embodiment, for example, La 55 Al 25 Ni 20 (glass transition point (Tg) = 200)
° C, crystallization start temperature (Tx) = 275 ° C), and others.
【００５８】[0058]
【発明の効果】以上説明したように、請求項１の発明に
よれば、金属ガラス部材を加熱して押圧し、その後、冷
却するため、金属ガラス部材の結晶化を防止でき、強固
な金属部材の接合を行うことができる。As described above, according to the first aspect of the present invention, since the metallic glass member is heated and pressed, and then cooled, the crystallization of the metallic glass member can be prevented, and the strong metallic member can be prevented. Can be joined.
【００５９】請求項２の発明によれば、加熱手段を接触
させて加熱するため、金属ガラス部材の加熱を短時間で
行うことができる。According to the second aspect of the present invention, since the heating means is brought into contact with and heated, the metallic glass member can be heated in a short time.
【００６０】請求項３の発明によれば、凹凸部を介して
接合するため、物理的な接合ができ、接合する部材の材
質の選択の自由度が増大する。According to the third aspect of the present invention, since the bonding is performed via the uneven portions, physical bonding can be performed, and the degree of freedom in selecting the material of the members to be bonded is increased.
【００６１】請求項４の発明によれば、金属ガラス部材
同士の接合であっても、金属ガラス部材の結晶化を防止
し、強固な金属部材の接合を行うことができる。According to the fourth aspect of the present invention, even when joining metallic glass members, crystallization of the metallic glass members can be prevented, and strong joining of metallic members can be performed.
【図１】本発明の実施の形態１の接合前の状態を示す断
面図である。FIG. 1 is a cross-sectional view showing a state before bonding according to a first embodiment of the present invention.
【図２】実施の形態１の押圧時の状態を示す断面図であ
る。FIG. 2 is a sectional view showing a state at the time of pressing in the first embodiment.
【図３】実施の形態２の接合前の状態を示す断面図であ
る。FIG. 3 is a sectional view showing a state before bonding according to a second embodiment.
【図４】実施の形態２の押圧時の状態を示す断面図であ
る。FIG. 4 is a sectional view showing a state at the time of pressing according to a second embodiment.
【図５】実施の形態３の接合前の状態を示す断面図であ
る。FIG. 5 is a sectional view showing a state before bonding according to a third embodiment.
【図６】実施の形態３の押圧時の状態を示す断面図であ
る。FIG. 6 is a sectional view showing a state at the time of pressing in the third embodiment.
【図７】実施の形態４によって製造される成形部品の断
面図である。FIG. 7 is a sectional view of a molded part manufactured according to a fourth embodiment.
【図８】図７のＡ−Ａ線断面図である。FIG. 8 is a sectional view taken along line AA of FIG. 7;
【図９】実施の形態４の接合前の状態を示す断面図であ
る。FIG. 9 is a cross-sectional view showing a state before bonding according to a fourth embodiment.
【図１０】実施の形態４の押圧時の状態を示す断面図で
ある。FIG. 10 is a cross-sectional view illustrating a state of the fourth embodiment when pressed.
１ 押圧ポンチ ２ 金属ガラス部材 ３ 押さえ板 ４ 固定治具 ５ 金属部材 ６ 輻射ヒータ ７ 真空チャンバー ８ 熱電対 ９ ＰＩＤ温度調節器 REFERENCE SIGNS LIST 1 pressing punch 2 metal glass member 3 holding plate 4 fixing jig 5 metal member 6 radiant heater 7 vacuum chamber 8 thermocouple 9 PID temperature controller
Claims (4)
非晶質合金からなる金属ガラス部材である二体以上の金
属部材を重ね合わせる工程と、 重ね合わせた金属部材を前記金属ガラス部材の過冷却液
体域まで加熱する工程と、 重ね合わせた金属部材の内、少なくとも金属ガラス部材
を押圧手段により押圧して金属部材を相互に接合する工
程と、 接合した金属部材を冷却する工程と、 を有することを特徴とする金属部材の接合方法。1. A step of superposing two or more metal members, at least one of which is a metal glass member made of an amorphous alloy having a supercooled liquid region, and supercooling the superimposed metal member on the metal glass member A step of heating to a liquid region, a step of pressing at least a metal glass member of the superposed metal members by pressing means to join the metal members to each other, and a step of cooling the joined metal members. A method for joining metal members.
属部材の接合方法において、 過冷却液体域を有する非晶質合金からなる金属ガラス部
材である一方の金属部材を他方の金属部材と重ね合わせ
る工程と、 金属ガラス部材である一方の金属部材に所定の温度に加
熱された加熱手段を接触させることにより、重ね合わせ
た金属部材を前記金属ガラス部材の過冷却液体域まで加
熱する工程と、 他方の金属部材側から押圧手段により押圧して金属部材
を相互に接合する工程と、 接合した金属部材を冷却する工程と、 を有することを特徴とする金属部材の接合方法。2. A method for joining at least two metal members, the method comprising joining one metal member, which is a metal glass member made of an amorphous alloy having a supercooled liquid region, with the other metal member. Heating the superposed metal member to a supercooled liquid region of the metal glass member by bringing a heating means heated to a predetermined temperature into contact with one of the metal members being a metal glass member; 2. A method for joining metal members, comprising: a step of pressing the metal members from each other by pressing the metal members from the metal member side; and a step of cooling the joined metal members.
は、金属ガラス部材と接する側に凹凸部が形成されてい
ることを特徴とする請求項１または２記載の金属部材の
接合方法。3. The method for joining metal members according to claim 1, wherein the metal member joined to the metal glass member has an uneven portion formed on a side in contact with the metal glass member.
二体の非晶質合金からなる金属ガラス部材を結晶化開始
温度順に重ね合わせる工程と、 最も高い結晶化開始温度を有する金属ガラス部材側から
順に金属ガラス部材の過冷却液体域まで加熱する工程
と、 最も低い結晶化開始温度を有する金属ガラス部材側から
押圧手段によって押圧し、重ね合わせた金属ガラス部材
を接合する工程と、 接合した金属部材を冷却する工程と、を有することを特
徴とする金属部材の接合方法。4. A step of superposing metallic glass members made of at least two amorphous alloys having different supercooled liquid regions in the order of the crystallization start temperature, in order from the metallic glass member having the highest crystallization start temperature. A step of heating the metal glass member to the supercooled liquid region, a step of pressing the metal glass member having the lowest crystallization start temperature from the side of the metal glass member by pressing means, and joining the superposed metal glass members; And a step of cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18487497A JPH1133746A (en) | 1997-07-10 | 1997-07-10 | Joining method of metallic member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18487497A JPH1133746A (en) | 1997-07-10 | 1997-07-10 | Joining method of metallic member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1133746A true JPH1133746A (en) | 1999-02-09 |
Family
ID=16160832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18487497A Withdrawn JPH1133746A (en) | 1997-07-10 | 1997-07-10 | Joining method of metallic member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1133746A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008214704A (en) * | 2007-03-06 | 2008-09-18 | Tohoku Univ | Amorphous metal or metal glass joined body |
| JP2009276703A (en) * | 2008-05-19 | 2009-11-26 | Canon Inc | Optical element and method of manufacturing the same |
| WO2010110405A1 (en) * | 2009-03-25 | 2010-09-30 | 国立大学法人 熊本大学 | Method of designing welding method, method of welding and weld joint |
| EP2479309A1 (en) | 2004-03-25 | 2012-07-25 | Topy Kogyo Kabushiki Kaisha | Metallic glass laminates, production methods and applications thereof |
-
1997
- 1997-07-10 JP JP18487497A patent/JPH1133746A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2479309A1 (en) | 2004-03-25 | 2012-07-25 | Topy Kogyo Kabushiki Kaisha | Metallic glass laminates, production methods and applications thereof |
| JP2008214704A (en) * | 2007-03-06 | 2008-09-18 | Tohoku Univ | Amorphous metal or metal glass joined body |
| JP2009276703A (en) * | 2008-05-19 | 2009-11-26 | Canon Inc | Optical element and method of manufacturing the same |
| WO2010110405A1 (en) * | 2009-03-25 | 2010-09-30 | 国立大学法人 熊本大学 | Method of designing welding method, method of welding and weld joint |
| US8944307B2 (en) | 2009-03-25 | 2015-02-03 | National University Corporation Kumamoto University | Method of welding method, welding method and welded joint body |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20041005 |