JPH11326285A - Eddy-current inspection apparatus for fuel cladding tube - Google Patents
Eddy-current inspection apparatus for fuel cladding tubeInfo
- Publication number
- JPH11326285A JPH11326285A JP10125578A JP12557898A JPH11326285A JP H11326285 A JPH11326285 A JP H11326285A JP 10125578 A JP10125578 A JP 10125578A JP 12557898 A JP12557898 A JP 12557898A JP H11326285 A JPH11326285 A JP H11326285A
- Authority
- JP
- Japan
- Prior art keywords
- cladding tube
- fuel cladding
- sensor
- fuel
- eddy current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Monitoring And Testing Of Nuclear Reactors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、非破壊検査法の一
つである渦電流試験に係わり、原子炉や原子力発電用の
燃料貯蔵プール内のような水中において、遠隔操作によ
る探傷試験や測定試験を安定かつ精度良く行うための燃
料被覆管の渦電流検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an eddy current test which is one of non-destructive inspection methods, and performs a remote control flaw detection test and measurement in water such as a fuel storage pool for a nuclear reactor or a nuclear power plant. The present invention relates to an eddy current inspection device for a fuel cladding tube for performing a test stably and accurately.
【０００２】[0002]
【従来の技術】非破壊検査法の一つである渦電流試験法
は、材料の表面にできた傷の検出の他に、材料表面の塗
膜厚さ測定や材料のフェライト量の測定等に広く利用さ
れている。該渦電流試験法の原理は、渦電流探傷器から
の交流電流で励磁されたコイルを電気の導体である試験
材料に近づけると、コイルが形成する交番磁界によって
試験材料に渦電流が発生する。この渦電流によって形成
される新たな磁界はコイルの磁界と干渉して、その結果
コイルのインピーダンスを変化させるものである。2. Description of the Related Art An eddy current test method, which is one of the nondestructive inspection methods, is used not only for detecting scratches formed on the surface of a material, but also for measuring the thickness of a coating film on the surface of a material and the amount of ferrite in a material. Widely used. The principle of the eddy current test method is that when a coil excited by an alternating current from an eddy current flaw detector is brought close to a test material which is an electric conductor, an eddy current is generated in the test material by an alternating magnetic field formed by the coil. The new magnetic field formed by this eddy current interferes with the magnetic field of the coil, thereby changing the impedance of the coil.
【０００３】試験材料に表面傷がある場合や、試験コイ
ルと試験材料との間隔が変化することによって渦電流が
変化し、その影響でコイルのインピーダンスが変化す
る。従ってこのコイルのインピーダンス変化を測定すれ
ば試験材料傷を検出したり、コイルと試験材料との間隙
を測定することが出来る。[0003] When the test material has a surface flaw or when the distance between the test coil and the test material changes, the eddy current changes, and as a result, the impedance of the coil changes. Therefore, if the impedance change of the coil is measured, it is possible to detect a flaw in the test material or to measure a gap between the coil and the test material.
【０００４】[0004]
【発明が解決しようとする課題】原子炉燃料部材への渦
電流検査の適用は、従来から原子力発電用の燃料貯蔵プ
ール内において、渦電流試験法を用いたチャンネルボッ
クスや燃料被覆管の酸化皮膜厚み測定が行われてきた
が、試験コイルを内蔵する検査用センサを安定して操作
することが難しく、短時間での精度の高い試験，検査が
行われていなかった。The application of the eddy current inspection to a fuel member of a nuclear reactor has been conventionally applied to an oxide film of a channel box or a fuel cladding tube using an eddy current test method in a fuel storage pool for nuclear power generation. Although thickness measurement has been performed, it is difficult to stably operate an inspection sensor having a built-in test coil, and a highly accurate test and inspection in a short time have not been performed.
【０００５】そこで上記の問題点に鑑み、本発明の目的
は、下記のような点を実現する燃料被覆管の渦電流検査
装置を提供するものである。SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an apparatus for inspecting an eddy current of a fuel cladding tube which realizes the following points.
【０００６】１）水中に沈潜させた検査装置を、遠隔操
作により燃料被覆管の決められた位置に安定して固定で
きる機構。1) A mechanism capable of stably fixing an inspection device submerged in water to a predetermined position of a fuel cladding tube by remote control.
【０００７】２）検査用センサを燃料被覆管に押し当て
る際、検査用センサと試験面を直角に保つ機構の構造。2) A structure of a mechanism for keeping the test sensor and the test surface at a right angle when the test sensor is pressed against the fuel cladding tube.
【０００８】３）測定精度を確保する上で、測定の前後
で検査用センサの零校正の方法。3) A method of zero calibration of the inspection sensor before and after the measurement in order to ensure the measurement accuracy.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するた
め、本発明による燃料被覆管の渦電流検査装置は、特許
請求の範囲の各請求項に記載の特徴を有する。特に、独
立項としての請求項１に係る発明の燃料被覆管の渦電流
検査装置は、検査用センサを水中に沈潜させて、原子炉
燃料部材の１つである燃料被覆管の材料検査、あるいは
表面に生成される酸化皮膜厚さ等の測定を行う燃料被覆
管の渦電流検査装置において、該渦電流検査装置に該燃
料被覆管を保持させる上下一対のチャック部と、該検査
用センサを前記燃料被覆管の中心にかつ垂直に押し当て
るセンサホルダ部と、前記検査用センサの零校正用試験
片部と、から構成されることを特徴とするものである。In order to achieve the above object, an apparatus for inspecting an eddy current of a fuel cladding tube according to the present invention has the features described in the claims. In particular, the fuel cladding eddy current inspection device of the invention according to claim 1 as an independent claim is to submerge an inspection sensor in water to inspect a material of a fuel cladding tube, which is one of the reactor fuel members, or In a fuel cladding eddy current inspection device for measuring the thickness of an oxide film formed on the surface, a pair of upper and lower chucks for holding the fuel cladding in the eddy current inspection device, and the inspection sensor It is characterized by comprising a sensor holder part pressed vertically against the center of the fuel cladding tube, and a test piece part for zero calibration of the inspection sensor.
【００１０】[0010]
【作用】以下、各課題を解決するための手段がもたらす
作用を、各手段毎に説明する。The function provided by the means for solving each problem will be described below for each means.
【００１１】１）本発明では検査装置を燃料被覆管に近
づけて、チャックの爪の間に燃料被覆管を導き、エア圧
により上下のチャックを同時に閉じて検査装置を固定す
ることができるようになる。1) In the present invention, the inspection device is brought close to the fuel cladding tube, the fuel cladding tube is guided between the claws of the chuck, and the upper and lower chucks are simultaneously closed by air pressure so that the inspection device can be fixed. Become.
【００１２】２）センサホルダは、後側のコイルバネと
スライドロッドで保持されたことで自由度が得られ、エ
アシリンダを押し出したとき、ガイドが燃料被覆管に沿
って接触し、検査用センサは常に試験面に垂直に当たる
ようになる。2) The sensor holder has a degree of freedom by being held by the rear coil spring and the slide rod. When the air cylinder is pushed out, the guide comes into contact with the fuel cladding tube, and the inspection sensor is used. It will always be perpendicular to the test surface.
【００１３】３）エア圧によりロータリアクチュエータ
を正回転させることで、校正用試験片は検査用センサの
上部から前面に移動し、検査用センサの押し当てが出来
るようになる。逆回転することで元の位置に戻る。この
機構により、水中の実際に試験体の測定を行う位置で、
検査装置の校正が可能となる。3) By rotating the rotary actuator forward by air pressure, the calibration test piece moves from the upper portion of the inspection sensor to the front surface, and the inspection sensor can be pressed. Return to the original position by reverse rotation. With this mechanism, at the position where the test specimen is actually measured in the water,
The inspection device can be calibrated.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施例を主に図１
乃至図４を使用して説明する。図１は原子力発電用の燃
料貯蔵プール内において、原子炉燃料部材の１つである
燃料被覆管１の表面に生成する、酸化皮膜厚さを測定す
るための渦電流検査装置の鳥敢図で、渦電流検査装置を
燃料被覆管１に固定するために、コの字型のシャシ２の
上下にチャック３とチャック３の開閉動作を行うエアシ
リンダ４を取り付けてある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described mainly with reference to FIG.
This will be described with reference to FIGS. FIG. 1 is a bird's eye view of an eddy current inspection device for measuring the thickness of an oxide film formed on the surface of a fuel cladding tube 1 which is one of the reactor fuel members in a fuel storage pool for nuclear power generation. In order to fix the eddy current inspection device to the fuel cladding tube 1, a chuck 3 and an air cylinder 4 for opening and closing the chuck 3 are mounted above and below a U-shaped chassis 2.
【００１５】コの字型のシャシ２の中央部には、検査用
センサ５を押し出す為のエアシリンダ６に取り付けて配
置している。また、シャシ２の上部には、ロータリアク
チュエータ７のベーンシャフト８に固定した校正用試験
片取付台９に校正用試験片１０を取り付けて、回転でき
るように配置している。At the center of the U-shaped chassis 2, an air cylinder 6 for pushing out the inspection sensor 5 is attached and arranged. On the upper part of the chassis 2, a calibration test piece 10 is mounted on a calibration test piece mounting table 9 fixed to the vane shaft 8 of the rotary actuator 7, and is arranged so as to be rotatable.
【００１６】図２は検査用センサ５の保持構造を示す。
センサホルダ１１に内挿した検査用センサ５は、後ろの
コイルバネ１２により常に前方に押し付けられており、
またセンサホルダ１１の外側には燃料被覆管１に接触す
るガイド１４が取り付けてある。FIG. 2 shows a structure for holding the inspection sensor 5.
The inspection sensor 5 inserted in the sensor holder 11 is always pressed forward by the rear coil spring 12,
A guide 14 that contacts the fuel cladding tube 1 is mounted outside the sensor holder 11.
【００１７】ガイド１４は前後にスライド出来るように
なっていて、常時コイルバネ１５で前方に押されてい
る。さらにセンサホルダ１１は支持板１３に固定されて
いる。これらの部材は、取付板１６に固定された４本の
スライドロッド１７とコイルバネ１８により保持されて
おり、スライドロッド１７の直径を支持板１３の穴径よ
り小さくすることで自由度を有している。The guide 14 can be slid forward and backward, and is constantly pushed forward by a coil spring 15. Further, the sensor holder 11 is fixed to the support plate 13. These members are held by four slide rods 17 fixed to the mounting plate 16 and a coil spring 18, and have a degree of freedom by making the diameter of the slide rod 17 smaller than the hole diameter of the support plate 13. I have.
【００１８】エアシリンダ６にエアを供給するとロッド
１９が突き出されて、最初にガイド１４が燃料被覆管１
に沿って接触して、検査用センサ５と燃料被覆管１の位
置決めを行う。次にセンサホルダ１１が前方にスライド
して検査用センサ５が燃料被覆管１に接触し、最後にガ
イド１４の後端が支持板１３にあたり、コイルバネ１８
が収縮することで検査用センサ５の押し付けが完了す
る。When air is supplied to the air cylinder 6, the rod 19 is protruded, and first, the guide 14 is connected to the fuel cladding tube 1.
And the positioning of the inspection sensor 5 and the fuel cladding tube 1 is performed. Next, the sensor holder 11 slides forward, and the inspection sensor 5 comes into contact with the fuel cladding tube 1. Finally, the rear end of the guide 14 hits the support plate 13, and
Is contracted, the pressing of the inspection sensor 5 is completed.
【００１９】図３は燃料被覆管１をつかむチャック３の
構造を示す。チャック３の動作は、図３（ａ）のように
渦電流検査装置を燃料被覆管１に近づけて、つめ２０の
間に燃料被覆管１を挿入する。次に、図３（ｂ）のよう
に燃料被覆管１がガイド２１に接触したとき、エアシリ
ンダ４のロッド２５を突き出し、ジョイント２３に連結
したリンク２２を開いて、燃料被覆管１をつかむ。FIG. 3 shows the structure of the chuck 3 for holding the fuel cladding tube 1. The operation of the chuck 3 is such that the eddy current inspection device is brought close to the fuel cladding tube 1 and the fuel cladding tube 1 is inserted between the claws 20 as shown in FIG. Next, when the fuel cladding tube 1 comes into contact with the guide 21 as shown in FIG. 3B, the rod 25 of the air cylinder 4 protrudes, the link 22 connected to the joint 23 is opened, and the fuel cladding tube 1 is grasped.
【００２０】渦電流検査装置は図４に示したように、渦
電流検査装置に接続した汎用ポール２６によって燃料貯
蔵プールの中に降ろし、高さ位置を測定部位に合わせ
る。汎用ポール２６の上部は汎用ポール保持台２７によ
って支持されている。渦電流信号線２８は汎用ポール２
６に沿って取り付けられ、渦電流探傷器２９に接続され
ている。As shown in FIG. 4, the eddy current inspection device is lowered into the fuel storage pool by the general-purpose pole 26 connected to the eddy current inspection device, and the height position is adjusted to the measurement site. The upper part of the general-purpose pole 26 is supported by a general-purpose pole holding stand 27. The eddy current signal line 28 is a general-purpose pole 2
6 and connected to an eddy current flaw detector 29.
【００２１】測定記録は、渦電流探傷器２９に接続した
記録計３０に記録される。また渦電流検査装置の各動作
部は全てエア駆動としているため、エア操作ユニット３
２でエアコンプレッサ３３から送られる高圧エアを切換
え、６本のエアホース３１を通して各動作部を操作す
る。The measurement record is recorded on a recorder 30 connected to the eddy current flaw detector 29. Also, since all the operating parts of the eddy current inspection device are driven by air, the air operation unit 3
In 2, the high-pressure air sent from the air compressor 33 is switched, and each operation unit is operated through the six air hoses 31.
【００２２】本渦電流検査装置を使った燃料被覆管１の
表面酸化皮膜厚さ測定は、その前後に校正用試験片１０
を用いて零校正が行われる。零校正は、ロータリアクチ
ュエータ７を１８０°正回転することで、校正用試験片
１０を検査用センサ５の前面に回転移動し、チャック３
でつかんだ後、検査用センサ５を押し出して、校正用試
験片１０に押し当てて行う。零校正の後は、逆に検査用
センサ５の引き戻し、チャック３を開いて、ロータリア
クチュエータ７を逆回転して、校正用試験片１０を元の
位置に戻す。The measurement of the surface oxide film thickness of the fuel cladding tube 1 using the eddy current inspection apparatus is performed before and after the measurement.
Is used to perform zero calibration. In the zero calibration, the calibration test piece 10 is rotated to the front of the inspection sensor 5 by rotating the rotary actuator 7 forward by 180 °.
After that, the inspection sensor 5 is pushed out and pressed against the calibration test piece 10. After the zero calibration, the inspection sensor 5 is pulled back, the chuck 3 is opened, the rotary actuator 7 is rotated in the reverse direction, and the calibration test piece 10 is returned to the original position.
【００２３】実際の燃料被覆管１の酸化皮膜厚さ測定
は、検査用センサ５のリフトオフ信号を利用した方法
で、渦電流検査装置を吊り下げた汎用ポール２６を上部
で支える汎用ポール保持台２７を操作して、渦電流検査
装置を燃料集合体３４に近づけ、燃料被覆管１をチャッ
クして、渦電流検査装置自体を固定し、燃料被覆管１に
検査用センサ５を押し当てて実施する。The actual measurement of the thickness of the oxide film of the fuel cladding tube 1 is performed by a method using a lift-off signal of the inspection sensor 5, and a general-purpose pole holding table 27 supporting a general-purpose pole 26 suspended from an eddy current inspection device at an upper portion thereof. Is operated to bring the eddy current inspection device close to the fuel assembly 34, chuck the fuel cladding tube 1, fix the eddy current inspection device itself, and press the inspection sensor 5 against the fuel cladding tube 1. .
【００２４】[0024]
【発明の効果】１）本発明のように渦電流検査装置を構
成すれば、水中にて遠隔操作で行う燃料被覆管の表面酸
化皮膜厚さ測定等を、高速で、かつ高い精度で行うこと
が出来るようになる。According to the present invention, when the eddy current inspection apparatus is configured as in the present invention, the measurement of the thickness of the surface oxide film of the fuel cladding tube, which is performed remotely in water, can be performed at high speed and with high accuracy. Can be done.
【００２５】２）検査用センサを常に垂直に押し当てる
ことが出来ることで、疑似指示が発生せずに安定した測
定が可能となり、良い精度を確保することが出来る。2) Since the inspection sensor can always be pressed vertically, stable measurement can be performed without generating a pseudo instruction, and good accuracy can be secured.
【００２６】３）水中の実際の測定雰囲気で遠隔操作に
より零校正を容易に行えることで、測定精度の向上及
び、測定時間の短縮が図れる。3) Since zero calibration can be easily performed by remote control in an actual measurement atmosphere in water, measurement accuracy can be improved and measurement time can be shortened.
【図１】本発明による燃料被覆管の渦電流検査装置の鳥
敢図。FIG. 1 is a bird's-eye view of a fuel cladding tube eddy current inspection device according to the present invention.
【図２】検査用センサの保持構造図。FIG. 2 is a view showing a holding structure of an inspection sensor.
【図３】チャック部の構造図。FIG. 3 is a structural view of a chuck unit.
【図４】渦電流検査装置のシステム構成図。FIG. 4 is a system configuration diagram of an eddy current inspection device.
１…燃料被覆管 ２…シャシ ３…チャック ４…エアシリン
ダ ５…検査用センサ ６…エアシリン
ダ ７…ロータリアクチュエータ ８…ベーンシャ
フト ９…校正用試験片取付台 １０…校正用試
験片 １１…センサホルダ １２…コイルバ
ネ １３…支持板 １４…ガイド １５…コイルバネ １６…取付板 １７…スライドロッド １８…コイルバ
ネ １９…ロッド ２０…つめ ２１…ガイド ２２…リンク ２３…ジョイント ２４…押え板 ２５…ロッド ２６…汎用ポー
ル ２７…汎用ポール保持台 ２８…渦電流信
号線 ２９…渦電流探傷器 ３０…記録計 ３１…エアホース ３２…エア操作
ユニット ３３…エアコンプレッサ ３４…燃料集合
体DESCRIPTION OF SYMBOLS 1 ... Fuel cladding tube 2 ... Chassis 3 ... Chuck 4 ... Air cylinder 5 ... Inspection sensor 6 ... Air cylinder 7 ... Rotary actuator 8 ... Vane shaft 9 ... Calibration test piece mounting base 10 ... Calibration test piece 11 ... Sensor holder DESCRIPTION OF SYMBOLS 12 ... Coil spring 13 ... Support plate 14 ... Guide 15 ... Coil spring 16 ... Mounting plate 17 ... Slide rod 18 ... Coil spring 19 ... Rod 20 ... Pawl 21 ... Guide 22 ... Link 23 ... Joint 24 ... Holding plate 25 ... Rod 26 ... General purpose pole 27 ... General-purpose pole holder 28 ... Eddy current signal line 29 ... Eddy current flaw detector 30 ... Recorder 31 ... Air hose 32 ... Air operation unit 33 ... Air compressor 34 ... Fuel assembly
───────────────────────────────────────────────────── フロントページの続き (72)発明者 久保 利雄 茨城県日立市幸町三丁目１番１号 株式会 社日立製作所日立工場内 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Toshio Kubo 3-1-1, Sakaimachi, Hitachi City, Ibaraki Prefecture Inside Hitachi, Ltd. Hitachi Plant
Claims (4)
炉燃料部材の１つである燃料被覆管の材料検査、あるい
は表面に生成される酸化皮膜厚さ等の測定を行う燃料被
覆管の渦電流検査装置において、 該渦電流検査装置に該燃料被覆管を保持させる上下一対
のチャック部と、該検査用センサを前記燃料被覆管の中
心にかつ垂直に押し当てるセンサホルダ部と、前記検査
用センサの零校正用試験片部と、から構成されることを
特徴とする燃料被覆管の渦電流検査装置。An inspection sensor is submerged in water to inspect a material of a fuel cladding tube, which is one of the reactor fuel members, or to measure a thickness of an oxide film formed on a surface of the fuel cladding tube. An eddy current inspection device, a pair of upper and lower chuck portions for holding the fuel cladding tube in the eddy current inspection device, a sensor holder portion for vertically pressing the inspection sensor against the center of the fuel cladding tube, and And a test piece for zero calibration of a fuel sensor.
ドに連結され、前記燃料被覆管の把持動作をエア駆動で
実施することを特徴とする請求項１に記載の燃料被覆管
の渦電流検査装置。2. The fuel cell cladding tube eddy current inspection device according to claim 1, wherein the chuck portion is connected to a rod of an air cylinder, and performs the gripping operation of the fuel cladding tube by air drive. .
後方のコイルバネとスライドロッドで保持され、これら
全体をエアシリンダに接続して、押し当て動作をエア駆
動で実施することを特徴とする請求項１に記載の燃料被
覆管の渦電流検査装置。3. The sensor holder, wherein the sensor holder is held by a rear coil spring and a slide rod, and the entirety of the sensor holder is connected to an air cylinder to perform a pressing operation by air drive. 2. The eddy current inspection device for a fuel cladding tube according to 1.
しており、校正時に前記検査用センサの前面に移動可能
に配設されたことを特徴とする請求項１に記載の燃料被
覆管の渦電流検査装置。4. The fuel according to claim 1, wherein the test piece for zero calibration has a rotation mechanism and is movably disposed on the front surface of the sensor for inspection during calibration. Eddy current inspection device for cladding tubes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12557898A JP3378500B2 (en) | 1998-05-08 | 1998-05-08 | Eddy current inspection system for fuel cladding tubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12557898A JP3378500B2 (en) | 1998-05-08 | 1998-05-08 | Eddy current inspection system for fuel cladding tubes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11326285A true JPH11326285A (en) | 1999-11-26 |
| JP3378500B2 JP3378500B2 (en) | 2003-02-17 |
Family
ID=14913661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12557898A Expired - Lifetime JP3378500B2 (en) | 1998-05-08 | 1998-05-08 | Eddy current inspection system for fuel cladding tubes |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3378500B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232985A (en) * | 2007-03-23 | 2008-10-02 | Nuclear Fuel Ind Ltd | Device and method for discriminating fuel rod cladding pipe material |
| JP2010091403A (en) * | 2008-10-08 | 2010-04-22 | Nuclear Fuel Ind Ltd | Device for measuring thickness of oxide film of fuel rod |
| JP2010145233A (en) * | 2008-12-18 | 2010-07-01 | Global Nuclear Fuel-Japan Co Ltd | Oxide film thickness measuring method |
| JP2011247664A (en) * | 2010-05-25 | 2011-12-08 | Jtekt Corp | Defect detection device of working surface of workpiece |
| JP2014163901A (en) * | 2013-02-27 | 2014-09-08 | Mitsubishi Heavy Ind Ltd | Inspection method and inspection device |
-
1998
- 1998-05-08 JP JP12557898A patent/JP3378500B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232985A (en) * | 2007-03-23 | 2008-10-02 | Nuclear Fuel Ind Ltd | Device and method for discriminating fuel rod cladding pipe material |
| JP2010091403A (en) * | 2008-10-08 | 2010-04-22 | Nuclear Fuel Ind Ltd | Device for measuring thickness of oxide film of fuel rod |
| JP2010145233A (en) * | 2008-12-18 | 2010-07-01 | Global Nuclear Fuel-Japan Co Ltd | Oxide film thickness measuring method |
| JP2011247664A (en) * | 2010-05-25 | 2011-12-08 | Jtekt Corp | Defect detection device of working surface of workpiece |
| JP2014163901A (en) * | 2013-02-27 | 2014-09-08 | Mitsubishi Heavy Ind Ltd | Inspection method and inspection device |
| US9793016B2 (en) | 2013-02-27 | 2017-10-17 | Mitsubishi Heavy Industries, Ltd. | Inspection method and inspection device |
| US10726963B2 (en) | 2013-02-27 | 2020-07-28 | Mitsubishi Heavy Industries, Ltd. | Inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3378500B2 (en) | 2003-02-17 |
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