JPH11313475A - Linear motor - Google Patents
Linear motorInfo
- Publication number
- JPH11313475A JPH11313475A JP13462698A JP13462698A JPH11313475A JP H11313475 A JPH11313475 A JP H11313475A JP 13462698 A JP13462698 A JP 13462698A JP 13462698 A JP13462698 A JP 13462698A JP H11313475 A JPH11313475 A JP H11313475A
- Authority
- JP
- Japan
- Prior art keywords
- field
- armature
- core
- armature core
- cores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Linear Motors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、コギング低減を追
求した直線運動を行うリニアモータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor that performs a linear motion in order to reduce cogging.
【０００２】[0002]
【従来の技術】従来、工作機械や半導体製造装置などの
分野で精密送りとして用いられると共に、直線運動を行
うリニアモータは図６のようになっている。図におい
て、１はリニアモータ、６はリニアモータ１の可動子、
７はリニアモータ１の固定子、３は磁束を通す平板状の
電機子鉄心、２は電機子鉄心３の長手方向に沿って外周
に巻装された電機子コイル、５は電機子鉄心３の長手方
向の両側に空隙を介して直交するように対向配置された
平滑形の界磁用磁石で、永久磁石で構成されている。４
は界磁用磁石５を固着した磁束を通す平滑形の界磁鉄
心、８は電機子鉄心３の上面に配設されたテーブルであ
る。このようなリニアモータ１は、テーブル８を搭載し
た可動子６が固定子７の長手方向に沿って直線移動す
る。また、図７は図６を矢視Ｈ方向から見た図である
が、リニアモータのコギング低減を計る方法として界磁
用磁石５を斜めに貼り付ける（スキュー）方策をとった
り、あるいは整列した鉄心の両端に補極の鉄心を配置
し、界磁用磁石の端効果を小さくする方策をとってい
た。2. Description of the Related Art Conventionally, a linear motor which is used as a precision feed in a field of a machine tool or a semiconductor manufacturing apparatus and performs a linear motion is as shown in FIG. In the figure, 1 is a linear motor, 6 is a mover of the linear motor 1,
Reference numeral 7 denotes a stator of the linear motor 1, 3 denotes a plate-shaped armature core through which magnetic flux passes, 2 denotes an armature coil wound around the outer circumference along the longitudinal direction of the armature core 3, and 5 denotes an armature core 3 It is a smooth field magnet which is disposed opposite to each other in the longitudinal direction at right angles to each other with a gap therebetween, and is constituted by a permanent magnet. 4
Reference numeral 8 denotes a smooth field iron core through which the magnetic flux to which the field magnet 5 is fixed passes, and 8 denotes a table arranged on the upper surface of the armature iron core 3. In such a linear motor 1, the mover 6 on which the table 8 is mounted moves linearly along the longitudinal direction of the stator 7. FIG. 7 is a view of FIG. 6 as viewed from the direction of arrow H. As a method of reducing cogging of the linear motor, a method of skewing the field magnet 5 (skew) or an aligned core is used. In this case, the cores of the auxiliary poles are arranged at both ends of the magnet to reduce the end effect of the field magnet.
【０００３】[0003]
【発明が解決しようとする課題】ところが、従来技術で
は、界磁用磁石にスキューを施したり、補極の鉄心を配
置する方法でもコギングが多少残り、その結果コギング
発生に伴って起こる速度変動の問題がある。 このような
リニアモータを、例えば工作機械の刃物台を搭載したテ
ーブルの駆動に使用した場合、リニアモータのコギング
が被加工物の加工精度に悪影響を与えていた。そこで、
本発明はコギングを小さくすることができ、速度変動を
起こすことのないリニアモータを提供することを目的と
する。However, in the prior art, some cogging remains even in the method of skewing the field magnet or arranging the iron core of the auxiliary pole, and as a result, the speed fluctuation caused by the occurrence of cogging is reduced. There's a problem. When such a linear motor is used, for example, for driving a table on which a tool rest of a machine tool is mounted, cogging of the linear motor adversely affects the processing accuracy of a workpiece. Therefore,
An object of the present invention is to provide a linear motor that can reduce cogging and does not cause speed fluctuation.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、請求項１に記載の本発明は、磁束を通す平板状の電
機子鉄心と、前記電機子鉄心の長手方向に沿って外周に
巻装された電機子コイルと、前記電機子鉄心の長手方向
の両側に空隙を介して直交するように対向配置された平
滑形の界磁用磁石と、前記界磁用磁石の前記電機子鉄心
との反対側の表面に固着された磁束を通す平滑形の界磁
鉄心と、前記電機子鉄心または前記界磁鉄心の何れかの
上面に配設されたテーブルとを備え、前記電機子鉄心と
前記界磁用磁石とを相対的に走行するように配置したリ
ニアモータにおいて、前記対向するそれぞれの界磁用磁
石を、前記界磁鉄心の長手方向に向かって相対的にずら
して配設したものである。また、請求項２に記載の本発
明は、磁束を通す平板状の電機子鉄心と、前記電機子鉄
心の長手方向に沿って外周に巻装された電機子コイル
と、前記電機子鉄心の長手方向の両側に空隙を介して直
交するように対向配置された平滑形の界磁用磁石と、前
記界磁用磁石の前記電機子鉄心との反対側の表面に固着
された磁束を通す平滑形の界磁鉄心と、前記電機子鉄心
または前記界磁鉄心の何れかの上面に配設されたテーブ
ルとを備え、前記電機子鉄心と前記界磁用磁石とを相対
的に走行するように配置したリニアモータにおいて、前
記電機子鉄心の長手方向の形状を、前記界磁鉄心の長手
方向に向かって相対的に偏心させたものである。また、
請求項３に記載の本発明は、磁束を通す平滑形の界磁鉄
心と、前記界磁鉄心の両側に長手方向に沿って固着され
た平滑形の界磁用磁石と、前記界磁用磁石と空隙を介し
て直交するように対向配置された磁束を通す平板状の電
機子鉄心と、前記電機子鉄心の長手方向に沿って外周に
巻装された電機子コイルと、前記電機子鉄心または前記
界磁鉄心の何れかの上面に配設されたテーブルとを備
え、前記電機子鉄心と前記界磁用磁石とを相対的に走行
するように配置したリニアモータにおいて、前記対向す
るそれぞれの界磁用磁石または前記対向するそれぞれの
電機子鉄心を、前記界磁鉄心の長手方向に沿って相対的
にずらして配設したものである。上記手段により、テー
ブルの移動方向に沿って、２つのコギング発生部であ
る、それぞれ対向する界磁用磁石または電機子鉄心の配
置位置が相対的にずれているため、相殺効果が生まれ、
その結果としてコギングは小さくなる。In order to solve the above-mentioned problems, the present invention according to the first aspect of the present invention provides a flat armature core through which a magnetic flux passes, and an outer circumference along the longitudinal direction of the armature core. Mounted armature coil, a smooth field magnet that is disposed opposite to each other in the longitudinal direction of the armature core so as to be orthogonal to each other with a gap therebetween, and the armature core of the field magnet. A field iron core of a smooth type that passes a magnetic flux fixed to the opposite surface of the armature core, and a table disposed on the upper surface of either the armature iron core or the field iron core, and the armature iron core and the In a linear motor arranged so that a field magnet and a field magnet run relatively to each other, the opposed field magnets are arranged relatively shifted in a longitudinal direction of the field core. is there. Further, the present invention according to claim 2 provides a flat armature core through which magnetic flux passes, an armature coil wound around the outer circumference along a longitudinal direction of the armature core, and a longitudinal armature core. And a smooth field magnet which is disposed opposite to each other so as to be orthogonal to each other with an air gap therebetween on both sides of the direction, and a magnetic flux fixed to a surface of the field magnet opposite to the armature iron core. And a table disposed on an upper surface of either the armature core or the field iron core, and the armature core and the field magnet are arranged to travel relatively. In the linear motor described above, the shape of the armature core in the longitudinal direction is relatively eccentric toward the longitudinal direction of the field core. Also,
The present invention according to claim 3, wherein a smooth field iron core that passes magnetic flux, a smooth field magnet fixed along both sides of the field iron along the longitudinal direction, and the field magnet And a plate-shaped armature core that passes magnetic flux that is disposed so as to be orthogonal to each other with a gap therebetween, an armature coil wound around the outer circumference along the longitudinal direction of the armature core, and the armature core or A linear motor having a table disposed on one of the upper surfaces of the field iron cores and arranged so that the armature iron core and the field magnet run relatively to each other. The magnets for magnets or the respective armature cores opposed to each other are arranged relatively displaced along the longitudinal direction of the field cores. By the above-described means, since the arrangement positions of the opposing field magnets or the armature iron cores, which are the two cogging generators, are relatively shifted along the moving direction of the table, a canceling effect is generated,
As a result, cogging is reduced.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図１は、本発明の第１の実施例を示すリ
ニアモータで、（ａ）は、リニアモータの斜視図で、
（ｂ）はリニアモータのテーブルを取り外した状態を上
面から見た図である。図において、従来と同じ構成要素
については同じ符号を付してその説明を省略し、異なる
点のみ説明する。本発明が従来と異なる構成は、以下の
とおりである。すなわち、電機子鉄心３と空隙を介して
それぞれ対向配置された界磁用磁石５が、界磁鉄心４の
長手方向に向かって相対的にずらして配設してある。こ
こで、界磁用磁石５のずれ量をδとしている。次に動作
を説明する。リニアモータにおいて、固定子の内側に空
隙を介して対向配置された可動子を固定子の長手方向に
沿って直線移動させると それぞれ対向する界磁用磁石
の配置位置のずれにより、それぞれの側で発生するコギ
ングが相殺され、その結果、可動子は移動方向に速度変
動を起こすことなく、一定の速度で移動する。次に、本
発明の第２の実施例を図２に示す。電機子鉄心３１にお
ける界磁鉄心４に対向する方向を軸とする断面を、その
断面の軸線方向の任意の位置において界磁鉄心４の長手
方向に相対的にずれるような形状にし、電機子鉄心３１
を曲げて配置してある。ここで、電機子鉄心３１のずれ
量をδとしている。動作については、第１の実施例と同
じであるため省略する。さらに、本発明の第３、第４の
実施例を図３、図４に示す。すなわち、第１、第２の実
施例との基本的な構成の違いは、リニアモータの可動子
６は、界磁鉄心４１の両側面に界磁用磁石５ａ、５ｂを
貼着して構成し、また、固定子７として、可動子６の長
手方向の両側に空隙を介して電機子鉄心３２を設け、電
機子鉄心３２の外周に電機子コイル２を巻装して構成し
た点である。ここで３３は電機子鉄心３２を固定する固
定プレートである。このような構成の下での特徴は、図
３で示されるそれぞれ対向する電機子鉄心３２、または
図４で示されるそれぞれ対向する界磁用磁石５ａ、５ｂ
を、可動子６の長手方向に相対的にずらして配設してあ
る点である。ここで電機子鉄心３２のずれ量、界磁用磁
石５ａ、５ｂのずれ量をδとしている。また、動作につ
いては、第１、第2 の実施例と同様なので省略する。以
上は、可動子をなす電機子鉄心の両側に空隙を介し対向
させて設けた界磁用磁石、あるいは界磁用磁石の両側に
空隙を介し対向させて設けた電機子鉄心を相対的にずら
すなどして配置させた例であるが、その他の実施例とし
て、フラット形のリニアモータに見られるような片面だ
けに電機子鉄心３４、界磁鉄心４２、または界磁用磁石
５ａ、５ｂを配置させる構造に適用しても構わない。こ
の構造に本発明を盛り込んだ例を図５に示す。この構造
でも、それぞれ対向する界磁用磁石５ａ、５ｂの配置を
相対的にずらしたり，電機子コイル２を巻装した２列の
電機子鉄心３４の配置を相対的にずらしたりすること
で、同様なコギング低減効果が得られる。ここで、ずれ
量をδとしている。したがって、リニアモータの２つの
コギング発生部である、相対向する界磁用磁石または電
機子鉄心の配置位置を界磁鉄心の長手方向に相対的にず
らして配置したので、コギングの小さいリニアモータを
実現でき、速度変動の小さい動作が可能となる。なお、
本発明の界磁用磁石または電機子鉄心を相対的にずらす
構成において、マグネットそれぞれにスキューをつけて
も良く、これによりさらにコギング低減を図ることも可
能である。また、実施例では界磁用磁石として永久磁石
を用いたが、永久磁石の代わりにコイルを使用した電磁
石を用いるようにしても良い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a linear motor according to a first embodiment of the present invention. FIG. 1A is a perspective view of the linear motor.
(B) is the figure which looked at the state which removed the table of the linear motor from the upper surface. In the drawings, the same components as those in the related art are denoted by the same reference numerals, and description thereof will be omitted. Only different points will be described. The configuration in which the present invention is different from the conventional one is as follows. In other words, the field magnets 5 that are respectively opposed to the armature core 3 via the air gap are disposed relatively shifted in the longitudinal direction of the field iron core 4. Here, the shift amount of the field magnet 5 is set to δ. Next, the operation will be described. In the linear motor, when the mover, which is disposed inside the stator and faces through the air gap, is linearly moved along the longitudinal direction of the stator, the position of the opposing field magnets is shifted by each side. The generated cogging is canceled, and as a result, the mover moves at a constant speed without causing speed fluctuation in the moving direction. Next, a second embodiment of the present invention is shown in FIG. The cross section of the armature core 31 with the direction facing the field core 4 as an axis is shaped so as to be relatively displaced in the longitudinal direction of the field core 4 at an arbitrary position in the axial direction of the cross section. 31
Is bent. Here, the shift amount of the armature core 31 is δ. The operation is the same as in the first embodiment, and a description thereof will be omitted. FIGS. 3 and 4 show a third and a fourth embodiment of the present invention. That is, the basic configuration difference from the first and second embodiments is that the mover 6 of the linear motor is configured by attaching the field magnets 5a and 5b to both side surfaces of the field core 41. Further, an armature core 32 is provided as a stator 7 on both sides in the longitudinal direction of the mover 6 via a gap, and the armature coil 2 is wound around the outer periphery of the armature core 32. Here, 33 is a fixing plate for fixing the armature core 32. The feature under such a configuration is that the opposing armature cores 32 shown in FIG. 3 or the opposing field magnets 5a and 5b shown in FIG.
Are relatively displaced in the longitudinal direction of the mover 6. Here, the shift amount of the armature core 32 and the shift amount of the field magnets 5a and 5b are denoted by δ. The operation is the same as in the first and second embodiments, and a description thereof will be omitted. Above, the field magnet provided opposite to both sides of the armature core forming the mover via the gap, or the armature core provided opposite to both sides of the field magnet via the gap is relatively shifted. However, as another embodiment, the armature core 34, the field core 42, or the field magnets 5a and 5b are arranged only on one side as seen in a flat linear motor. The present invention may be applied to a structure that causes the above. FIG. 5 shows an example in which the present invention is incorporated in this structure. Also in this structure, the arrangement of the opposing field magnets 5a and 5b is relatively shifted, and the arrangement of the two rows of armature cores 34 around which the armature coils 2 are wound is relatively shifted. A similar cogging reduction effect can be obtained. Here, the shift amount is set to δ. Therefore, since the arrangement positions of the opposing field magnets or the armature cores, which are the two cogging generators of the linear motor, are relatively shifted in the longitudinal direction of the field core, a linear motor with small cogging can be used. The operation can be realized, and an operation with small speed fluctuation can be realized. In addition,
In the configuration of the present invention in which the field magnet or the armature core is relatively shifted, each magnet may be skewed, thereby further reducing cogging. In the embodiment, the permanent magnet is used as the field magnet. However, an electromagnet using a coil may be used instead of the permanent magnet.
【０００６】[0006]
【発明の効果】以上述べたように、本発明によれば、リ
ニアモータにおける対向するそれぞれの界磁用磁石また
は電機子鉄心を、界磁鉄心の長手方向に相対的にずらし
て配設した構造にしたので、コギングが小さいリニアモ
ータを実現することができる。その結果、速度変動の小
さい動作が可能となり、精密送り等の用途に適用できる
というメリットがある。As described above, according to the present invention, the structure in which the opposing field magnets or armature cores in the linear motor are disposed relatively displaced in the longitudinal direction of the field cores. Therefore, a linear motor with small cogging can be realized. As a result, there is an advantage that an operation with a small speed fluctuation can be performed and the present invention can be applied to an application such as precision feeding.
【図１】本発明の第１の実施例を示すリニアモータ、
（ａ）は、リニアモータの斜視図、（ｂ）はリニアモー
タのテーブルを取り外した状態を上面から見た図であ
る。FIG. 1 is a linear motor showing a first embodiment of the present invention;
FIG. 2A is a perspective view of a linear motor, and FIG. 2B is a view of the linear motor with a table removed, as viewed from above.
【図２】本発明の第２の実施例を示すリニアモータであ
って、上面から見た図である。FIG. 2 is a top view of a linear motor according to a second embodiment of the present invention.
【図３】本発明の第３の実施例を示すリニアモータであ
って、上面から見た図である。FIG. 3 is a top view of a linear motor according to a third embodiment of the present invention.
【図４】本発明の第４の実施例を示すリニアモータであ
って、上面から見た図である。FIG. 4 is a top view of a linear motor according to a fourth embodiment of the present invention.
【図５】本発明のその他の実施例を示すリニアモータの
斜視図である。FIG. 5 is a perspective view of a linear motor showing another embodiment of the present invention.
【図６】従来技術を示すリニアモータの斜視図である。FIG. 6 is a perspective view of a linear motor showing a conventional technique.
【図７】図６の矢視Ｈ方向から見た図である。FIG. 7 is a view as seen from the direction of arrow H in FIG. 6;
１ リニアモータ ２ 電機子コイル ３、３１、３２ 電機子鉄心 ４、４１ 界磁鉄心 ５、５ａ、５ｂ 界磁用磁石 ６ 可動子 ７ 固定子 ８ テーブル DESCRIPTION OF SYMBOLS 1 Linear motor 2 Armature coil 3, 31, 32 Armature iron core 4, 41 Field iron core 5, 5a, 5b Field magnet 6 Mover 7 Stator 8 Table
───────────────────────────────────────────────────── フロントページの続き (72)発明者 久恒 正希 福岡県北九州市八幡西区黒崎城石２番１号 株式会社安川電機内 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masaki Hisatsune 2-1, Kurosaki Castle Stone, Yawatanishi-ku, Kitakyushu-shi, Fukuoka Inside Yaskawa Electric Corporation
Claims (3)
機子鉄心の長手方向に沿って外周に巻装された電機子コ
イルと、前記電機子鉄心の長手方向の両側に空隙を介し
て直交するように対向配置された平滑形の界磁用磁石
と、前記界磁用磁石の前記電機子鉄心との反対側の表面
に固着された磁束を通す平滑形の界磁鉄心と、前記電機
子鉄心または前記界磁鉄心の何れかの上面に配設された
テーブルとを備え、前記電機子鉄心と前記界磁用磁石と
を相対的に走行するように配置したリニアモータにおい
て、 前記対向するそれぞれの界磁用磁石を、前記界磁鉄心の
長手方向に向かって相対的にずらして配設したことを特
徴とするリニアモータ。1. An armature core having a flat plate shape through which a magnetic flux passes, an armature coil wound around the outer circumference along the longitudinal direction of the armature core, and a gap on both sides of the armature core in the longitudinal direction. A field magnet of a smooth type, which is disposed so as to be orthogonal and orthogonal, and a field magnet of a smooth type that passes a magnetic flux fixed to a surface of the field magnet opposite to the armature core; A linear motor having an armature core or a table disposed on an upper surface of any of the field cores, wherein the armature core and the field magnet are arranged to run relatively to each other; Wherein the field magnets are arranged so as to be shifted relative to each other in the longitudinal direction of the field core.
機子鉄心の長手方向に沿って外周に巻装された電機子コ
イルと、前記電機子鉄心の長手方向の両側に空隙を介し
て直交するように対向配置された平滑形の界磁用磁石
と、前記界磁用磁石の前記電機子鉄心との反対側の表面
に固着された磁束を通す平滑形の界磁鉄心と、前記電機
子鉄心または前記界磁鉄心の何れかの上面に配設された
テーブルとを備え、前記電機子鉄心と前記界磁用磁石と
を相対的に走行するように配置したリニアモータにおい
て、 前記電機子鉄心の長手方向の形状を、前記界磁鉄心の長
手方向に向かって相対的に偏心させたことを特徴とする
リニアモータ。2. An armature core having a flat plate shape through which a magnetic flux passes, an armature coil wound around the outer circumference along a longitudinal direction of the armature core, and a gap provided on both sides in a longitudinal direction of the armature core. A field magnet of a smooth type, which is disposed so as to be orthogonal and orthogonal, and a field magnet of a smooth type that passes a magnetic flux fixed to a surface of the field magnet opposite to the armature core; A linear motor comprising: an armature core or a table disposed on an upper surface of any of the field cores, wherein the armature core and the field magnet are arranged to run relatively to each other. A linear motor, wherein a shape of a child core in a longitudinal direction is relatively eccentric toward a longitudinal direction of the field core.
鉄心の両側に長手方向に沿って固着された平滑形の界磁
用磁石と、前記界磁用磁石と空隙を介して直交するよう
に対向配置された磁束を通す平板状の電機子鉄心と、前
記電機子鉄心の長手方向に沿って外周に巻装された電機
子コイルと、前記電機子鉄心または前記界磁鉄心の何れ
かの上面に配設されたテーブルとを備え、前記電機子鉄
心と前記界磁用磁石とを相対的に走行するように配置し
たリニアモータにおいて、 前記対向するそれぞれの界磁用磁石または前記対向する
それぞれの電機子鉄心を、前記界磁鉄心の長手方向に沿
って相対的にずらして配設したことを特徴とするリニア
モータ。3. A smooth field magnet through which magnetic flux passes, a smooth field magnet fixed along both sides of the field iron along the longitudinal direction, and a gap between the field magnet and the field magnet. A flat plate-shaped armature core, which is arranged to face the magnetic core at right angles to the armature core, an armature coil wound around the outer circumference along the longitudinal direction of the armature core, and the armature core or the field core. A table disposed on any one of the upper surfaces, wherein the armature iron and the field magnet are arranged to travel relatively to each other, wherein the opposed field magnets or A linear motor, wherein opposing armature cores are relatively displaced along a longitudinal direction of the field core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13462698A JPH11313475A (en) | 1998-04-28 | 1998-04-28 | Linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13462698A JPH11313475A (en) | 1998-04-28 | 1998-04-28 | Linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11313475A true JPH11313475A (en) | 1999-11-09 |
Family
ID=15132780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13462698A Pending JPH11313475A (en) | 1998-04-28 | 1998-04-28 | Linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11313475A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100356703B1 (en) * | 2000-05-20 | 2002-10-18 | 미래산업 주식회사 | Apparatus for Assembling Permanent Magnet of Linear Motor |
| EP1276015A2 (en) * | 2001-07-09 | 2003-01-15 | Canon Kabushiki Kaisha | Stage apparatus and method of driving the same |
| JP2005295678A (en) * | 2004-03-31 | 2005-10-20 | Yaskawa Electric Corp | Linear drive system |
| JP2006136156A (en) * | 2004-11-08 | 2006-05-25 | Okuma Corp | Linear motor |
| JP2008517571A (en) * | 2004-10-17 | 2008-05-22 | ドルマ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | Sliding door with transport system and / or drive system with magnet rows |
| WO2013122031A1 (en) * | 2012-02-16 | 2013-08-22 | 日立金属株式会社 | Linear motor |
| WO2014148434A1 (en) * | 2013-03-22 | 2014-09-25 | 日立金属株式会社 | Linear motor |
| JP2015008555A (en) * | 2013-06-24 | 2015-01-15 | 株式会社安川電機 | Linear motor |
| JP2018074722A (en) * | 2016-10-27 | 2018-05-10 | 山洋電気株式会社 | Linear motor |
-
1998
- 1998-04-28 JP JP13462698A patent/JPH11313475A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100356703B1 (en) * | 2000-05-20 | 2002-10-18 | 미래산업 주식회사 | Apparatus for Assembling Permanent Magnet of Linear Motor |
| EP1276015A2 (en) * | 2001-07-09 | 2003-01-15 | Canon Kabushiki Kaisha | Stage apparatus and method of driving the same |
| EP1276015B1 (en) * | 2001-07-09 | 2008-10-29 | Canon Kabushiki Kaisha | Stage apparatus |
| JP2005295678A (en) * | 2004-03-31 | 2005-10-20 | Yaskawa Electric Corp | Linear drive system |
| JP2008517571A (en) * | 2004-10-17 | 2008-05-22 | ドルマ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | Sliding door with transport system and / or drive system with magnet rows |
| JP2006136156A (en) * | 2004-11-08 | 2006-05-25 | Okuma Corp | Linear motor |
| WO2013122031A1 (en) * | 2012-02-16 | 2013-08-22 | 日立金属株式会社 | Linear motor |
| CN104115384A (en) * | 2012-02-16 | 2014-10-22 | 日立金属株式会社 | Linear motor |
| JPWO2013122031A1 (en) * | 2012-02-16 | 2015-05-11 | 日立金属株式会社 | Linear motor |
| WO2014148434A1 (en) * | 2013-03-22 | 2014-09-25 | 日立金属株式会社 | Linear motor |
| TWI513150B (en) * | 2013-03-22 | 2015-12-11 | Hitachi Metals Ltd | Linear motor |
| JPWO2014148434A1 (en) * | 2013-03-22 | 2017-02-16 | 日立金属株式会社 | Linear motor |
| US10044251B2 (en) | 2013-03-22 | 2018-08-07 | Hitachi Metals, Ltd. | Linear motor |
| JP2015008555A (en) * | 2013-06-24 | 2015-01-15 | 株式会社安川電機 | Linear motor |
| JP2018074722A (en) * | 2016-10-27 | 2018-05-10 | 山洋電気株式会社 | Linear motor |
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