JPH11295281A - Ultrasonic transducer for measurement - Google Patents
Ultrasonic transducer for measurementInfo
- Publication number
- JPH11295281A JPH11295281A JP11413098A JP11413098A JPH11295281A JP H11295281 A JPH11295281 A JP H11295281A JP 11413098 A JP11413098 A JP 11413098A JP 11413098 A JP11413098 A JP 11413098A JP H11295281 A JPH11295281 A JP H11295281A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- measurement
- wave
- ultrasonic
- longitudinal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、計測用の超音波ト
ランスジュ−サ−に関し、特に、縦波及び横波の超音波
を同時発信させることによって、精密な計測が得られる
ようにしたものである。用途としては、熱応力や応力変
動を受ける機械部品の負荷及び残量応力、ボルトの軸応
力、各種材料の弾性率、内部摩耗等の計測が挙げられ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic transducer for measurement and, more particularly, to an ultrasonic transducer for transmitting longitudinal and transverse ultrasonic waves at the same time to obtain a precise measurement. is there. Applications include measurement of load and residual stress of mechanical parts subjected to thermal stress and stress fluctuation, axial stress of bolts, elastic modulus of various materials, internal wear, and the like.
【０００２】[0002]
【従来の技術】従来、超音波を利用した計測では、第１
に、縦波及び横波のトランジュ−サ−を取り替えること
で別々に用いる場合、第２に、縦波及び横波のトランジ
ュ−サ−を上下、横並び、同心円状又は放物線状に設置
する場合、第３に、縦波から横波にモ−ド変換する場合
がある。2. Description of the Related Art Conventionally, in measurement using ultrasonic waves,
Secondly, when the longitudinal wave and the transverse wave transducers are used separately by replacing them, secondly, when the longitudinal wave and the transverse wave transducers are arranged vertically and horizontally, concentrically or parabolically, the third method is used. In some cases, mode conversion is performed from longitudinal waves to transverse waves.
【０００３】そして、これら第１〜第３の場合は、通
常、トランスジュ−サ−と被計測物の間には、接触媒質
を介在させ、また被計測物側にある圧電体の表面には、
圧電体保護のためポリマ−やセラミックス質の薄膜保護
層を被覆させた間接的な接触構成を採用している。さら
に、トランジュ−サ−の被計測物に対する圧接について
は、通常、作業者の手圧、重しの負荷により行なわれて
いる。In these first to third cases, usually, a couplant is interposed between the transducer and the object to be measured, and the surface of the piezoelectric body on the side of the object to be measured is usually provided. ,
In order to protect the piezoelectric body, an indirect contact configuration in which a polymer or ceramic thin film protective layer is coated is adopted. Further, the pressure contact of the transducer with the object to be measured is usually performed by the hand pressure of the operator and the load of the weight.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、第１の
場合では、計測中に取り替えのできない低温、高温計測
には不向きであり、第２の場合では、被計測物の同一箇
所の計測でないことから、材料の精密計測ができず、均
一に分散していない混合相の組織の計測で誤差を生じる
問題点があり、第３の場合では、トランジュ−サ−径の
約４０％よりも小さい厚さの試料は、計測できないとい
う欠点を有している。However, in the first case, it is unsuitable for low-temperature and high-temperature measurement which cannot be replaced during measurement, and in the second case, it is not the measurement of the same portion of the object to be measured. There is a problem that accurate measurement of the material cannot be performed and an error occurs in the measurement of the structure of the mixed phase that is not uniformly dispersed. In the third case, the thickness is smaller than about 40% of the diameter of the transducer. Has the disadvantage that it cannot be measured.
【０００５】また、接触媒質の使用は、媒質の経時変化
により、精密計測ができないという重大な欠陥があり、
ポリマ−やセラミックス質の薄膜保護層は、圧電体との
材質違いにより、精密計測の阻害要因であることも判明
した。Further, the use of a couplant has a serious defect that precise measurement cannot be performed due to a change with time of the medium.
It has also been found that the polymer or ceramics thin film protective layer is an obstacle to precision measurement due to the difference in material from the piezoelectric body.
【０００６】さらに、トランジュ−サの被計測物に対す
る圧接は、多くの場合片押しとなり、精密計測を阻害す
るという問題点があった。In addition, the pressure contact of the transducer with the object to be measured is often one-sided, which hinders precision measurement.
【０００７】[0007]
【課題を解決するための手段】本発明は上述の点に鑑み
なされたもので、計測用の超音波トランスジュ−サ−
は、ケ−ス内には、少なくともダンパ−及び基板状の圧
電素子が組込まれ、特に、この圧電素子の位置関係及び
圧電現象を改善するようにしたものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has an ultrasonic transducer for measurement.
In the case, at least a damper and a substrate-like piezoelectric element are incorporated in a case, and in particular, the positional relationship of the piezoelectric element and the piezoelectric phenomenon are improved.
【０００８】すなわち、前記圧電素子は、ケ−ス内で
は、電極を備えた内表面が位置し、また被計測物側で
は、被計測物に対して接触媒質や薄膜保護層を介在させ
ずに直接接触する外表面が位置するように構成され、圧
電素子中には、分極された縦波発生用の圧電ドメイン及
び横波発生用の圧電ドメインの二種類が存在するように
構成したものである。したがって、本発明の計測用の超
音波トランスジュ−サ−は、圧電素子が被計測物に間接
ではなく直接接触するとともに、超音波が圧電素子から
被計測物に向って同時発信するものである。この結果、
従来技術では、不可能な縦波及び横波超音波の同時計
測、また均一に分散していない混合相の組織の計測がで
き、材料厚さの制約も受けないものである。この場合、
圧電素子の外表面は、超音波の伝播から、面粗度が４０
０メッシュ以上の平坦面になっていることが好ましい。
また、縦波の超音波及び横波の超音波は、各周波数が
０．５〜２００ＭＨｚの範囲内、好ましく１〜３０ＭＨ
ｚの範囲内で設定され、また、縦波と横波の発進速度比
が１０：１〜１：１０の範囲内、好ましくは２：１〜
１：２の範囲内で設定される。[0008] That is, the piezoelectric element has an inner surface provided with electrodes in the case, and on the measurement object side, the couplant or the thin film protective layer does not intervene with the measurement object. The piezoelectric element is configured so that an outer surface that directly contacts the piezoelectric element is located, and two types of piezoelectric domains for generating polarized longitudinal waves and piezoelectric domains for generating transverse waves exist in the piezoelectric element. Therefore, in the ultrasonic transducer for measurement of the present invention, the piezoelectric element directly contacts the object to be measured, not indirectly, and simultaneously transmits ultrasonic waves from the piezoelectric element to the object to be measured. . As a result,
According to the prior art, simultaneous measurement of longitudinal and transverse ultrasonic waves, which is impossible, and measurement of mixed phase structure that is not uniformly dispersed can be performed, and there is no restriction on material thickness. in this case,
The outer surface of the piezoelectric element has a surface roughness of 40 due to the propagation of ultrasonic waves.
Preferably, it is a flat surface of 0 mesh or more.
The longitudinal ultrasonic wave and the transverse ultrasonic wave have respective frequencies within a range of 0.5 to 200 MHz, preferably 1 to 30 MHz.
z, and the starting speed ratio of the longitudinal wave and the transverse wave is in the range of 10: 1 to 1:10, preferably 2: 1 to 1
It is set within the range of 1: 2.
【０００９】また、前記ケ−スについては、永久磁石又
は電磁石で構成すれば、鉄系からなる被計測物の吸着が
可能になり、被計測物への圧接が均一になって精密計測
を常時確保できる。Further, if the case is constituted by a permanent magnet or an electromagnet, it is possible to adsorb an iron-based object to be measured, and the pressure contact with the object to be measured becomes uniform, so that precise measurement is always performed. Can be secured.
【００１０】[0010]
【発明の実施の形態】以下、本発明計測用の超音波トラ
ンスジュ−サ−について、その一実施例につき図を参照
しながら説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the ultrasonic transducer for measurement according to the present invention will be described below with reference to the drawings.
【００１１】図１（ａ）（ｂ）は、本発明計測用の超音
波トランスジュ−サ−１を示す概念図であり、ケ−ス２
の内部には、少なくとも、ポリマ−質のダンパ−３及び
基板状の圧電素子４が組込まれている。そして、前記圧
電素子４は、使用周波数によって制約があり、その厚み
が０．１〜１ｍｍ程度になっている。そして、圧電素子
４の内表面４ａには、同軸ケ−ブル５のリ−ド線６ａに
接続される電極７が設けられ、この内表面４ａの反対側
にある露出した外表面４ｂが被計測物８に直接接触する
ように構成されている。この場合、前記ダンパ−３は、
絶縁性を兼ねているものであり、また、ケ−ス２の内周
壁部分には、ゴムなどの吸収材を利用して吸音壁を構成
することが好ましい。さらに、圧電素子４の内表面４ａ
に設けられる電極７は、例えば塗布又は乾質もしくは湿
質メッキされたものである。FIGS. 1A and 1B are conceptual diagrams showing an ultrasonic transducer 1 for measurement according to the present invention.
At least a polymer damper 3 and a substrate-like piezoelectric element 4 are incorporated in the inside of the device. The thickness of the piezoelectric element 4 is limited to about 0.1 to 1 mm, depending on the frequency used. An electrode 7 connected to the lead wire 6a of the coaxial cable 5 is provided on the inner surface 4a of the piezoelectric element 4, and the exposed outer surface 4b on the opposite side of the inner surface 4a is measured. It is configured to directly contact the object 8. In this case, the damper-3 is
In addition, it is preferable that the inner peripheral wall portion of the case 2 is formed of a sound absorbing wall using an absorbing material such as rubber. Further, the inner surface 4a of the piezoelectric element 4
Is provided, for example, by coating or by dry or wet plating.
【００１２】なお、圧電素子４の外表面４ｂを被計測物
８に直接接触させたのは、伝播時間の誤差要因となる電
極層やポリマ−、セラミック保護層、接触媒質を除去す
ることによって、精密な伝播時間の計測を可能にするた
めである。そして、圧電素子４の外表面４ｂは、超音波
の伝播から、外表面４ｂの面粗度を４００メッシュ以上
の平坦面にすることが好ましい。The outer surface 4b of the piezoelectric element 4 is brought into direct contact with the object 8 by removing the electrode layer, the polymer, the ceramic protective layer, and the couplant which cause errors in the propagation time. This is to enable accurate measurement of the propagation time. The outer surface 4b of the piezoelectric element 4 is preferably a flat surface having a surface roughness of 400 mesh or more from the propagation of ultrasonic waves.
【００１３】また、前記圧電素子４は、例えばペロブス
カイト型結晶構造を有する（Ｔｉ，Ｚｒ）Ｐｂ０3もし
くはＴｉＰｂ０3などの酸化物やポリ弗化ビニリデン
（ＰＶＤＦ）共重合体などのポリマ−からなり、圧電素
子４中には、分極された縦波発生用の圧電ドメイン及び
横波発生用の圧電ドメインの二種類が存在している。こ
の場合、ドメインとは、粒子の集合をいい、普通１０〜
１００μｍの大きさをもっているものである。したがっ
て、例えばＢＮＣコネクタ−、ＲＳ２３２Ｃ（いずれも
図示せず）に接続される前記同軸ケ−ブル５のリ−ド線
６ａを使用して、電極７及び被計測物８間に印加電圧し
たときには、縦波の超音波及び横波の超音波が圧電素子
４から被計測物８に向って同時発信する。この場合、前
記被計測物８は、図２で示されるように電極を兼ねてい
るものであり、電極用のリ−ド線６ｂが接続されるよう
になっている。Further, the piezoelectric element 4, for example having a perovskite crystal structure (Ti, Zr) Pb0 3 or TiPb0 oxide and polyvinylidene fluoride (PVDF), such as 3 copolymer polymers such as - made, The piezoelectric element 4 has two types of piezoelectric domains for generating polarized longitudinal waves and piezoelectric domains for generating transverse waves. In this case, the domain refers to a set of particles, usually 10 to
It has a size of 100 μm. Therefore, for example, when a voltage is applied between the electrode 7 and the measured object 8 using the lead wire 6a of the coaxial cable 5 connected to the BNC connector or RS232C (both not shown), A longitudinal ultrasonic wave and a transverse ultrasonic wave are simultaneously transmitted from the piezoelectric element 4 to the measured object 8. In this case, the object to be measured 8 also serves as an electrode as shown in FIG. 2, and is connected to a lead wire 6b for the electrode.
【００１４】このような構成の圧電素子４を採用した本
発明の計測用の超音波トランスジュ−サ−１は、従来技
術では、不可能な縦波及び横波超音波の同時計測、均一
に分散していない混合相の組織の計測ができ、しかも材
料厚さの制約も受けないものである。The ultrasonic transducer for measurement 1 of the present invention employing the piezoelectric element 4 having such a configuration is capable of simultaneously measuring longitudinal and transverse ultrasonic waves, which cannot be achieved by the prior art, and uniformly dispersing the ultrasonic waves. It is possible to measure the structure of a mixed phase that has not been performed, and is not subject to restrictions on the material thickness.
【００１５】なお、超音波の縦波の超音波及び横波の超
音波は、各周波数が０．５〜２００ＭＨｚの範囲内、好
ましく１〜３０ＭＨｚの範囲内で設定される。周波数が
０．５ＭＨｚ未満では、波形がブロ−ドになって精密計
測を不能にするとともに、２００ＭＨｚをこえると、圧
電素子４が薄くなりすぎて破損を起こしたり、縦波と横
波の同時伝播ができなくなったりするからである。ま
た、縦波と横波の発進速度比が１０：１〜１：１０の範
囲内、好ましくは２：１〜１：２の範囲内で設定され
る。これは、この範囲内であると、縦波と横波の伝播時
間の同時計測及びピ−ク高さの計測が容易になるからで
ある。The longitudinal ultrasonic waves and the transverse ultrasonic waves are set to have respective frequencies within a range of 0.5 to 200 MHz, preferably within a range of 1 to 30 MHz. If the frequency is less than 0.5 MHz, the waveform becomes a broad band, making precise measurement impossible. If the frequency exceeds 200 MHz, the piezoelectric element 4 becomes too thin and may be damaged, or simultaneous propagation of longitudinal and transverse waves may occur. It is because it becomes impossible. The starting speed ratio between the longitudinal wave and the transverse wave is set in the range of 10: 1 to 1:10, preferably in the range of 2: 1 to 1: 2. This is because within this range, simultaneous measurement of the propagation time of the longitudinal and transverse waves and measurement of the peak height are facilitated.
【００１６】さらに、前記ケ−ス２は、図１（ａ）
（ｂ）及び図２では、例えば、ＳＵＳ４３２からなる永
久磁石２ａにより構成されている。したがって、鉄系の
被計測物８を対象にした場合には、ケ−ス２が被計測物
８を吸着する。この結果、この被計測物８への圧接は、
均一になって精密計測を常時確保できる。そして、電磁
石２ｂの場合は、例えば、図３に示されたように、鉄心
９を介してＮ極及びＳ極が同心円状に設けられるように
なっている。Further, the case 2 is shown in FIG.
In FIG. 2B and FIG. 2, for example, it is configured by a permanent magnet 2a made of SUS432. Therefore, when the iron-based measurement object 8 is targeted, the case 2 attracts the measurement object 8. As a result, the pressure contact with the object 8 is
It becomes uniform and accurate measurement can always be secured. In the case of the electromagnet 2b, for example, as shown in FIG. 3, an N pole and an S pole are provided concentrically via an iron core 9.
【００１７】なお、図４は、被計測物８として、鋼製の
丸棒（φ１０×１０ｍｍ）を選択し、本発明品Ａ及び従
来の比較品Ｂにおける横波の伝播時間の経時変化を示し
た特性図である。この場合、比較品Ｂは、トランスジュ
−サ−の先端部分に電極層やポリマ−、セラミック保護
層、接触媒質などを介在させた従来方式のものである。
この結果、本発明品Ａは、伝播時間が安定しており、精
密音速計測が可能になることを知見した。これに対し、
比較品Ｂは、保護膜や接触媒質などの膜厚及び膜質が経
時変化し、正確な伝播時間の計測を阻害していることが
判明した。この場合、横波の伝播時間を比較し、図示し
たのは、縦波の伝播時間の経時変化が少なく、横波の場
合の方が有意差が明瞭になるからである。FIG. 4 shows a change with time of the propagation time of the shear wave in the product A of the present invention and the comparative product B of the related art when a steel round bar (φ10 × 10 mm) was selected as the object 8 to be measured. It is a characteristic diagram. In this case, the comparative product B is of a conventional type in which an electrode layer, a polymer, a ceramic protective layer, a couplant, and the like are interposed at the tip of the transducer.
As a result, it has been found that the product A of the present invention has a stable propagation time and enables precise sound velocity measurement. In contrast,
In Comparative Example B, it was found that the film thickness and film quality of the protective film, the couplant, and the like changed with time, which hindered accurate measurement of the propagation time. In this case, the transit time of the shear wave is compared and shown in the figure because the temporal change of the transit time of the longitudinal wave is small, and the significant difference is clearer in the case of the shear wave.
【００１８】[0018]
【発明の効果】本発明は、以上説明したように、圧電素
子４については、電極７を設けた内表面４ａ及び被計測
物８に直接接触する外表面４ｂが構成されたものである
から、超音波の伝播時間の経時変化が少なくなり、超精
密な計測が常時可能になるという利点を有する。According to the present invention, as described above, the piezoelectric element 4 has the inner surface 4a provided with the electrode 7 and the outer surface 4b which is in direct contact with the object 8 to be measured. There is an advantage that the change with time of the propagation time of the ultrasonic wave is reduced, and ultra-precision measurement is always possible.
【００１９】また、圧電素子４による超音波の伝播は、
縦波及び横波の超音波を同時発信できるように構成した
ものであるから、低温、高温計測や振動が発生している
計測、不均一混合相の組織計測も可能で、試料厚さの制
約もないなどの利点を有する。したがって、熱応力や応
力変動を受ける機械部品の負荷及び残量応力、ボルトの
軸応力、各種材料の弾性率、内部摩耗等の計測にも好適
するという利点を有する。The propagation of the ultrasonic wave by the piezoelectric element 4 is as follows.
Because it is configured to transmit longitudinal and transverse ultrasonic waves at the same time, it is possible to measure low and high temperatures, measurement where vibration is occurring, texture measurement of heterogeneous mixed phase, and limit sample thickness. There are advantages such as not. Therefore, there is an advantage that it is suitable for measurement of load and residual stress of mechanical parts subjected to thermal stress and stress fluctuation, axial stress of bolt, elastic modulus of various materials, internal wear and the like.
【００２０】さらに、前記ケ−ス２については、永久磁
石２ａ又は電磁石２ｂで構成すれば、鉄系からなる被計
測物８の吸着が可能になり、被計測物８への圧接が均一
になって精密計測を常時確保できるという利点を有す
る。Further, if the case 2 is constituted by the permanent magnet 2a or the electromagnet 2b, the object to be measured 8 made of iron can be attracted and the pressure contact with the object to be measured 8 becomes uniform. Therefore, there is an advantage that precise measurement can be always secured.
【図１】本発明計測用の超音波トランスジュ−サ−の一
実施例を示す概念図であり、（ａ）は正面図、（ｂ）は
平面図。FIGS. 1A and 1B are conceptual diagrams showing an embodiment of an ultrasonic transducer for measurement according to the present invention, wherein FIG. 1A is a front view and FIG. 1B is a plan view.
【図２】計測状態の説明図。FIG. 2 is an explanatory diagram of a measurement state.
【図３】電磁石の構成を概念的に示す説明図。FIG. 3 is an explanatory view conceptually showing a configuration of an electromagnet.
【図４】本発明品及び比較品における横波の伝播時間の
経時変化を示す特性図。FIG. 4 is a characteristic diagram showing a change over time of a propagation time of a shear wave in the product of the present invention and a comparative product.
ｌ 計測用の超音波トランスジュ−サ− ２ ケ−ス ２ａ 永久磁石 ２ｂ 電磁石 ３ ダンパ− ４ 圧電素子 ４ａ 内表面 ４ｂ 外表面 ５ 同軸ケ−ブル ６ａ リ−ド線 ６ｂ リ−ド線 ７ 電極 ８ 被計測物 ９ 鉄心 1 Ultrasonic transducer for measurement 2 Case 2a Permanent magnet 2b Electromagnet 3 Damper 4 Piezoelectric element 4a Inner surface 4b Outer surface 5 Coaxial cable 6a Lead wire 6b Lead wire 7 Electrode 8 DUT 9 Iron core
───────────────────────────────────────────────────── フロントページの続き (72)発明者 星野 充宏 神奈川県横浜市南区中村町１−１−14 ジ ャパン プローブ株式会社内 (72)発明者 中田 正明 神奈川県横浜市南区中村町１−１−14 ジ ャパン プローブ株式会社内 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Mitsuhiro Hoshino 1-1-14 Nakamura-cho, Minami-ku, Yokohama-shi, Kanagawa Prefecture Inside Japan Probe Corporation (72) Inventor Masaaki Nakata 1--1, Nakamura-cho, Minami-ku, Yokohama-shi, Kanagawa 1-14 Japan Probe Co., Ltd.
Claims (5)
及び基板状の圧電素子４が組込まれるようにした計測用
の超音波トランスジュ−サ−において、 前記圧電素子４は、ケ−ス２内では、電極７を備えた内
表面４ａが位置し、また被計測物８側では、被計測物８
に直接接触する露出した外側面４ｂが位置するようにな
っており、しかも圧電素子４中には、分極された縦波発
生用の圧電ドメイン及び横波発生用の圧電ドメインの二
種類が存在して、前記電極７及び被計測物８を利用して
印加電圧したときには、縦波の超音波及び横波の超音波
が圧電素子４から被計測物８に向って同時発信するよう
にしたことを特徴とする計測用の超音波トランスジュ−
サ−。1. A casing 2 having at least a damper-3.
And an ultrasonic transducer for measurement in which a substrate-like piezoelectric element 4 is incorporated, wherein the piezoelectric element 4 has an inner surface 4a provided with an electrode 7 in a case 2, On the object 8 side, the object 8
The piezoelectric element 4 has two types of piezoelectric domains, one for generating a polarized longitudinal wave and the other for generating a transverse wave, in the piezoelectric element 4. When an applied voltage is applied using the electrode 7 and the object 8, longitudinal ultrasonic waves and transverse ultrasonic waves are simultaneously transmitted from the piezoelectric element 4 to the object 8. Ultrasonic transducer for measurement
Sir.
石２ｂにより構成され、鉄系の被計測物８を吸着してい
る請求項１に記載の計測用の超音波トランスジュ−サ
−。2. The ultrasonic transducer for measurement according to claim 1, wherein said case 2 is constituted by a permanent magnet 2a or an electromagnet 2b and adsorbs an iron-based object 8 to be measured. .
各周波数が０．５〜２００ＭＨｚの範囲内、好ましく１
〜３０ＭＨｚの範囲内で設定される請求項１に記載の計
測用の超音波トランスジュ−サ−。3. The ultrasonic wave of the longitudinal wave and the ultrasonic wave of the transverse wave,
Each frequency is in the range of 0.5 to 200 MHz, preferably 1
2. The ultrasonic transducer for measurement according to claim 1, wherein the ultrasonic transducer is set within a range of about 30 MHz.
縦波と横波の発進速度比が１０：１〜１：１０の範囲
内、好ましくは２：１〜１：２の範囲内で設定されてい
る請求項１〜請求項３のいずれかに記載の超音波トラン
スジュ−サ−。4. The ultrasonic wave of the longitudinal wave and the ultrasonic wave of the transverse wave,
The launch speed ratio between the longitudinal wave and the transverse wave is set in the range of 10: 1 to 1:10, preferably in the range of 2: 1 to 1: 2. Ultrasonic transducer.
０メッシュ以上の平坦面になっている請求項１〜請求項
４のいずれかに記載の超音波トランスジュ−サ−。5. An outer surface of the piezoelectric element has a surface roughness of 40.
The ultrasonic transducer according to any one of claims 1 to 4, wherein the ultrasonic transducer has a flat surface of 0 mesh or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11413098A JPH11295281A (en) | 1998-04-08 | 1998-04-08 | Ultrasonic transducer for measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11413098A JPH11295281A (en) | 1998-04-08 | 1998-04-08 | Ultrasonic transducer for measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11295281A true JPH11295281A (en) | 1999-10-29 |
Family
ID=14629898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11413098A Pending JPH11295281A (en) | 1998-04-08 | 1998-04-08 | Ultrasonic transducer for measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11295281A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002365270A (en) * | 2001-06-06 | 2002-12-18 | Toshiba Tungaloy Co Ltd | Ultrasonic probe having excellent impact resistance, abrasion resistance and elasticity |
| WO2007145127A1 (en) | 2006-06-15 | 2007-12-21 | Koichi Hirama | Composite resonator |
| CN102411031A (en) * | 2011-11-30 | 2012-04-11 | 北京科技大学 | Device and method for ultrasonically measuring elastic modulus of magnetostrictive material |
| CN102879468A (en) * | 2012-09-18 | 2013-01-16 | 东北大学 | Double-bending-element ultrasonic sensing test device and method for evaluating rock damage |
| CN106370731A (en) * | 2016-09-09 | 2017-02-01 | 中国石油大学(华东) | Ultrasonic longitudinal and shear wave-resistivity integrated type probe for rock physical experiment |
| CN115094393A (en) * | 2022-06-21 | 2022-09-23 | 武汉大学 | ZnO piezoelectric coating material capable of simultaneously exciting longitudinal-transverse waves and preparation method and application thereof |
-
1998
- 1998-04-08 JP JP11413098A patent/JPH11295281A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002365270A (en) * | 2001-06-06 | 2002-12-18 | Toshiba Tungaloy Co Ltd | Ultrasonic probe having excellent impact resistance, abrasion resistance and elasticity |
| WO2007145127A1 (en) | 2006-06-15 | 2007-12-21 | Koichi Hirama | Composite resonator |
| US8179209B2 (en) | 2006-06-15 | 2012-05-15 | Koichi Hirama | Complex resonance circuit |
| CN102411031A (en) * | 2011-11-30 | 2012-04-11 | 北京科技大学 | Device and method for ultrasonically measuring elastic modulus of magnetostrictive material |
| CN102879468A (en) * | 2012-09-18 | 2013-01-16 | 东北大学 | Double-bending-element ultrasonic sensing test device and method for evaluating rock damage |
| CN106370731A (en) * | 2016-09-09 | 2017-02-01 | 中国石油大学(华东) | Ultrasonic longitudinal and shear wave-resistivity integrated type probe for rock physical experiment |
| CN115094393A (en) * | 2022-06-21 | 2022-09-23 | 武汉大学 | ZnO piezoelectric coating material capable of simultaneously exciting longitudinal-transverse waves and preparation method and application thereof |
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