JPH11287657A - Deposition mask for forming electrode and tuning fork type angular velocity sensor - Google Patents
Deposition mask for forming electrode and tuning fork type angular velocity sensorInfo
- Publication number
- JPH11287657A JPH11287657A JP10105804A JP10580498A JPH11287657A JP H11287657 A JPH11287657 A JP H11287657A JP 10105804 A JP10105804 A JP 10105804A JP 10580498 A JP10580498 A JP 10580498A JP H11287657 A JPH11287657 A JP H11287657A
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- deposition mask
- fork type
- electrode
- angular velocity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Gyroscopes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は音叉型角速度センサ
の電極を形成するための蒸着マスク及び音叉型角速度セ
ンサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition mask for forming electrodes of a tuning fork type angular velocity sensor and a tuning fork type angular velocity sensor.
【０００２】[0002]
【従来の技術】音叉型振動子は、比較的低周波数の発振
源として多用されている。特に水晶を使った音叉型水晶
振動子は時計を始めとして多くの分野で使用されてい
る。近年では、音叉型水晶振動子を利用した角速度セン
サ等も開発され、実用化が進んでいる。音叉型角速度セ
ンサについては、例えば特開平１０−３８５８０号公報
により開示されている。2. Description of the Related Art Tuning fork vibrators are frequently used as oscillation sources of relatively low frequency. In particular, a tuning-fork type crystal unit using a crystal is used in many fields including a clock. In recent years, angular velocity sensors and the like using a tuning-fork type quartz resonator have been developed and are being put to practical use. The tuning fork type angular velocity sensor is disclosed, for example, in Japanese Patent Application Laid-Open No. 10-38580.
【０００３】音叉型水晶振動子は水晶の圧電気現象を利
用した振動子であるため水晶の表面に電極を形成する必
要があり、多くの場合、水晶の表面に電極を形成するた
めの窓を形成したマスクを密着させ、真空槽の中で適当
な金属を蒸着することで電極を形成している。真空槽内
での蒸着はバッチ処理のため、一度にたくさんの水晶振
動子の蒸着が行われる。Since a tuning fork type crystal resonator is a resonator utilizing the piezoelectric effect of crystal, it is necessary to form electrodes on the surface of the crystal. In many cases, a window for forming electrodes on the surface of the crystal is provided. The electrodes are formed by bringing the formed mask into close contact and depositing an appropriate metal in a vacuum chamber. Since vapor deposition in a vacuum chamber is a batch process, vapor deposition of many crystal units is performed at one time.
【０００４】本発明に係る音叉型振動子を使った角速度
センサは、片方の枝部を発振用に、片方の枝部を検出用
に使い、検出効率を上げる為検出用の枝部の側面にはプ
ラスとマイナスの両電極を作成する必要がある。An angular velocity sensor using a tuning-fork type vibrator according to the present invention uses one of the branches for oscillation and the other for detection, and attaches one of the branches to the side of the detection branch in order to increase the detection efficiency. Need to make both positive and negative electrodes.
【０００５】前記音叉型角速度センサは励振電極に交流
電圧を印加して音叉型振動子を振動させた時、この振動
した状態で回転力（角速度Ω）が加わると、コリオリの
力が振動方向に直角な力として生じる。コリオリの力は
Ｆ＝２ｍＶ・Ωで表されるもので、ｍは振動片の質量、
Ｖは振動時の速度である。このコリオリ力による振動に
より発生する電荷を検出電極により検出して角速度を測
定するのが音叉型角速度センサの原理である。In the tuning fork type angular velocity sensor, when an AC voltage is applied to an excitation electrode and a tuning fork type vibrator is vibrated, when a rotational force (angular velocity Ω) is applied in the vibrating state, the Coriolis force changes in the vibration direction. Produced as a right angle force. The Coriolis force is represented by F = 2 mV · Ω, where m is the mass of the resonator element,
V is the speed during vibration. The principle of a tuning fork type angular velocity sensor is to detect an electric charge generated by the vibration due to the Coriolis force with a detection electrode and measure the angular velocity.
【０００６】図１は音叉型水晶振動子を用いた角速度セ
ンサの斜視図であり、図２は図１の音叉型角速度センサ
を反対側から見た場合の斜視図である。図３は、枝部の
断面図である。この音叉型水晶振動子は、Ｘ軸に関して
ＸＹ面を５゜回転してＸＹ面で切断したいわゆるＸカッ
ト水晶振動子である。音叉型振動子１の枝部２側には励
振用電極３ａ、３ｂ、３ｃ、３ｄが形成され、枝部４側
には検出用電極５ａ、５ｂ、５ｃ、５ｄが形成されてい
る。励振用電極３ａと３ｃは振動子の表面内で接続さ
れ、励振用電極３ｂと３ｄも振動子の表面内で接続され
ている。また、検出用電極５ａ、５ｃが振動子の表面内
で接続され、検出用電極５ｂ、５ｄが振動子の表面内で
接続されている。外部との接続は音叉型振動子の基部に
設けられた外部との接続用端子電極によって行われる。
励振用電極、検出用電極の各電極は、蒸着マスクを用い
て蒸着又はスパッタ法で形成される。FIG. 1 is a perspective view of an angular velocity sensor using a tuning fork type crystal resonator, and FIG. 2 is a perspective view of the tuning fork type angular velocity sensor of FIG. 1 as viewed from the opposite side. FIG. 3 is a sectional view of a branch portion. This tuning-fork type crystal resonator is a so-called X-cut crystal resonator obtained by rotating the XY plane by 5 ° with respect to the X axis and cutting the XY plane. Exciting electrodes 3a, 3b, 3c, 3d are formed on the branch 2 side of the tuning fork vibrator 1, and detection electrodes 5a, 5b, 5c, 5d are formed on the branch 4 side. The excitation electrodes 3a and 3c are connected within the surface of the vibrator, and the excitation electrodes 3b and 3d are also connected within the surface of the vibrator. The detection electrodes 5a and 5c are connected within the surface of the vibrator, and the detection electrodes 5b and 5d are connected within the surface of the vibrator. The connection with the outside is made by a terminal electrode for connection with the outside provided at the base of the tuning fork type vibrator.
Each of the excitation electrode and the detection electrode is formed by vapor deposition or sputtering using a vapor deposition mask.
【０００７】[0007]
【発明が解決しようとする課題】図１、図２の音叉型角
速度センサは、長さが１７ｍｍ、幅が２．４９ｍｍ、枝
部の幅はそれぞれ１．０９ｍｍ、厚さは１．１６ｍｍ程
度のものである。前記音叉型角速度センサの電極を形成
するにあたっては、音叉型振動子の側面に形成する検出
用電極を側面中央部分で分離させることが難しい。特に
図２に示す枝部４の内側の検出用電極５ａ、５ｄを分離
させることは難しく、特別な蒸着マスクが必要となる。The tuning fork type angular velocity sensor shown in FIGS. 1 and 2 has a length of about 17 mm, a width of about 2.49 mm, a width of about 1.09 mm, and a thickness of about 1.16 mm. Things. In forming the electrode of the tuning fork type angular velocity sensor, it is difficult to separate the detection electrode formed on the side surface of the tuning fork vibrator at the center of the side surface. In particular, it is difficult to separate the detection electrodes 5a and 5d inside the branch 4 shown in FIG. 2, and a special deposition mask is required.
【０００８】上記した振動子の枝部の主面（Ｕ字面）と
側面に形成される検出用電極において、検出用電極の主
面の中央分離部分は、その形状に合わせた蒸着マスクを
用いれば、容易に且つ正確に形成することができる。し
かし、側面の検出用電極の中央分離部分を形成するため
には中央部分で電極を分割するための蒸着マスクが必要
となる。[0008] In the detection electrodes formed on the main surface (U-shaped surface) and side surfaces of the branch portion of the vibrator, the central separation portion of the main surface of the detection electrode can be formed by using an evaporation mask suitable for the shape. , Can be formed easily and accurately. However, in order to form the center separation portion of the detection electrode on the side surface, a vapor deposition mask for dividing the electrode at the center portion is required.
【０００９】そこで、本発明は音叉型振動子の電極を側
面の中央部分で分割するための蒸着マスクを提供し、該
蒸着マスクを用いて電極形成される音叉型角速度センサ
を提供しようとするものである。Accordingly, the present invention provides a vapor deposition mask for dividing an electrode of a tuning fork vibrator at a central portion of a side surface, and provides a tuning fork type angular velocity sensor in which an electrode is formed using the vapor deposition mask. It is.
【００１０】[0010]
【課題を解決するための手段】音叉型振動子の側面に中
央部分で分割され、長さ方向に延びる電極を形成するた
めの電極形成用蒸着マスクにおいて、音叉型振動子の枝
部の内側面と外側面に接する凸部を設けたことを特徴と
する電極形成用蒸着マスク。According to an aspect of the present invention, there is provided an electrode forming mask for forming an electrode which is divided at a central portion on a side surface of a tuning fork vibrator and extends in a longitudinal direction. And a convex portion in contact with the outer surface.
【００１１】音叉型振動子の一方の枝部に励振用電極
を、他方の枝部に検出用電極を蒸着法により形成して成
る音叉型角速度センサにおいて、前記検出用電極の側面
に接する凸部を設けた電極形成用蒸着マスクを用いて電
極形成した音叉型角速度センサ。In a tuning fork type angular velocity sensor in which an excitation electrode is formed on one branch of a tuning fork vibrator and a detection electrode is formed on the other branch by a vapor deposition method, a projection contacting a side surface of the detection electrode. A tuning fork type angular velocity sensor in which electrodes are formed using an electrode-forming vapor deposition mask provided with.
【００１２】[0012]
【発明の実施の形態】図４は本発明の蒸着用マスクの組
み合わせを示す断面図である。蒸着マスク９、位置決め
板８、蒸着マスク１０、位置決め板７、蒸着マスク６の
５層の組合せである。２、４は音叉型振動子の枝部であ
る。蒸着マスク６、９は音叉型振動子の電極を形成する
ための蒸着マスクであり、枝部２側には励振用電極を、
枝部４側には検出用電極を形成するパターンを有してい
る。蒸着マスク１０は音叉型振動子の枝部の内側面と外
側面の中央部分で電極を分割するための凸部１０ａ、１
０ｂを有している。位置決め板７、８は振動子枝部４に
接する蒸着マスクの凸部１０ａ、１０ｂが枝部側面の中
央で接するように蒸着用マスク１０を挟んで設置されて
いる。蒸着マスクの凸部１０ａ、１０ｂが接触している
部分には電極がつかないので中央で分離されることにな
る。FIG. 4 is a sectional view showing a combination of a vapor deposition mask of the present invention. This is a combination of five layers of a vapor deposition mask 9, a positioning plate 8, a vapor deposition mask 10, a positioning plate 7, and a vapor deposition mask 6. Numerals 2 and 4 are branches of the tuning fork type vibrator. The vapor deposition masks 6 and 9 are vapor deposition masks for forming electrodes of the tuning fork vibrator, and an excitation electrode is provided on the branch portion 2 side.
The branch 4 has a pattern for forming a detection electrode. The deposition mask 10 has projections 10a, 1a, 1b, 1c, and 1d for dividing electrodes at the center of the inner surface and the outer surface of the branch portion of the tuning fork vibrator.
0b. The positioning plates 7 and 8 are provided with the vapor deposition mask 10 interposed therebetween such that the projections 10a and 10b of the vapor deposition mask that are in contact with the vibrator branch 4 are in contact with the center of the side surface of the branch. The electrode is not attached to the portion where the projections 10a and 10b of the deposition mask are in contact with each other, so that they are separated at the center.
【００１３】図５は本発明の蒸着用マスクの上面図であ
る。蒸着マスク１０の凸部１０ａは枝部４の外側面の電
極を分離するためものである。凸部１０ｂは枝部４の内
側面に沿って長さ方向に延びており、枝部の内側面の電
極を分離するものである。前記蒸着マスクは一つの振動
子に対応する部分のみを示しているが、実際の蒸着はバ
ッチ処理で行うため、隣り合わせに多数個作成されてい
る。FIG. 5 is a top view of the evaporation mask of the present invention. The convex portion 10 a of the vapor deposition mask 10 is for separating the electrode on the outer surface of the branch portion 4. The convex portion 10b extends in the length direction along the inner surface of the branch portion 4, and separates the electrode on the inner surface of the branch portion. Although only a portion corresponding to one vibrator is shown in the vapor deposition mask, many vapor deposition masks are formed adjacent to each other because the actual vapor deposition is performed by a batch process.
【００１４】前記側面電極分離用の蒸着マスクを用いる
ことにより、検出用のプラス・マイナスの両電極を形成
することができる。By using the vapor deposition mask for separating the side electrodes, both positive and negative electrodes for detection can be formed.
【００１５】一実施形態として説明した位置決め板７、
８と蒸着マスク１０は別体のものであるが、一枚板をエ
ッチング等の加工により、凸部１０ａ、１０ｂを形成し
て一体化することも可能である。この方法によればマス
クの組合せが簡素化され、蒸着工程の作業性もあがる。The positioning plate 7 described as one embodiment,
8 and the vapor deposition mask 10 are separate bodies, but it is also possible to form and integrate the projections 10a and 10b on a single plate by processing such as etching. According to this method, the combination of the masks is simplified, and the workability of the vapor deposition process is improved.
【００１６】[0016]
【発明の効果】蒸着用マスクに、音叉型振動子の枝部の
内側面と外側面の中央部分で電極を分離するための凸部
を設けることにより、一方の枝部側面に２つの異なる電
極を形成できるようになった。According to the present invention, by providing a projection mask for separating electrodes at the center of the inner surface and the outer surface of the branch of the tuning fork vibrator, two different electrodes are provided on one side of the branch. Can be formed.
【００１７】枝部の内側面と外側面の中央部分で電極を
分離するための凸部を有する蒸着マスクを用いて蒸着す
ることにより、音叉型角速度センサが得られた。A tuning fork type angular velocity sensor was obtained by vapor deposition using a vapor deposition mask having a convex portion for separating electrodes at the central portion between the inner surface and the outer surface of the branch portion.
【図１】音叉型振動子を用いた角速度センサの斜視図FIG. 1 is a perspective view of an angular velocity sensor using a tuning fork type vibrator.
【図２】図１の音叉型角速度センサを反対側から見た場
合の斜視図FIG. 2 is a perspective view of the tuning fork type angular velocity sensor of FIG. 1 when viewed from the opposite side.
【図３】音叉型角速度センサの枝部の断面図FIG. 3 is a sectional view of a branch portion of the tuning fork type angular velocity sensor.
【図４】本発明の蒸着マスクの組み合わせを示す断面図FIG. 4 is a cross-sectional view showing a combination of a vapor deposition mask of the present invention.
【図５】本発明の蒸着マスクの上面図FIG. 5 is a top view of the vapor deposition mask of the present invention.
１ 水晶振動子 ２ 枝部 ３ａ 励振用電極 ３ｂ 励振用電極 ３ｃ 励振用電極 ３ｄ 励振用電極 ４ 枝部 ５ａ 検出用電極 ５ｂ 検出用電極 ５ｃ 検出用電極 ５ｄ 検出用電極 ６ 蒸着マスク ７ 位置決め板 ８ 位置決め板 ９ 蒸着マスク １０ 蒸着マスク １０ａ 凸部 １０ｂ 凸部 REFERENCE SIGNS LIST 1 crystal oscillator 2 branch 3 a excitation electrode 3 b excitation electrode 3 c excitation electrode 3 d excitation electrode 4 branch 5 a detection electrode 5 b detection electrode 5 c detection electrode 5 d detection electrode 6 deposition mask 7 positioning plate 8 positioning Plate 9 Deposition mask 10 Deposition mask 10a Projection 10b Projection
Claims (2)
され長さ方向に延びる電極を形成するための電極形成用
蒸着マスクにおいて、音叉型振動子の枝部の内側面と外
側面に接する凸部を設けたことを特徴とする電極形成用
蒸着マスク。1. An electrode-forming vapor deposition mask for forming an electrode which is divided at a central portion and extends in a length direction on a side surface of a tuning fork vibrator, wherein an inner side surface and an outer side surface of a branch portion of the tuning fork type vibrator are provided. A deposition mask for forming an electrode, wherein a projection is provided in contact with the deposition mask.
を、他方の枝部に検出用電極を蒸着法により形成して成
る音叉型角速度センサにおいて、音叉型振動子の枝部の
内側面と外側面に接する凸部を設けた電極形成用蒸着マ
スクを用いて電極形成したことを特徴とする音叉型角速
度センサ。2. A tuning fork type angular velocity sensor in which an excitation electrode is formed on one branch of a tuning fork vibrator and a detection electrode is formed on the other branch by a vapor deposition method. A tuning fork type angular velocity sensor characterized in that electrodes are formed using an electrode formation vapor deposition mask provided with a convex portion contacting an inner surface and an outer surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10105804A JPH11287657A (en) | 1998-03-31 | 1998-03-31 | Deposition mask for forming electrode and tuning fork type angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10105804A JPH11287657A (en) | 1998-03-31 | 1998-03-31 | Deposition mask for forming electrode and tuning fork type angular velocity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11287657A true JPH11287657A (en) | 1999-10-19 |
Family
ID=14417311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10105804A Pending JPH11287657A (en) | 1998-03-31 | 1998-03-31 | Deposition mask for forming electrode and tuning fork type angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11287657A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005134364A (en) * | 2003-10-10 | 2005-05-26 | Nippon Dempa Kogyo Co Ltd | Tuning fork type quartz oscillator for angular velocity sensor, and manufacturing method therefor |
| JP2009276356A (en) * | 2009-08-25 | 2009-11-26 | Seiko Epson Corp | Vibratory gyroscope and its manufacturing method |
| JP2011203265A (en) * | 2011-05-27 | 2011-10-13 | Seiko Epson Corp | Manufacturing method of vibrating structure gyroscope |
-
1998
- 1998-03-31 JP JP10105804A patent/JPH11287657A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005134364A (en) * | 2003-10-10 | 2005-05-26 | Nippon Dempa Kogyo Co Ltd | Tuning fork type quartz oscillator for angular velocity sensor, and manufacturing method therefor |
| JP4509621B2 (en) * | 2003-10-10 | 2010-07-21 | 日本電波工業株式会社 | Manufacturing method of tuning-fork type crystal resonator for angular velocity sensor |
| JP2009276356A (en) * | 2009-08-25 | 2009-11-26 | Seiko Epson Corp | Vibratory gyroscope and its manufacturing method |
| JP2011203265A (en) * | 2011-05-27 | 2011-10-13 | Seiko Epson Corp | Manufacturing method of vibrating structure gyroscope |
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