JPH11286333A - Substrate housing device and substrate housing method - Google Patents
Substrate housing device and substrate housing methodInfo
- Publication number
- JPH11286333A JPH11286333A JP10086458A JP8645898A JPH11286333A JP H11286333 A JPH11286333 A JP H11286333A JP 10086458 A JP10086458 A JP 10086458A JP 8645898 A JP8645898 A JP 8645898A JP H11286333 A JPH11286333 A JP H11286333A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cassette
- substrate housing
- storage device
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、例えば液晶表示
装置を構成するガラス基板等を収納する際に用いられる
基板収納装置および基板収納方法に関するものである。[0001] 1. Field of the Invention [0002] The present invention relates to a substrate storage device and a substrate storage method used for storing, for example, a glass substrate constituting a liquid crystal display device.
【０００２】[0002]
【従来の技術】図３は従来の基板収納装置（以下、カセ
ットと称する）およびこのカセットに収納されている基
板の状態を示す断面図である。図において、１は少なく
とも基板２を搬出入するための開口面を有する箱状のカ
セット、３はカセット１に収納される基板２を一枚ずつ
互いに間隔をあけて保持するための支持部、４はカセッ
ト１に基板２を搬出入するための搬送装置のハンド部で
ある。従来のカセットは、カセット１の対向する一対の
側面に配置された支持部３により、収納される基板２を
水平に保持するよう構成されている。2. Description of the Related Art FIG. 3 is a cross-sectional view showing a conventional substrate storage device (hereinafter referred to as a cassette) and the state of substrates stored in the cassette. In the figure, reference numeral 1 denotes a box-shaped cassette having at least an opening surface for loading and unloading substrates 2, and 3 denotes a support portion for holding the substrates 2 accommodated in the cassette 1 one by one at intervals. Numeral denotes a hand unit of a transfer device for carrying the substrate 2 in and out of the cassette 1. The conventional cassette is configured so that the substrate 2 to be stored is horizontally held by support portions 3 arranged on a pair of opposed side surfaces of the cassette 1.
【０００３】[0003]
【発明が解決しようとする課題】従来のカセットは以上
のように構成されているので、収納される基板２のサイ
ズが大きくなった場合、図３に示すように、収納されて
いる基板２には大きなたわみが生じるため、基板２をカ
セット１に搬出入するために基板２間に挿入される搬送
装置のハンド部４の挿入可能なエリアが限定され、ま
た、基板２のたわみ量が一定でない場合には、ハンド部
４と基板２が接触して基板２を破損する可能性があり、
搬送装置による基板２の自動搬出入が難しいという問題
があった。また、搬送装置を用いてカセット１に基板２
を自動搬出入するためには、基板２を支持している支持
部３のピッチを大きくする必要があり、その場合には基
板２の収納効率が低下するという問題があった。Since the conventional cassette is configured as described above, when the size of the substrate 2 to be stored is increased, as shown in FIG. Causes a large deflection, which limits the area in which the hand unit 4 of the transfer device to be inserted between the substrates 2 to carry the substrate 2 into and out of the cassette 1 is insertable, and the amount of deflection of the substrate 2 is not constant. In this case, there is a possibility that the hand part 4 and the substrate 2 come into contact with each other and break the substrate 2,
There is a problem that it is difficult to automatically carry in and out the substrate 2 by the transfer device. Further, the substrate 2 is placed in the cassette 1 by using a transfer device.
It is necessary to increase the pitch of the supporting portion 3 supporting the substrate 2 in order to automatically carry in and out the substrate 2, and in that case, there is a problem that the storage efficiency of the substrate 2 is reduced.
【０００４】この発明は、上記のような問題点を解決す
るためになされたもので、カセットに収納された基板の
たわみを抑制して、基板の収納効率を低下させることな
く、搬送装置によるカセットへの基板の自動搬出入が可
能な基板収納装置および基板収納方法を提供することを
目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and suppresses the deflection of a substrate stored in a cassette, thereby reducing the efficiency of storing a substrate. It is an object of the present invention to provide a substrate storage device and a substrate storage method capable of automatically carrying substrates in and out of the substrate.
【０００５】[0005]
【課題を解決するための手段】この発明に係わる基板収
納装置は、複数の基板を一枚ずつ互いに間隔をあけて収
納する箱状の基板収納装置において、基板収納装置に基
板を搬出入する開口面と直交する方向にある一対の側面
に、一枚の基板を保持するための対を成す支持部材が段
差を持って配置されているものである。また、基板収納
装置の一対の側面に配設された対を成す支持部材は、水
平面に対して３０±５度の傾斜角度を有するように段差
を持って配置されているものである。また、この発明に
係わる基板収納方法は、基板を水平面に対して傾斜させ
た状態で保持するものである。SUMMARY OF THE INVENTION A substrate storage device according to the present invention is a box-shaped substrate storage device for storing a plurality of substrates one by one at a distance from each other. A pair of supporting members for holding a single substrate are arranged with a step on a pair of side surfaces in a direction perpendicular to the surface. Further, the pair of support members provided on the pair of side surfaces of the substrate storage device are arranged with a step so as to have an inclination angle of 30 ± 5 degrees with respect to a horizontal plane. Further, in the method for storing a substrate according to the present invention, the substrate is held in a state of being inclined with respect to a horizontal plane.
【０００６】[0006]
【発明の実施の形態】実施の形態１．以下、この発明の
一実施の形態である基板収納装置（カセット）を図につ
いて説明する。図１は本発明の実施の形態１によるカセ
ットおよびこのカセットに収納されている基板の状態を
示す断面図である。図において、１は少なくとも基板２
を搬出入するための開口面を有する箱状のカセット、３
はカセット１に収納される基板２を一枚ずつ互いに間隔
をあけて保持するための支持部で、カセット１に基板２
を搬出入する開口面と直交する方向にある一対の側面の
内の一方の側面に所定のピッチで支持部材３ａが配置さ
れ、他方の側面に支持部材３ａと同一ピッチで支持部材
３ｂが配置されると共に、一枚の基板２を保持する対を
成す支持部材３ａと３ｂは、図２に示すように、水平面
から傾斜角度θを有するよう段差を持って配置される。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, a substrate storage device (cassette) according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a state of a cassette according to the first embodiment of the present invention and a substrate housed in the cassette. In the figure, 1 is at least the substrate 2
Box-shaped cassette having an opening for loading and unloading
Is a support for holding the substrates 2 housed in the cassette 1 one by one at a distance from each other.
A support member 3a is arranged at a predetermined pitch on one side surface of a pair of side surfaces in a direction orthogonal to an opening surface for carrying in and out, and a support member 3b is arranged at the same pitch as the support member 3a on the other side surface. In addition, as shown in FIG. 2, the support members 3a and 3b forming a pair for holding one substrate 2 are arranged with a step so as to have an inclination angle θ from a horizontal plane.
【０００７】本実施の形態によるカセット１は、傾斜角
度θを有して配置された対を成す支持部材３ａと３ｂに
より、収納される基板２を水平面に対して傾斜させて保
持するよう構成されており、傾斜して保持された基板２
のたわみ量は、同一部分を支持して水平に保持される場
合より大幅に小さくなる。なお、傾斜角度θを３０±５
度とすることによって、基板の撓みを小さくし、基板上
に形成された薄膜や薄膜デバイスに与えるストレスを小
さくすると共に、基板のハンドリングを容易にして、カ
セットの耐久性を向上させることができる。The cassette 1 according to the present embodiment is configured to hold the substrate 2 to be accommodated in a state inclined with respect to a horizontal plane by a pair of support members 3a and 3b arranged with an inclination angle θ. And the substrate 2 held at an angle
Is much smaller than in the case where the same portion is supported and held horizontally. Note that the inclination angle θ is 30 ± 5.
By setting the degree, the bending of the substrate can be reduced, the stress applied to the thin film or the thin film device formed on the substrate can be reduced, the handling of the substrate can be facilitated, and the durability of the cassette can be improved.
【０００８】次に、本実施の形態によるカセット１を用
いた基板２の搬出入工程について説明する。なお、本実
施の形態によるカセット１は、例えば、液晶表示装置の
製造工程において、液晶表示装置を構成するガラス基板
の洗浄、成膜、写真製版、エッチングおよび検査等の各
処理工程間においてガラス基板を搬送する際等に用いら
れる。複数の基板２を対を成す支持部材３ａと３ｂによ
り所定のピッチで傾斜させた状態で収納したカセット１
は、その状態で搬送され、基板２をカセット１から搬出
する場合には、搬送装置の真空吸着機構を有するハンド
部を、カセット１内の基板２と同じ角度（θ）に傾斜さ
せてカセット１内の基板２間に挿入し、真空吸着により
基板２をハンド部に固定し、傾斜させたままカセット１
から搬出する。また、基板２をカセット１に搬入する場
合には、基板２を真空吸着により固定しているハンド部
を、傾斜角度θに傾斜させてカセット１内に搬入し、ハ
ンド部の真空吸着を解除して基板２を支持部材３ａと３
ｂ上に配置する。Next, a description will be given of a loading / unloading process of the substrate 2 using the cassette 1 according to the present embodiment. Note that the cassette 1 according to the present embodiment is, for example, used in a manufacturing process of a liquid crystal display device during a process of cleaning, film formation, photolithography, etching, inspection, and the like of a glass substrate constituting the liquid crystal display device. It is used when transporting. Cassette 1 in which a plurality of substrates 2 are housed in a state of being inclined at a predetermined pitch by a pair of support members 3a and 3b
Is transported in that state, and when the substrate 2 is to be unloaded from the cassette 1, the hand unit having the vacuum suction mechanism of the transport device is inclined at the same angle (θ) as the substrate 2 in the cassette 1. The substrate 2 is fixed to the hand part by vacuum suction and inserted into the cassette 1 while being tilted.
Remove from When the substrate 2 is loaded into the cassette 1, the hand unit holding the substrate 2 by vacuum suction is loaded into the cassette 1 at an inclination angle θ, and the vacuum suction of the hand unit is released. The substrate 2 by supporting members 3a and 3
b.
【０００９】この発明によれば、カセット１に基板２を
搬出入する開口面の左右において、カセット１内の基板
２を所定の角度に傾斜させて保持することにより、カセ
ット１に収納された基板２のたわみ量を小さくすること
ができ、搬送装置によるカセット１への基板２の自動搬
出入を可能にする。According to the present invention, the substrate 2 accommodated in the cassette 1 is held by tilting the substrate 2 in the cassette 1 at a predetermined angle on the left and right sides of the opening surface for carrying the substrate 2 in and out of the cassette 1. 2 can be reduced, and the substrate 2 can be automatically carried in and out of the cassette 1 by the transfer device.
【００１０】[0010]
【発明の効果】以上のように、この発明によれば、複数
の基板を一枚ずつ互いに間隔をあけて収納する箱状の基
板収納装置において、基板収納装置に基板を搬出入する
開口面と直交する方向にある一対の側面に配設され、一
枚の基板を保持するための対を成す支持部材を段差を持
って配置することにより、基板収納装置に収納される基
板を水平面から傾斜させて保持するため、基板収納装置
に収納された基板のたわみを抑制でき、基板の収納効率
を低下させることなく、搬送装置を用いて基板収納装置
へ基板を自動搬出入することができる。As described above, according to the present invention, in a box-shaped substrate storage device for storing a plurality of substrates one by one at a distance from each other, an opening surface for carrying substrates in and out of the substrate storage device is provided. By disposing a pair of support members arranged on a pair of side surfaces in a direction orthogonal to each other and forming a pair of supporting members for holding one substrate with a step, the substrate stored in the substrate storage device is inclined from a horizontal plane. Therefore, the substrate stored in the substrate storage device can be restrained from bending, and the substrate can be automatically carried in and out of the substrate storage device using the transfer device without lowering the storage efficiency of the substrate.
【図１】 この発明の実施の形態１による基板収納装置
を示す断面図である。FIG. 1 is a sectional view showing a substrate storage device according to a first embodiment of the present invention.
【図２】 この発明の実施の形態１による基板収納装置
の支持部材の配置を説明するための図である。FIG. 2 is a diagram for explaining an arrangement of a support member of the substrate storage device according to the first embodiment of the present invention.
【図３】 従来のこの種基板収納装置を示す断面図であ
る。FIG. 3 is a cross-sectional view showing a conventional substrate storage device of this type.
１ カセット、２ 基板、３ 支持部、３ａ、３ｂ 支
持部材。1 cassette, 2 substrates, 3 support parts, 3a, 3b support members.
Claims (3)
て収納する箱状の基板収納装置において、 上記基板収納装置に上記基板を搬出入する開口面と直交
する方向にある一対の側面に、上記一枚の基板を保持す
るための対を成す支持部材が段差を持って配置されてい
ることを特徴とする基板収納装置。1. A box-shaped substrate storage device for storing a plurality of substrates one by one at a distance from each other, wherein a pair of side surfaces in a direction orthogonal to an opening surface for carrying the substrate into and out of the substrate storage device. A substrate storage device, wherein a pair of support members for holding the one substrate is arranged with a step.
対を成す支持部材は、水平面に対して３０±５度の傾斜
角度を有するように段差を持って配置されていることを
特徴とする請求項１記載の基板収納装置。2. A pair of support members provided on a pair of side surfaces of the substrate storage device are arranged with a step so as to have an inclination angle of 30 ± 5 degrees with respect to a horizontal plane. The substrate storage device according to claim 1, wherein
保持することを特徴とする基板収納方法。3. A method for storing a substrate, wherein the substrate is held in a state of being inclined with respect to a horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10086458A JPH11286333A (en) | 1998-03-31 | 1998-03-31 | Substrate housing device and substrate housing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10086458A JPH11286333A (en) | 1998-03-31 | 1998-03-31 | Substrate housing device and substrate housing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11286333A true JPH11286333A (en) | 1999-10-19 |
Family
ID=13887516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10086458A Pending JPH11286333A (en) | 1998-03-31 | 1998-03-31 | Substrate housing device and substrate housing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11286333A (en) |
-
1998
- 1998-03-31 JP JP10086458A patent/JPH11286333A/en active Pending
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