JPH11277402A - Ingot cutting method with wire saw - Google Patents
Ingot cutting method with wire sawInfo
- Publication number
- JPH11277402A JPH11277402A JP9811998A JP9811998A JPH11277402A JP H11277402 A JPH11277402 A JP H11277402A JP 9811998 A JP9811998 A JP 9811998A JP 9811998 A JP9811998 A JP 9811998A JP H11277402 A JPH11277402 A JP H11277402A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- ingot
- reel
- wound
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ベアウエハ、デバ
イス付ウエハ、磁気ディスクウエハ等のウエハの基板と
なるインゴッド、セラミックス、ガラス等をワイヤーソ
ウで切断する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cutting a wafer such as a bare wafer, a wafer with devices, a magnetic disk wafer, or the like with a wire saw into ingots, ceramics, glass, and the like.
【０００２】[0002]
【従来の技術】図３に示すようにワイヤー３を複数の溝
付きローラ４，４，４に巻掛け、このワイヤーをダンサ
機構５，５で張力を調整しながら往復走行させる過程
で、砥粒を含む加工液を供給しながらインゴッド６をワ
イヤーに上方から下方へ圧接させ、インゴッド６を切断
加工するワイヤーソー装置１は知られている（特開平４
−９３１６６号、同４−１３５１５７号、同４−１３５
１５８号、同５−１５４８３１号公報、「砥粒加工学会
誌」、Ｖｏｌ．４２，Ｎｏ．１、１９８８年 ＪＡＮ．
２２−２５頁参照）。ワイヤー３は巻き取り用リール６
に巻き取られる。図中、７はローラ４を回転駆動させる
サーボモータである。2. Description of the Related Art As shown in FIG. 3, a wire 3 is wound around a plurality of grooved rollers 4, 4 and 4, and the wire is reciprocated while adjusting the tension by dancer mechanisms 5 and 5. There is known a wire saw device 1 for cutting an ingot 6 by pressing an ingot 6 from above to a lower side while supplying a working fluid containing the same.
-93166, 4-135157, 4-135
Nos. 158 and 5-148331, "Journal of the Japan Society of Abrasive Processing", Vol. 42, no. 1, 1988 JAN.
See pages 22-25). Wire 3 is winding reel 6
It is wound up. In the figure, reference numeral 7 denotes a servomotor for driving the roller 4 to rotate.
【０００３】上記砥粒（ダイヤモンド砥粒、銅粉、酸化
けい素粉、ガラス粉）を水等に分散した加工液（遊離砥
粒）を用いるインゴッドの切断方法では、切断に使用し
た遊離砥粒の砥粒が作業台上に飛散、乾燥して作業環境
が汚される欠点があると共に、廃液処理、切断されたイ
ンゴッドのスライスの洗浄が必要とされる。遊離砥粒を
用いるインゴッド（シリコン、セラミック、ガラス等も
含む）のワイヤーソウによる切断の前記欠点を解決する
手段としてワイヤー（ピアノ線）上にダイヤモンド砥
粒、銅粉を熱硬化性樹脂バインダーで付着させ、加熱硬
化させた固型砥粒が付着したワイヤーを用いることが提
案された（「１９９７年度精密工学会春季学術講演大
会」；開催日１９９８年３月１８日）。この固型砥粒ワ
イヤー工具を用いるインゴッドの切断方法は、遊離砥粒
の前記欠点を改善するものである。[0003] In the method of cutting an ingot using a working fluid (free abrasive grains) in which abrasive grains (diamond abrasive grains, copper powder, silicon oxide powder, glass powder) are dispersed in water or the like, the free abrasive grains used for cutting are used. In addition to the disadvantage that the abrasive grains are scattered on the work table and dried to contaminate the working environment, waste liquid treatment and washing of the cut ingot slices are required. As a means to solve the above-mentioned drawbacks of cutting ingots (including silicon, ceramics, glass, etc.) using free abrasive grains with a wire saw, diamond abrasive grains and copper powder are adhered to a wire (piano wire) with a thermosetting resin binder. It has been proposed to use a wire to which solid abrasive grains that have been heated and hardened are adhered ("1997 Precision Engineering Society Spring Academic Conference"; held March 18, 1998). The method for cutting an ingot using the solid abrasive wire tool improves the above-mentioned disadvantages of loose abrasive grains.
【０００４】しかし、ワイヤーに砥粒が固定されている
ので、インゴッドには、ワイヤーの往復運動で何時も同
じ箇所の固定砥粒、ワイヤーが当接し（図４参照）、砥
粒、ワイヤーの摩耗が激しいと共に、砥粒がインゴッド
に当るところと、ワイヤーのピアノ線がインゴッドに当
るところではスライスされたインゴッド片の肉厚差が大
きいと共に、スライスされたインゴッド片が反ることが
あり、次の工程の研削、研磨の量を多くする欠点がある
ことが判明した。又、ワイヤーの往復運動がインゴッド
の切断までに切断速度が０．０２〜２．５ｍｍ／分のと
きは６〜２０時間と長く要するので摩耗したワイヤーが
断線する欠点がある。However, since the abrasive grains are fixed to the wire, the fixed abrasive grains and the wire at the same location always contact the ingot by the reciprocating movement of the wire (see FIG. 4), and the wear of the abrasive grains and the wire is reduced. Intensely, where the abrasive grain hits the ingot and where the wire piano wire hits the ingot, the thickness difference between the sliced ingot pieces is large, and the sliced ingot pieces may warp. It has been found that there is a disadvantage that the amount of grinding and polishing is increased. Further, when the reciprocating movement of the wire requires a cutting speed of 0.02 to 2.5 mm / min before cutting the ingot, it takes as long as 6 to 20 hours.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、反りが小さ
く、かつ、厚さのバラツキが小さいインゴッド片（ウエ
ハ）が得られ、ワイヤーの切断も生じにくいインゴッド
の切断方法の提供を目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for cutting an ingot, which can obtain an ingot piece (wafer) having a small warpage and a small thickness variation and is hard to cut a wire. .
【０００６】[0006]
【課題を解決するための手段】本発明は、送り出し用の
リールから砥粒が固着したワイヤーを供給し、このワイ
ヤーを複数の溝付きローラに巻掛け、さらにこのワイヤ
ーを巻取り用のリールにより巻取る過程で、上記溝付き
ローラ間のワイヤーとインゴッドとを相互に圧接しつつ
ワイヤーに往復直線運動を与えて送り方向に走行させて
インゴッドを切断加工する方法において、前記ワイヤー
は送り出し用のリールから供給され、巻取り用のリール
に巻き取られる間に２〜１０回りねじられて走行するこ
とを特徴とするワイヤーソウによるインゴッドの切断方
法を提供するものである。According to the present invention, a wire to which abrasive grains are fixed is supplied from a reel for sending out, the wire is wound around a plurality of grooved rollers, and the wire is wound on a reel for winding. In the winding process, the wire between the grooved rollers and the ingot are pressed against each other while giving a reciprocating linear movement to the wire and running in the feed direction to cut the ingot, wherein the wire is a reel for feeding. And a method for cutting an ingot by a wire saw, wherein the ingot is run while being twisted 2 to 10 times while being wound on a winding reel.
【０００７】[0007]
【作用】インゴッドの切断時に、固定砥粒ワイヤーは２
〜１０回りねじられて、またはねじり戻されてインゴッ
ドを切断するので、従来の図５に示すローラの溝の断面
形状が２等辺三角形のローラを用いるワイヤーソウ装置
と異なり、ワイヤーとインゴッドの当接する場所がワイ
ヤーの往復時に異なり、ワイヤーの摩耗が均一に行われ
るのでワイヤーの寿命が長くなると共に、切断されたイ
ンゴッド片の肉厚分布の振れ幅は小さなものとなり、イ
ンゴッド片の反りは小さい。[Function] When cutting the ingot, the fixed abrasive wire is 2
Since the ingot is cut by being twisted or untwisted by about 10 to cut the ingot, unlike the conventional wire saw apparatus using a roller having an isosceles triangular cross section, as shown in FIG. 5, the wire and the ingot come into contact with each other. The location is different when the wire reciprocates and the wear of the wire is evenly performed, so that the life of the wire is prolonged, and the thickness distribution of the cut ingot piece is small, and the warp of the ingot piece is small.
【０００８】[0008]
【発明の実施の形態】以下、図面を用いて本発明を説明
する。図１は本発明の実施に用いるワイヤーソウ装置の
ローラの一部を切り欠いた断面図である。図２は、ロー
ラの溝の部分拡大図である。図１と図２において、４は
ローラ、４ａは溝を形成する突部（山）、４ｂは溝、４
ｃは右辺、４ｄは左辺、θは谷の角度である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of a wire saw device used in the embodiment of the present invention, in which a part of a roller is cut away. FIG. 2 is a partially enlarged view of the groove of the roller. 1 and 2, 4 is a roller, 4a is a protrusion (mountain) forming a groove, 4b is a groove,
c is the right side, 4d is the left side, and θ is the angle of the valley.
【０００９】一本のローラにおいて、インゴッドの径に
も依存するが溝は１００〜３００本、同一形状に設けら
れている。３本のローラのうち、少なくとも１本は溝の
断面形状が右辺４ｃと左辺４ｄの長さが異なる三角形を
示す。この右辺と左辺の長さの異なる断面形状を有する
略三角形断面形状の溝を備えるローラ４は、ローラ３本
中の１本でも、２本でも３本共であってもよい。In one roller, 100 to 300 grooves are provided in the same shape, depending on the diameter of the ingot. At least one of the three rollers has a triangular shape in which the cross-sectional shape of the groove is different in length of the right side 4c and the left side 4d. The number of the rollers 4 provided with the grooves having a substantially triangular cross-sectional shape having different cross-sectional shapes with different lengths of the right side and the left side may be one out of three rollers, two or three.
【００１０】該断面形状でない溝を備えるロール４の形
状は、図５の拡大図に示すよう右辺と左辺の長さの等し
い二等辺三角形断面形状とする。二等辺三角形断面形状
でないローラ溝のピッチ幅（ｌ）は０．５〜２ｍｍ、好
ましくは０．８〜１．５ｍｍ、溝の高さ（ｈ）は０．８
〜２ｍｍ、好ましくは０．８〜１．５ｍｍ、谷の角度
（θ）は２５〜６０度、溝を構成する右辺と左辺の長さ
は三角形の仮想底辺４ｅの長さをｌ0 とし、谷の頂点Ｏ
より底辺４ｅへ垂線を引いたときの底辺４ｅと垂線が交
差する点をＡとしたとき、底辺の長さ（ｌ1，ｌ2 ）
が、この点Ａにより１：１．２５〜５の比に分割される
ように設定するのが好ましい。この点Ａの山（４ａ）へ
の寄りは、ワイヤー３が往復運動することから、右寄り
でも左寄りでもよい。底辺の長さ（ｌO ）は０．５〜２
ｍｍ、好ましくは１〜２ｍｍである。ローラの直径は１
００〜２００ｍｍが一般である（図２参照）。The shape of the roll 4 provided with the groove not having the cross-sectional shape is an isosceles triangular cross-sectional shape having the same length on the right and left sides as shown in the enlarged view of FIG. The pitch width (l) of the roller groove which is not an isosceles triangle cross section is 0.5 to 2 mm, preferably 0.8 to 1.5 mm, and the height (h) of the groove is 0.8.
To 2 mm, and preferably 0.8 to 1.5 mm, the valley of the angle (theta) is 25 to 60 degrees, the length of the left and right sides constituting the groove the length of the imaginary base 4e of the triangle with l 0, Valley Vertex O
The length of the base (l 1 , l 2 ), where A is the point where the perpendicular intersects with the base 4 e when a perpendicular is drawn to the base 4 e
However, it is preferable to set so that the ratio is divided into the ratio of 1: 1.25 to 5 by this point A. The deviation of the point A to the mountain (4a) may be rightward or leftward because the wire 3 reciprocates. Bottom length (l O ) is 0.5-2
mm, preferably 1-2 mm. Roller diameter is 1
It is generally from 200 to 200 mm (see FIG. 2).
【００１１】固定砥粒ワイヤー３が供給される速度は、
１００〜２，０００ｍｍ／分、好ましくは、５００〜
１，５００ｍｍ／分である。固定砥粒ワイヤー３として
は、砥粒が２０〜５０μｍのダイヤモンド砥粒を集中度
２０〜５５、好ましくは５０で直径０．１５〜０．３０
ｍｍのピアノ線にエポキシ樹脂、フェノール樹脂、アク
リルウレタン樹脂バインダーで加熱硬化または紫外線照
射硬化させたものが好ましい。前記学会で発表されたよ
うに粒径０．５〜１μｍの銅粉、亜鉛粉等をバインダー
に３０〜６０重量％含有させてもよい。またワイヤー表
面にニッケルを電着させ、それから固定砥数をバインダ
ーで付着させたものも使用できる。The speed at which the fixed abrasive wire 3 is supplied is:
100 to 2,000 mm / min, preferably 500 to 2,000 mm / min
1,500 mm / min. As the fixed abrasive wire 3, diamond abrasive grains whose abrasive grains are 20 to 50 μm have a concentration of 20 to 55, preferably 50 and a diameter of 0.15 to 0.30.
It is preferable that a piano wire of mm is cured by heating or ultraviolet irradiation with an epoxy resin, a phenol resin, or an acrylic urethane resin binder. As announced at the above-mentioned conference, the binder may contain 30 to 60% by weight of copper powder, zinc powder or the like having a particle size of 0.5 to 1 μm. Alternatively, nickel may be electrodeposited on the surface of the wire, and then a fixed abrasive may be attached with a binder.
【００１２】溝数は一本のローラに付き１００〜３００
本前後である。固定砥粒ワイヤーが、二等辺三角形でな
い三角形の断面形状の溝に接触すると溝の右辺４ｃと左
辺４ｄの長さが異なるのでワイヤー３は一本のローラを
渡りきるまでに各溝と接することにより徐々にねじられ
ていく。谷の角度（θ）、底辺を分割する仮想点Ａの位
置、溝の数、ワイヤー径、二等辺三角形でない三角形の
断面形状を有する溝を設けるローラの本数により、送り
出し用リール２より送られたワイヤー３が巻き取り用リ
ール６に巻き取られる迄にワイヤー３がねじられる回数
が定まる。The number of grooves is 100 to 300 per roller.
Before and after the book. When the fixed abrasive wire contacts a groove having a triangular cross-sectional shape other than an isosceles triangle, the length of the right side 4c and the length of the left side 4d of the groove are different, so that the wire 3 comes into contact with each groove until it crosses one roller. It is gradually twisted. It was sent from the reel 2 for delivery according to the angle of the valley (θ), the position of the virtual point A dividing the base, the number of grooves, the wire diameter, and the number of rollers having grooves having a triangular cross-sectional shape other than an isosceles triangle. The number of times the wire 3 is twisted before the wire 3 is wound on the winding reel 6 is determined.
【００１３】この回数は、２〜１０回、好ましくは２〜
５回である。ワイヤーのねじり回数が多いとワイヤーが
切断されやすくなる。逆に少なすぎるとワイヤーの摩耗
が大きくワイヤーの寿命が短かったり、本発明の効果で
ある肉厚分布のバラツキ幅の小さなインゴッド切断片が
得られない。ここでねじり回数とは、ワイヤーのＡ点が
送り出し用リールから送り出され、巻き取り用リールに
巻かれる迄にワイヤーＡ点がワイヤーの軸心回りに回転
された回数をいう。The number of times is 2 to 10 times, preferably 2 to 10 times.
5 times. If the number of twists of the wire is large, the wire is likely to be cut. On the other hand, if the amount is too small, the wire wear will be large and the life of the wire will be short, and an ingot cut piece having a small variation width of the thickness distribution, which is an effect of the present invention, cannot be obtained. Here, the number of twists refers to the number of times the point A of the wire is rotated around the axis of the wire before the point A of the wire is sent out from the sending reel and wound around the winding reel.
【００１４】ワイヤーソウ装置１において、ワイヤーは
送り出し用リールとリール巻き取り用リールの間を往復
運動するので、ワイヤーＡ点は、復路のリール巻き取り
用リール６からくり出されて送り出し用リール２に戻る
ときは逆にねじ戻されることとなる。ローラ４の素材と
しては、硬質ポリウレタン、ナイロン６、ナイロン６
６、ナイロン６，１０等が使用される。In the wire saw apparatus 1, since the wire reciprocates between the sending reel and the reel winding reel, the point A of the wire is drawn out from the reel winding reel 6 on the return path to the feeding reel 2. When returning, he will be screwed back. The material of the roller 4 is hard polyurethane, nylon 6, nylon 6
6, nylon 6,10 and the like are used.
【００１５】[0015]
【実施例】直径３００ｍｍ、長さ２５０ｍｍのシリコン
インゴッドを直径０．１８ｍｍのスチールワイヤーに粒
径３５〜４０μｍのダイヤモンド砥粒をエポキシ樹脂を
用い、集中度５０で塗布し、加熱硬化させたワイヤー工
具を用い、ローラとして、３本共、直径１６０ｍｍ、長
さ５５０ｍｍが溝を図２に示すように溝の高さ１．５ｍ
ｍ、溝ピッチ（底辺）１．３７ｍｍ、谷の角度（θ）３
７度、谷の頂点から底辺に向っておろした垂線により底
辺（ｌ0 ）が１：２（ｌ1 ：ｌ2 ）に分割される三角形
断面形状の溝を有するナイロン６製ロールを用いて、ワ
イヤー速度５００ｍｍ／分、新線供給量２００ｍｍ／
分、インゴッド切断片肉厚１．１１０ｍｍの条件でワイ
ヤーソウ切断した。EXAMPLE A wire tool obtained by applying a silicon ingot having a diameter of 300 mm and a length of 250 mm to a steel wire having a diameter of 0.18 mm and diamond abrasive grains having a particle diameter of 35 to 40 μm using an epoxy resin at a concentration of 50 and heating and curing. And three rollers, each having a diameter of 160 mm and a length of 550 mm, and having a groove height of 1.5 m as shown in FIG.
m, groove pitch (bottom) 1.37 mm, valley angle (θ) 3
Using a nylon 6 roll having a triangular cross-sectional groove whose base (l 0 ) is divided into 1: 2 (l 1 : l 2 ) by a perpendicular drawn down from the top of the valley to the base 7 degrees, Wire speed 500mm / min, new wire supply 200mm /
The wire saw was cut under the condition of the ingot cut piece thickness of 1.110 mm.
【００１６】切断に９６０分要し、ワイヤー工具のワイ
ヤーは、送り出し用リールから送り出され、巻き取り用
リールに巻き取られる迄に約３回ねじられていた。得ら
れたインゴッド切断片のワイヤー走行方向の７点におけ
る厚みの分布は、１１１０．２μｍ、１１１０．０μ
ｍ、１１０９．６μｍ、１１０９．８μｍ、１１１０．
４μｍ、１１０９．８μｍ、１１１０．０μｍであり、
切断方向における厚みの分布は１１１．４μｍ、１１１
８．６μｍ、１１１０．０μｍ、１１０９．５ｍｍ、１
１０９．５μｍ、１１１．２μｍ、１１１０．１μｍで
あった。切断されたインゴッド片の反りは最大１３μｍ
であった。It took 960 minutes to cut, and the wire of the wire tool was twisted about three times before being sent out from the delivery reel and wound up on the take-up reel. The thickness distribution of the obtained ingot cut pieces at seven points in the wire running direction was 1110.2 μm, 1110.0 μm.
m, 1109.6 μm, 1109.8 μm, 1110.
4 μm, 1109.8 μm, 1110.0 μm,
The thickness distribution in the cutting direction is 111.4 μm, 111
8.6 μm, 1110.0 μm, 1109.5 mm, 1
It was 109.5 micrometers, 111.2 micrometers, and 1110.1 micrometers. The maximum warpage of the cut ingot pieces is 13μm
Met.
【００１７】[0017]
【発明の効果】インゴッド切断片の切り口の平坦度が良
好で、反りの小さなインゴッド切断片が得られる。According to the present invention, an ingot cut piece having a good cut flatness and a small warp can be obtained.
【図１】本発明に用いるワイヤーソウ装置のローラの一
部を切り欠いた上面図である。FIG. 1 is a partially cutaway top view of a roller of a wire saw device used in the present invention.
【図２】ローラの溝の部分拡大図である。FIG. 2 is a partially enlarged view of a groove of a roller.
【図３】ワイヤーソウ装置の斜視図である。FIG. 3 is a perspective view of a wire saw device.
【図４】従来のワイヤーソウ装置のローラの上面図であ
る。FIG. 4 is a top view of a roller of a conventional wire saw device.
【図５】従来のローラの部分断面図である。FIG. 5 is a partial sectional view of a conventional roller.
１ ワイヤーソウ装置 ２ 送り出し用リール ３ ワイヤー ４ ローラ ４ａ 溝 ４ｂ 溝を構成する突部 ４ｃ 右辺 ４ｄ 左辺 ４ｅ 底辺 ５ ダンサ機構 ６ インゴッド ７ サーボモータ DESCRIPTION OF SYMBOLS 1 Wire saw apparatus 2 Reel for sending out 3 Wire 4 Roller 4a Groove 4b Protrusion which comprises a groove 4c Right side 4d Left side 4e Bottom 5 Dancer mechanism 6 Ingot 7 Servo motor
フロントページの続き (72)発明者 猪内 忠彦 神奈川県厚木市上依知3009番地 株式会社 岡本工作機械製作所半導体事業本部内Continuing from the front page (72) Inventor Tadahiko Inouchi 3009 Kamiyori, Atsugi-shi, Kanagawa Semiconductor Company Okamoto Machine Tool Works, Ltd.
Claims (3)
ワイヤーを供給し、このワイヤーを複数の溝付きローラ
に巻掛け、さらにこのワイヤーを巻取り用のリールによ
り巻取る過程で、上記溝付きローラ間のワイヤーとイン
ゴッドとを相互に圧接しつつワイヤーに往復直線運動を
与えて送り方向に走行させてインゴッドを切断加工する
方法において、前記ワイヤーは送り出し用のリールから
供給され、巻取り用のリールに巻き取られる間に２〜１
０回ねじられて走行することを特徴とするワイヤーソウ
によるインゴッドの切断方法。1. A wire to which abrasive grains are fixed is supplied from a sending reel, the wire is wound around a plurality of grooved rollers, and the wire is wound by a winding reel. In a method of cutting the ingot by giving a reciprocating linear motion to the wire while pressing the wire between the rollers and the ingot with each other and running the wire in the feed direction, the wire is supplied from a reel for sending out, and is wound for winding. 2-1 while being wound on a reel
A method for cutting an ingot by a wire saw, wherein the method is performed by twisting the ingot 0 times.
うち、少なくとも１本は、溝の断面形状が二等辺三角形
状ではなく、ワイヤーを挟持する右辺と左辺の長さが異
なる三角形状であり、ワイヤーを挟持する右辺と左辺の
なす谷の角度が３０〜６０度をなしており、一本のロー
ラにおける溝群のピッチ幅、断面形状が同一である溝付
きローラであることを特徴とする、請求項１に記載のワ
イヤーソウによるインゴッドの切断方法。2. A grooved roller, wherein at least one of the plurality of grooved rollers has a groove not having an isosceles triangular cross-sectional shape but having a triangular shape having different lengths of a right side and a left side sandwiching a wire. There is a grooved roller in which the angle of the valley formed by the right side and the left side holding the wire is 30 to 60 degrees, and the pitch width and the cross-sectional shape of the groove group in one roller are the same. The method for cutting an ingot using the wire saw according to claim 1.
ｍのダイヤモンド砥粒を集中度２０〜５５で、樹脂バイ
ンダーを用いてピアノ線に塗布し、加熱硬化させて得た
固定砥粒ワイヤーである、請求項１または２に記載のワ
イヤーソウによるインゴッドの切断方法。3. The wire to which the abrasive grains are fixed is 20 to 50 μm.
m is a fixed abrasive wire obtained by applying a diamond abrasive at a concentration of 20 to 55 to a piano wire using a resin binder, and curing by heating, wherein the ingot is formed by a wire saw according to claim 1 or 2. Cutting method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9811998A JPH11277402A (en) | 1998-03-27 | 1998-03-27 | Ingot cutting method with wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9811998A JPH11277402A (en) | 1998-03-27 | 1998-03-27 | Ingot cutting method with wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11277402A true JPH11277402A (en) | 1999-10-12 |
Family
ID=14211422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9811998A Pending JPH11277402A (en) | 1998-03-27 | 1998-03-27 | Ingot cutting method with wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11277402A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001328055A (en) * | 2000-05-22 | 2001-11-27 | Ricoh Co Ltd | Wire tool and its manufacturing method |
| WO2004071708A1 (en) * | 2003-01-24 | 2004-08-26 | Neomax Co., Ltd. | Wire saw device and method of manufacturing sintered magnet using the same |
| US6837778B2 (en) | 2000-11-24 | 2005-01-04 | Neomax Co., Ltd | Method for cutting rare earth alloy, method for manufacturing rare earth magnet, and wire-saw machine |
| KR100728891B1 (en) | 2005-09-09 | 2007-06-14 | 주식회사 실트론 | Apparatus for cutting silicon single crystal ingot |
| JP2011054822A (en) * | 2009-09-03 | 2011-03-17 | Sumco Corp | Method of cutting silicon ingot |
| CN105592993A (en) * | 2013-09-30 | 2016-05-18 | 贝卡尔特公司 | Method to produce composite stone veneer product |
| CN115533718A (en) * | 2022-11-28 | 2022-12-30 | 四川航天川南火工技术有限公司 | Foot line polishing assembly, foot line polishing mechanism and foot line preparation device |
-
1998
- 1998-03-27 JP JP9811998A patent/JPH11277402A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001328055A (en) * | 2000-05-22 | 2001-11-27 | Ricoh Co Ltd | Wire tool and its manufacturing method |
| US6837778B2 (en) | 2000-11-24 | 2005-01-04 | Neomax Co., Ltd | Method for cutting rare earth alloy, method for manufacturing rare earth magnet, and wire-saw machine |
| US6896595B2 (en) | 2000-11-24 | 2005-05-24 | Neomax Co., Ltd. | Method for cutting rare earth alloy, method for manufacturing rare earth magnet, and wire-saw machine |
| WO2004071708A1 (en) * | 2003-01-24 | 2004-08-26 | Neomax Co., Ltd. | Wire saw device and method of manufacturing sintered magnet using the same |
| KR100728891B1 (en) | 2005-09-09 | 2007-06-14 | 주식회사 실트론 | Apparatus for cutting silicon single crystal ingot |
| JP2011054822A (en) * | 2009-09-03 | 2011-03-17 | Sumco Corp | Method of cutting silicon ingot |
| CN105592993A (en) * | 2013-09-30 | 2016-05-18 | 贝卡尔特公司 | Method to produce composite stone veneer product |
| CN115533718A (en) * | 2022-11-28 | 2022-12-30 | 四川航天川南火工技术有限公司 | Foot line polishing assembly, foot line polishing mechanism and foot line preparation device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI578392B (en) | Method for simultaneously cutting a multiplicity of slices of particularly uniform thickness from a workpiece | |
| US8820308B2 (en) | Methods, wires, and apparatus for slicing hard materials | |
| US4930486A (en) | Blade cutting method for hard brittle material | |
| JPH11277402A (en) | Ingot cutting method with wire saw | |
| JP6270796B2 (en) | Fixed abrasive wire saw and fixed abrasive wire dressing method | |
| JP2006007387A (en) | Super-abrasive grain wire saw | |
| JP2002331466A (en) | Resin bond wire saw and manufacturing method | |
| JP2000218504A (en) | Wire with fixed abrasive grains and cutting method for fixed abrasive grains wire saw | |
| JPH10217095A (en) | Wire saw and work cutting method by wire saw | |
| JP2004216553A (en) | Manufacturing method for super-abrasive grain wire saw | |
| JP2000288903A (en) | Surface grinding method and surface grinding device using multiwire saw | |
| JPH1128654A (en) | Dressing method and device of fixed abrasive grain wire saw | |
| JP2008006584A (en) | Cutting method using super-abrasive grain wire saw | |
| JP2003159642A (en) | Work cutting method and multi-wire saw system | |
| JP5958430B2 (en) | Work cutting method and wire saw | |
| JPS6171949A (en) | Grinding device for difficult-cutting material and the like | |
| JP4601804B2 (en) | Polishing wheel and method for manufacturing polishing wheel | |
| CN110545957B (en) | Method for cutting workpiece and joined member | |
| JP6819621B2 (en) | Work cutting method and wire saw | |
| JP2010284782A (en) | Wire saw | |
| JP2008188721A (en) | Substrate manufacturing method and wire saw device | |
| CN111655500A (en) | Method for printing on a wire-shaped component and wire saw | |
| JP3396291B2 (en) | Wire saw and wire saw cutting method | |
| JP2002052455A5 (en) | ||
| US342917A (en) | Machine for treating metal ribbon for watch-springs |