JPH11241984A - Vickers hardness tester - Google Patents

Vickers hardness tester

Info

Publication number
JPH11241984A
JPH11241984A JP5886398A JP5886398A JPH11241984A JP H11241984 A JPH11241984 A JP H11241984A JP 5886398 A JP5886398 A JP 5886398A JP 5886398 A JP5886398 A JP 5886398A JP H11241984 A JPH11241984 A JP H11241984A
Authority
JP
Japan
Prior art keywords
sample
moving table
microcomputer
surface shape
vickers hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5886398A
Other languages
Japanese (ja)
Other versions
JP3877023B2 (en
Inventor
Hirotaka Hayashi
浩孝 林
Takayuki Yamada
貴幸 山田
Koji Matsuura
幸治 松浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Corp
Original Assignee
Akashi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Corp filed Critical Akashi Corp
Priority to JP05886398A priority Critical patent/JP3877023B2/en
Publication of JPH11241984A publication Critical patent/JPH11241984A/en
Application granted granted Critical
Publication of JP3877023B2 publication Critical patent/JP3877023B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To display a proper indenter point in the hardness test of a sample having a non-flat surface form. SOLUTION: This tester 10 has an analog depth gauge type surface form detecting mechanism B provided above a differential table 9 capable of placing a sample. The differential table 9 is moved in X-direction and Y-direction while the pointer of the depth gauge is allowed to abut to the sample surface, the upper end protrusion (or lower end recess) of the sample is visually detected, and the sample position at that time is measured by micrometers 9X, 9Y attached to the differential table 9 and displayed on an indicator 20.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ビッカース硬さ試
験機に関し、特に表面が平坦でない試料の硬さ試験にお
いて、適正な圧子点(圧子を押し付けるポイント)を表
示する機能をそなえたビッカース硬さ試験機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Vickers hardness tester, and more particularly to a Vickers hardness tester having a function of displaying an appropriate indenter point (point at which an indenter is pressed) in a hardness test of a sample having an uneven surface. Related to testing machine.

【0002】[0002]

【従来の技術】試料が円筒体や球体の場合、あるいは凹
球面体の場合、図7(a),(b)に示すように、圧子1を
試料2の表面2aに押し付けるとき、試料2の上端凸部
a(あるいは下端凹部b)すなわち適正圧子点以外で
は、圧子1が試料面2aを滑り、正規なくぼみを形成で
きない。
2. Description of the Related Art When a sample is a cylindrical body, a spherical body, or a concave spherical body, when the indenter 1 is pressed against the surface 2a of the sample 2, as shown in FIGS. Except for the upper convex part a (or the lower concave part b), that is, other than the proper indenter point, the indenter 1 slides on the sample surface 2a and cannot form a regular depression.

【0003】そこで従来、試料の円筒形状面あるいは球
面部についてビッカース硬さ試験機で硬さ試験を行なう
場合、図8に示すようにくぼみ測定用の光学顕微鏡01の
焦点合わせ操作と、(試料)微動台9のX−Y方向移動
操作とにより、試料02を微動させながら焦点合わせして
測定したい面すなわち試料面02aの上端凸部aあるいは
下端凹部b(図9参照)すなわち試料02の適正圧子点
(硬さ試験点)を見つけ出すという操作を必要とした。
なお微動台9は機枠に、X方向およびY方向に移動可能
に支持されており、光学顕微鏡01は微動台9の上方で機
枠に回転可能に支持されたターレットに取り付けられて
いる。ターレットには圧子機構も取り付けられている。
Conventionally, when a hardness test is performed on a cylindrical surface or a spherical portion of a sample with a Vickers hardness tester, a focusing operation of an optical microscope 01 for measuring a dent is performed as shown in FIG. By moving the fine moving table 9 in the X and Y directions, the surface to be measured by focusing while moving the sample 02 finely, that is, the upper convex portion a or the lower concave portion b (see FIG. 9) of the sample surface 02a, that is, the appropriate indenter of the sample 02 An operation of finding a point (hardness test point) was required.
The fine moving table 9 is supported on the machine frame so as to be movable in the X direction and the Y direction, and the optical microscope 01 is mounted on the turret rotatably supported on the machine frame above the fine moving table 9. An indenter mechanism is also attached to the turret.

【0004】[0004]

【発明が解決しようとする課題】ところで、上述のよう
な従来の技術において、光学顕微鏡に焦点深度の深い対
物レンズを用いると、上端凸部aの検出を容易に行なう
ことができるが、通常、くぼみ測定用レンズで焦点合わ
せする場合が多い。くぼみ測定レンズは倍率が高いため
視野範囲が狭く、したがって上端凸部の検出(確認)は
容易でないという問題点がある。また、上述のとおり複
雑な操作となるため、測定者の熟練を必要とし、また非
能率的であるという問題点もある。本発明は、これらの
問題点を解決しようとするものである。
By the way, in the prior art as described above, if an objective lens having a large depth of focus is used for an optical microscope, the upper end convex portion a can be easily detected. In many cases, focusing is performed using a dimple measurement lens. The dimple measurement lens has a problem that the range of the visual field is narrow because the magnification is high, so that it is not easy to detect (confirm) the convex portion at the upper end. Further, since the operation is complicated as described above, there is also a problem that the skill of the measurer is required and the operation is inefficient. The present invention seeks to solve these problems.

【0005】[0005]

【課題を解決するための手段】本発明は、機枠と、同機
枠にX方向およびY方向に移動可能に支持されるととも
に試料を載置可能な微動台と、同微動台の上方で上記機
枠に回転可能に取り付けられたターレットとをそなえる
とともに、同ターレットに取り付けられた試料表面形状
検出機構と、上記微動台のX方向およびY方向の各移動
情報を入力されて同微動台の位置を演算可能なマイクロ
コンピュータとをそなえたビッカース硬さ試験機におい
て、上記検出機構の出力値に基づいて上記試料の適正圧
子点が検出されたときに同適正圧子点の位置を上記マイ
クロコンピュータを介して表示器に表示するように構成
して課題解決の手段としているまた、上記試料表面形状
検出機構として、アナログ式ゲージを用いて課題解決の
手段としている。
SUMMARY OF THE INVENTION The present invention provides a machine frame, a fine moving table supported on the machine frame so as to be movable in X and Y directions and on which a sample can be placed, and a fine moving table above the fine moving table. It has a turret rotatably mounted on the machine frame, a sample surface shape detection mechanism mounted on the turret, and the position of the fine moving table when the movement information in the X and Y directions of the fine moving table is input. A Vickers hardness tester provided with a microcomputer capable of calculating the appropriate indenter point of the sample based on the output value of the detection mechanism when the appropriate indenter point is detected via the microcomputer. In this case, an analog gauge is used as the sample surface shape detection mechanism to solve the problem.

【0006】さらに、上記試料表面形状検出機構とし
て、上記試料の表面形状をデジタル信号として出力可能
なデジタル式計測器を用い、上記マイクロコンピュータ
に同デジタル式計測器の上記出力と上記微動台のX方向
およびY方向の各移動情報とを入力して上記試料の適性
圧子点の位置の演算を行ない、同マイクロコンピュータ
で演算された上記試料の適性圧子点の位置を表示部に表
示させるようにして課題解決の手段としている。
Further, a digital measuring instrument capable of outputting the surface shape of the sample as a digital signal is used as the sample surface shape detecting mechanism, and the microcomputer outputs the output of the digital measuring instrument and the X of the fine moving table to the microcomputer. The position of the appropriate indenter point of the sample is calculated by inputting the movement information in the direction and the Y direction, and the position of the appropriate indenter point of the sample calculated by the microcomputer is displayed on the display unit. This is a means of solving the problem.

【0007】本発明によると、 試料表面形状検出機構
で検出された試験点の位置を、試験機に内蔵のマイクロ
コンピュータを介して表示器に表示できるようにしたた
め、試料の適正な試験点の割り出しが容易となる。
According to the present invention, the position of the test point detected by the sample surface shape detecting mechanism can be displayed on a display via a microcomputer built in the tester, so that an appropriate test point of the sample can be determined. Becomes easier.

【0008】また、試料表面形状検出機構として、アナ
ログ式ゲージを用いて、試験機の低コスト化をはかるこ
とができる。
Further, the cost of the testing machine can be reduced by using an analog gauge as the sample surface shape detecting mechanism.

【0009】[0009]

【発明の実施の形態】以下、図面により本発明の一実施
形態としてのビッカース硬さ試験機について説明する
と、図1はその斜視図、図2はそのターレットを斜め下
方から見た斜視図、図3はそのアナログ式デプスゲージ
の正面図、図4はその差動変圧器型計測器の平面図、図
5(a)〜(c)はそのアナログ式デプスゲージを用いた場
合の使用状態の説明図、図6はデジタル式測長器を用い
た場合の手順を示すフローチャートである。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a Vickers hardness tester according to an embodiment of the present invention; FIG. 3 is a front view of the analog depth gauge, FIG. 4 is a plan view of the differential transformer-type measuring instrument, and FIGS. 5A to 5C are explanatory views of a use state when the analog depth gauge is used. FIG. 6 is a flowchart showing a procedure when a digital length measuring device is used.

【0010】図1,2に示すように、ビッカース硬さ試
験機10に、従来と同様に機枠10a上をX方向およびY方
向に移動可能に支持されて、試料を載置可能な微動台9
が設けられている。
As shown in FIGS. 1 and 2, a fine movement table on which a sample can be placed is supported by a Vickers hardness tester 10 on a machine frame 10a so as to be movable in X and Y directions in the same manner as in the prior art. 9
Is provided.

【0011】さらに、微動台9の上方で機枠10aに回転
可能に、図2に示すようなターレット5が回転可能に設
けられており、このターレット5に、従来の試験機と同
様に、圧子機構6,くぼみ測定用レンズ7が設けられて
おり、そのほかに試料表面形状検出機構8が取り付けら
れている。符号13はくぼみ測定用レンズ7に光学的に連
なる測微鏡を示している。
Further, a turret 5 as shown in FIG. 2 is rotatably provided on the machine frame 10a above the fine movement table 9, and the turret 5 is provided with an indenter similarly to the conventional testing machine. A mechanism 6 and a dent measurement lens 7 are provided. In addition, a sample surface shape detection mechanism 8 is attached. Reference numeral 13 denotes a microscope optically connected to the dent measurement lens 7.

【0012】試料表面形状検出機構8としては、図3に
示すようなアナログ式のデプスゲージ(Depth Gauge)
(ダイヤルゲージ)11や、図4に示すような測定値をデ
ジタル信号として出力可能な差動変圧器型計測器12が好
適である。図4中の符号12aは一次コイル,符号12bは
コア,符号12cはコア12bと一体の計測棒,符号12dは
二次コイルをそれぞれ示していて、コア12cすなわち計
測棒12bの動きに比例した出力電圧がリード12eからデ
ジタル信号として取り出せるようになっている。試料表
面形状検出機構8として、上記の接触式のもののほか、
渦電流式や光反射式などの非接触式のものを用いてもよ
い。
As the sample surface shape detection mechanism 8, an analog depth gauge as shown in FIG. 3 is used.
(Dial gauge) 11 and a differential transformer type measuring instrument 12 capable of outputting a measured value as a digital signal as shown in FIG. 4 are preferable. In FIG. 4, reference numeral 12a denotes a primary coil, reference numeral 12b denotes a core, reference numeral 12c denotes a measurement rod integrated with the core 12b, and reference numeral 12d denotes a secondary coil, respectively. The output is proportional to the movement of the core 12c, ie, the measurement rod 12b. The voltage can be taken out as a digital signal from the lead 12e. As the sample surface shape detection mechanism 8, in addition to the above-mentioned contact type,
A non-contact type such as an eddy current type or a light reflection type may be used.

【0013】上述の構成において、デプスゲージ11を用
いる場合、図5(a)に示すように、計測棒11aの先端部
11bを試料表面に当接したまま微動台9をX方向および
Y方向に手動で移動させる、つまりデプスゲージ11の計
測棒11aの先端部11bで試料表面をなぞり、その出力
(ゲージ目盛:図5(b))を視認することにより試料の
上端凸部aの検出を行なう。すなわち、試料02が蒲鉾型
の場合、図5(a)において試料1を矢印x方向に移動さ
せるとき、デプスゲージ11の各位置A,B,Cにおける
ゲージ出力は図5(b)に示すようになる。したがってこ
の例の場合、試料の上端凸部aはデプスゲージ11の
「B」の位置にある。
In the above configuration, when the depth gauge 11 is used, as shown in FIG.
The fine adjustment table 9 is manually moved in the X direction and the Y direction while keeping the sample 11b in contact with the sample surface. In other words, the sample surface is traced by the tip 11b of the measuring rod 11a of the depth gauge 11, and its output (gauge scale: FIG. b)), the upper end convex portion a of the sample is detected by visual recognition. That is, when the sample 02 is of a kamaboko type, when the sample 1 is moved in the direction of the arrow x in FIG. 5A, the gauge output at each of the positions A, B, and C of the depth gauge 11 is as shown in FIG. Become. Therefore, in the case of this example, the upper end convex portion a of the sample is at the position “B” of the depth gauge 11.

【0014】そして、微動台9のX方向およびY方向の
各移動量を、微動台9に付設のマイクロメータ9X,9
Y(図5(c)参照)で計測し、その計測値を硬度計10に
内蔵のマイクロコンピュータ21に入力し、試料の上端凸
部aの位置(座標)を試験機10の正面に設けた表示器20
に表示させるようになっている。
The movement amounts of the fine adjustment table 9 in the X direction and the Y direction are determined by micrometers 9X and 9 attached to the fine adjustment table 9.
Y (see FIG. 5 (c)), the measured value was input to a microcomputer 21 built in the hardness meter 10, and the position (coordinates) of the upper end convex portion a of the sample was provided on the front of the tester 10. Display 20
Is displayed.

【0015】差動変圧器型測長器12、すなわちデジタル
信号を用いる場合には、図6のフローチャートに示すよ
うに、測長器12からの出力すなわち表面形状情報を試験
機内部のマイクロコンピュータ(CPU)21に取り込む
(ステップA1)とともに、微動台9をX方向,Y方向
に移動してX方向およびY方向の移動情報、すなわち微
動台位置情報をCPUに入力し(ステップA2)、これ
らの情報の解析をCPUで行なって、上端凸部a(ある
いは下端凹部b)の位置(座標)すなわち測定可能位置
情報を演算(ステップA3)して、機枠正面の表示部20
に表示させる(ステップA4)ようになっている。測定
者は表示部に表示された位置に移動台を操作して試験を
行なう。
In the case of using a differential transformer type length measuring device 12, that is, a digital signal, as shown in the flowchart of FIG. CPU 21) (step A 1 ), and the fine moving table 9 is moved in the X and Y directions to input movement information in the X and Y directions, that is, fine moving table position information to the CPU (step A 2 ). The CPU analyzes these information, calculates the position (coordinates) of the upper convex portion a (or the lower concave portion b), that is, measurable position information (step A 3 ), and displays the information on the display unit 20 on the front of the machine frame.
(Step A 4 ). The measurer operates the movable table at the position indicated on the display unit to perform the test.

【0016】このように、この実施形態の場合、試験機
10に内蔵のマイクロコンピュータにより試料の適正圧子
点の位置を演算し、かつ表示器20に表示でき、従来面倒
であった操作は全く不必要となり、簡単に適正圧子点、
すなわち測定位置の割り出しおよび硬度試験を行なうこ
とができる。
As described above, in the case of this embodiment, the testing machine
The microcomputer can calculate the position of the proper indenter point of the sample by the built-in microcomputer and display it on the display 20, eliminating the need for complicated operations in the past.
That is, a measurement position can be determined and a hardness test can be performed.

【0017】[0017]

【発明の効果】以上詳述したように、本発明のビッカー
ス硬さ試験機によれば次のような効果が得られる。 (1) 試料表面形状検出機構で検出された試験点の位置
を、試験機に内蔵のマイクロコンピュータを介して表示
器に表示できるようにしたため、試料の適正な試験点の
割り出しが容易となる。 (2) 試料表面形状検出機構として、アナログ式ゲージを
用いて、試験機の低コスト化をはかることができる。
As described above, according to the Vickers hardness tester of the present invention, the following effects can be obtained. (1) Since the positions of the test points detected by the sample surface shape detecting mechanism can be displayed on a display via a microcomputer built in the tester, it is easy to determine an appropriate test point of the sample. (2) The cost of the testing machine can be reduced by using an analog gauge as the sample surface shape detection mechanism.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態としてのビッカース硬さ試
験機を示す斜視図。
FIG. 1 is a perspective view showing a Vickers hardness tester as one embodiment of the present invention.

【図2】同ターレットの斜視図。FIG. 2 is a perspective view of the turret.

【図3】同アナログ式デプスゲージの正面図。FIG. 3 is a front view of the analog depth gauge.

【図4】同差動変圧器型計測器の平面図。FIG. 4 is a plan view of the differential transformer type measuring instrument.

【図5】(a) 同アナログ式デプスゲージを用いたとき
の操作手順を示す模式図。 (b) 同デプスゲージの出力値を示すグラフ。 (c) 同微動台とマイクロコンピュータとの結線を示す
模式図。
FIG. 5A is a schematic view showing an operation procedure when the analog depth gauge is used. (b) A graph showing the output value of the depth gauge. (c) A schematic diagram showing the connection between the fine movement table and the microcomputer.

【図6】同差動変圧器型計測器を用いたときの操作手順
を示すフローチャート。
FIG. 6 is a flowchart showing an operation procedure when the differential transformer type measuring instrument is used.

【図7】(a) 円筒体状試料の硬さ試験を示す模式図。 (b) 円弧状くぼみ形状試料の硬さ試験を示す模式図。FIG. 7A is a schematic view showing a hardness test of a cylindrical sample. (b) A schematic diagram showing a hardness test of an arc-shaped hollow sample.

【図8】従来の試験点の割り出し操作を示す模式図。FIG. 8 is a schematic diagram showing a conventional test point finding operation.

【符号の説明】[Explanation of symbols]

1 圧子 2 試料 2a 表面 5 ターレット 6 圧子機構 7 くぼみ測定用レンズ 8 試料表面形状検出機構 9 微動台 9X,9Y マイクロメータ 10 ビッカース硬さ試験機 11 アナログ式デプスゲージ 12 差動変圧器型計測器 20 表示器 21 マイクロコンピュータ Reference Signs List 1 indenter 2 sample 2a surface 5 turret 6 indenter mechanism 7 indentation measurement lens 8 sample surface shape detection mechanism 9 fine moving table 9X, 9Y micrometer 10 Vickers hardness tester 11 analog depth gauge 12 differential transformer type measuring instrument 20 display Container 21 Microcomputer

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 機枠と、同機枠にX方向およびY方向に
移動可能に支持されるとともに試料を載置可能な微動台
と、同微動台の上方で上記機枠に回転可能に取り付けら
れたターレットとをそなえるとともに、同ターレットに
取り付けられた試料表面形状検出機構と、上記微動台の
X方向およびY方向の各移動情報を入力されて同微動台
の位置を演算可能なマイクロコンピュータとをそなえ、
上記検出機構の出力値に基づいて上記試料の適正圧子点
が検出されたときに同適正圧子点の位置が上記マイクロ
コンピュータを介して表示器に表示されるように構成さ
れていることを特徴とする、ビッカース硬さ試験機。
1. A machine frame, a fine moving table supported on the machine frame movably in X and Y directions and capable of mounting a sample, and rotatably mounted on the machine frame above the fine moving table. A turret and a sample surface shape detection mechanism attached to the turret, and a microcomputer capable of calculating the position of the fine moving table by inputting the respective movement information in the X and Y directions of the fine moving table. Well,
When an appropriate indenter point of the sample is detected based on an output value of the detection mechanism, the position of the appropriate indenter point is configured to be displayed on a display via the microcomputer. Vickers hardness tester.
【請求項2】 上記試料表面形状検出機構として、アナ
ログ式ゲージが用いられていることを特徴とする、請求
項1に記載のビッカース硬さ試験機。
2. The Vickers hardness tester according to claim 1, wherein an analog gauge is used as the sample surface shape detecting mechanism.
【請求項3】 上記試料表面形状検出機構として、上記
試料の表面形状をデジタル信号として出力可能なデジタ
ル式計測器が用いられ、上記マイクロコンピュータに同
デジタル式計測器の上記出力と上記微動台のX方向およ
びY方向の各移動情報とが入力されて上記試料の適性圧
子点の位置の演算が行なわれることを特徴とする、請求
項1に記載のビッカース硬さ試験機。
3. A digital measuring device capable of outputting the surface shape of the sample as a digital signal is used as the sample surface shape detecting mechanism, and the microcomputer outputs the output of the digital measuring device and the fine moving table to the microcomputer. 2. The Vickers hardness tester according to claim 1, wherein each of the movement information in the X direction and the Y direction is input to calculate a position of an appropriate indenter point of the sample.
JP05886398A 1998-02-24 1998-02-24 Vickers hardness tester Expired - Fee Related JP3877023B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05886398A JP3877023B2 (en) 1998-02-24 1998-02-24 Vickers hardness tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05886398A JP3877023B2 (en) 1998-02-24 1998-02-24 Vickers hardness tester

Publications (2)

Publication Number Publication Date
JPH11241984A true JPH11241984A (en) 1999-09-07
JP3877023B2 JP3877023B2 (en) 2007-02-07

Family

ID=13096571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05886398A Expired - Fee Related JP3877023B2 (en) 1998-02-24 1998-02-24 Vickers hardness tester

Country Status (1)

Country Link
JP (1) JP3877023B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100941172B1 (en) 2009-10-09 2010-02-10 (주) 대진유압기계 Brinell hardness tester for lot test

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5910407B2 (en) * 2012-08-09 2016-04-27 株式会社島津製作所 Hardness tester and hardness test method in hardness tester

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100941172B1 (en) 2009-10-09 2010-02-10 (주) 대진유압기계 Brinell hardness tester for lot test

Also Published As

Publication number Publication date
JP3877023B2 (en) 2007-02-07

Similar Documents

Publication Publication Date Title
JP5810244B1 (en) Shape measuring instruments
KR20080080048A (en) Lens meter
US4050822A (en) Drop measuring apparatus, and a method of evaluating materials wettability
JPH10311779A (en) Equipment for measuring characteristics of lens
JP2004037424A (en) Hardness tester and hardness test method
JP4756828B2 (en) Lens meter
JPH11241984A (en) Vickers hardness tester
JP6079432B2 (en) Indenter unit and hardness tester
CN106052537A (en) Spectacle frame nose bridge deformation tester
JPH0622201Y2 (en) Hardness tester
Mahto Engineering Metrology and Measurements
JPH0617064Y2 (en) Displacement calibration mechanism of hardness tester
JP2001324375A (en) Minute weighting detector and minute weighting measuring device
JPH07113603A (en) Inside measuring device
JPH0532752Y2 (en)
Reddy A BRIEF INTRODUCTION ABOUT COMPARATORS AND ITS FUNCTIONS
JPH0829129A (en) Length measuring apparatus
JP2000221127A (en) Test force measuring method and device in indentation hardness tester
KR960000039Y1 (en) Digital height measurement of semiconductor device
JPS63131018A (en) Apparatus for measuring inner and outer diameters
JPH02234041A (en) Focal distance measuring device
JP2570282Y2 (en) Lens meter
JP2004251788A (en) Shape measuring system of object to be examined and shape measuring method for the object to be examined
Franklin et al. Practical Physics: A Laboratory Manual Fro Colleges and Technical Schools
JP2004077198A (en) Board thickness measuring jig

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050215

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20050302

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060721

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060802

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060929

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20061025

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20061025

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091110

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121110

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121110

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151110

Year of fee payment: 9

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees