JPH11188301A - Fluid coater - Google Patents
Fluid coaterInfo
- Publication number
- JPH11188301A JPH11188301A JP9360898A JP36089897A JPH11188301A JP H11188301 A JPH11188301 A JP H11188301A JP 9360898 A JP9360898 A JP 9360898A JP 36089897 A JP36089897 A JP 36089897A JP H11188301 A JPH11188301 A JP H11188301A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- coating
- block
- opening
- application
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0091—Apparatus for coating printed circuits using liquid non-metallic coating compositions
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は矩形や円盤状の塗布
対称平面を有する塗布対象物と相対的に移動し流体を塗
布する流体塗布装置に係り、特に、液晶やプラズマ等の
硝子基板及びフラット型ＣＲＴ管等のようにレジスト液
やスラリー等を、塗布対象物の塗布表面上に均一に塗布
し、均一な薄膜を形成するために使用される流体塗布装
置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid coating apparatus for applying a fluid by moving relative to a coating object having a rectangular or disk-shaped coating symmetry plane, and particularly to a glass substrate such as a liquid crystal or a plasma and a flat substrate. The present invention relates to a fluid coating apparatus used for forming a uniform thin film by uniformly applying a resist solution, a slurry, or the like on a coating surface of an object to be coated, such as a mold CRT tube.
【０００２】[0002]
【従来の技術】液晶ディスプレー（ＬＣＤ）や半導体光
学素子、半導体素子、半導体集積回路、プリント配線基
板等の製造工程においては、フォトレジストや絶縁材
料、はんだレジスト等の各種塗布液を塗布対象物（例え
ば、グラス基板や半導体ウエハ等）の表面に塗布し、数
ミクロン程度の非常に薄い塗膜を形成する工程がある。
具体的には、液晶ディスプレーの製造工程においては、
ガラス基板の表面に乾燥後の厚みが約１〜３ミクロンの
均一なフォトレジストをコーティングする必要がある。2. Description of the Related Art In a manufacturing process of a liquid crystal display (LCD), a semiconductor optical element, a semiconductor element, a semiconductor integrated circuit, a printed wiring board, and the like, various coating liquids such as a photoresist, an insulating material, and a solder resist are applied to an object ( For example, there is a step of forming a very thin coating film having a thickness of about several microns by applying it to the surface of a glass substrate or a semiconductor wafer.
Specifically, in the manufacturing process of the liquid crystal display,
It is necessary to coat a uniform photoresist having a thickness of about 1 to 3 microns after drying on the surface of the glass substrate.
【０００３】このような場合においては、有効面全体に
わたり極めて均一な膜厚の塗膜を形成する必要があり、
しかも、高精度に膜厚を制御する必要があるために、従
来は、塗布装置としてスピンコータ（遠心力を利用した
回転塗布装置）が一般に多く使用されている。このスピ
ンコータを用いたスピンコート法によれば、塗布対象物
を一定の回転数で回転させながら基層の上に塗布液を多
めに滴下し、遠心力によって塗布液を薄く延ばし、塗布
液の粘度や回転数等によって決まる膜厚の塗膜を塗布対
象物の表面に形成するものである。[0003] In such a case, it is necessary to form a coating film having a very uniform film thickness over the entire effective surface.
Moreover, since it is necessary to control the film thickness with high accuracy, a spin coater (rotary coating device using centrifugal force) has been generally used as a coating device. According to the spin coating method using this spin coater, a coating liquid is dripped over the base layer while rotating the object to be coated at a constant rotation speed, the coating liquid is thinly spread by centrifugal force, and the viscosity of the coating liquid and This is to form a coating film having a thickness determined by the number of revolutions or the like on the surface of the object to be coated.
【０００４】しかしながら、このスピンコート法によれ
ば、塗布対象物が回転するので円盤状の基板には良い
が、矩形の基板に塗布液の無駄なく塗布することはでき
なかった。また、塗布対象物の上に滴下した塗布液のう
ち、塗布対象物の表面に最終的に塗布されて残る量は、
滴下量の数％に過ぎず、残りの９０数％は余剰塗布液と
なり塗布対象物から排出されることになる。しかも、こ
の排出された塗布液は回転により周囲に飛散して空気に
触れるため、回収して再利用することができず、塗市液
の浪費が激しいという問題があった。さらに、排出され
た余剰液の清掃処理及び余剰液の処理が必要となるもの
であった。However, according to this spin coating method, the object to be coated is rotated, so that it is good for a disk-shaped substrate, but it has not been possible to apply the coating liquid to a rectangular substrate without waste. In addition, of the application liquid dropped on the application target, the remaining amount that is finally applied to the surface of the application target is
This is only a few percent of the drop amount, and the remaining 90 percent is a surplus coating solution that is discharged from the application target. In addition, since the discharged coating liquid scatters around by rotation and comes into contact with air, it cannot be collected and reused, and there is a problem that the coating liquid is wasted. Further, it is necessary to perform a cleaning process of the discharged surplus liquid and a treatment of the surplus liquid.
【０００５】一方、スピンコート法によって、飛散した
余剰液はミストを発生させ、回転により発生した乱気流
の作用により塗布有効面にミスト粒になって再付着した
り、塗布対象物の端面（外周面）にも塗布液が流動拡散
して付着するために、乾燥後に、塗布対象物の端面に付
着した塗膜が剥離し、剥離した塗膜が塗布対象物の表面
に再付着する結果、後工程において思わぬトラブルを発
生させることがある。このために、製品の歩留りを低下
させる原因となっていた。また、その歩留り低下を避け
るためには、塗布対象物の端面や裏面をクリーニングし
なければならず、そのための付加工程が必要であった。
かつまた、遠心力を利用していることから、回転半径に
比例して遠心力は大きくなることから、膜厚は薄くなる
ので、均一な膜厚を得ることは難しくなることから、大
型の塗布対象物への塗布には自ずから限界があった。On the other hand, the surplus liquid scattered by the spin coating method generates mist, and the turbulence generated by the rotation causes the mist to become mist particles and re-adhere to the effective coating surface. Also, since the coating liquid flows and diffuses and adheres, the coating film adhering to the end surface of the application object is peeled off after drying, and the peeled coating film re-adheres to the surface of the application object. May cause unexpected trouble. For this reason, the yield of products has been reduced. Further, in order to avoid the decrease in the yield, the end face and the back face of the object to be coated must be cleaned, and an additional step for that purpose has been required.
In addition, since centrifugal force is used, the centrifugal force increases in proportion to the radius of rotation, and the film thickness becomes thin, so it is difficult to obtain a uniform film thickness. There was naturally a limit to the application to the object.
【０００６】このようなスピンコート法の欠点を解決す
る方法として、塗布ヘッドを用いた流体塗布装置が知ら
れている。この塗布装置によれば、スピンコート法のよ
うに過剰な塗布液を供給せず、しかも塗布ヘッドから塗
布対象物上の必要な領域（塗布有効面）のみに塗布液を
供給することができ、塗布液の歩留りを向上させて塗布
液を節約することができるものである。また、余剰液が
塗布されないことから塗布対象物の側面に付着した塗膜
が剥離して塗布対象物の塗布面に再付着したりすること
も防止できる。さらに、塗布液を外気に晒すことなく塗
布対象物へ塗布することができるようにした、クローズ
ド方式の流体塗布装置とすることができ、しかも塗布対
象物のサイズに限定されない利点がある。[0006] As a method of solving such a drawback of the spin coating method, a fluid coating apparatus using a coating head is known. According to this coating apparatus, it is possible to supply the coating liquid from the coating head only to a necessary area (effective coating surface) on the coating object without supplying an excessive coating liquid as in the spin coating method, The coating liquid can be saved by improving the yield of the coating liquid. Further, since the surplus liquid is not applied, it is possible to prevent the coating film attached to the side surface of the application target from peeling off and re-adhering to the application surface of the application target. Further, a closed-type fluid application device capable of applying the application liquid to the application object without exposing it to the outside air can be provided, and there is an advantage that the size of the application object is not limited.
【０００７】図を用いて従来の塗布ヘッドの構造を簡単
に述べると、図７は、従来の塗布ヘッドの立体分解図で
ある。本図において、塗布ヘッドは、所定圧力で圧送さ
れる塗布流体を、流体注入口２１６を介して導入するこ
とで開口部の長手方向に広げるために図示のような長溝
形状に形成される空洞部２０３と、この空洞部２０３に
連通するとともに塗布流体を所定負圧で吸引するために
図示のように左右一対分が設けられる吸引口２１７を設
けるとともに、空洞部から連続形成される第一接合面２
０２ａを略完璧な平面になるように仕上げた第一ブロッ
ク２０２と、この第一ブロック２０２に対して開口部の
間隙分の厚さを有するシム部材２０６であって、図示の
ような「コ」の字形状に加工されることで左右部位２０
６ｃの間で間隙を形成させるための部材と、この部材を
介在させるようにして不図示の多数のボルトにより、平
面状になるように加工された接合面２０７ａを形成した
第二ブロック２０７とを積層構造とするように構成され
ている。The structure of the conventional coating head will be briefly described with reference to the drawings. FIG. 7 is an exploded view of the conventional coating head. In this drawing, the coating head is provided with a cavity formed in a long groove shape as shown in the drawing in order to spread the coating fluid fed at a predetermined pressure through the fluid inlet 216 in the longitudinal direction of the opening. 203 and a suction port 217 provided with a pair of left and right portions as shown in the drawing to communicate with the cavity 203 and to aspirate the application fluid at a predetermined negative pressure, and a first joining surface continuously formed from the cavity. 2
02a, and a shim member 206 having a thickness corresponding to a gap of an opening with respect to the first block 202. The right and left parts 20
6c, and a second block 207 having a joining surface 207a formed into a planar shape by a number of bolts (not shown) with the member interposed therebetween. It is configured to have a laminated structure.
【０００８】以上のような積層構造とすることで、シム
部材２０６の板厚分の間隙が接合面２０２ａから延設さ
れる先端部２０４と、接合面２０７ａから延設される先
端部２０８との間において確保されるようにしている。With the above-described laminated structure, a gap corresponding to the plate thickness of the shim member 206 is formed between the distal end 204 extending from the joint surface 202a and the distal end 208 extending from the joint surface 207a. In between.
【０００９】すなわち、所望厚みのシム部材２０６を空
洞部２０３から吐出先端までを開口するような形状に予
め機械加工しておき、不図示の貫通孔を通過するように
してボルト等を利用し締結することでスリット状の開口
部を形成するようにしていた。That is, a shim member 206 having a desired thickness is machined in advance so as to open from the hollow portion 203 to the discharge tip, and is fastened using a bolt or the like so as to pass through a through hole (not shown). By doing so, a slit-shaped opening was formed.
【００１０】しかしながら、このようにして形成される
スリット状の開口部によれば、開口部の長手方向の全長
が長くなればなるほど、各ブロックの反りや曲がり等の
部材の平面度のばらつきの影響を無視できなくなる。さ
らにまた、ボルトを締めることで各ブロックが歪むとい
った現象が発生し、所望する均一な極狭のスリット間隙
を得ることが困難となる。However, according to the slit-shaped opening formed in this manner, the longer the entire length of the opening in the longitudinal direction, the more the influence of the unevenness of the flatness of the members such as the warping or bending of each block. Can not be ignored. Furthermore, the tightening of the bolts causes a phenomenon in which each block is distorted, making it difficult to obtain a desired uniform and extremely narrow slit gap.
【００１１】すなわち、図８開口部の拡大図に示すよう
に部材そのものの大きな反りを矯正することはできず、
加工技術に依存する方法であったために、壁面加工にお
ける面粗度は平均１μｍを得ているが、平面度は１０μ
ｍとばらついていた。このために、スリット状の開口部
の間隙ｇ１、ｇ２は、吐出幅方向に大きく（数μｍ〜１
０μｍ）ばらつくことになる。この対策に、シム部材を
厚くすることでばらつきの比率を少なくしたり、各ブロ
ック他の加工精度を向上させたり、締結の影響を小さく
するこめに、ブロック断面形状を大幅に大きくしたり、
多数のボルトで低トルク締めを行なうようにしている。That is, as shown in the enlarged view of the opening in FIG. 8, it is impossible to correct a large warpage of the member itself.
Since the method depends on the processing technology, the surface roughness in wall processing is 1 μm on average, but the flatness is 10 μm.
m. For this reason, the gaps g1 and g2 between the slit-shaped openings are large in the discharge width direction (several μm to 1 μm).
0 μm). To countermeasure this, thickening the shim members reduces the ratio of variation, improves the processing accuracy of each block, and greatly increases the block cross-sectional shape to reduce the effect of fastening.
Many bolts are used for low torque tightening.
【００１２】[0012]
【発明が解決しようとする課題】しかし、シム部材の厚
みを厚くすると塗付開始時の塗布ムラ領域（厚塗りもし
くはカスレ）が広い領域でばらつくことになり、所望の
塗膜有効面内までバラツキが到る場合もあり塗布品質面
でおおきな問題となる。However, when the thickness of the shim member is increased, the uneven coating area (thick coating or thin spot) at the start of coating varies over a wide area, and the unevenness reaches the desired effective area of the coating film. In some cases, causing a serious problem in terms of coating quality.
【００１３】また、通常の塗布装置のブロック素材とし
ては難機械加工材料に属するＳＵＳ３１６である場合が
多いことから、スリット壁面（接合面２０２ａ、２０７
ａ）の研削工程は高度の研削加工技術と高精度な研削機
械を必要とし長時間かけて加工せざるを得ないために、
加工コストは莫大なものとなる問題がある。Further, since SUS316, which belongs to a difficult-to-machine material, is often used as a block material for a normal coating device, the slit wall surface (joining surfaces 202a, 207
Since the grinding process a) requires advanced grinding technology and a high-precision grinding machine, it must be performed over a long period of time.
There is a problem that the processing cost is enormous.
【００１４】さらに、このような精密加工により、たと
え高い精度のスリット壁面（接合面）を得る事ができた
としても、その後の取扱いには慎重さが求められ、組立
までの過程でブロック先端に傷を付ける場合もあり、こ
の場合には廃棄されることになる。また、組立後に到っ
ては、塗布実験を繰り返し、塗付膜を乾燥させ測定し、
その結果を判断しつつ、いくつかの縮結ボルトのトルク
調整を行う、極限られている技能者により塗布ヘッドを
完成させていた。このことから、組立後の調整に時間を
要し、かつまた塗布ヘッドの分解掃除等を行った場合に
は、その再現性を得るまでに相当の期間と技術と労力を
費やすので、生産に支障をきたす場合もあった。そこ
で、ブロックの剛性を高める工夫も試みたが、重量増に
比例するかのように取扱い上の問題（先端部の損傷）が
発生してしまうことが判明し、片ブロック重量を数Ｋｇ
程度に抑えることで、取扱い性を向上させる必要がある
ことが分かった。Furthermore, even if a slit wall (joining surface) with high precision can be obtained by such precision processing, caution is required for the subsequent handling, and the tip of the block must be attached to the end of the block during the assembly process. They may be scratched and in this case will be discarded. Also, after assembling, the coating experiment is repeated, the coated film is dried and measured,
The applicator head was completed by an extremely limited number of technicians who adjusted the torque of some compression bolts while judging the results. As a result, it takes time to make adjustments after assembling, and if the dispensing head is disassembled and cleaned, it takes a considerable period of time, technology, and labor to obtain reproducibility. In some cases. Therefore, an attempt was made to increase the rigidity of the block. However, it was found that a handling problem (damage at the tip portion) occurred as if the weight was increased.
It was found that it was necessary to improve the handleability by suppressing the amount to a degree.
【００１５】したがって、本発明は上述した問題点に鑑
みてなされたものであり、特にスリット状の開口部の間
隙からの流出状態を整流にでき、しかも確実に組み立て
るようにでき、取扱い性を向上した塗布ヘッドを備える
ことで塗付開始領域の膜厚不安定領域の縮小を行えるよ
うにした流体塗布装置の提供を目的としている。Accordingly, the present invention has been made in view of the above-mentioned problems, and in particular, the outflow state from the gap between the slit-shaped openings can be rectified, and the assembling can be performed reliably, thereby improving the handling. It is an object of the present invention to provide a fluid coating apparatus that includes a coating head configured as described above, so that a film thickness unstable region in a coating start region can be reduced.
【００１６】加えて、塗布両端面を除いた中央部領域の
塗布膜の均一性の向上を行える流体塗布装置の提供を目
的としている。In addition, it is another object of the present invention to provide a fluid coating apparatus capable of improving the uniformity of a coating film in a central region excluding both end surfaces of the coating.
【００１７】加えて、塗布有効面外の塗布領域の縮少化
であって、矩形有効塗布面における省液の額縁塗布の実
現を可能にすることを目的としている。In addition, it is an object of the present invention to reduce the application area outside the effective application surface, and to realize liquid-saving frame application on the rectangular effective application surface.
【００１８】[0018]
【課題を解決するための手段】上述した課題を解決し、
目的を達成するために、本発明によれば、平面の塗布対
象基板上に塗布流体を所定厚さで流出させるために、前
記塗布対象基板の外形寸法に略一致する全長を有するス
リット状の開口部を有する塗布ヘッドを、前記開口部の
長手方向に略直交するように前記塗布対象基板に対して
相対移動させつつ塗布を行なうための流体塗布装置であ
って、前記塗布ヘッドを、所定圧力で圧送される前記塗
布流体を、流体注入口を介して導入し前記開口部の長手
方向に広げる空洞部と、該空洞部に連通するとともに前
記塗布流体を所定負圧で吸引する流体吸引口と、前記空
洞部から連続形成される第一接合面とを設けた第一ブロ
ックと、前記第一接合面に対して前記開口部の間隙分の
厚さを有するシム部材を介在させて、第二接合面に対し
て接合される第二ブロックとからなる積層構造とすると
ともに、前記シム部材に、基部から前記開口部の近傍ま
で所定間隔で延設される複数の突起部を形成すること
で、前記開口部に至る流路内における塗布流体の膜厚と
流速の均一化を図ることを特徴としている。Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, according to the present invention, a slit-shaped opening having a total length substantially matching the outer dimensions of the coating target substrate in order to cause the coating fluid to flow out onto the flat coating target substrate at a predetermined thickness. A fluid application device for performing application while relatively moving the application head having a portion relative to the application target substrate so as to be substantially perpendicular to the longitudinal direction of the opening, wherein the application head is operated at a predetermined pressure. A hollow portion that introduces the application fluid to be pumped through a fluid inlet and expands in the longitudinal direction of the opening portion, and a fluid suction port that communicates with the hollow portion and sucks the application fluid at a predetermined negative pressure. A first block provided with a first joining surface continuously formed from the hollow portion, and a shim member having a thickness corresponding to a gap of the opening with respect to the first joining surface, and a second joining Second joined to face By forming a plurality of protrusions extending at predetermined intervals from the base to the vicinity of the opening on the shim member, the shim member has a laminated structure including a lock, so that the coating in the flow path reaching the opening can be performed. It is characterized in that the thickness and the flow velocity of the fluid are made uniform.
【００１９】[0019]
【発明の実施の形態】以下に添付図面を参照しながら、
本発明の好適な実施形態につき説明する。BRIEF DESCRIPTION OF THE DRAWINGS FIG.
A preferred embodiment of the present invention will be described.
【００２０】図１は、第１実施形態にかかる塗布ヘッド
の立体分解図であって、平面状の塗布対象基板１０上に
塗布流体を所定厚さで流出させるために、基板１０の外
形寸法Ｗに略一致する全長を有するスリット状の開口部
を有するように塗布ヘッドを組み立てる様子を示してい
る。FIG. 1 is a three-dimensional exploded view of the coating head according to the first embodiment. In order to allow a coating fluid to flow onto a flat coating target substrate 10 at a predetermined thickness, the external dimensions W of the substrate 10 are determined. 3 shows a state in which the coating head is assembled so as to have a slit-shaped opening having an overall length substantially corresponding to FIG.
【００２１】本図において、塗布ヘッドは図示の第一接
合面２ａを形成した第一ブロック２と、開口部の間隙分
の厚さを有するシム部材６を介在させて、第二接合面７
ａに対して接合される第二ブロック７とから積層構造と
して構成され、不図示のボルトにより一体的になるよう
に組み立てられる。In the drawing, the coating head is provided with a first bonding surface 2a having a first bonding surface 2a and a shim member 6 having a thickness corresponding to the gap of the opening, and a second bonding surface 7a.
and a second block 7 joined to a, which is configured as a laminated structure, and assembled by bolts (not shown) so as to be integrated.
【００２２】第一ブロック２には、所定圧力で圧送され
る塗布流体を、注入口１６を介して導入して開口部の長
手方向に左右に広げる空洞部３と、この空洞部３に連通
するとともに塗布流体を所定負圧で吸引するサック弁に
接続された流体吸引口１７が左右端に設けられている。
また空洞部３からは第一接合面２ａが連続形成される。
また、この第一接合面２ａからは開口部４ａを端部に形
成した形状部４が形成される。The first block 2 is provided with a cavity 3 for introducing a coating fluid fed under a predetermined pressure through an inlet 16 and expanding the cavity left and right in the longitudinal direction of the opening, and communicates with the cavity 3. In addition, a fluid suction port 17 connected to a sack valve for sucking the application fluid at a predetermined negative pressure is provided at the left and right ends.
Further, the first bonding surface 2a is continuously formed from the cavity 3.
Further, from the first joint surface 2a, a shape portion 4 having an opening 4a at an end is formed.
【００２３】また、第一ブロック２にはさらに一対の位
置決め用ピン５が図示の位置に植設されており、この位
置決め用ピン５により、シム部材６及び第二ブロック７
の相対位置決めを行うようにしている。Further, a pair of positioning pins 5 are implanted in the first block 2 at positions shown in the figure, and the shim member 6 and the second block 7 are
Relative positioning is performed.
【００２４】このために、シム部材６には貫通孔６ａ
が、また第二ブロック７には貫通孔７ａが位置決め用ピ
ン６の植設位置に対応するように穿設されており、図示
のように潜入させることで互いの位置決めを行うように
している。For this purpose, the shim member 6 has a through hole 6a.
However, a through hole 7a is formed in the second block 7 so as to correspond to the position where the positioning pin 6 is planted.
【００２５】一方、第二ブロック７には第二接合面７ａ
ａが連続形成され、この第二接合面２ａからは開口部８
ａを端部に形成した形状部８が形成される。On the other hand, the second block 7 has a second joint surface 7a.
a are continuously formed, and an opening 8 is formed from the second joint surface 2a.
The shape part 8 which formed a at the end part is formed.
【００２６】また、図２の組み付け後の正面図をさらに
参照して、シム部材６は図示のような櫛状になるように
エッチング加工やレーザ加工されるととともに、基部６
ｋから開口部４ａの近傍まで所定間隔Ｐ１で延設される
複数の突起部６ｂを形成している。さらに、突起部６ｂ
は図示のようにとなりあう突起部６ｂ間において所定傾
斜角度Θを有する先細りテーパ形状とすることで、塗布
流体の乱流乃至渦の発生を抑制し、かつ揖失を少なくし
た整流にするようにしている。Further, with further reference to the front view after assembly in FIG. 2, the shim member 6 is etched or laser-processed so as to have a comb shape as shown in FIG.
A plurality of protrusions 6b are formed extending from k to the vicinity of the opening 4a at a predetermined interval P1. Further, the protrusion 6b
As shown in the figure, by forming a tapered shape having a predetermined inclination angle 突起 between the protruding portions 6b, the turbulence or vortex of the coating fluid is suppressed, and rectification is performed with less loss. ing.
【００２７】以上のように構成される塗布ヘッドによれ
ば、シム部材６により開口部４ａに至る流路内における
塗布流体の膜厚と流速の均一化を図ることができるよう
になる。According to the coating head configured as described above, the thickness and flow velocity of the coating fluid in the flow path reaching the opening 4a can be made uniform by the shim member 6.
【００２８】次に、図３は第２実施形態になる塗布ヘッ
ドの立体分解図である。また、図４（ａ）は塗布ヘッド
組み立て後の一部拡大正面図、（ｂ）はそのＸ−Ｘ線矢
視断面図である。FIG. 3 is an exploded perspective view of a coating head according to a second embodiment. FIG. 4A is a partially enlarged front view after assembling the coating head, and FIG. 4B is a sectional view taken along line XX of FIG.
【００２９】図３、４において、既に説明済みの構成部
品については同様の符号を附して説明を割愛すると、両
図においてシム部材６を接合面で圧接する例が示されて
している。シム部材６には基部６ｋにおいて多数の貫通
孔６ｃが穿設されるとともに、第一ブロック２にはネジ
穴１１が、また第二ブロック７には貫通穴７ｂが穿設さ
れている。第一ブロック２の剛性は第二ブロック７の剛
性に比較して低く設定されており、第二ブロック７が外
力作用により撓み変形するようにしている。3 and 4, the same reference numerals are given to the components already described, and the description is omitted. In both drawings, an example is shown in which the shim member 6 is pressed against the joint surface. A large number of through holes 6c are formed in the shim member 6 at the base 6k, a screw hole 11 is formed in the first block 2, and a through hole 7b is formed in the second block 7. The rigidity of the first block 2 is set lower than the rigidity of the second block 7, so that the second block 7 is flexibly deformed by the action of an external force.
【００３０】また、第三ブロック１５には開口部４ａ、
８ａの長手方向に沿うように所定間隔で固定されること
で、開口部４ａ、８ａの間の間隙を個別に調整可能にす
る複数のネジとスプリング１４とからなる調整部が設け
られている。また、この第三ブロック１５にはボルト１
３を挿通させるための貫通穴１２が穿設されており、複
数のボルト１５を貫通穴１２に挿通した後に、第一ブロ
ック２に形成されたネジ穴１１に螺合させて、図４
（ｂ）に図示の積層状態に固定する。The third block 15 has openings 4a,
An adjusting portion including a plurality of screws and a spring 14 is provided which is fixed at a predetermined interval along the longitudinal direction of 8a so that the gap between the openings 4a and 8a can be individually adjusted. The third block 15 has a bolt 1
3, a plurality of bolts 15 are inserted through the through-holes 12, and then screwed into the screw holes 11 formed in the first block 2 so that the bolts 15 shown in FIG.
(B) is fixed to the laminated state shown in the figure.
【００３１】以上のように外周部はボルト締結すること
でシム部材を圧接し、流体をシール部を形成する一方
で、シム部材６の突起部６ｂの対面を各々独立したスプ
リング１６等でネジ１４の回動により調整することで押
すことで個別に矯正可能にしている。そのために相手側
の部材は高剛性断面形状としている。スプリング１６の
先端には圧接子１６０を設け、圧接子１６０を突起部
（櫛歯）に作用する配置としている。As described above, the outer peripheral portion is pressed with the shim member by bolting to form a seal portion with the fluid, while the opposing surface of the projection 6b of the shim member 6 is screwed by the independent spring 16 or the like. It is possible to correct individually by pushing by adjusting by the rotation of. For this purpose, the member on the other side has a highly rigid sectional shape. A press contact 160 is provided at the tip of the spring 16, and the press contact 160 is arranged to act on the protrusion (comb).
【００３２】以上のように構成することで、開口部４
ａ、８ａの間隙を個別に調整可能になり、破線図示の流
体Ｔを均一に流出できるようになる。With the above configuration, the opening 4
The gaps a and 8a can be individually adjusted, and the fluid T shown by the broken line can be uniformly discharged.
【００３３】図５は、第３実施形態に係る塗布ヘッド組
み立て後の一部拡大正面図（ａ）、そのＸ−Ｘ線矢視断
面図（ｂ）である。本図において、既に説明済みの構成
部品については同様の符号を附して説明を割愛すると、
突起部６ｂ（櫛歯）に締結用の貫通孔６ｄが穿設されて
おり、各貫通孔６ｄに締結用のボルト１３を通し締める
ようにすることシム部材６を接合面において両側から圧
接できるようにしている。FIG. 5 is a partially enlarged front view (a) after assembling the coating head according to the third embodiment, and a sectional view taken along the line XX (b) of FIG. In this drawing, the same reference numerals are given to the components already described and the description is omitted.
A through hole 6d for fastening is formed in the protruding portion 6b (comb teeth), and a bolt 13 for fastening is passed through each through hole 6d so that the shim member 6 can be pressed from both sides on the joint surface. I have to.
【００３４】図６は、開口部の拡大図であって本図に示
すように、シム部材６を流壁面を構成する接合面間に挟
み圧接することにより、壁面間の大きな反りがあった場
合には、この反りを矯正できるので、均一な接合面間距
離を形成することができる。矯正できる部材であるため
には少なくとも一方の部材にそれなりの変形を期待する
ことになり壁面方向に高い剛性は必要でなくなる。また
形成したヘッド先端の直線性はさほど重要でなく、むし
ろ接合面間で形成される開口部４ａ、８ａの間隙の精度
が重要であることはいうまでもなく、シム部材を用いる
と従来の加工精度で極めて高い開口部間隙精度を容易に
得る事ができるようになる。また、ヘッドで流路を構成
するブロック材質をセラミックス材料から加工すること
で温度変化に影響を受けないようにできる。FIG. 6 is an enlarged view of the opening. As shown in FIG. 6, when the shim member 6 is sandwiched between the joining surfaces constituting the flow wall surface and pressed against each other, there is a large warpage between the wall surfaces. In this case, since the warpage can be corrected, a uniform distance between the joining surfaces can be formed. In order to be a member that can be corrected, at least one member is expected to undergo some deformation, and high rigidity in the wall direction is not required. Further, it is needless to say that the accuracy of the gap between the openings 4a and 8a formed between the joining surfaces is not important. It is possible to easily obtain an extremely high accuracy of the opening gap with high accuracy. Further, by processing the block material constituting the flow path by the head from a ceramic material, it is possible to prevent the head from being affected by a temperature change.
【００３５】以上のように、シム部材の突起部である櫛
歯形状をテーパ状とし渦の発生を抑制し損失を少なくし
た整流溝を形成することで、櫛歯先端から吐出ヘッドに
至るまでの流路の流体膜厚と流速を均一化できる。さら
に、塗布終了時の塗布対象物に塗布した液と塗布ヘッド
内の液切りと液ダレを防止し、塗布ヘッド先端部に付着
した残液を塗布ヘッド内に引き込み口から適当な量の塗
布ヘッド内の流体を排出するようにしている。このとき
ヘッドの外にあって先端に付着した残液はヘッド内に引
き込まれる。引き込まれた流体が制止したとき塗布ヘッ
ド先端からの流体は一様なレベルにあることが好まし
く、このためにも、塗布ヘッド先端の開口部４ａ、８ａ
と突起部６ｂの先端とは適当な距離（好ましく数ｍｍ）
を設け、先端部をテーパ状（好ましくは１０°〜１２
°）にし、ピッチＰ１は等ピッチであることが好まし
い。As described above, by forming the rectifying groove in which the comb teeth, which are the projections of the shim member, are tapered to suppress the generation of vortices and reduce the loss, the distance from the tip of the comb teeth to the discharge head is reduced. The fluid film thickness and flow velocity of the flow path can be made uniform. Furthermore, at the end of the coating, the liquid applied to the object to be coated and the liquid in the coating head are prevented from dripping and dripping, and the remaining liquid adhering to the tip of the coating head is drawn into the coating head and a suitable amount of the coating head is drawn from the opening. The fluid inside is discharged. At this time, the remaining liquid outside the head and adhering to the tip is drawn into the head. It is preferred that the fluid from the tip of the application head is at a uniform level when the drawn fluid is stopped, which is why the openings 4a, 8a at the tip of the application head are also provided.
A suitable distance (preferably several mm) from the tip of the projection 6b
And the tip is tapered (preferably from 10 ° to 12 °).
°), and the pitch P1 is preferably equal.
【００３６】また、従来の塗布ヘッドを構成する部材
は、耐腐性や耐薬品性からＳＵＳ３１６材を常用してい
た。材料をセラミックスにすることで、耐腐性や耐薬品
性ばかりかヤング率も濡れ性も向上し、その比重は従来
比の半分以下であり、塗布ヘッドの軽量化が実現できる
ようになる。Further, SUS316 material has been commonly used as a member constituting the conventional coating head because of its corrosion resistance and chemical resistance. By using ceramics as the material, not only corrosion resistance and chemical resistance, but also Young's modulus and wettability are improved, and the specific gravity is less than half that of the conventional art, so that the weight of the coating head can be reduced.
【００３７】以上説明したように、シム部材を２つの接
合面で圧接して開口部間距離を一定にすることで研削工
程で最大の問題であった加工歪みや反りを随時矯正する
ことができるので、加工技術は壁面の面粗さを向上させ
る作業に専念でき、従来のスピンコーターやスリットコ
ーターでは実現できなかった大型基板への超薄膜形成の
可能性が高まり、技術向上に貢献できるようになる。As described above, by pressing the shim member at the two joining surfaces to keep the distance between the openings constant, it is possible to correct the processing distortion and warping, which are the biggest problems in the grinding process, as needed. Therefore, the processing technology can concentrate on the work to improve the surface roughness of the wall surface, and the possibility of forming an ultra-thin film on a large substrate, which could not be realized with the conventional spin coater or slit coater, has been increased, contributing to technology improvement Become.
【００３８】[0038]
【発明の効果】以上説明したように、本発明によれば、
特にスリット状の開口部の間隙からの流出状態を整流に
でき、しかも確実に組み立てるようにでき、取扱い性を
向上した塗布ヘッドを備えることで塗付開始領域の膜厚
不安定領域の縮小を行えるようにした流体塗布装置の提
供することができる。As described above, according to the present invention,
In particular, the outflow state from the gap between the slit-shaped openings can be rectified, and the assembling can be surely performed. By providing a coating head with improved handleability, the thickness unstable region of the coating start region can be reduced. Thus, a fluid application device can be provided.
【００３９】[0039]
【図１】第１実施形態にかかる塗布ヘッドの立体分解図
である。FIG. 1 is a three-dimensional exploded view of a coating head according to a first embodiment.
【図２】組み付け後の正面図である。FIG. 2 is a front view after assembly.
【図３】第２実施形態にかかる塗布ヘッドの立体分解図
である。FIG. 3 is a three-dimensional exploded view of a coating head according to a second embodiment.
【図４】（ａ）は、図３の塗布ヘッドの組み立て後の一
部拡大正面図である。（ｂ）は（ａ）のＸ−Ｘ線矢視断
面図である。FIG. 4A is a partially enlarged front view after assembling the coating head of FIG. 3; (B) is a sectional view taken along line XX of (a).
【図５】（ａ）は、第３実施形態に係る塗布ヘッド組み
立て後の一部拡大正面図である。（ｂ）は（ａ）のＸ−
Ｘ線矢視断面図である。FIG. 5A is a partially enlarged front view after assembling a coating head according to a third embodiment. (B) is the X-
It is X-ray arrow sectional drawing.
【図６】塗布ヘッドの開口部の拡大図である。FIG. 6 is an enlarged view of an opening of a coating head.
【図７】従来の塗布ヘッドの立体分解図である。FIG. 7 is a three-dimensional exploded view of a conventional coating head.
【図８】従来の塗布ヘッドの開口部の拡大図である。FIG. 8 is an enlarged view of an opening of a conventional coating head.
２ 第一ブロック、 ３ 空洞部、 ４ 形状部 ４ａ 開口部 ６ シム部材 ６ｂ 突起部 ７ 第二ブロック １０ 基板 2 First block, 3 Cavity, 4 Shaped part 4a Opening 6 Shim member 6b Projection 7 Second block 10 Substrate
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｈ０１Ｌ 21/027 Ｂ０５Ｄ 7/00 Ｅ // Ｂ０５Ｄ 7/00 Ｈ Ｈ０１Ｌ 21/30 ５６４Ｚ ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification symbol FI H01L 21/027 B05D 7/00 E // B05D 7/00 H H01L 21/30 564Z
Claims (7)
厚さで流出させるために、前記塗布対象基板の外形寸法
に略一致する全長を有するスリット状の開口部を有する
塗布ヘッドを、前記開口部の長手方向に略直交するよう
に前記塗布対象基板に対して相対移動させつつ塗布を行
なうための流体塗布装置であって、 前記塗布ヘッドを、 所定圧力で圧送される前記塗布流体を、流体注入口を介
して導入し前記開口部の長手方向に広げる空洞部と、 該空洞部に連通するとともに前記塗布流体を所定負圧で
吸引する流体吸引口と、前記空洞部から連続形成される
第一接合面とを設けた第一ブロックと、 前記第一接合面に対して前記開口部の間隙分の厚さを有
するシム部材を介在させて、第二接合面に対して接合さ
れる第二ブロックとからなる積層構造とするとともに、 前記シム部材に、基部から前記開口部の近傍まで所定間
隔で延設される複数の突起部を形成することで、前記開
口部に至る流路内における塗布流体の膜厚と流速の均一
化を図ることを特徴とする流体塗布装置。1. A coating head having a slit-shaped opening having an overall length substantially corresponding to an outer dimension of the substrate to be applied in order to cause a coating fluid to flow out onto the flat substrate to be applied at a predetermined thickness, A fluid application device for performing application while relatively moving the application target substrate so as to be substantially orthogonal to a longitudinal direction of an opening, wherein the application head is configured to supply the application fluid that is pressure-fed at a predetermined pressure. A cavity that is introduced through a fluid inlet and extends in the longitudinal direction of the opening, a fluid suction port that communicates with the cavity and suctions the application fluid at a predetermined negative pressure, and is continuously formed from the cavity. A first block provided with a first joint surface, and a shim member having a thickness corresponding to a gap of the opening with respect to the first joint surface, and a first joint joined to the second joint surface. Lamination consisting of two blocks Along with the structure, by forming a plurality of protrusions extending at a predetermined interval from the base to the vicinity of the opening on the shim member, the thickness of the coating fluid in the flow path to the opening and A fluid coating device characterized by uniform flow velocity.
クと前記シム部材との間の相対位置決めをする位置決め
部材を、さらに設けることを特徴とする請求項１に記載
の流体塗布装置。2. The fluid application device according to claim 1, further comprising a positioning member that performs relative positioning between the first block or the second block and the shim member.
または前記第二ブロックに植設された位置決めピンと、
前記シム部材に穿設されるとともに前記位置決めピンに
挿通される位置決め孔から構成されることを特徴とする
請求項２に記載の流体塗布装置。3. The positioning member, wherein: a positioning pin implanted in the first block or the second block;
The fluid application device according to claim 2, comprising a positioning hole formed in the shim member and inserted into the positioning pin.
ックの剛性の間に差を設けることで、いずれかの接合面
を弾性変形可能にするとともに、 前記開口部の長手方向に沿うように所定間隔で固定され
ることで、前記開口部の前記間隙を個別に調整可能にす
る複数の調整手段を第三ブロックに設けることを特徴と
する請求項１に記載の流体塗布装置。4. By providing a difference between the stiffness of the first block and the stiffness of the second block, any one of the joining surfaces can be elastically deformed, and can be arranged along the longitudinal direction of the opening. 2. The fluid application device according to claim 1, wherein a plurality of adjustment units that are individually fixed at predetermined intervals so as to adjust the gaps of the openings are provided in the third block. 3.
細りテーパ形状とすることで、塗布流体の乱流乃至渦の
発生を抑制し、かつ揖失を少なくした整流にすることを
特徴とする請求項１乃至請求項４のいずれかに記載の流
体塗布装置。5. A rectifying flow in which a turbulent flow or a vortex of the application fluid is suppressed and the loss is reduced by forming the projection portion into a tapered shape having a predetermined inclination angle. The fluid application device according to claim 1.
に、前記第一ブロックと前記第二ブロックにおいて前記
貫通孔に適合するボルト孔及びネジ部を形成すること
で、前記開口部の長手方向に沿う間隙をより一定にする
ことを特徴とする請求項１乃至請求項５のいずれかに記
載の流体塗布装置。6. A longitudinal direction of the opening by forming a through hole in the projection and forming a bolt hole and a screw portion in the first block and the second block that match the through hole. The fluid application device according to any one of claims 1 to 5, wherein the gap along (1) is more constant.
双方、またはいずれかを温度変化に伴う熱膨張のきわめ
て少ないセラミックス材料から加工形成することを特徴
とする請求項１乃至請求項６のいずれかに記載の流体塗
布装置。7. The method according to claim 1, wherein at least one of the first block and the second block is formed from a ceramic material having a very small thermal expansion due to a temperature change. A fluid application device according to any one of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9360898A JPH11188301A (en) | 1997-12-26 | 1997-12-26 | Fluid coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9360898A JPH11188301A (en) | 1997-12-26 | 1997-12-26 | Fluid coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11188301A true JPH11188301A (en) | 1999-07-13 |
Family
ID=18471381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9360898A Withdrawn JPH11188301A (en) | 1997-12-26 | 1997-12-26 | Fluid coater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11188301A (en) |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20050301 |