JPH11185313A - Optical recording medium - Google Patents

Optical recording medium

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Publication number
JPH11185313A
JPH11185313A JP9354524A JP35452497A JPH11185313A JP H11185313 A JPH11185313 A JP H11185313A JP 9354524 A JP9354524 A JP 9354524A JP 35452497 A JP35452497 A JP 35452497A JP H11185313 A JPH11185313 A JP H11185313A
Authority
JP
Japan
Prior art keywords
layer
optical recording
recording medium
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9354524A
Other languages
Japanese (ja)
Inventor
Toshio Inao
俊雄 稲生
Koyata Takahashi
小弥太 高橋
Hitoshi Iigusa
仁志 飯草
Kensho Oshima
憲昭 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP9354524A priority Critical patent/JPH11185313A/en
Publication of JPH11185313A publication Critical patent/JPH11185313A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a recording film which hardly gives rise to a head crash and exhibits high durability without the impairment of optical characteristics by forming a transparent diamond-like carbon layer on a protective layer forming on a substrate and forming a lubricating layer thereon. SOLUTION: The optical recording medium is formed by laminating a first protective layer 12, the recording layer 13 consisting of a magneto-optical recording film, a second protective layer 14, the diamond-like carbon(DLC) layer 15 and the lubricating layer 16 on the substrate 11. Glass, polycarbonate, etc., are usable as the substrate 11. A transparent dielectric film of AlN, SiN, etc., are formed as the first protective layer 12 on the substrate 11. Further, the recording layer 13 consisting of the magneto-optical recording film of TbFeCo, DyFeCo, etc., is formed on the first protective layer 12. AlN, SiN, etc., are formed as the second protective layer 14 on the recording layer 13 and the DLC 15 is formed thereon. Finally, the lubricating layer 16 of a film thickness of >=0.3 to <=4.0 nm is formed, by which the recording medium is obtd.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は書き換えが可能な光
記録媒体、特に、レーザービームによって記録層に光学
的変化を生じさせ、情報の記録、再生及び消去を行なう
光磁気記録媒体、あるいは相変化記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rewritable optical recording medium, and more particularly to a magneto-optical recording medium for recording, reproducing and erasing information by causing an optical change in a recording layer by a laser beam, or a phase change. It relates to a recording medium.

【０００２】[0002]

【従来の技術】光記録媒体は大容量・高密度記録が可能
な可搬型記録媒体であり、近年のマルチメディア化に伴
なうコンピュータの大容量保存ファイルとして動画等を
記録する書き換え型メディアとして需要が急増しつつあ
る。2. Description of the Related Art An optical recording medium is a portable recording medium capable of large-capacity and high-density recording, and is a rewritable medium for recording moving images and the like as a large-capacity storage file of a computer accompanying the recent increase in multimedia. Demand is increasing rapidly.

【０００３】従来の書き換え型光記録媒体は一般にプラ
スチック等の円盤状の基板に記録層を含む多層膜を形成
し、プラスチック基板側からレーザーを照射して記録、
再生、消去を行っていた。[0003] Conventional rewritable optical recording media generally form a multilayer film including a recording layer on a disc-shaped substrate such as plastic, and irradiate a laser from the plastic substrate side to record.
Playing and erasing were performed.

【０００４】これに対して、光学ヘッドを記録膜に近付
けて記録再生する、いわゆる、近接場光記録が高密度化
の手段として注目されている（Ａｐｐｌ．Ｐｈｙｓ．Ｌ
ｅｔｔ．６８，ｐ．１４１（１９９６））。On the other hand, so-called near-field optical recording, in which an optical head is brought close to a recording film for recording / reproducing, has attracted attention as a means for increasing the density (Appl. Phys. L.).
ett. 68, p. 141 (1996)).

【０００５】この記録方法ではＳｏｌｉｄ Ｉｍｍｅｒ
ｓｉｏｎ Ｌｅｎｓ（以下ＳＩＬと略す）ヘッドを使用
しレーザービームスポットサイズを縮小することによ
り、従来光源のレーザー波長（λ）によって決まる記録
限界（〜λ／２ＮＡ：ＮＡは対物レンズの開口数）より
短いマークでの再生が可能であり、超高記録密度の記録
再生が実現できる。この近接場光記録では光学ヘッドを
記録媒体に近付ける必要があるために（〜１００ｎ
ｍ）、従来の光記録媒体のように基板を通して記録膜に
レーザービームを照射するのではなく、基板を通さずに
直接記録膜にレーザービームを照射する方法を用いる。
すなわち、記録膜の構成が従来の光記録媒体では基板／
第１保護膜／記録膜／第２保護膜／反射膜としているの
が一般的であるのに対して、近接場光記録では基板／反
射膜／第１保護膜／記録膜／第２保護膜という逆構成の
膜構造として膜表面側からレーザービームを照射し、記
録再生を行なう（表面記録再生）。この際、記録膜とＳ
ＩＬヘッドを近付けるために浮上式のスライダーヘッド
を利用することが提案されている。In this recording method, Solid Imager is used.
By reducing the size of a laser beam spot using a Ssion Lens (hereinafter abbreviated as SIL) head, it is shorter than the recording limit (： λ / 2NA: NA is the numerical aperture of the objective lens) determined by the laser wavelength (λ) of the conventional light source. Reproduction with marks is possible, and recording and reproduction with an ultra-high recording density can be realized. In this near-field optical recording, it is necessary to bring the optical head close to the recording medium (〜100 n).
m) Instead of irradiating the recording film with the laser beam through the substrate as in the conventional optical recording medium, a method of directly irradiating the recording film with the laser beam without passing through the substrate is used.
That is, in a conventional optical recording medium, the recording film has a substrate /
In general, the first protective film / recording film / second protective film / reflective film is used, whereas in near-field optical recording, the substrate / reflective film / first protective film / recording film / second protective film is used. A laser beam is irradiated from the film surface side to perform recording / reproduction (surface recording / reproduction). At this time, the recording film and S
It has been proposed to use a floating slider head to approach the IL head.

【０００６】[0006]

【発明が解決しようとする課題】近接場光記録では上述
のように超高記録密度が可能であるが、光学ヘッドを記
録膜に接近させる必要がある。この場合、浮上式のスラ
イダーヘッドが記録膜に衝突する、いわゆる、ヘッドク
ラッシュが起きやすく、高い耐久性のある記録膜を得る
のが困難である。In the near-field optical recording, an extremely high recording density is possible as described above, but it is necessary to bring the optical head close to the recording film. In this case, a flying slider head collides with the recording film, that is, a so-called head crash easily occurs, and it is difficult to obtain a highly durable recording film.

【０００７】本発明は、ヘッドクラッシュが起きにく
い、高い耐久性のある表面記録再生型光記録膜を提供す
ることを目的としている。It is an object of the present invention to provide a highly durable surface recording / reproducing optical recording film in which head crash is unlikely to occur.

【０００８】[0008]

【課題を解決するための手段】本発明者等は上述のよう
な現状に鑑み、鋭意検討を重ねた結果、近接場光記録を
利用した表面記録再生型光記録媒体において、保護層の
上に透明なダイヤモンド状カーボン膜と潤滑層を形成す
ることにより、光学的な特性を損なうことなくヘッドク
ラッシュが起きにくく耐久性の高い記録膜が得られるこ
とを見いだし本発明を完成するに至った。Means for Solving the Problems In view of the above situation, the present inventors have made intensive studies and as a result, have found that a surface recording / reproducing type optical recording medium using near-field optical recording has By forming a transparent diamond-like carbon film and a lubricating layer, it has been found that a recording film having high durability can be obtained without causing head crash without deteriorating optical characteristics, and the present invention has been completed.

【０００９】すなわち、本発明の光記録媒体は基板上に
少なくとも記録層、保護層をこの順に形成した光記録媒
体において、保護層上にダイヤモンド状カーボン（ＤＬ
Ｃ）層を形成し、さらにこのダイヤモンド状カーボン層
の上に潤滑層を形成したことを特徴とするものである。That is, in the optical recording medium of the present invention, at least a recording layer and a protective layer are formed on a substrate in this order.
C), and a lubricating layer is formed on the diamond-like carbon layer.

【００１０】本発明の光記録媒体の記録層はＴｂＦｅＣ
ｏ、ＤｙＦｅＣｏ、ＧｄＴｂＦｅＣｏ、ＮｄＤｙＦｅＣ
ｏ等の光磁気記録膜、あるいはＧｅＳｂＴｅ、ＡｇＩｎ
ＳｂＴｅ等の相変化記録膜など偏光面、反射率、光の位
相などの変化で記録が可能な膜で構成される。[0010] The recording layer of the optical recording medium of the present invention is made of TbFeC.
o, DyFeCo, GdTbFeCo, NdDyFeC
o or other magneto-optical recording film, or GeSbTe, AgIn
It is composed of a film such as a phase change recording film such as SbTe, which can be recorded by changing the polarization plane, the reflectance, the phase of light, and the like.

【００１１】本発明の光記録媒体の保護層はＡｌＮ、Ｓ
ｉＮ、Ｔａ2Ｏ5、ＺｎＳ−ＳｉＯ2等からなる透明な誘
電体膜で構成される。The protective layer of the optical recording medium of the present invention is made of AlN, S
It is composed of a transparent dielectric film made of iN, Ta 2 O 5 , ZnS—SiO 2 or the like.

【００１２】本発明の光記録媒体のＤＬＣ層は水素を含
有したカーボンで構成し、波長６３３ｎｍにおける屈折
率が１．７〜２．１の範囲とすることが好ましい。ＤＬ
Ｃは水素含有ＤＬＣと窒素含有ＤＬＣがあるが水素含有
ＤＬＣのほうが透明性が高く光ディスクに用いるには好
ましい。窒素含有ＤＬＣを用いてもスライダーヘッドの
浮上性は向上するが、窒素含有ＤＬＣの場合は膜厚を１
０ｎｍ以下として光の吸収を少なくすることが好まし
い。The DLC layer of the optical recording medium of the present invention is preferably made of hydrogen-containing carbon, and has a refractive index at a wavelength of 633 nm in the range of 1.7 to 2.1. DL
C includes hydrogen-containing DLC and nitrogen-containing DLC, and hydrogen-containing DLC has higher transparency and is preferable for use in optical discs. The use of a nitrogen-containing DLC improves the levitation of the slider head.
It is preferable to reduce the absorption of light to 0 nm or less.

【００１３】ＤＬＣ層はスパッタ法、イオンビームスパ
ッタ法、プラズマＣＶＤ法等により成膜することができ
る。スパッタ法で水素含有ＤＬＣを作製するにはアルゴ
ン（Ａｒ）とメタン（ＣＨ4）、あるいはアルゴン（Ａ
ｒ）と水素（Ｈ2）の雰囲気中でカーボン（Ｃ）ターゲ
ットをスパッタすることなどで可能である。メタンや水
素の流量を大きくすると屈折率は小さくなる。従ってス
パッタ成膜中のメタンや水素の流量でＤＬＣの屈折率は
制御可能である。ＤＬＣの屈折率を１．７以上とするこ
とで欠陥にスライダーヘッドがヒットしたときの衝撃を
やわらげヘッドクラッシュが起きにくくなる。また、屈
折率を２．１以下とすることで波長６００ｎｍ以上で吸
収をほとんど無視できる程度に透明となる。また、波長
６００ｎｍから４００ｎｍの間は６３３ｎｍでの屈折率
が低いほど吸収が少ないが、吸収率に応じてＤＬＣ層を
薄く設定することで光学的な特性をほとんど損なうこと
なくスライダーヘッドの浮上特性が向上する。The DLC layer can be formed by a sputtering method, an ion beam sputtering method, a plasma CVD method or the like. To produce a hydrogen-containing DLC by sputtering, argon (Ar) and methane (CH 4 ) or argon (A)
r) and a hydrogen (H 2 ) atmosphere by sputtering a carbon (C) target. Increasing the flow rate of methane or hydrogen decreases the refractive index. Therefore, the refractive index of DLC can be controlled by the flow rate of methane or hydrogen during sputtering film formation. By setting the refractive index of the DLC to 1.7 or more, the impact when the slider head hits a defect is softened, and a head crash hardly occurs. Further, by setting the refractive index to be 2.1 or less, the film becomes transparent to a wavelength of 600 nm or more so that absorption can be almost ignored. Also, between 600 nm and 400 nm, the lower the refractive index at 633 nm, the lower the absorption. However, by setting the DLC layer thin according to the absorptance, the floating characteristics of the slider head can be reduced without substantially impairing the optical characteristics. improves.

【００１４】本発明の光記録媒体の潤滑層はシリコーン
オイル、あるいはフルオロポリエーテル系のフッ素オイ
ル等潤滑性を示すものであれば使用できるが、特にパー
フルオロポリエーテル及びパーフルオロポリエーテル誘
導体が望ましい。パーフルオロポリエーテル誘導体とし
てはアルコール変性パーフルオロポリエーテル、エステ
ル変性パーフルオロポリエーテル、イソシアネート変性
パーフルオロポリエーテル、カルボキシル基変性パーフ
ルオロポリエーテル、ピペロニル変性パーフルオロポリ
エーテル等が挙げられる。本発明の潤滑層の膜厚は０．
３ｎｍ以上４．０ｎｍ以下が好ましい。０．３ｎｍ未満
では潤滑層の保護性能が足りなくなり薄膜に傷がはいり
やすくなり、４．０ｎｍ以上ではスライダーヘッドがデ
ィスクに張り付いてクラッシュしやすくなる。The lubricating layer of the optical recording medium of the present invention can be used as long as it exhibits lubricating properties such as silicone oil or fluoropolyether-based fluorine oil, but perfluoropolyether and perfluoropolyether derivatives are particularly preferable. . Examples of the perfluoropolyether derivative include alcohol-modified perfluoropolyether, ester-modified perfluoropolyether, isocyanate-modified perfluoropolyether, carboxyl group-modified perfluoropolyether, and piperonyl-modified perfluoropolyether. The thickness of the lubricating layer of the present invention is 0.1.
It is preferably 3 nm or more and 4.0 nm or less. If the thickness is less than 0.3 nm, the protective performance of the lubricating layer will be insufficient, and the thin film will be easily damaged, and if it is more than 4.0 nm, the slider head will stick to the disk and crash easily.

【００１５】本発明を光磁気記録媒体に適用する場合
は、基板上に少なくとも第１保護層、光磁気記録層、第
２保護層、ダイヤモンド状カーボン層、潤滑層を積層し
てなることが好ましい。When the present invention is applied to a magneto-optical recording medium, it is preferable that at least a first protective layer, a magneto-optical recording layer, a second protective layer, a diamond-like carbon layer, and a lubricating layer are laminated on a substrate. .

【００１６】図１にこの構成の本発明の光記録媒体の一
実施様態の部分断面図を示す。基板１１上に第１保護層
１２、光磁気記録膜からなる記録層１３、第２保護層１
４、ダイヤモンド状カーボン層１５、潤滑層１６が積層
されている。FIG. 1 is a partial cross-sectional view of an embodiment of the optical recording medium of the present invention having this structure. On a substrate 11, a first protective layer 12, a recording layer 13 composed of a magneto-optical recording film, and a second protective layer 1.
4, a diamond-like carbon layer 15 and a lubricating layer 16 are laminated.

【００１７】基板１１としては機械特性などの媒体基板
としての特性を満たすものであれば特に限定されず、ガ
ラス、ポリカーボネート、アモルファスポリオレフィ
ン、スーパーエンジニアリングプラスチック等を用いる
ことができる。この基板１１の上に第１保護層１２とし
てＡｌＮ、ＳｉＮ、Ｔａ2Ｏ5、ＺｎＳ−ＳｉＯ2等の透
明な誘電体膜をスパッタ法又は真空蒸着法等で形成す
る。この第１保護層１２上にＴｂＦｅＣｏ、ＤｙＦｅＣ
ｏ、ＧｄＴｂＦｅＣｏ、ＮｄＤｙＦｅＣｏ等の光磁気記
録膜からなる記録層１３をスパッタ法又は真空蒸着法等
で形成する。この記録層１３上に第２保護層１４として
ＡｌＮ、ＳｉＮ、Ｔａ2Ｏ5、ＺｎＳ−ＳｉＯ2等をスパ
ッタ法又は真空蒸着法等で形成する。この上にＤＬＣ膜
１５をスパッタ法などで形成する。さらにこの上に、潤
滑層１６をディップ引き上げ法等の方法で形成する。The substrate 11 is not particularly limited as long as it satisfies the characteristics of a medium substrate such as mechanical characteristics, and glass, polycarbonate, amorphous polyolefin, super engineering plastic or the like can be used. A transparent dielectric film such as AlN, SiN, Ta 2 O 5 , ZnS—SiO 2 or the like is formed as a first protective layer 12 on the substrate 11 by a sputtering method or a vacuum evaporation method. On the first protective layer 12, TbFeCo, DyFeC
o, a recording layer 13 made of a magneto-optical recording film of GdTbFeCo, NdDyFeCo, or the like is formed by a sputtering method, a vacuum evaporation method, or the like. AlN as the second protective layer 14 on the recording layer 13, SiN, Ta 2 O 5 , a ZnS-SiO 2 or the like formed by sputtering or a vacuum evaporation method or the like. A DLC film 15 is formed thereon by a sputtering method or the like. Further, a lubricating layer 16 is formed thereon by a method such as a dip pulling method.

【００１８】第１保護層１２は記録層１３を保護できる
程度の膜厚があれば良く、１０ｎｍ以上１００ｎｍ以下
の膜厚が好ましい。記録層１３は光が第１保護層１２ま
で透過しない程度の膜厚が必要で３０ｎｍ以上２００ｎ
ｍ以下の膜厚が好ましい。第２保護層１４は記録層を保
護する役割のほかに記録層への光吸収効率を制御した
り、記録前後の反射光の変化量やカー回転角を大きくす
る役割も有する。このため、第２保護層１４の膜厚は使
用するレーザー波長などを考慮して設計し、２０ｎｍ以
上３００ｎｍ以下が好ましい。基板１１と第１保護層１
２の間にＡｌ、Ａｌ合金、Ａｕ、Ａｇなどの熱伝導の良
好な膜をヒートシンクとして挿入し、記録感度を調整す
ることも可能である。The first protective layer 12 only needs to have a thickness that can protect the recording layer 13, and preferably has a thickness of 10 nm or more and 100 nm or less. The recording layer 13 needs to have a thickness such that light does not transmit to the first protective layer 12 and is 30 nm or more and 200 n
m or less is preferred. In addition to the role of protecting the recording layer, the second protective layer 14 also has the role of controlling the light absorption efficiency of the recording layer, and increasing the amount of change in reflected light before and after recording and the Kerr rotation angle. For this reason, the thickness of the second protective layer 14 is designed in consideration of the laser wavelength to be used, and is preferably 20 nm or more and 300 nm or less. Substrate 11 and first protective layer 1
It is also possible to insert a film having good thermal conductivity such as Al, Al alloy, Au, Ag or the like as a heat sink between the two to adjust the recording sensitivity.

【００１９】本発明を光磁気記録媒体に適用する場合の
他の媒体構成としては、基板上に少なくとも反射層、光
磁気記録層、保護層、ダイヤモンド状カーボン層、潤滑
層を積層してなることを特徴とすることがあげられる。In the case where the present invention is applied to a magneto-optical recording medium, another medium configuration is such that at least a reflective layer, a magneto-optical recording layer, a protective layer, a diamond-like carbon layer, and a lubricating layer are laminated on a substrate. It is characterized by the following.

【００２０】図２に本発明のこの構成の光記録媒体の一
実施様態の部分断面図を示す。基板２１上に反射層２
２、第１保護層２３、光磁気記録層２４、第２保護層２
５、ダイヤモンド状カーボン層２６、潤滑層２７が積層
されている。FIG. 2 is a partial cross-sectional view of one embodiment of the optical recording medium of this configuration according to the present invention. Reflective layer 2 on substrate 21
2, first protective layer 23, magneto-optical recording layer 24, second protective layer 2
5, a diamond-like carbon layer 26 and a lubrication layer 27 are laminated.

【００２１】反射層２２はＡｌ、Ａｌ合金、Ａｕ、Ａｇ
などの反射率の高い材料で構成され、膜厚は反射率を確
保するため１０ｎｍ以上２００ｎｍ以下が好ましい。第
１保護層２３と第２保護層２５はＡｌＮ、ＳｉＮ、Ｔａ
2Ｏ5、ＺｎＳ−ＳｉＯ2等の透明な誘電体膜である。光
磁気記録層１５の膜厚は記録の安定性を確保するために
８ｎｍ以上が好ましく、ある程度反射層まで光を透過さ
せて多重反射を起こさせてカー回転角を増大させるため
に４０ｎｍ以下が好ましく、３０ｎｍ以下がさらに好ま
しい。The reflection layer 22 is made of Al, Al alloy, Au, Ag.
And the like, and the film thickness is preferably 10 nm or more and 200 nm or less in order to secure the reflectance. The first protective layer 23 and the second protective layer 25 are made of AlN, SiN, Ta.
It is a transparent dielectric film of 2 O 5 , ZnS—SiO 2 or the like. The thickness of the magneto-optical recording layer 15 is preferably 8 nm or more in order to secure recording stability, and is preferably 40 nm or less in order to transmit light to the reflective layer to some extent to cause multiple reflection and increase the Kerr rotation angle. , 30 nm or less is more preferable.

【００２２】このような構成でプラスチック基板のよう
に環境変化により基板が変形しやすい基板を使っても環
境変化に強く、反射層が結晶性であっても結晶のグレイ
ンによるノイズを低くするためには、図３に示すように
基板３１上に膜厚ｄ1の反射層３２、膜厚ｄ2の光磁気記
録層３３、膜厚ｄ3の保護層３４、膜厚ｄ4のダイヤモン
ド状カーボン層３５、潤滑層３６を積層してなり、各層
の膜厚が１０ｎｍ≦ｄ1≦１００ｎｍ、８ｎｍ≦ｄ2≦３
０ｎｍ、５ｎｍ≦ｄ3、３０ｎｍ≦ｄ3＋ｄ4≦１００ｎ
ｍ、５ｎｍ≦ｄ4≦６０ｎｍであることが好ましい。こ
のような構成により、薄い記録膜でも良好な光磁気出力
を得ることが可能であり、かつ膜厚が薄いために膜中の
応力が小さく衝突の衝撃や環境変化に対して膜が割れに
くくなる。また、反射層にＴｂＦｅＣｏ、ＤｙＦｅＣ
ｏ、ＧｄＴｂＦｅＣｏ、ＮｄＤｙＦｅＣｏ等のアモルフ
ァスの光磁気記録層を直接積層することで反射層のグレ
インによるノイズが強調されなくなる。With such a configuration, even if a substrate such as a plastic substrate whose substrate is easily deformed due to environmental changes is used, it is resistant to environmental changes, and even if the reflective layer is crystalline, noise due to crystal grains is reduced. a reflective layer 32 of thickness d 1 on the substrate 31 as shown in FIG. 3, the magneto-optical recording layer 33 of thickness d 2, the protective layer 34 having a thickness d 3, diamond-like carbon layer having a thickness d 4 35, a lubricating layer 36 is laminated, and the thickness of each layer is 10 nm ≦ d 1 ≦ 100 nm, 8 nm ≦ d 2 ≦ 3
0 nm, 5 nm ≦ d 3 , 30 nm ≦ d 3 + d 4 ≦ 100 n
m, preferably 5 nm ≦ d 4 ≦ 60 nm. With such a configuration, it is possible to obtain a good magneto-optical output even with a thin recording film, and since the film thickness is small, the stress in the film is small, so that the film is less likely to be broken by impact of collision or environmental change. . In addition, TbFeCo, DyFeC
By directly laminating an amorphous magneto-optical recording layer such as o, GdTbFeCo, NdDyFeCo, etc., noise due to grains in the reflective layer is not emphasized.

【００２３】[0023]

【実施例】以下、本発明を実施例に基づき更に詳細に説
明するが、本発明はこれらの実施例のみに限定されるも
のではない。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to only these Examples.

【００２４】（実施例１、比較例１及び比較例２）以下
に記すようにして、図２に示すような構造の近接場光記
録用の光記録媒体を製造した。トラックピッチ０．４５
μｍのポリカーボネート製の直径１３０ｍｍのディスク
状の基板２１上に反射層２２としてＡｌ−３ｗｔ％Ｃｒ
合金膜（膜厚５０ｎｍ）をＤＣスパッタ法により形成し
た。この上にＳｉＮからなる第１保護層２３をＡｒとＮ
2の混合雰囲気中でＳｉターゲットを使用した反応性Ｒ
Ｆスパッタ法で形成した（膜厚５ｎｍ）。この上にＴｂ
20（Ｆｅ90Ｃｏ10）80からなる光磁気記録層２４をＴｂ
ターゲットとＦｅ90Ｃｏ10ターゲットのＤＣ同時スパッ
タ法により形成した（膜厚２０ｎｍ）。さらにこの上に
ＳｉＮからなる第２保護層２５をＡｒとＮ2の混合雰囲
気中でＳｉターゲットを使用した反応性ＲＦスパッタ法
で形成した（膜厚３０ｎｍ）。この上に６３３ｎｍにお
ける屈折率が１．８５のＤＬＣ層２６をＡｒとＣＨ4の
混合雰囲気中でＣターゲットを使用した反応性ＲＦスパ
ッタ法で形成した（膜厚２０ｎｍ）。Example 1, Comparative Example 1 and Comparative Example 2 An optical recording medium for near-field optical recording having a structure as shown in FIG. 2 was manufactured as described below. Track pitch 0.45
Al-3 wt% Cr as a reflective layer 22 on a disk-shaped substrate 21 made of polycarbonate having a diameter of 130 mm
An alloy film (thickness: 50 nm) was formed by DC sputtering. On this, a first protective layer 23 made of SiN is formed by Ar and N
Reactivity R using Si target in mixed atmosphere of 2
It was formed by the F sputtering method (film thickness: 5 nm). Tb on this
The magneto-optical recording layer 24 made of 20 (Fe 90 Co 10 ) 80 is
A target and an Fe 90 Co 10 target were formed by a DC simultaneous sputtering method (film thickness: 20 nm). Further, a second protective layer 25 made of SiN was formed thereon by a reactive RF sputtering method using a Si target in a mixed atmosphere of Ar and N 2 (thickness: 30 nm). A DLC layer 26 having a refractive index of 1.85 at 633 nm was formed thereon by a reactive RF sputtering method using a C target in a mixed atmosphere of Ar and CH 4 (film thickness: 20 nm).

【００２５】ＤＬＣ層２６を形成した後、パーフルオロ
ポリエーテル系溶媒（アウジモント社製、商品名「ガル
デンＳＶ−７０」）を使用したピペロニル変性パーフル
オロポリエーテル（アウジモント社製、商品名「フォン
ブリン：ＡＭ２００１」）の溶液から記録媒体を引き上
げることにより潤滑層２７を塗布して光磁気記録媒体を
完成させた。After the DLC layer 26 has been formed, piperonyl-modified perfluoropolyether (manufactured by Audimont, trade name “Fomblin”) using a perfluoropolyether solvent (manufactured by Ausimont, trade name “Galden SV-70”) : AM2001 ”), and the lubricating layer 27 was applied by lifting the recording medium from the solution to complete the magneto-optical recording medium.

【００２６】この際、溶液濃度と引き上げ速度を変化さ
せることにより潤滑層の膜厚を０．２、０．５、１．
０、２．０、３．０、４．５ｎｍと変化させた光磁気記
録媒体を作製した。潤滑層の膜厚はＸ線光電子分光法
（ＸＰＳ）を使用し、Ｃ1Sピーク強度を観察することに
より算出した。At this time, the thickness of the lubricating layer is changed to 0.2, 0.5, 1.
Magneto-optical recording media were prepared in which the thickness was changed to 0, 2.0, 3.0, and 4.5 nm. The thickness of the lubricating layer was calculated by observing the C 1S peak intensity using X-ray photoelectron spectroscopy (XPS).

【００２７】また、比較例１として基板２１からＤＬＣ
層２６までは実施例１と同様に積層し、潤滑層２７を塗
布しない光磁気記録媒体および比較例２として基板２１
から光磁気記録層２４までは実施例１と同様に積層し、
ＳｉＮからなる第２保護層２５を５０ｎｍ積層し、ＤＬ
Ｃ層２６を省いて潤滑層２７を２．０ｎｍ塗布した光磁
気記録媒体を作製した。Further, as Comparative Example 1, DLC was
The layer up to the layer 26 is laminated in the same manner as in the first embodiment, and the magneto-optical recording medium not coated with the lubricating layer 27 and the substrate 21 as the comparative example 2
To the magneto-optical recording layer 24 are laminated in the same manner as in the first embodiment.
A second protective layer 25 made of SiN is laminated to a thickness of 50 nm,
The magneto-optical recording medium having the lubricating layer 27 coated thereon with a thickness of 2.0 nm was manufactured without the C layer 26.

【００２８】以上のようにして得られた光磁気記録媒体
をグライドテスターにセットして、線速度７．５ｍ／ｓ
で回転させながら、ピエゾ素子のついたグライドヘッド
（グライドライト社製：７０％スライダー、０．０１
２″×６．０ｇｒ）を半径３０〜６０ｍｍの範囲でシー
クさせた。このグライドヘッドの浮上量は線速７．５ｍ
／ｓにおいて０．０５μｍである。グライドヘッドをシ
ークさせた際にピエゾ素子に誘起される電圧をオシロス
コープにより観察した。この際、８００ｍＶを越える電
圧値を記録媒体との接触と判断しカウントした。The magneto-optical recording medium obtained as described above was set on a glide tester, and the linear velocity was 7.5 m / s.
Glide head with a piezo element (made by Glidelight: 70% slider, 0.01
2 "x 6.0 gr) was sought within a radius of 30 to 60 mm. The flying height of this glide head was 7.5 m in linear velocity.
/ S is 0.05 μm. The voltage induced in the piezo element when the glide head was sought was observed with an oscilloscope. At this time, a voltage value exceeding 800 mV was judged as contact with the recording medium and counted.

【００２９】以上の測定を実施例１、比較例１及び比較
例２の光磁気記録媒体それぞれ１０枚づつに対して行っ
たところ、実施例１の潤滑層膜厚が０．５、１．０、
２．０、３．０ｎｍの光磁気記録媒体では目に見える傷
の発生はなく、ヒット数はいずれも３個以内で、ヒット
数がゼロの媒体の割合は４０％以上と良好であった。実
施例１の潤滑層膜厚が０．２ｎｍの光磁気記録媒体では
ヒット数が平均５個程度でクラッシュは無かったがいづ
れの媒体にも目に見える細かな傷が数個発生した。実施
例１の潤滑層膜厚が４．５ｎｍの光磁気記録媒体では、
１０枚中３枚に傷が数本発生した。残りの媒体はヒット
数が５個以内であった。潤滑層を形成していない比較例
１及びＤＬＣ層を省いた比較例２の光磁気記録媒体では
いずれの媒体もヘッドをロードしたとたんにクラッシュ
した。The above measurements were performed on each of the ten magneto-optical recording media of Example 1, Comparative Examples 1 and 2, and the lubricating layer thickness of Example 1 was 0.5, 1.0. ,
The 2.0 and 3.0 nm magneto-optical recording medium had no visible scratches, the number of hits was less than 3, and the ratio of the medium having zero hits was as good as 40% or more. In the magneto-optical recording medium of Example 1 having a lubricating layer thickness of 0.2 nm, the number of hits was about 5 on average, and there was no crash. In the magneto-optical recording medium having a lubricating layer thickness of 4.5 nm in Example 1,
Several scratches occurred on 3 out of 10 sheets. The remaining media had less than 5 hits. In each of the magneto-optical recording media of Comparative Example 1 in which the lubricating layer was not formed and Comparative Example 2 in which the DLC layer was omitted, both media crashed as soon as the head was loaded.

【００３０】以上の結果より潤滑層は０．３ｎｍ以上
４．０ｎｍ以下の厚さが好ましい。また、ＤＬＣ層２６
がないと媒体の浮上特性が良くないことがわかった。From the above results, the lubricating layer preferably has a thickness of 0.3 nm or more and 4.0 nm or less. Also, the DLC layer 26
It was found that the absence of the medium resulted in poor flying characteristics of the medium.

【００３１】（実施例２及び比較例３）以下に記すよう
にして、図１に示すような構造の近接場光記録用の光記
録媒体を製造した。トラックピッチ０．４５μｍのポリ
カーボネート製の直径１３０ｍｍのディスク状の基板１
１上にＡｌＳｉＮからなる第１保護層１２をＡｒとＮ2
の混合雰囲気中でＡｌＳｉターゲットを使用した反応性
ＲＦスパッタ法で形成した（膜厚５０ｎｍ）。この上に
Ｔｂ22（Ｆｅ85Ｃｏ15）78からなる光磁気記録層１３を
ＴｂターゲットとＦｅ85Ｃｏ15ターゲットのＤＣ同時ス
パッタ法により形成した（膜厚７０ｎｍ）。さらにこの
上にＳｉＮからなる第２保護層１４をＡｒとＮ2の混合
雰囲気中でＳｉターゲットを使用した反応性ＲＦスパッ
タ法で形成した（膜厚８０ｎｍ）。この上に６３３ｎｍ
における屈折率が１．９のＤＬＣ層１５をＡｒとＣＨ4
の混合雰囲気中でＣターゲットを使用した反応性ＲＦス
パッタ法で形成した（膜厚３０ｎｍ）。Example 2 and Comparative Example 3 As described below, an optical recording medium for near-field optical recording having a structure as shown in FIG. 1 was manufactured. Disc-shaped substrate 1 made of polycarbonate with a track pitch of 0.45 μm and a diameter of 130 mm
A first protective layer 12 made of AlSiN is formed on Ar and N 2.
Formed by a reactive RF sputtering method using an AlSi target in a mixed atmosphere (film thickness: 50 nm). On this, a magneto-optical recording layer 13 made of Tb 22 (Fe 85 Co 15 ) 78 was formed by a DC simultaneous sputtering method using a Tb target and an Fe 85 Co 15 target (film thickness: 70 nm). Further, a second protective layer 14 of SiN was formed thereon by a reactive RF sputtering method using a Si target in a mixed atmosphere of Ar and N 2 (film thickness: 80 nm). 633 nm on this
The DLC layer 15 having a refractive index of 1.9 was formed of Ar and CH 4
Formed by a reactive RF sputtering method using a C target in a mixed atmosphere (film thickness: 30 nm).

【００３２】ＤＬＣ層１５を形成した後、パーフルオロ
ポリエーテル系溶媒（アウジモント社製、商品名「ガル
デンＳＶ−７０」）を使用したピペロニル変性パーフル
オロポリエーテル（アウジモント社製、商品名「フォン
ブリン：ＡＭ２００１」）の溶液から記録媒体を引き上
げることにより潤滑層１６を１．５ｎｍ塗布して光磁気
記録媒体を完成させた。After the DLC layer 15 is formed, piperonyl-modified perfluoropolyether (manufactured by Ausimont, trade name “Fomblin”) using a perfluoropolyether solvent (manufactured by Ausimont, trade name “Galden SV-70”) : AM2001 "), and the lubricating layer 16 was applied to 1.5 nm by pulling up the recording medium from the solution to complete the magneto-optical recording medium.

【００３３】また、比較例３として基板１１から光磁気
記録層１３までは実施例２と同様に積層し、ＳｉＮから
なる第２保護層１４を１０５ｎｍ積層し、ＤＬＣ層１５
を省いて潤滑層１６を１．５ｎｍ塗布した光磁気記録媒
体を作製した。As Comparative Example 3, the substrate 11 to the magneto-optical recording layer 13 were laminated in the same manner as in Example 2, the second protective layer 14 of SiN was laminated to a thickness of 105 nm, and the DLC layer 15 was formed.
Was omitted to produce a magneto-optical recording medium coated with a 1.5 nm lubricating layer 16.

【００３４】以上のようにして得られた光記録媒体をグ
ライドテスターにセットして、実施例１と同様の方法で
グライド試験を行った。実施例２および比較例３の光磁
気記録媒体それぞれ１０枚づつに対して行ったところ、
実施例２では目で見える傷はなく、ヒット数はいずれも
５個以内でヒット数がゼロの媒体の割合は３０％であっ
た。比較例３ではいずれの媒体もヘッドをロードしたと
たんにクラッシュした。以上の結果よりＤＬＣ層１５が
ないと媒体の浮上特性が良くないことがわかった。The optical recording medium obtained as described above was set in a glide tester, and a glide test was performed in the same manner as in Example 1. When the measurement was performed on ten magneto-optical recording media of Example 2 and Comparative Example 3, respectively,
In Example 2, there were no visible scratches, the number of hits was 5 or less, and the ratio of the medium having zero hits was 30%. In Comparative Example 3, each medium crashed as soon as the head was loaded. From the above results, it was found that the flying characteristics of the medium were not good without the DLC layer 15.

【００３５】（実施例３）実施例１と同様の構成の媒体
で潤滑層２７の膜厚が２．０ｎｍで、ＤＬＣ層２６の形
成条件としてＡｒに対するＣＨ4の割合を変化させるこ
とで屈折率を変化させて、屈折率１．６、１．６５、
１．７５、１．９、２．０の媒体を作製した。(Example 3) A medium having the same structure as that of Example 1, the lubricating layer 27 having a thickness of 2.0 nm, and the refractive index by changing the ratio of CH 4 to Ar as a condition for forming the DLC layer 26. To change the refractive indices of 1.6, 1.65,
1.75, 1.9 and 2.0 media were produced.

【００３６】以上のようにして得られた光記録媒体をグ
ライドテスターにセットして、実施例１と同様の方法で
グライド試験を行った。実施例３の光磁気記録媒体それ
ぞれ１０枚づつに対して行ったところ、実施例３の屈折
率が１．７５、１．９、２．０の光磁気記録媒体では目
で見える傷はなく、ヒット数は屈折率１．７５の媒体で
はいずれも５個以内でヒット数がゼロの媒体の割合は３
０％、屈折率１．９の媒体ではいずれも３個以内でヒッ
ト数がゼロの媒体の割合は５０％、屈折率２．０の媒体
ではいずれも３個以内でヒット数がゼロの媒体の割合は
５０％であった。実施例３の屈折率が１．６、１．６５
の光磁気記録媒体ではロード時に薄く目で見える傷が数
個生じ、ヒット数は屈折率１．６の媒体ではいずれも２
０個以内でヒット数がゼロの媒体はなく、屈折率１．６
５の媒体ではいずれも１２個以内でヒット数がゼロの媒
体はなかった。The optical recording medium obtained as described above was set in a glide tester, and a glide test was performed in the same manner as in Example 1. When the measurement was performed on each of the ten magneto-optical recording media of Example 3, the magneto-optical recording media of Example 3 having a refractive index of 1.75, 1.9, and 2.0 had no visible scratches. The number of hits is 5 or less for the medium with a refractive index of 1.75, and the ratio of the medium with zero hits is 3
In the medium having 0% and the refractive index of 1.9, the ratio of the medium having three or less hits is 50%, and the medium having the refractive index of 2.0 is less than 3 in the medium having zero hits. The proportion was 50%. Example 3 has a refractive index of 1.6, 1.65
In the case of the magneto-optical recording medium described above, several thin scratches are visible when loaded, and the number of hits is 2 for the medium having a refractive index of 1.6.
There is no medium with zero hits within 0 and a refractive index of 1.6.
In all of the media of No. 5, there was no media in which the number of hits was zero with no more than 12 hits.

【００３７】（実施例４）以下に記すようにして、図３
に示すような構造の近接場光記録用の光磁気記録媒体を
製造した。トラックピッチ０．４５μｍのポリカーボネ
ート製の直径１３０ｍｍのディスク状の基板３１上に反
射層３２としてＡｌ−３ｗｔ％Ｃｒ合金膜（膜厚５０ｎ
ｍ）をＤＣスパッタ法により形成した。この上にＴｂ20
（Ｆｅ90Ｃｏ10）80からなる光磁気記録層３３をＴｂタ
ーゲットとＦｅ90Ｃｏ10ターゲットのＤＣ同時スパッタ
法により形成した（膜厚２０ｎｍ）。さらにこの上にＳ
ｉＮからなる保護層３４をＡｒとＮ2の混合雰囲気中で
Ｓｉターゲットを使用した反応性ＲＦスパッタ法で形成
した（膜厚３０ｎｍ）。この上に６３３ｎｍにおける屈
折率が１．８５のＤＬＣ層３５をＡｒとＣＨ4の混合雰
囲気中でＣターゲットを使用した反応性ＲＦスパッタ法
で形成した（膜厚２０ｎｍ）。(Embodiment 4) As described below, FIG.
A magneto-optical recording medium for near-field optical recording having a structure as shown in FIG. An Al-3 wt% Cr alloy film (50 n thick) is formed as a reflective layer 32 on a disc-shaped substrate 31 made of polycarbonate having a track pitch of 0.45 μm and having a diameter of 130 mm.
m) was formed by a DC sputtering method. On top of this, Tb 20
A magneto-optical recording layer 33 made of (Fe 90 Co 10 ) 80 was formed by a DC simultaneous sputtering method using a Tb target and an Fe 90 Co 10 target (film thickness: 20 nm). In addition, S
The protective layer 34 made of iN was formed by a reactive RF sputtering method using a Si target in a mixed atmosphere of Ar and N 2 (film thickness: 30 nm). A DLC layer 35 having a refractive index of 1.85 at 633 nm was formed thereon by a reactive RF sputtering method using a C target in a mixed atmosphere of Ar and CH 4 (film thickness: 20 nm).

【００３８】ＤＬＣ層３５を形成した後、パーフルオロ
ポリエーテル系溶媒（アウジモント社製、商品名「ガル
デンＳＶ−７０」）を使用したピペロニル変性パーフル
オロポリエーテル（アウジモント社製、商品名「フォン
ブリン：ＡＭ２００１」）の溶液から記録媒体を引き上
げることにより潤滑層３６を２．０ｎｍ塗布して光磁気
記録媒体を完成させた。After the formation of the DLC layer 35, piperonyl-modified perfluoropolyether (manufactured by Ausimont, trade name "Fomblin") using a perfluoropolyether-based solvent (manufactured by Ausimont, trade name "Galden SV-70") : AM2001 ”), the lubricating layer 36 was applied to 2.0 nm by pulling up the recording medium from the solution to complete the magneto-optical recording medium.

【００３９】レーザー波長が６８０ｎｍで実効的なＮＡ
が１．２のＳＩＬヘッドの光学系の記録再生評価機に実
施例１および実施例４の媒体をセットして記録再生特性
を評価した。７ｍ／ｓの線速度で回転させながら、対物
レンズの手前のレーザー出力が６ｍＷになるようにレー
ザーを照射しながら、周波数７ＭＨｚで±１５０ Ｏｅ
の大きさで変調させた磁界をＳＩＬヘッドに備え付けら
れたコイルから加えることで媒体に記録した。対物レン
ズの手前のレーザー出力が１ｍＷになるようにレーザー
を照射しながら再生を行ったところキャリア（Ｃ）レベ
ルは実施例１と実施例４で同等であったがノイズ（Ｎ）
レベルについては実施例４の方が実施例１に比べて２ｄ
Ｂ低く、キャリア対ノイズ比（ＣＮＲ）は実施例１では
４３ｄＢ、実施例４では４５ｄＢが得られた。Effective NA at laser wavelength of 680 nm
The media of Examples 1 and 4 were set in a recording / reproducing evaluator of the optical system of the SIL head of 1.2, and the recording / reproducing characteristics were evaluated. While rotating at a linear velocity of 7 m / s, while irradiating a laser so that the laser output before the objective lens becomes 6 mW, ± 150 Oe at a frequency of 7 MHz.
A magnetic field modulated by the magnitude of was applied from a coil provided in the SIL head to record on the medium. When reproduction was performed while irradiating a laser so that the laser output before the objective lens was 1 mW, the carrier (C) level was the same in Examples 1 and 4, but noise (N) was obtained.
As for the level, the fourth embodiment is 2d in comparison with the first embodiment.
B was low, and the carrier-to-noise ratio (CNR) was 43 dB in Example 1 and 45 dB in Example 4.

【００４０】[0040]

【発明の効果】本発明により近接場光記録に適したヒッ
ト数が少なくヘッドクラッシュが起きにくく耐久性の高
い表面記録再生型光記録媒体が得られる。また、プラス
チック基板のように環境変化によって変形しやすい基板
を使っても膜が割れにくくなる。また、反射層が結晶性
であっても結晶のグレインによるノイズを低くすること
も可能である。According to the present invention, a surface recording / reproducing type optical recording medium which has a small number of hits suitable for near-field optical recording, hardly causes head crash, and has high durability can be obtained. Further, even if a substrate such as a plastic substrate which is easily deformed due to environmental changes is used, the film is hardly broken. Also, even if the reflective layer is crystalline, it is possible to reduce noise due to crystal grains.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の光記録媒体の一例の構造を示す部分断
面図である。FIG. 1 is a partial sectional view showing a structure of an example of an optical recording medium of the present invention.

【図２】本発明の光記録媒体の他の一例の構造を示す部
分断面図である。FIG. 2 is a partial sectional view showing the structure of another example of the optical recording medium of the present invention.

【図３】本発明の光記録媒体の他の一例の構造を示す部
分断面図である。FIG. 3 is a partial sectional view showing the structure of another example of the optical recording medium of the present invention.

【符号の説明】[Explanation of symbols]

１１、２１、３１：基板 ２２、３２：反射層 １２、２３ ：第１保護層 １３、２４、３３：記録層 １４、２５ ：第２保護層 ３４：保護層 １５、２６、３５：ＤＬＣ層 １６、２７、３６：潤滑層 11, 21, 31: Substrate 22, 32: Reflective layer 12, 23: First protective layer 13, 24, 33: Recording layer 14, 25: Second protective layer 34: Protective layer 15, 26, 35: DLC layer 16 , 27, 36: Lubrication layer

Claims (6)

【特許請求の範囲】[Claims] 【請求項１】 基板上に少なくとも記録層及び保護層を
この順に形成した光記録媒体において、保護層上にダイ
ヤモンド状カーボン層を形成し、さらにこのダイヤモン
ド状カーボン層の上に潤滑層を形成したことを特徴とす
る光記録媒体。1. An optical recording medium in which at least a recording layer and a protective layer are formed in this order on a substrate, a diamond-like carbon layer is formed on the protective layer, and a lubricating layer is further formed on the diamond-like carbon layer. An optical recording medium characterized by the above-mentioned. 【請求項２】 ダイヤモンド状カーボン層が水素を含有
したカーボンで構成され、波長６３３ｎｍにおける屈折
率が１．７〜２．１の範囲であることを特徴とする請求
項１記載の光記録媒体。2. The optical recording medium according to claim 1, wherein the diamond-like carbon layer is made of carbon containing hydrogen, and has a refractive index of 1.7 to 2.1 at a wavelength of 633 nm. 【請求項３】 潤滑層の膜厚が０．３ｎｍ以上４．０ｎ
ｍ以下であることを特徴とする請求項１又は２記載の光
記録媒体。3. The lubricating layer has a thickness of 0.3 nm or more and 4.0 n or more.
3. The optical recording medium according to claim 1, wherein m is equal to or less than m. 【請求項４】 基板上に少なくとも第１保護層、光磁気
記録層、第２保護層、ダイヤモンド状カーボン層、潤滑
層をこの順に積層してなることを特徴とする請求項１、
２又は３記載の光記録媒体。4. The method according to claim 1, wherein at least a first protective layer, a magneto-optical recording layer, a second protective layer, a diamond-like carbon layer, and a lubricating layer are laminated on the substrate in this order.
4. The optical recording medium according to 2 or 3. 【請求項５】 基板上に少なくとも反射層、光磁気記録
層、保護層、ダイヤモンド状カーボン層、潤滑層をこの
順に積層してなることを特徴とする請求項１、２又は３
記載の光記録媒体。5. A substrate according to claim 1, wherein at least a reflective layer, a magneto-optical recording layer, a protective layer, a diamond-like carbon layer, and a lubricating layer are laminated on the substrate in this order.
The optical recording medium according to the above. 【請求項６】 基板上に膜厚ｄ1の反射層、膜厚ｄ2の光
磁気記録層、膜厚ｄ3の保護層、膜厚ｄ4のダイヤモンド
状カーボン層、潤滑層をこの順に積層してなり、各層の
膜厚が、１０ｎｍ≦ｄ1≦１００ｎｍ、８ｎｍ≦ｄ2≦３
０ｎｍ、５ｎｍ≦ｄ3、３０ｎｍ≦ｄ3＋ｄ4≦１００ｎ
ｍ、５ｎｍ≦ｄ4≦６０ｎｍ、であることを特徴とする
請求項５記載の光記録媒体。6. A reflective layer having a thickness d 1 on the substrate, the magneto-optical recording layer having a thickness d 2, protective layer having a thickness d 3, layered diamond-like carbon layer having a thickness d 4, a lubricating layer in this order The thickness of each layer is 10 nm ≦ d 1 ≦ 100 nm, 8 nm ≦ d 2 ≦ 3
0 nm, 5 nm ≦ d 3 , 30 nm ≦ d 3 + d 4 ≦ 100 n
6. The optical recording medium according to claim 5, wherein m, 5 nm ≦ d 4 ≦ 60 nm.
JP9354524A 1997-12-24 1997-12-24 Optical recording medium Pending JPH11185313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9354524A JPH11185313A (en) 1997-12-24 1997-12-24 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9354524A JPH11185313A (en) 1997-12-24 1997-12-24 Optical recording medium

Publications (1)

Publication Number Publication Date
JPH11185313A true JPH11185313A (en) 1999-07-09

Family

ID=18438142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9354524A Pending JPH11185313A (en) 1997-12-24 1997-12-24 Optical recording medium

Country Status (1)

Country Link
JP (1) JPH11185313A (en)

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