JPH11173396A - Static pressure feed screw mechanism - Google Patents
Static pressure feed screw mechanismInfo
- Publication number
- JPH11173396A JPH11173396A JP33886697A JP33886697A JPH11173396A JP H11173396 A JPH11173396 A JP H11173396A JP 33886697 A JP33886697 A JP 33886697A JP 33886697 A JP33886697 A JP 33886697A JP H11173396 A JPH11173396 A JP H11173396A
- Authority
- JP
- Japan
- Prior art keywords
- water
- static pressure
- pressure feed
- feed screw
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、ＥＥＭ(弾性放
散加工；Elastic Emission Machining)を利用した研磨
装置等に使用される静圧送りねじ機構に関する。[0001] 1. Field of the Invention [0002] The present invention relates to a static pressure feed screw mechanism used in a polishing apparatus or the like using EEM (Elastic Emission Machining).
【０００２】[0002]
【従来の技術】従来、ＥＥＭを利用した研磨装置では、
上部が開放された槽内に、被加工物と相互作用により結
合する性質を有する粉末粒子を純水に分散させた加工液
を満たし、槽の上方から加工液中に延びる回転軸の先端
に取り付けられた弾性体を、加工液に浸漬させた被加工
物の被研磨面に接近させた状態にして、上記回転軸を回
転させて加工液を弾性体に連れ回りさせる。これによ
り、粉末粒子を被加工物の表面に輸送して、粉末粒子と
被加工物の表面原子とを相互作用によって結合させると
共に、被加工物の表面原子とその裏側の原子との結合力
を減少させて、被加工物の表面原子を取り除いて、被加
工物の表面を原子サイズのオーダーで平坦に加工する。
しかしながら、上記ＥＥＭを利用した研磨装置では、槽
の上部が開放されているため、大気中の酸素が加工液中
に溶け込んで、加工現象の安定に悪影響を及ぼすという
問題があった。2. Description of the Related Art Conventionally, in a polishing apparatus using EEM,
A tank with an open top is filled with a working liquid in which powder particles having the property of binding to the workpiece by interaction are dispersed in pure water, and attached to the tip of a rotating shaft extending into the working liquid from above the tank. The elastic body thus obtained is brought close to the surface to be polished of the workpiece immersed in the working fluid, and the rotating shaft is rotated to cause the working fluid to rotate with the elastic body. As a result, the powder particles are transported to the surface of the workpiece, and the powder particles are bonded to the surface atoms of the workpiece by interaction, and the bonding force between the surface atoms of the workpiece and the atoms on the back side is increased. Then, the surface atoms of the workpiece are removed, and the surface of the workpiece is flattened in the order of the atomic size.
However, in the polishing apparatus using the EEM, since the upper portion of the tank is open, there is a problem that oxygen in the atmosphere dissolves into the processing liquid and adversely affects the stability of the processing phenomenon.
【０００３】そこで、本出願人は、駆動部を含む数値制
御用ステージ全体を密閉タンク内の加工液中に設置する
ことによって、加工液中に酸素が溶け込むのを防いで、
ＥＥＭによる加工現象を高度に安定に保つことができる
研磨装置を考えた。Therefore, the present applicant has set the entire numerical control stage including the drive unit in the working fluid in the closed tank to prevent oxygen from being dissolved in the working fluid.
A polishing apparatus capable of keeping the processing phenomenon by the EEM highly stable was considered.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記数
値制御用ステージ全体が密閉タンク内の加工液中に設置
された研磨装置において、ステージを移動させるために
送りねじ機構を用いた場合、送りねじ機構の雄ねじとナ
ットとが接触して、加工液を磨耗粉等により汚染すると
いう問題がある。However, when a feed screw mechanism is used to move the stage in a polishing apparatus in which the entire stage for numerical control is installed in a working fluid in a closed tank, a feed screw mechanism is required. There is a problem that the male screw and the nut come into contact with each other and the working fluid is contaminated by wear powder and the like.
【０００５】そこで、この発明の目的は、水中または水
を含む液体中で使用されても、その水または水を含む液
体を汚染することのない静圧送りねじ機構を提供するこ
とにある。It is an object of the present invention to provide a static pressure feed screw mechanism which does not contaminate water or liquid containing water even when used in water or liquid containing water.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、請求項１の静圧送りねじ機構は、作動流体が純水で
ある静圧送りねじ機構であって、水に対して不溶性を有
する材料からなる雄ねじと、上記雄ねじに螺合すると共
に、水に対して不溶性を有する材料からなるナットとを
備えたことを特徴としている。In order to achieve the above object, a static pressure feed screw mechanism according to claim 1 is a static pressure feed screw mechanism in which a working fluid is pure water and has insolubility in water. A male screw made of a material and a nut screwed to the male screw and made of a material that is insoluble in water are provided.
【０００７】上記請求項１の静圧送りねじ機構によれ
ば、水に対して不溶性を有する例えばステンレス,アル
ミニウムまたはセラミック等の材料からなる雄ねじとナ
ットとの間に、純水である作動流体により静圧を発生さ
せて、雄ねじとナットとを非接触にするので、磨耗粉が
生じたりしない。しかも、上記雄ねじとナットの材料が
水に溶けだしたりしない。したがって、例えば、この静
圧送りねじ機構をＥＥＭ(弾性放散加工；Elastic Emiss
ion Machining)研磨装置に用いた場合に、数値制御用ス
テージの少なくとも静圧送りねじ機構が用いられた部分
を加工液中に浸漬させても、加工液が汚染されるのを防
止できる。According to the static pressure feed screw mechanism of the first aspect, pure water working fluid is provided between the nut and the male screw made of a material insoluble in water, such as stainless steel, aluminum or ceramic. Since static pressure is generated to make the male screw and the nut non-contact, no abrasion powder is generated. Moreover, the material of the male screw and the nut does not dissolve in water. Therefore, for example, this static pressure feed screw mechanism is referred to as EEM (Elastic Emissive Processing).
When used in an ion machining (polishing) apparatus, even if at least the portion of the numerical control stage where the static pressure feed screw mechanism is used is immersed in the working fluid, the working fluid can be prevented from being contaminated.
【０００８】また、請求項２の静圧送りねじ機構は、請
求項１の静圧送りねじ機構において、全体が水中または
水を含む液体中に浸漬されることを特徴としている。[0008] A static pressure feed screw mechanism according to claim 2 is characterized in that, in the static pressure feed screw mechanism according to claim 1, the whole is immersed in water or a liquid containing water.
【０００９】上記請求項２の静圧送りねじ機構によれ
ば、雄ねじとナットとが非接触でかつ作動流体に純水を
用いているので、その水または水を含む液体を汚染する
ことがない。According to the static pressure feed screw mechanism of the second aspect, since the male screw and the nut are not in contact with each other and use pure water as the working fluid, the water or the liquid containing water is not contaminated. .
【００１０】[0010]
【発明の実施の形態】以下、この発明の静圧送りねじ機
構を図示の実施の形態により詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The static pressure feed screw mechanism of the present invention will be described below in detail with reference to the embodiments shown in the drawings.
【００１１】図１はこの発明の実施の一形態の静圧送り
ねじ機構の分解斜視図であり、１はステンレス製の雄ね
じ、２,３は上記雄ねじ１に螺合し、軸方向に互いに所
定の間隔をあけて配置されたアルミニウム製のナット、
４は上記ナット２,３に外嵌されたステンレス製のハウ
ジングである。FIG. 1 is an exploded perspective view of a static pressure feed screw mechanism according to one embodiment of the present invention, wherein 1 is a male screw made of stainless steel, and 2 and 3 are screwed to the male screw 1 and predetermined in the axial direction. Aluminum nuts, spaced at intervals of
Reference numeral 4 denotes a stainless steel housing which is fitted over the nuts 2 and 3.
【００１２】上記ナット２には、ナット３側と反対の側
から軸方向に通路２１を設けると共に、軸に対して通路
２１軸の反対側に、ナット３側と反対の側から軸方向に
通路２４を設けている。上記通路２１とナット２の内側
とをポケット２３を介して連通する３つの分岐路２２を
軸方向に所定の間隔をあけて設けている。上記３つのポ
ケット２３は、ねじ溝２aのナット３側の斜面に開口し
ている。一方、上記通路２４とナット２の内側とをポケ
ット２６を介して連通する３つの分岐路２５を軸方向に
所定の間隔をあけて設けている。上記３つのポケット２
６は、ねじ溝２aのナット３側と反対側の斜面に開口し
ている。The nut 2 is provided with a passage 21 in the axial direction from the side opposite to the nut 3 side, and the passage 21 is provided on the side opposite to the shaft with respect to the shaft in the axial direction from the side opposite to the nut 3 side. 24 are provided. Three branch passages 22 that communicate the passage 21 and the inside of the nut 2 via pockets 23 are provided at predetermined intervals in the axial direction. The three pockets 23 are opened on the slope of the screw groove 2a on the nut 3 side. On the other hand, three branch passages 25 that communicate the passage 24 and the inside of the nut 2 via the pockets 26 are provided at predetermined intervals in the axial direction. The above three pockets 2
Reference numeral 6 denotes an opening on the slope of the screw groove 2a opposite to the nut 3 side.
【００１３】上記ナット３には、ナット２側と反対の側
から軸方向に通路３１を設けると共に、軸に対して通路
３１軸の反対側に、ナット２側と反対の側から軸方向に
通路３４を設けている。上記通路３１とナット３の内側
とをポケット３３を介して連通する３つの分岐路３２を
軸方向に所定の間隔をあけて設けている。上記３つのポ
ケット３３は、ねじ溝３aのナット２側の斜面に開口し
ている。一方、上記通路３４とナット３の内側とをポケ
ット３６を介して連通する３つの分岐路３５を軸方向に
所定の間隔をあけて設けている。上記３つのポケット３
６は、ねじ溝３aのナット２側と反対側の斜面に開口し
ている。The nut 3 is provided with a passage 31 in the axial direction from the side opposite to the nut 2 side, and the passage 31 is provided in the opposite side of the passage 31 with respect to the shaft in the axial direction from the side opposite to the nut 2 side. 34 are provided. Three branch passages 32 that communicate the passage 31 and the inside of the nut 3 via a pocket 33 are provided at predetermined intervals in the axial direction. The three pockets 33 are opened on the slope of the screw groove 3a on the nut 2 side. On the other hand, three branch passages 35 that communicate the passage 34 with the inside of the nut 3 via pockets 36 are provided at predetermined intervals in the axial direction. The above three pockets 3
Reference numeral 6 denotes an opening on the slope of the thread groove 3a opposite to the nut 2 side.
【００１４】また、上記ナット２の通路２１,２４の入
口には、ポンプ１０から供給された超純水がオリフィス
絞り１１,１２を介して夫々注入される。また、上記ナ
ット３の通路３１,３４の入口には、ポンプ１０から供
給された超純水がオリフィス絞り１３,１４を介して夫
々注入される。Ultrapure water supplied from a pump 10 is injected into the inlets of the passages 21 and 24 of the nut 2 through orifice throttles 11 and 12, respectively. Ultrapure water supplied from the pump 10 is injected into the inlets of the passages 31 and 34 of the nut 3 via the orifice throttles 13 and 14, respectively.
【００１５】上記ポンプ１０を除く静圧送りねじ機構
を、超純水に粉末粒子を一様に分散させた加工液で満た
された容器３０に収容している。The static pressure feed screw mechanism excluding the pump 10 is housed in a container 30 filled with a working fluid in which powder particles are uniformly dispersed in ultrapure water.
【００１６】上記構成の静圧送りねじ機構では、ポンプ
１０から供給された超純水は、ナット２の通路２１,分
岐路２２およびポケット２３を介してねじ溝２aと雄ね
じ１のねじ山１aとの間に供給されると共に、ナット２
の通路２４,分岐路２５およびポケット２６を介してね
じ溝２aと雄ねじ１のねじ山１aとの間に供給される。そ
うすることによって、上記ナット２のねじ溝２aと雄ね
じ１のねじ山１aとの間に静圧を発生させて、ナット２
と雄ねじ１とが非接触となる。一方、上記ポンプ１０か
ら供給された超純水は、ナット３の通路３１,分岐路３
２およびポケット３３を介してねじ溝３aと雄ねじ１の
ねじ山１aとの間に供給されると共に、ナット３の通路
３４,分岐路３５およびポケット３６を介してねじ溝３a
と雄ねじ１のねじ山１aとの間に供給される。そうする
ことによって、上記ナット３のねじ溝３aと雄ねじ１の
ねじ山１aとの間に静圧を発生させて、ナット３と雄ね
じ１とが非接触となる。なお、上記ナット２と雄ねじ１
との間およびナット３と雄ねじ１との間に供給された超
純水は、外側の容器３０内に排出される。In the static pressure feed screw mechanism having the above structure, the ultrapure water supplied from the pump 10 passes through the passage 21 of the nut 2, the branch passage 22, and the pocket 23 to the screw groove 2 a and the thread 1 a of the male screw 1. And nut 2
Is supplied between the thread groove 2a and the thread 1a of the male screw 1 through the passage 24, the branch passage 25, and the pocket 26 of FIG. By doing so, a static pressure is generated between the thread groove 2a of the nut 2 and the thread 1a of the male screw 1, and the nut 2
And the male screw 1 are not in contact with each other. On the other hand, ultrapure water supplied from the pump 10 is supplied to the passage 31 of the nut 3 and the branch passage 3.
2 and the pocket 33, the screw 3a is supplied between the screw groove 3a and the thread 1a of the male screw 1, and the screw groove 3a is provided through the passage 34, the branch path 35 and the pocket 36 of the nut 3.
And the thread 1a of the external thread 1. By doing so, a static pressure is generated between the thread groove 3a of the nut 3 and the thread 1a of the male screw 1, so that the nut 3 and the male screw 1 are not in contact. The nut 2 and the male screw 1
And the ultrapure water supplied between the nut 3 and the male screw 1 is discharged into the outer container 30.
【００１７】このように、上記静圧送りねじ機構は、雄
ねじ１とナット２,３とが接触するこことによる磨耗粉
が生じることがなく、雄ねじ１とナット２,３およびハ
ウジング４からの水への溶けだしがないと共に、作動流
体に純水を使用しているので、水中または水を含む液体
中でこの静圧送りねじ機構を用いても、水または水を含
む液体が汚染されるのを防止することができる。したが
って、この静圧送りねじ機構を、数値制御用ステージ全
体が容器３０内の純水と粉末粒子からなる加工液中に設
置されたＥＥＭを用いた研磨装置に用いた場合、密閉タ
ンク内の加工液を汚染することなく、研磨装置のステー
ジ等を駆動することができる。As described above, the static pressure feed screw mechanism does not generate abrasion powder due to the contact between the male screw 1 and the nuts 2 and 3, and the water from the male screw 1 and the nuts 2 and 3 and the housing 4 And the use of pure water for the working fluid, the use of this hydrostatic lead screw mechanism in water or liquids containing water prevents contamination of water or liquids containing water. Can be prevented. Therefore, when this static pressure feed screw mechanism is used in a polishing apparatus using an EEM that is installed in a processing liquid in which the entire stage for numerical control is made up of pure water and powder particles in the container 30, the processing in the closed tank is performed. The stage or the like of the polishing apparatus can be driven without contaminating the liquid.
【００１８】上記実施の形態では、ＥＥＭを用いた研磨
装置にこの発明の静圧送りねじ機構を適用する場合につ
いて説明したが、ＥＥＭを用いた研磨装置に限らず、液
体中に浸されたステージ等を移動させる静圧送りねじ機
構を用いた装置にこの発明を適用してよい。In the above embodiment, the case where the static pressure feed screw mechanism of the present invention is applied to the polishing apparatus using the EEM has been described. However, the present invention is not limited to the polishing apparatus using the EEM, but the stage immersed in a liquid. The present invention may be applied to a device using a static pressure feed screw mechanism for moving the like.
【００１９】また、上記実施の形態では、ステンレス製
の雄ねじ１,アルミニウム製のナット２,３およびステン
レス製のハウジング４を用いたが、雄ねじ,ナットおよ
びハウジングの材料はこれに限らず、水に溶けにくい水
溶性を有しないセラミック等の材料を用いてよい。In the above embodiment, the stainless steel male screw 1, the aluminum nuts 2, 3 and the stainless steel housing 4 are used. However, the materials of the male screw, the nut and the housing are not limited thereto, and the material may be water. A material such as a ceramic which does not easily dissolve and has no water solubility may be used.
【００２０】[0020]
【発明の効果】以上より明らかなように、請求項１の発
明の静圧送りねじ機構は、作動流体が純水である静圧送
りねじ機構であって、水に対して不溶性を有する材料か
らなる雄ねじと、上記雄ねじに螺合すると共に、水に対
して不溶性を有する材料からなるナットとを備えたもの
である。As is apparent from the above description, the static pressure feed screw mechanism according to the first aspect of the present invention is a static pressure feed screw mechanism in which the working fluid is pure water, and is made of a material which is insoluble in water. And a nut screwed to the male screw and made of a material that is insoluble in water.
【００２１】したがって、請求項１の発明の静圧送りね
じ機構をＥＥＭを用いた研磨装置等に用いた場合、雄ね
じとナットとが非接触に維持されるため、磨耗粉を発生
することがなく、また、作動流体に純水を使用すること
によって、加工液を汚染することないので、研磨装置の
ステージ等を駆動することができる。Therefore, when the static pressure feed screw mechanism according to the first aspect of the present invention is used in a polishing apparatus or the like using an EEM, since the male screw and the nut are kept in non-contact, no abrasion powder is generated. Also, by using pure water as the working fluid, the working fluid is not contaminated, so that the stage or the like of the polishing apparatus can be driven.
【００２２】また、請求項２の発明の静圧送りねじ機構
は、請求項１の静圧送りねじ機構において、全体が水中
または水を含む液体中に浸漬されるものである。A static pressure feed screw mechanism according to a second aspect of the present invention is the static pressure feed screw mechanism according to the first aspect, wherein the whole is immersed in water or a liquid containing water.
【００２３】したがって、請求項２の発明の静圧送りね
じ機構によれば、上記水に対して溶け出さない材料から
なる雄ねじとナットとが非接触でかつ作動流体に純水を
用いているので、その水または水を含む液体を汚染する
ことがない。Therefore, according to the static pressure feed screw mechanism of the second aspect of the present invention, since the male screw made of a material that does not dissolve in water and the nut are in non-contact and pure water is used as the working fluid. Does not contaminate the water or liquid containing water.
【図１】 図１はこの発明の実施の一形態の静圧送りね
じ機構の断面図である。FIG. 1 is a sectional view of a hydrostatic feed screw mechanism according to an embodiment of the present invention.
１…雄ねじ、 ２,３…ナット、 ４…ハウジング、 １０…ポンプ、 １１〜１４…オリフィス絞り、 ２１,２２,３１,３４…通路、 ２２,２５,３２,３５…分岐路、 ２３,２６,３３,３６…ポケット。 DESCRIPTION OF SYMBOLS 1 ... Male thread, 2, 3 ... Nut, 4 ... Housing, 10 ... Pump, 11-14 ... Orifice restrictor, 21, 22, 31, 34 ... Passageway, 22, 25, 32, 35 ... Branch passage, 23, 26, 33, 36 ... Pocket.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 平岡 大治 大阪府大阪市中央区南船場三丁目５番８号 光洋精工株式会社内 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Daiji Hiraoka 3-5-8 Minamisenba, Chuo-ku, Osaka-shi, Osaka Koyo Seiko Co., Ltd.
Claims (2)
であって、 水に対して不溶性を有する材料からなる雄ねじと、 上記雄ねじに螺合すると共に、水に対して不溶性を有す
る材料からなるナットとを備えたことを特徴とする静圧
送りねじ機構。1. A static pressure feed screw mechanism in which a working fluid is pure water, comprising: a male screw made of a material insoluble in water; and a material screwed to the male screw and insoluble in water. And a nut comprising: a static pressure feed screw mechanism.
いて、 全体が水中または水を含む液体中に浸漬されることを特
徴とする静圧送りねじ機構。2. The static pressure feed screw mechanism according to claim 1, wherein the whole is immersed in water or a liquid containing water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33886697A JPH11173396A (en) | 1997-12-09 | 1997-12-09 | Static pressure feed screw mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33886697A JPH11173396A (en) | 1997-12-09 | 1997-12-09 | Static pressure feed screw mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11173396A true JPH11173396A (en) | 1999-06-29 |
Family
ID=18322141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33886697A Pending JPH11173396A (en) | 1997-12-09 | 1997-12-09 | Static pressure feed screw mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11173396A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101817153A (en) * | 2010-04-26 | 2010-09-01 | 济南二机床集团有限公司 | Ram type milling head feeding mechanism |
| CN108907708A (en) * | 2018-08-16 | 2018-11-30 | 西安巨浪精密机械有限公司 | A kind of flexure pre-stretching mounting process |
-
1997
- 1997-12-09 JP JP33886697A patent/JPH11173396A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101817153A (en) * | 2010-04-26 | 2010-09-01 | 济南二机床集团有限公司 | Ram type milling head feeding mechanism |
| CN108907708A (en) * | 2018-08-16 | 2018-11-30 | 西安巨浪精密机械有限公司 | A kind of flexure pre-stretching mounting process |
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