JPH11156263A - Method for coating application of photoresist material - Google Patents
Method for coating application of photoresist materialInfo
- Publication number
- JPH11156263A JPH11156263A JP32769497A JP32769497A JPH11156263A JP H11156263 A JPH11156263 A JP H11156263A JP 32769497 A JP32769497 A JP 32769497A JP 32769497 A JP32769497 A JP 32769497A JP H11156263 A JPH11156263 A JP H11156263A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- coated
- roll
- potential
- coating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、フィルム、基板、
紙等の表面にフォトレジスト剤を均一な厚みに塗布する
フォトレジスト剤の塗布方法に関するものである。The present invention relates to a film, a substrate,
The present invention relates to a method of applying a photoresist agent to a surface of paper or the like with a uniform thickness.
【０００２】[0002]
【従来の技術】従来のフォトレジスト剤の塗布方法は、
塗布装置に複数のロールを設け、このロールに塗布剤を
付着させ、ロールを被塗布材にこすり付けて塗布をおこ
なっていた。ロールは少なくとも、塗布剤をくみ上げる
塗布剤くみ上げロール、被塗布材に塗布剤を塗り付ける
塗布剤コートロール、被塗布材をガイドする被塗布材ガ
イドロールの３本が必要である。2. Description of the Related Art A conventional method of applying a photoresist agent is as follows.
A plurality of rolls are provided in a coating device, a coating agent is adhered to the rolls, and the rolls are rubbed on a material to be coated to perform coating. At least three rolls are required: an application agent pumping roll that pumps up the application agent, an application agent coating roll that applies the application agent to the application material, and an application material guide roll that guides the application material.
【０００３】複数のロールを使用して塗布する方法の特
徴は、ロールの回転数、回転方向、ロールと被塗布材と
の間隔などにより塗布膜の厚さを比較的簡単に変えるこ
とができる点にある。また、塗布装置の構造が簡単にな
るためメンテナンス性に優れているという特徴もある。[0003] The feature of the method of coating using a plurality of rolls is that the thickness of the coating film can be relatively easily changed by the number of rotations of the rolls, the rotation direction, the distance between the rolls and the material to be coated, and the like. It is in. Another feature is that the structure of the coating apparatus is simplified, so that maintenance is excellent.
【０００４】[0004]
【発明が解決しようとする課題】従来のフォトレジスト
剤の塗布方法には以下の問題点があった。The conventional method of applying a photoresist agent has the following problems.
【０００５】塗布剤コートロールを被塗布材にこすり付
けて塗布をおこなっているため、ロールの端部に相当す
る被塗布材部分の塗布膜がそれ以外の塗布部分に比べて
２〜３倍厚くなってしまい均一な膜厚が得られない。[0005] Since the coating is performed by rubbing the coating roll with the coating material, the coating film at the coating material portion corresponding to the end of the roll is 2-3 times thicker than the other coating portions. As a result, a uniform film thickness cannot be obtained.
【０００６】図３は、この問題点の説明図である。塗布
剤コートロール１６に付着した塗布剤１２を、被塗布材
１１にこすり付ける様子を示す。塗布剤コートロール１
６を横から見た図で、被塗布材１１は紙面に対して垂直
な方向に送り出される。図３（ａ）は塗布剤１２を塗布
する前、図３（ｂ）は塗布した直後を示す。FIG. 3 is an explanatory diagram of this problem. The state where the coating material 12 adhered to the coating material coat roll 16 is rubbed on the material 11 to be coated is shown. Coating roll 1
6, a material 11 to be coated is sent out in a direction perpendicular to the paper surface. FIG. 3A shows the state before the coating agent 12 is applied, and FIG. 3B shows the state immediately after the application.
【０００７】塗布剤コートロール１６の端部に相当する
被塗布材１１の部分では、塗布剤１２の厚さが中央の塗
布部分に比較して２倍程度厚くなっており、塗布剤がフ
ォトレジストのように感光剤の場合、この塗布膜の厚さ
の差は特に問題となる。つまり、ロールの端部に相当す
る部分がその他の部分に比べて倍以上の露光時間が必要
となり、通常の露光ではその部分だけ露光不足になって
しまう。従って、その部分だけ再度露光しなければなら
ないという不具合が発生する。この傾向は塗布膜の厚さ
が厚くなるほど顕著に現れてくる。At the portion of the coating material 11 corresponding to the end of the coating roll 16, the thickness of the coating material 12 is about twice as large as that of the central coating portion. In the case of a photosensitive agent as described above, this difference in the thickness of the coating film is particularly problematic. In other words, the portion corresponding to the end of the roll requires an exposure time twice or more that of the other portions, and the normal exposure results in underexposure of only that portion. Therefore, a problem occurs in that only that portion must be exposed again. This tendency becomes more conspicuous as the thickness of the coating film increases.
【０００８】従って本発明の目的は、前記した従来技術
の欠点を解消し、ロールの端部に相当する部分において
も、均一な膜厚の塗布をおこなうことができるフォトレ
ジスト剤の塗布方法を提供することにある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method of applying a photoresist agent which can solve the above-mentioned disadvantages of the prior art and can apply a uniform film thickness even at a portion corresponding to the end of a roll. Is to do.
【０００９】[0009]
【課題を解決するための手段】本発明は上記の目的を実
現するため、被塗布材に複数のロールを用いてフォトレ
ジスト剤を塗布するフォトレジスト剤の塗布方法におい
て、前記被塗布材および前記フォトレジスト剤の両方と
も同電位とした。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method of applying a photoresist agent using a plurality of rolls to apply the photoresist agent to the object. Both photoresist agents were set at the same potential.
【００１０】前記電位は、プラスの電位とした。[0010] The potential is a positive potential.
【００１１】[0011]
【発明の実施の形態】図１は、本発明のフォトレジスト
剤の塗布方法の一実施例を説明する概略断面図である。
本塗布方法を可能にする塗布装置は、被塗布材１に塗布
剤２を塗布する塗布剤コートロール６、タンク３に入っ
ている塗布剤２をくみ上げる塗布剤くみ上げロール５、
被塗布材１をガイドする被塗布材ガイドロール７、塗布
剤２に電位を供給する電極４、被塗布材１に電位を供給
する給電ロール８より構成される。FIG. 1 is a schematic sectional view for explaining one embodiment of a method for applying a photoresist agent according to the present invention.
The coating apparatus that enables this coating method includes a coating roll 6 for coating the coating material 2 on the material 1 to be coated, a coating roll 5 for pumping the coating material 2 in the tank 3,
The apparatus includes a material guide roll 7 for guiding the material 1 to be applied, an electrode 4 for supplying a potential to the material 2, and a power supply roll 8 for supplying a potential to the material 1.
【００１２】被塗布材１は例えばＴＡＢテープであり、
給電ロール８によってプラス（陽）電位が供給される。
一方、塗布剤２にもタンク３内に設けられた電極４によ
って被塗布材１と同じ値のプラス（陽）電位が供給され
る。被塗布材１は被塗布材ガイドロール７によって塗布
剤コートロール６までガイドされ、塗布剤２は塗布剤く
み上げロール５によって塗布剤コートロール６に転写さ
れて最終的に被塗布材１に塗布される。その後、図示さ
れていないべーク部を経て被塗布材１は巻き取られる。
従って、被塗布材１は図１の紙面上右から左へ送り出さ
れる。The material 1 to be coated is, for example, a TAB tape.
A positive (positive) potential is supplied by the feeding roll 8.
On the other hand, a positive (positive) potential having the same value as that of the material to be coated 1 is supplied to the coating material 2 by the electrode 4 provided in the tank 3. The material 1 to be coated is guided by the material guide roll 7 to the coating agent coating roll 6, and the coating material 2 is transferred to the coating material coating roll 6 by the coating material pumping roll 5 and finally applied to the material 1 to be coated. You. Thereafter, the material to be coated 1 is wound up through a bake portion (not shown).
Therefore, the material 1 is fed from right to left on the paper of FIG.
【００１３】図２は、塗布前後の被塗布材１と塗布剤２
の状態の説明図である。図２（ａ）は塗布する直前につ
いて示し、被塗布材１と塗布剤２は各々給電ロール８お
よび電極４によって前記したようにプラス（陽）の同電
位とされている。FIG. 2 shows a coating material 1 and a coating material 2 before and after coating.
FIG. FIG. 2A shows a state immediately before the application, and the applied material 1 and the application material 2 are set to the same positive (positive) potential by the power supply roll 8 and the electrode 4 as described above.
【００１４】図２（ｂ）は、被塗布材１に塗布剤２を塗
布した直後を示す。プラス電位の被塗布材１に同電位の
塗布剤２がこすり付けられており、塗布剤２と被塗布材
１との問で電気的な反発力が発生し、物理的にロール端
部に相当する部分に溜まった塗布剤はこの力により拡散
する。FIG. 2B shows a state immediately after the coating material 2 is applied to the material 1 to be coated. The coating material 2 having the same potential is rubbed on the material 1 to be applied with a positive potential, and an electric repulsive force is generated between the coating material 2 and the material 1 to be applied, and physically corresponds to the end of the roll. The coating agent accumulated in the portion to be spread is diffused by this force.
【００１５】図２（ｃ）は、溜まった塗布剤の拡散が終
了して均一な塗布膜が得られている様子を示す。FIG. 2C shows a state in which the diffusion of the accumulated coating agent is completed and a uniform coating film is obtained.
【００１６】この反発力はクーロンの法則に従うもので
ある。フォトレジスト剤にはプラスの電位が供給され、
その結果フォトレジスト剤の各分子はプラスの電荷を帯
びるようになる。このプラスの電荷を持つ分子同士が集
合すると、お互いの電荷の積に比例し、分子間の距離の
２乗に半比例する反発力が発生する。これが、すなわち
クーロンの法則である。従って、拡散したい塗布剤の量
に応じてプラスの電位の大きさを調整すれば良い。This repulsive force follows Coulomb's law. A positive potential is supplied to the photoresist agent,
As a result, each molecule of the photoresist agent becomes positively charged. When the molecules having the positive charges gather, a repulsive force is generated which is proportional to the product of the charges of each other and half proportional to the square of the distance between the molecules. This is Coulomb's law. Therefore, the magnitude of the positive potential may be adjusted according to the amount of the coating agent to be diffused.
【００１７】なお、電位をお互いにマイナスにした場合
にも塗布剤の拡散は起きるが、別の問題が生じる。つま
り、空気中には塵があり、一般にプラスの電荷を帯びて
いるのが多い。そのため電位を共にマイナスにすると、
空気中の塵がマイナスの電荷を帯びているフォトレジス
ト剤に付き、フォトレジスト剤の質が低下すると言う問
題が生じる。従って、電位は共にプラスが望ましい。When the potentials are set to be negative, diffusion of the coating agent occurs, but another problem arises. That is, there is dust in the air, and the air generally has a positive charge in many cases. Therefore, if both potentials are negative,
The dust in the air adheres to the negatively charged photoresist agent, causing a problem that the quality of the photoresist agent is reduced. Therefore, it is desirable that both potentials are positive.
【００１８】[0018]
【発明の効果】本発明のフォトレジスト剤の塗布方法に
よれば、塗布剤及び被塗布材の両方ともプラス（陽）の
同電位にしたことにより、両者に電気的な反発力が発生
し、物理的に塗布面端部に溜った塗布剤が拡散して、端
部まで均一な塗布膜厚の確保が可能となった。According to the method of applying a photoresist agent of the present invention, since both the coating agent and the material to be coated are set to the same positive (positive) potential, an electric repulsive force is generated between them. The coating agent physically collected at the end of the coating surface was diffused, and it was possible to ensure a uniform coating film thickness up to the end.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明のフォトレジスト剤の塗布方法の一実施
例を説明した正面説明図である。FIG. 1 is an explanatory front view illustrating an embodiment of a method of applying a photoresist agent according to the present invention.
【図２】本発明のフォトレジスト剤の塗布方法の一実施
例に係わり、塗布直後の塗布剤と被塗布材の状態説明図
である。FIG. 2 is an explanatory view of the state of the coating agent and the material to be applied immediately after the application, according to one embodiment of the method of applying the photoresist agent of the present invention.
【図３】従来のフォトレジストの塗布方法に係わる問題
点の説明図である。FIG. 3 is an explanatory diagram of a problem with a conventional photoresist coating method.
１、１１ 被塗布材 ２、１２ 塗布剤 ３ タンク ４ 電極 ５ 塗布剤くみ上げロール ６、１６ 塗布剤コートロール ７ 被塗布材ガイドロール ８ 給電ロール DESCRIPTION OF SYMBOLS 1, 11 Coating material 2, 12 Coating agent 3 Tank 4 Electrode 5 Coating material pumping roll 6, 16 Coating agent coating roll 7 Coating material guide roll 8 Power supply roll
フロントページの続き (72)発明者 松本 雄行 茨城県土浦市木田余町3550番地 日立電線 株式会社システムマテリアル研究所内Continuation of front page (72) Inventor Yuki Matsumoto 3550 Kida Yomachi, Tsuchiura-shi, Ibaraki Hitachi Cable, Ltd.
Claims (2)
ジスト剤を塗布するフォトレジスト剤の塗布方法におい
て、前記被塗布材および前記フォトレジスト剤の両方と
も同電位にして塗布を行うことを特徴とするフォトレジ
スト剤の塗布方法。In a method of applying a photoresist agent to a material to be applied by using a plurality of rolls, it is preferable that both the material to be applied and the photoresist agent are applied at the same potential. Characteristic method of applying a photoresist agent.
もプラスの電位にすることを特徴とする請求項１記載の
フォトレジスト剤の塗布方法。2. The method for applying a photoresist agent according to claim 1, wherein both the material to be coated and the photoresist agent have a positive potential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32769497A JPH11156263A (en) | 1997-11-28 | 1997-11-28 | Method for coating application of photoresist material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32769497A JPH11156263A (en) | 1997-11-28 | 1997-11-28 | Method for coating application of photoresist material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11156263A true JPH11156263A (en) | 1999-06-15 |
Family
ID=18201942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32769497A Pending JPH11156263A (en) | 1997-11-28 | 1997-11-28 | Method for coating application of photoresist material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11156263A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006109644A1 (en) | 2005-04-12 | 2006-10-19 | Toray Industries, Inc. | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
| JP2006314990A (en) * | 2005-04-12 | 2006-11-24 | Toray Ind Inc | Coater of electric insulating sheet and method for producing electric insulating sheet with coating film |
-
1997
- 1997-11-28 JP JP32769497A patent/JPH11156263A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006109644A1 (en) | 2005-04-12 | 2006-10-19 | Toray Industries, Inc. | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
| JP2006314990A (en) * | 2005-04-12 | 2006-11-24 | Toray Ind Inc | Coater of electric insulating sheet and method for producing electric insulating sheet with coating film |
| EP1870169A1 (en) * | 2005-04-12 | 2007-12-26 | Toray Industries, Inc. | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
| EP1870169A4 (en) * | 2005-04-12 | 2011-03-23 | Toray Industries | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
| US7927668B2 (en) * | 2005-04-12 | 2011-04-19 | Toray Industries, Inc. | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
| KR101270503B1 (en) * | 2005-04-12 | 2013-06-03 | 도레이 카부시키가이샤 | Coater of electric insulating sheet and method for producing electric insulating sheet with coated film |
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