JPH11108109A - Supporting device of controllable vibration-eliminating stand - Google Patents
Supporting device of controllable vibration-eliminating standInfo
- Publication number
- JPH11108109A JPH11108109A JP27706797A JP27706797A JPH11108109A JP H11108109 A JPH11108109 A JP H11108109A JP 27706797 A JP27706797 A JP 27706797A JP 27706797 A JP27706797 A JP 27706797A JP H11108109 A JPH11108109 A JP H11108109A
- Authority
- JP
- Japan
- Prior art keywords
- laminated rubber
- vertical
- vibration
- actuator
- rubber body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は制御型除振台の支持
装置に関し、詳しくは、例えば半導体製造工場やレーザ
ー応用製品製造工場などに設置される各種機器を搭載す
る除振台に地盤の微振動や自動車の走行などに起因する
振動が伝播されて該除振台が鉛直方向および水平方向に
振動することを除去するために、除振台と接地面との間
に外部より振動を打ち消すように駆動制御可能なアクチ
ュエータを設けてなる制御型除振台の支持装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a supporting device for a control type anti-vibration table, and more particularly, to a micro-vibration table mounted with various devices installed in a semiconductor manufacturing factory or a laser application product manufacturing factory. In order to eliminate vibrations and vibrations caused by the running of the automobile and the like that the vibration isolator oscillates in the vertical and horizontal directions, externally cancel the vibration between the vibration isolator and the ground plane. The present invention relates to a support device for a control-type anti-vibration table, which is provided with an actuator whose drive can be controlled.
【０００２】[0002]
【従来の技術】この種の制御型除振台の支持装置とし
て、従来、特開平５−１４９３７９号公報に開示されて
いるように、機器を搭載する除振台を接地支持する接地
支持台と接地面との間に積層圧電形アクチュエータをそ
の駆動方向が鉛直方向に沿うように配置するとともに、
このアクチュエータと上記除振台との間に、金属板など
の剛性板材と薄肉ゴム板との複数枚を交互に積層配置し
てなる鉛直型積層ゴム体の単体を介在させてなるものが
知られている。2. Description of the Related Art As a supporting device for a control type anti-vibration table, as disclosed in Japanese Patent Application Laid-Open No. Hei 5-149379, a grounding support table for supporting an anti-vibration table on which equipment is mounted is grounded. While arranging the laminated piezoelectric actuator between the ground plane and the driving direction along the vertical direction,
It is known that a vertical type laminated rubber body in which a plurality of rigid plate materials such as a metal plate and a thin rubber plate are alternately laminated is interposed between the actuator and the vibration isolation table. ing.
【０００３】上記した構成の従来の制御型除振台の支持
装置は、組み付け時にアクチュエータの駆動方向に対し
て直交する方向において接地支持台と除振台との間に位
置ずれがあった場合、その位置ずれを上記積層ゴム体の
薄肉ゴム板それぞれの微小量づつの弾性変形によって吸
収させる位置ずれ吸収機能と、アクチュエータの駆動方
向に対して直交する方向で該アクチュエータの駆動によ
る除振、制振性能の妨げとなるような力が加わった場
合、その力を上記積層ゴム体の薄肉ゴム板それぞれの微
小量づつの弾性変形によって吸収させてアクチュエータ
に不要な剪断力が作用することを回避させる剪断力吸収
機能とを発揮するものである。[0003] The conventional control type anti-vibration table support device having the above-described configuration can be used in a case where there is a displacement between the ground support table and the anti-vibration table in a direction orthogonal to the driving direction of the actuator during assembly. A displacement displacement absorbing function for absorbing the displacement by a small amount of elastic deformation of each of the thin rubber plates of the laminated rubber body, and vibration isolation and vibration suppression by driving the actuator in a direction orthogonal to the driving direction of the actuator. When a force which hinders performance is applied, the force is absorbed by a minute amount of elastic deformation of each of the thin rubber plates of the laminated rubber body to prevent unnecessary shear force from acting on the actuator. It exerts a force absorbing function.
【０００４】[0004]
【発明が解決しようとする課題】上記のように鉛直型積
層ゴム体の単体とアクチュエータが直列配置された従来
の制御型除振台の支持装置においては、組み付け時にお
ける接地支持台と除振台との間の位置ずれ吸収機能およ
びアクチュエータに対する剪断力吸収機能が、鉛直型積
層ゴム体における薄肉ゴム板のアクチュエータの駆動方
向に対して直交する方向への弾性変形により発揮される
ように構成されたものであるために、それら両吸収機能
を発揮するために鉛直型積層ゴム体の薄肉ゴム板が弾性
変形した状態だけで既に該鉛直型積層ゴム体のアクチュ
エータ駆動方向（鉛直方向）の剛性が増大し、積層ゴム
体が本来有している圧縮ばね剛性が損なわれることにな
る。As described above, in the conventional control type vibration isolating table supporting apparatus in which the vertical laminated rubber body alone and the actuator are arranged in series, the grounding supporting table and the vibration isolating table at the time of assembly are used. And the shear force absorbing function for the actuator is exerted by elastic deformation of the thin rubber plate in the vertical laminated rubber body in the direction perpendicular to the driving direction of the actuator. The rigidity of the vertical laminated rubber body in the actuator driving direction (vertical direction) is already increased only when the thin rubber plate of the vertical laminated rubber body is elastically deformed in order to exhibit both of these absorbing functions. However, the compression spring rigidity inherent in the laminated rubber body is impaired.
【０００５】その上、大質量の鉛直荷重を安定よく支持
させるために鉛直型積層ゴム体の圧縮ばね剛性はもとも
と大きく設定せざるを得ず、その結果、アクチュエータ
を用いて伝達率の増加している周波数帯域を制御するに
しても、支持装置全体の固有振動数を低く設定すること
が技術的に非常に難しいことから、鉛直方向および水平
方向のいずれも低周波領域の振動に対して良好な除振、
制振性能を発揮させることができず、特に、大質量の鉛
直荷重が作用する条件下で使用される支持装置として
は、未だ改善の余地があった。In addition, the compression spring stiffness of the vertical laminated rubber body must be set to be large in order to stably support a large mass of vertical load. As a result, the transmission rate is increased by using an actuator. Even when controlling the frequency band, it is technically very difficult to set the natural frequency of the entire supporting device to a low value. Vibration isolation,
There is still room for improvement as a support device that cannot exhibit the vibration damping performance and is used particularly under the condition where a large mass vertical load acts.
【０００６】本発明は上記のような実情に鑑みてなされ
たもので、大質量の鉛直荷重が作用する条件下での使用
に際して、圧縮ばね剛性を低下させるとともに、アクチ
ュエータの駆動効率を向上させて鉛直方向および水平方
向いずれの低周波領域の振動に対しても良好な除振、制
振性能を発揮させることができ、また、装置全体を嵩低
いコンパクトなものに構成することができる制御型除振
台の支持装置を提供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above-described circumstances, and when used under conditions where a large mass vertical load is applied, the compression spring rigidity is reduced and the driving efficiency of the actuator is improved. A controlled type vibration isolator that can exhibit good vibration isolation and vibration damping performance against vibrations in low frequency regions in both the vertical and horizontal directions, and can be configured to be bulky and compact. It is an object to provide a support device for a shaking table.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、請求項１に記載の発明に係る制御型除振台の支持装
置は、機器を搭載する除振台と接地面との間に、複数枚
のゴム板と金属板とを交互に積層配置してなる鉛直型縦
積層ゴム体及び複数枚のゴム板と金属板とを交互に積層
してなる剪断型横積層ゴム体との直列結合体を介在させ
ているとともに、上記除振台と接地面との間に、上記直
列結合体における横積層ゴム体に並列配置させて外部よ
り駆動制御可能なアクチュエータをその駆動方向が鉛直
方向に沿うように介在させていることを特徴とするもの
である。According to a first aspect of the present invention, there is provided a supporting apparatus for a control type anti-vibration table according to the first aspect of the present invention. A series of a vertical vertical laminated rubber body in which a plurality of rubber plates and metal plates are alternately laminated and arranged and a shear type horizontal laminated rubber body in which a plurality of rubber plates and a metal plate are alternately laminated. While the coupling body is interposed, an actuator that can be externally driven and controlled by being arranged in parallel with the horizontal laminated rubber body in the series coupling body between the anti-vibration table and the ground plane has a vertical driving direction. It is characterized by being interposed along.
【０００８】上記のような構成の請求項１に記載の発明
によれば、主として鉛直荷重を支える鉛直型縦積層ゴム
体と主として剪断荷重を支える剪断型横積層ゴム体との
直列結合体を用いることで、縦積層ゴム体の圧縮ばね剛
性を大質量の鉛直荷重を安定支持するに足りる値に設定
しながら、その圧縮ばね剛性が横積層ゴム体の剪断ばね
剛性により減少されるとともに、横積層ゴム体に加わる
剪断荷重も縦積層ゴム体により逃がされて減少されるこ
とになり、支持装置全体としての圧縮ばね剛性および剪
断ばね剛性を、縦積層ゴム体を単体使用する場合に比べ
て非常に小さくして系全体の固有振動数を低く設定する
ことが可能となる。また、このような直列結合体を用い
た圧縮ばね剛性の低下により除振領域が拡大されて伝達
率が増加している低周波数帯域を制御するためのアクチ
ュエータを上記直列結合体における横積層ゴム体に並列
配置することによって、アクチュエータの予圧縮力を除
振台と接地面との間の複数箇所に実装した直列結合体に
おける縦および横積層ゴム体のばね剛性に応じて個別に
調整して各アクチュエータの駆動効率を高めることが可
能となる。これによって、大質量の鉛直荷重が作用する
条件下での使用においても鉛直方向および水平方向の除
振、制振性能の著しい向上が図れる。According to the first aspect of the present invention, a series combination of a vertical vertical laminated rubber body mainly supporting vertical load and a shear type horizontal laminated rubber body mainly supporting shear load is used. By setting the compression spring stiffness of the vertically laminated rubber body to a value sufficient to stably support a large mass vertical load, the compression spring stiffness is reduced by the shear spring stiffness of the horizontally laminated rubber body, and The shear load applied to the rubber body is also reduced by being released by the vertical laminated rubber body, and the compression spring stiffness and the shear spring stiffness of the entire support device are significantly reduced as compared with the case where the vertical laminated rubber body is used alone. And the natural frequency of the entire system can be set low. Further, an actuator for controlling a low frequency band in which the vibration isolation region is expanded and the transmissibility is increased due to a decrease in the compression spring stiffness using such a serially coupled body is provided with a horizontally laminated rubber body in the serially coupled body. By arranging them in parallel, the pre-compression force of the actuator is individually adjusted according to the spring stiffness of the vertical and horizontal laminated rubber bodies in the serially coupled body mounted at multiple locations between the vibration isolation table and the ground plane. The drive efficiency of the actuator can be improved. As a result, even in the use under a condition in which a large mass vertical load acts, the vibration isolation performance in the vertical direction and the horizontal direction can be remarkably improved.
【０００９】加えて、アクチュエータと横積層ゴム体と
の並列配置によって、これらを直列配置する場合に比し
て、支持装置全体の嵩を低くしてコンパクト化が図れる
とともに、該支持装置の設置使用中でも、アクチュエー
タのみを単独に取り出して任意に点検、補修や交換する
ことが可能である。In addition, by arranging the actuator and the horizontal laminated rubber body in parallel, it is possible to reduce the bulk of the whole support device and to make it compact as compared with the case where these are arranged in series, and to install and use the support device. Above all, it is possible to take out only the actuator alone and arbitrarily inspect, repair or replace it.
【００１０】上記請求項１に記載の発明に係る制御型除
振台の支持装置において、請求項２に記載のように、上
記アクチュエータの駆動方向の端部に、該アクチュエー
タの予圧縮力を調整可能な高さ調整機構及び／又はゴム
状弾性体を直列に配置する構成を採用することによっ
て、アクチュエータの組付け後であっても、搭載機器の
重量に対応した上記高さ調整機構による高さ調整及び／
又は厚さの異なるゴム状弾性体の入れ替えによりアクチ
ュエータの予圧縮力を容易に調整して、該アクチュエー
タをいかなる重量の搭載機器に対しても常に最適の駆動
点で駆動し制振性能の一層の向上を図ることができる。According to the first aspect of the present invention, in the supporting device for a control-type anti-vibration table, the pre-compression force of the actuator is adjusted at an end in the driving direction of the actuator. By employing a possible height adjustment mechanism and / or a configuration in which rubber-like elastic bodies are arranged in series, even after the actuator is assembled, the height by the height adjustment mechanism corresponding to the weight of the mounted device Adjustment and / or
Alternatively, the pre-compression force of the actuator is easily adjusted by replacing the rubber-like elastic bodies having different thicknesses, and the actuator is always driven at the optimum driving point with respect to the mounted equipment of any weight to further improve the vibration damping performance. Improvement can be achieved.
【００１１】また、上記請求項１または２に記載の発明
に係る制御型除振台の支持装置において、請求項３に記
載のように、上記直列結合体における横積層ゴム体を環
状一体形に形成するか、もしくは、複数個の横積層ゴム
体を環状に配置し、その環状中心部に上記アクチュエー
タを配置する構成を採用することによって、アクチュエ
ータの駆動方向に対して直交するあらゆる方向から加わ
る力を環状一体形あるいは環状に配置された複数個の横
積層ゴム体によりバランスよく吸収させてアクチュエー
タに対する剪断力吸収機能を良好に発揮させることがで
きるとともに、支持装置全体を一層コンパクト化するこ
とができる。Further, in the supporting apparatus of the control type vibration isolating table according to the first or second aspect of the present invention, as in the third aspect, the horizontal laminated rubber body in the serially coupled body is formed into an annular integral shape. By forming or adopting a configuration in which a plurality of laterally laminated rubber bodies are arranged in a ring and the actuator is arranged in the center of the ring, a force applied from any direction perpendicular to the driving direction of the actuator is adopted. Can be well-balanced by a plurality of laterally laminated rubber bodies arranged in an annular shape or annularly, so that the shearing force absorbing function for the actuator can be satisfactorily exhibited, and the entire support device can be made more compact. .
【００１２】さらに、上記請求項１，２または３に記載
の発明に係る制御型除振台の支持装置において、上記直
列結合体における横積層ゴム体を、請求項４に記載のよ
うに、該横積層ゴム体を構成するゴム板と金属板との積
層面が鉛直方向および水平方向に対して共に傾斜する面
に沿う傾斜姿勢に配置する構成としてもよく、この場合
は、搭載機器の質量に対応して上記横積層ゴム体の積層
面の傾斜角度を変更することにより、鉛直方向の剛性、
つまり圧縮ばね剛性を任意に設定することが可能とな
る。また、接地支持台との間に横積層ゴム体を配置する
中間支持台と横積層ゴム体との接着が不完全であった
り、不良であったとしても、中間支持台の抜け落ちがな
く、それだけ支持装置全体の組付けが容易になる。Further, in the supporting device for a control-type anti-vibration table according to the first, second or third aspect of the present invention, the horizontal laminated rubber body in the series-coupled body may be provided as described in the fourth aspect. A configuration in which the lamination surface of the rubber plate and the metal plate constituting the horizontal laminated rubber body is arranged in an inclined position along a surface that is both inclined with respect to the vertical direction and the horizontal direction may be adopted. Correspondingly, by changing the inclination angle of the laminating surface of the horizontal laminated rubber body, rigidity in the vertical direction,
That is, the compression spring rigidity can be set arbitrarily. Also, even if the bonding between the intermediate support and the horizontal laminated rubber body, in which the horizontal laminated rubber body is disposed between the ground support and the horizontal laminated rubber body, is incomplete or defective, the intermediate support does not fall off. Assembling of the entire support device is facilitated.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態を図面
にもとづいて説明する。図１ないし図３は本発明に係る
制御型除振台の支持装置の第１の実施形態を示す基本的
な構成図で、図１は機器が搭載され振動等の外乱が作用
していない状態、図２は機器搭載状態で振動等の外乱が
作用した状態、図３は概略平面図である。同支持装置Ａ
は、機器を搭載する除振台１と該除振台１を接地面に支
持する上向き開放コ字形の接地支持台２との間に門形の
中間支持台５が配置されており、この中間支持台５の水
平部５ａと上記除振台１との間に、その積層面を水平姿
勢にした鉛直型縦積層ゴム体３と、該鉛直型縦積層ゴム
体３の左右両側で上記中間支持台５の左右鉛直部５ｂ，
５ｂとこれらに対向する上記接地支持台２の左右鉛直部
２ｂ，２ｂとの間にそれらの積層面を鉛直姿勢にした２
個の剪断型横積層ゴム体４，４とからなる直列結合体８
が介在されているとともに、上記接地支持台２の水平部
２ａの中央部と上記中間支持台５の水平部５ａの中央部
との間に、上記横積層ゴム体４，４に並列配置させて外
部より駆動制御可能なアクチュエータ７をその駆動方向
（矢印ａ−ｂ）が鉛直方向に沿うように介在されてい
る。Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1 to 3 are basic configuration diagrams showing a first embodiment of a supporting device for a control-type anti-vibration table according to the present invention. FIG. 1 shows a state where equipment is mounted and no disturbance such as vibration acts. FIG. 2 is a schematic plan view showing a state where disturbances such as vibrations are applied when the apparatus is mounted. Supporting device A
A gate-shaped intermediate support 5 is disposed between an anti-vibration table 1 on which equipment is mounted and an upwardly open U-shaped ground support table 2 supporting the anti-vibration table 1 on a ground surface. Between the horizontal portion 5a of the support base 5 and the anti-vibration table 1, a vertical vertical laminated rubber body 3 having a laminated surface in a horizontal posture, and the intermediate support on both left and right sides of the vertical vertical laminated rubber body 3 Left and right vertical portions 5b of the base 5,
5b and the left and right vertical portions 2b, 2b of the ground support 2 opposed thereto, with their laminated surfaces in a vertical posture.
Series-combined body 8 composed of two shear-type horizontally laminated rubber bodies 4 and 4
And between the central portion of the horizontal portion 2a of the ground support 2 and the central portion of the horizontal portion 5a of the intermediate support 5 are arranged in parallel with the horizontal laminated rubber bodies 4, 4. An actuator 7 that can be drive-controlled from the outside is interposed so that the drive direction (arrows ab) is along the vertical direction.
【００１４】また、上記アクチュエータ７の駆動方向の
下端部と上記接地支持台２の水平部２ａの中央部との間
にはねじ機構（図示省略）を利用した高さ調整機構９が
アクチュエータ７と直列に配置されているとともに、ア
クチュエータ７の駆動方向の上端部と上記中間支持台５
の水平部５ａの中央部との間にはゴム状弾性体１０がア
クチュエータ７と直列に配置されており、これら高さ調
整機構９による高さ調整および／またはゴム状弾性体１
０の厚さの異なるものとの交換により、上記アクチュエ
ータ７の予圧縮力を調整可能にしている。A height adjusting mechanism 9 using a screw mechanism (not shown) is provided between the lower end of the actuator 7 in the driving direction and the center of the horizontal portion 2a of the ground support base 2 so as to be connected to the actuator 7. While being arranged in series, the upper end of the actuator 7 in the driving direction and the intermediate support 5
A rubber elastic body 10 is arranged in series with the actuator 7 between the horizontal part 5a and the center of the horizontal part 5a.
The precompression force of the actuator 7 can be adjusted by replacing the actuator 7 with one having a different thickness.
【００１５】上記直列結合体８における鉛直型縦積層ゴ
ム体３は、ゴム板３ａと金属板３ｂとの複数枚を交互に
積層配置してなり、上記除振台１に付加される鉛直荷重
Ｗ１を主として支えるものであり、かつ、上記剪断型横
積層ゴム体４，４はそれぞれ、図４に明示されているよ
うに、ゴム板４ａと金属板４ｂとの複数枚を交互に積層
してなり、上記除振台１に付加される剪断荷重Ｗ２を主
として支えるもので、これら２個の横積層ゴム体４，４
の幅方向の中央部を結ぶ線上の中心部に上記アクチュエ
ータ７が配置されている。なお、上記アクチュエータ７
としては、積層ピエゾ素子や超磁歪素子、ボイスコイル
モータ、リニアモータなど外部より矢印ａ−ｂ方向に駆
動制御可能なものが用いられる。The vertical vertical laminated rubber body 3 in the series combination body 8 is composed of a plurality of rubber plates 3a and metal plates 3b alternately laminated and arranged, and a vertical load W1 applied to the vibration isolation table 1 is provided. And the shear-type laterally laminated rubber bodies 4, 4 are each formed by alternately laminating a plurality of rubber plates 4a and metal plates 4b as clearly shown in FIG. , Mainly supporting the shearing load W2 applied to the vibration isolation table 1.
The actuator 7 is disposed at a center portion on a line connecting the center portions in the width direction. The actuator 7
As such a device, a layered piezo element, a giant magnetostrictive element, a voice coil motor, a linear motor, or the like that can be driven and controlled in the directions of arrows ab from outside is used.
【００１６】上記のような構成の制御型除振台の支持装
置Ａは、例えば図５に示すように、隣接する支持装置Ａ
における剪断型横積層ゴム体４，４が水平二次元方向で
互いに直交する姿勢に配置して鉛直方向の支持マウント
として使用される。この使用態様において、除振台１上
に機器を搭載したことにより付加される鉛直荷重Ｗ１は
主として直列結合体８における鉛直型縦積層ゴム体３で
支えられるが、その一部は剪断型横積層ゴム体４，４で
支えられることになる。すなわち、鉛直型縦積層ゴム体
３の圧縮ばね剛性が剪断型横積層ゴム４，４の剪断ばね
剛性により減少され、また、剪断型横積層ゴム体４，４
に付加される剪断荷重Ｗ２の一部は鉛直型縦積層ゴム体
３により逃がされることになるために、支持装置Ａ全体
としての圧縮ばね剛性および剪断ばね剛性が減少される
ことになり、鉛直型縦積層ゴム体を単独使用する場合に
比べて支持装置Ａ全体としての固有振動数を非常に低く
設定することが可能となる。As shown in FIG. 5, for example, as shown in FIG.
The shear-type laterally laminated rubber bodies 4 and 4 are arranged in a posture orthogonal to each other in a horizontal two-dimensional direction and used as a vertical support mount. In this mode of use, the vertical load W1 added by mounting the device on the vibration isolation table 1 is mainly supported by the vertical vertical laminated rubber body 3 in the serially coupled body 8, but a part of the vertical load W1 is sheared horizontal laminated. It will be supported by the rubber bodies 4 and 4. That is, the compression spring rigidity of the vertical type vertical laminated rubber body 3 is reduced by the shear spring rigidity of the shear type horizontal laminated rubber bodies 4, 4.
A part of the shear load W2 applied to the supporting device A is released by the vertical type vertical laminated rubber body 3, so that the compression spring rigidity and the shear spring rigidity of the support device A as a whole are reduced, and the vertical type The natural frequency of the entire support device A can be set very low as compared with the case where the vertically laminated rubber body is used alone.
【００１７】また、図５に示すような実装使用状態にお
いて、各支持装置Ａにおけるアクチュエータ７は上記直
列結合体８における横積層ゴム体４，４に対して並列配
置されているために、これらアクチュエータ７の予圧縮
力を各支持装置Ａの直列結合体８における縦積層ゴム体
３および横積層ゴム体４，４のばね剛性に応じて個別に
調整することが可能であるとともに、除振台１への搭載
機器の重量および各支持装置Ａへの重量負担割合に対応
して上記高さ調整機構９を調整したり、上記ゴム状弾性
体１０を厚さの異なるものに入れ替えたりすることによ
り、各アクチュエータ７の予圧縮力を搭載機器の重量お
よび重量負担割合に応じて容易に調整して該アクチュエ
ータ７を最適駆動点で駆動させることが可能である。Further, in the mounting use state as shown in FIG. 5, the actuators 7 in each support device A are arranged in parallel with the horizontal laminated rubber bodies 4 and 4 in the serially connected body 8, 7 can be individually adjusted in accordance with the spring stiffness of the vertical laminated rubber body 3 and the horizontal laminated rubber bodies 4 and 4 in the serially coupled body 8 of each support device A, and the vibration isolator 1 By adjusting the height adjustment mechanism 9 in accordance with the weight of the equipment mounted on the device and the ratio of the weight burden on each support device A, or by replacing the rubber-like elastic body 10 with one having a different thickness, It is possible to easily adjust the pre-compression force of each actuator 7 according to the weight of the mounted device and the weight burden ratio, and drive the actuator 7 at the optimum driving point.
【００１８】これらの相乗作用によって、支持装置Ａ全
体においては、大質量の鉛直荷重Ｗ２を安定支持するこ
とが可能であると同時に、図６に示すように、鉛直型縦
積層ゴム体を単体使用する場合の除振領域を低周波数
域側の除振領域へ拡大移行させるとともに、そのよう
な除振領域の拡大移行に伴って伝達率が増加することに
なる低周波数帯域の振動に対して各アクチュエータ７の
最適駆動点での駆動制御により、大質量の鉛直荷重が作
用する条件下での使用時における鉛直方向および水平方
向の除振、制振性能を著しく向上させることが可能であ
る。By the synergistic action, the whole supporting device A can stably support the large mass vertical load W2, and at the same time, as shown in FIG. When the vibration isolation region is expanded, the vibration isolation region is expanded and shifted to the vibration isolation region on the low frequency region side. The drive control at the optimum drive point of the actuator 7 makes it possible to remarkably improve the vertical and horizontal vibration isolation and vibration damping performance when used under conditions in which a large vertical load is applied.
【００１９】因みに、上記第１の実施形態で述べたよう
に、鉛直型縦積層ゴム体３を１個、剪断型横積層ゴム体
４を２個使用してなる直列結合体８を備えた支持装置Ａ
についての圧縮ばね剛性Ｋｐおよび剪断ばね剛性Ｋｓを
検討してみると、次のようになる。圧縮ばね剛性Ｋｐ：
剪断ばね剛性Ｋｓ＝１０：１の関係にあることから、支
持装置Ａ全体の圧縮ばね剛性Ｋｐｐは、 Ｋｐ＝１０Ｋｓ Ｋｐｐ＝Ｋｐ・２Ｋｓ／２Ｋｓ＋Ｋｐ ＝１０Ｋｓ・２Ｋｓ／２Ｋｓ＋１０Ｋｓ ＝２０Ｋｓ2 ／１２Ｋｓ ＝２０／１２・Ｋｓ ＝１．６６７Ｋｓ となり、該支持装置Ａの圧縮ばね剛性は、縦積層ゴム体
のみの場合に比較して、約１／６になることが理解され
るであろう。Incidentally, as described in the first embodiment, a support provided with a series-coupled body 8 using one vertical type vertical laminated rubber body 3 and two shear type horizontal laminated rubber bodies 4 is used. Device A
When the compression spring stiffness Kp and the shear spring stiffness Ks are examined, the following is obtained. Compression spring rigidity Kp:
Since the shear spring stiffness Ks = 10: 1, the compression spring stiffness Kpp of the entire support device A is as follows: Kp = 10 Ks Kpp = Kp · 2Ks / 2Ks + Kp = 10Ks · 2Ks / 2Ks + 10Ks = 20Ks 2 / 12Ks = 20 / It will be understood that the compression spring stiffness of the supporting device A is about 1/6 as compared with the case of using only the vertically laminated rubber body.
【００２０】また、支持装置Ａの剪断ばね剛性Ｋｓｓは
２通りの剛性になり、 Ｋｓｓ１＝２Ｋｓ・Ｋｓ／Ｋｓ＋２Ｋｓ ＝２Ｋｓ2 ／３Ｋｓ ＝２／３・Ｋｓ ＝０．６６７Ｋｓ Ｋｓｓ２＝２Ｋｐ・Ｋｓ／Ｋｓ＋２Ｋｐ ＝２０Ｋｓ・Ｋｓ／Ｋｓ＋２０Ｋｓ ＝２０Ｋｓ2 ／２１Ｋｓ ＝２０／２１・Ｋｓ ＝０．９５２Ｋｓ となり、剪断ばね剛性も少し減少することが理解される
であろう。Further, the shear spring rigidity Kss of the supporting device A becomes two kinds of rigidity, Kss1 = 2Ks · Ks / Ks + 2Ks = 2Ks 2 /3Ks=2/3·Ks=0.667Ks Kss2 = 2Kp · Ks / Ks + 2Kp = 20Ks · Ks / Ks + 20Ks = 20Ks 2 /21Ks=20/21·Ks=0.952Ks It can be seen that the shear spring stiffness is slightly reduced.
【００２１】図７は本発明に係る制御型除振台の支持装
置の第２の実施形態を示す基本的構成図であり、この第
２の実施形態では、第１の実施形態の直列結合体８にお
ける縦積層ゴム体３と横積層ゴム体４との配置関係を上
下逆にしたものである。すなわち、直列結合体８におけ
る縦積層ゴム体３を接地支持台２の水平部２ａの中央部
と接地面との間に、それらの積層面を水平姿勢にして介
在する一方、横積層ゴム体４を図８に示すように、環状
一体形に形成し、この環状一体形の横積層ゴム体４を除
振台１に固定した門型の中間支持台５の環状鉛直部５ｂ
とこれに対向する接地支持台２の環状鉛直部２ｂとの間
に、それらの積層面を鉛直姿勢にして介在させ、かつ、
この環状一体形の横積層ゴム体４の環状中心部に上記ア
クチュエータ７を該横積層ゴム体４に対し並列配置させ
て上記中間支持台５の水平部５ａとこれに対向する接地
支持台２の水平部２ａとの間に介在させたものであり、
その他の構成は第１の実施形態の場合と同一であるた
め、該当部分に同一の符号を付して、それらの説明を省
略する。FIG. 7 is a basic configuration diagram showing a second embodiment of a supporting device for a control type anti-vibration table according to the present invention. In the second embodiment, a series-coupled body of the first embodiment is shown. 8, the arrangement relationship between the vertical laminated rubber body 3 and the horizontal laminated rubber body 4 is inverted. That is, the vertical laminated rubber body 3 in the series combination body 8 is interposed between the center of the horizontal portion 2a of the ground support 2 and the ground plane with their laminated surfaces in a horizontal posture, while the horizontal laminated rubber body 4 As shown in FIG. 8, an annular vertical portion 5 b of a gate-shaped intermediate support 5 in which an annular integrated laterally laminated rubber body 4 is fixed to a vibration isolation table 1 as shown in FIG.
And the annular vertical portion 2b of the ground support 2 opposed thereto, with their lamination surfaces interposed in a vertical posture, and
The actuator 7 is disposed in parallel with the horizontal laminated rubber body 4 at the annular central portion of the annular integrated laterally laminated rubber body 4 so that the horizontal portion 5a of the intermediate support 5 and the ground support 2 facing the horizontal portion 5a. And between the horizontal portion 2a.
Since other configurations are the same as those of the first embodiment, the corresponding portions are denoted by the same reference numerals and description thereof will be omitted.
【００２２】上記第２の実施形態による制御型除振台の
支持装置の場合も、上記第１の実施形態の場合と同様
に、鉛直型縦積層ゴム体３の圧縮ばね剛性を剪断型横積
層ゴム４，４の剪断ばね剛性により減少させて支持装置
Ａ全体としての圧縮ばね剛性を非常に小さくするととも
に、剪断型横積層ゴム体４，４に付加される剪断荷重Ｗ
２を鉛直型縦積層ゴム体３により逃がして支持装置Ａ全
体としての剪断ばね剛性も減少し、支持装置Ａ全体とし
て、大質量の鉛直荷重Ｗ２の安定支持と同時に固有振動
数を低く設定することが可能となると同時に、アクチュ
エータ７の予圧縮力の調整により除振領域となる低周波
数帯域の振動に対して各アクチュエータ７を最適駆動点
で駆動制御することが可能となり、大質量の鉛直荷重が
作用する条件下での使用時における鉛直方向および水平
方向の除振、制振性能を著しく向上させることができ
る。なお、この第２の実施形態では、横積層ゴム体４と
して、環状一体形のものを用いたが、図４に示すよう
に、２個の横積層ゴム体を用いてもよい。In the case of the control type vibration isolation table supporting device according to the second embodiment, similarly to the first embodiment, the compression spring stiffness of the vertical type vertical laminated rubber body 3 is determined by the shear type horizontal lamination. The compression spring rigidity of the support device A as a whole is reduced very much by the shear spring rigidity of the rubbers 4,4, and the shear load W applied to the shear-type horizontal laminated rubber bodies 4,4.
2 is released by the vertical vertical laminated rubber body 3 to reduce the shear spring stiffness of the whole support device A, and to set the natural frequency to be low simultaneously with the stable support of the large vertical load W2 of the support device A as a whole. At the same time, by adjusting the pre-compression force of the actuator 7, it becomes possible to drive and control each actuator 7 at the optimum driving point with respect to the vibration in the low frequency band which is the vibration isolation region, and the vertical load of a large mass can be reduced. Vertical and horizontal vibration isolation and vibration suppression performance when used under operating conditions can be significantly improved. In the second embodiment, the laterally laminated rubber body 4 is of a ring-shaped integral type. However, as shown in FIG. 4, two laterally laminated rubber bodies may be used.
【００２３】図９は本発明に係る制御型除振台の支持装
置の第３の実施形態を示す基本的構成図であり、この第
３の実施形態では、接地支持台２を逆Ｔ字形状に形成
し、この接地支持台２の左右鉛直部２ｂ，２ｂとこれに
平行に対向する中間支持台５の左右鉛直部５ｂ，５ｂと
の間にそれぞれ剪断型横積層ゴム体４，４を上下傾斜姿
勢に介在させたものである。また、この第３の実施形態
の変形例として、図１０あるいは図１１に示すように、
中間支持台５の左右鉛直部５ａ，５ａと接地支持台２の
左右鉛直部２ａ，２ａとにそれぞれ鉛直方向および水平
方向に対して共に傾斜する傾斜面５ｃ，５ｃ、２ｃ，２
ｃを対向状態に形成し、これら対向する傾斜面５ｃ，５
ｃと２ｃ，２ｃ間にそれぞれ剪断型横積層ゴム体４，４
をそれらの積層面が鉛直方向および水平方向に対して共
に傾斜するような傾斜姿勢に配置した構成を採用しても
よい。なお、この第３の実施形態およびその変形例にお
いて、その他の構成は図１及び図２に示す第１の実施形
態と同一であるため、該当部分に同一の符号を付して、
それらの詳しい説明は省略している。FIG. 9 is a basic configuration diagram showing a third embodiment of a supporting device for a control-type anti-vibration table according to the present invention. In this third embodiment, the grounding support table 2 has an inverted T-shape. And between the left and right vertical portions 2b, 2b of the ground support 2 and the left and right vertical portions 5b, 5b of the intermediate support 5 facing in parallel with each other, the shear-type laterally laminated rubber members 4, 4 are vertically moved, respectively. This is interposed in an inclined posture. As a modification of the third embodiment, as shown in FIG. 10 or FIG.
Inclined surfaces 5c, 5c, 2c, 2 that are inclined in both the vertical and horizontal directions on the left and right vertical portions 5a, 5a of the intermediate support 5 and the left and right vertical portions 2a, 2a of the ground support 2 respectively.
c are formed in an opposed state, and these opposed inclined surfaces 5c, 5c are formed.
c, 2c, and 2c, respectively, shear-type laterally laminated rubber bodies 4, 4
May be adopted in such a manner that their stacked surfaces are arranged in an inclined posture such that they are both inclined in the vertical direction and the horizontal direction. In the third embodiment and its modified example, other configurations are the same as those of the first embodiment shown in FIGS. 1 and 2, and the same reference numerals are given to the corresponding portions.
Detailed description of them is omitted.
【００２４】図９で示す第３の実施形態および図１０や
図１１で示す変形例による制御型除振台の支持装置の場
合も、上記第１の実施形態の場合と同様に、鉛直型縦積
層ゴム体３の圧縮ばね剛性を剪断型横積層ゴム４，４の
剪断ばね剛性により減少させて支持装置Ａ全体としての
圧縮ばね剛性を非常に小さくするとともに、剪断型横積
層ゴム体４，４に付加される剪断荷重Ｗ２を鉛直型縦積
層ゴム体３により逃がして支持装置Ａ全体としての剪断
ばね剛性も減少し、支持装置Ａ全体として、大質量の鉛
直荷重Ｗ２の安定支持と同時に固有振動数を低く設定す
ることが可能である他に、搭載機器の重量などに対応し
て上記剪断型横積層ゴム体４，４の積層面の傾斜角度θ
を変更することにより、鉛直方向の剛性、つまり圧縮ば
ね剛性を任意に設定することが可能となり、このこと
と、アクチュエータ７の予圧縮力の調整により除振領域
となる低周波数帯域の振動に対して各アクチュエータ７
を最適駆動点で駆動制御することが可能になることとの
相乗によって、大質量の鉛直荷重が作用する条件下での
使用時における鉛直方向および水平方向の除振、制振性
能を著しく向上させることができる。特に、図１０の変
形例においては、接地支持台２との間に横積層ゴム体
４，４を配置する中間支持台５と横積層ゴム体４，４と
の接着が不完全であったり、不良であったとしても、中
間支持台５が抜け落ちる心配がなく、それだけ支持装置
全体の組付けを容易にすることができる。In the third embodiment shown in FIG. 9 and the supporting device of the control type anti-vibration table according to the modified examples shown in FIGS. 10 and 11, similarly to the first embodiment, the vertical type vertical support is used. The compression spring stiffness of the laminated rubber body 3 is reduced by the shear spring stiffness of the shear-type lateral laminated rubbers 4 and 4 to greatly reduce the compression spring stiffness of the support device A as a whole. The shear load W2 applied to the support device A is released by the vertical vertical laminated rubber body 3 to reduce the shear spring rigidity of the support device A as a whole. In addition to being able to set the number low, the inclination angle θ of the lamination surface of the above-mentioned shear-type laterally laminated rubber bodies 4, 4 according to the weight of the mounted equipment, etc.
, The vertical stiffness, that is, the compression spring stiffness, can be arbitrarily set. In addition to this, with respect to the vibration in the low frequency band which becomes the vibration isolation region by adjusting the precompression force of the actuator 7, Each actuator 7
Synergy with the fact that it becomes possible to control the drive at the optimum drive point significantly improves vertical and horizontal vibration isolation and vibration damping performance when used under conditions where large mass vertical loads are applied be able to. In particular, in the modified example of FIG. 10, the bonding between the intermediate support 5 and the horizontal laminated rubber bodies 4 and 4 where the horizontal laminated rubber bodies 4 and 4 are arranged between the ground support 2 and the horizontal laminated rubber bodies 4 and 4 is incomplete, Even if it is defective, there is no fear that the intermediate support base 5 will fall off, so that the entire support device can be easily assembled.
【００２５】なお、上記第１の実施形態、第３の実施形
態およびそれの変形例では、剪断型横積層ゴム体４を鉛
直型縦積層ゴム体３の左右両側に二個配置したもので説
明したが、図１２に示すように、鉛直型縦積層ゴム体３
の周りに等間隔で三個の剪断型横積層ゴム体４を配置し
たものでも、図１３に示すように、鉛直型縦積層ゴム体
３の周囲に四個の剪断型横積層ゴム体４を配置したもの
であってもよい。In the first embodiment, the third embodiment, and the modifications thereof, two shear-type horizontal laminated rubber members 4 are arranged on the left and right sides of the vertical vertical laminated rubber member 3. However, as shown in FIG.
13, three shear-type laterally laminated rubber bodies 4 are arranged around the vertical type vertically-laminated rubber body 3 as shown in FIG. They may be arranged.
【００２６】[0026]
【発明の効果】以上のように、請求項１に記載の発明に
よれば、鉛直型縦積層ゴム体および剪断型横積層ゴムの
直列結合体と該直列結合体における横積層ゴム体に並列
配置させたアクチュエータとの組み合わせ使用によっ
て、縦積層ゴム体の圧縮ばね剛性を大質量の鉛直荷重を
安定支持するに足りる値に設定しながらも、支持装置全
体としての圧縮ばね剛性および剪断ばね剛性を非常に小
さくして系全体の固有振動数を低く設定することができ
ると同時に、圧縮ばね剛性の低下に伴う除振領域の拡大
により伝達率が増加することになる低周波数帯域を制御
するためのアクチュエータの予圧縮力を実装した直列結
合体における縦および横積層ゴム体のばね剛性に応じて
個別に調整しやすくて各アクチュエータの駆動効率を高
めることができる。したがって、鉛直型縦積層ゴム体を
単体使用してなる制御型除振台の支持装置に比べて、大
質量の鉛直荷重を安定支持することができるとともに、
そのような大質量の鉛直荷重が作用する条件下での使用
においても鉛直方向および水平方向の除振、制振性能を
著しく向上することができる。その上、アクチュエータ
と横積層ゴム体との並列配置により、これらを直列配置
する場合に比して、支持装置全体を嵩低いコンパクトな
ものに構成でき、また、該支持装置の設置使用中でも、
アクチュエータのみを単独に取り出して任意に点検、補
修や交換することができるという効果を奏する。As described above, according to the first aspect of the present invention, a series combination of a vertical type vertical laminated rubber body and a shear type laterally laminated rubber and a horizontal laminated rubber body in the series coupled body are arranged in parallel. Combined use with the actuator, the compression spring stiffness of the vertical laminated rubber body is set to a value sufficient to stably support a large vertical load, but the compression spring stiffness and shear spring stiffness of the entire support device are extremely high. Actuator to control the low frequency band where the natural frequency of the entire system can be set low and the transmissibility increases due to the expansion of the vibration isolation area due to the decrease in compression spring stiffness. It is easy to adjust individually according to the spring stiffness of the vertical and horizontal laminated rubber bodies in the serially coupled body mounting the precompression force, and it is possible to increase the driving efficiency of each actuator. Therefore, compared to the control device of the control type anti-vibration table using the vertical type vertically laminated rubber body alone, it is possible to stably support a large mass vertical load,
Even under such a condition that a large mass vertical load is applied, the vibration isolation and vibration damping performance in the vertical and horizontal directions can be remarkably improved. In addition, due to the parallel arrangement of the actuator and the laterally laminated rubber body, the entire support device can be configured to be less bulky and compact than when these are arranged in series, and even during installation use of the support device,
This has the effect that only the actuator can be taken out alone and arbitrarily inspected, repaired or replaced.
【００２７】特に、請求項２に記載の発明によれば、上
記の効果に加えて、アクチュエータの組付け後でも、搭
載機器の重量に対応してアクチュエータの予圧縮力を容
易に調整することができ、該アクチュエータをいかなる
重量の搭載機器に対しても常に最適の駆動点で駆動し制
振性能を一層向上することができる。In particular, according to the second aspect of the present invention, in addition to the above effects, even after the actuator is assembled, the pre-compression force of the actuator can be easily adjusted according to the weight of the mounted equipment. Thus, the actuator can always be driven at an optimum drive point for a mounted device of any weight to further improve the vibration damping performance.
【００２８】また、請求項３に記載の発明によれば、ア
クチュエータの駆動方向に対して直交するあらゆる方向
から加わる力を環状一体形あるいは環状に配置された複
数個の横積層ゴム体によりバランスよく吸収させてアク
チュエータに対する剪断力吸収機能を良好に発揮させる
ことができるとともに、支持装置全体を一層コンパクト
化することができる。According to the third aspect of the present invention, the forces applied from all directions perpendicular to the driving direction of the actuator are balanced by the plurality of laterally-laminated rubber bodies arranged in an annularly integrated or annular manner. It is possible to satisfactorily exert the function of absorbing the shearing force on the actuator by absorbing it, and further downsize the entire support device.
【００２９】さらに、請求項４に記載の発明によれば、
搭載機器の質量に対応して横積層ゴム体の積層面の傾斜
角度を変更することにより、鉛直方向の剛性、つまり圧
縮ばね剛性を任意に設定することが可能で適用性を拡大
できるとともに、接地支持台との間に横積層ゴム体を配
置する中間支持台と横積層ゴム体との接着が不完全であ
ったり、不良であったとしても、中間支持台の抜け落ち
がなく、それだけ支持装置全体の組付けを容易にするこ
とができる。Further, according to the fourth aspect of the present invention,
By changing the inclination angle of the lamination surface of the horizontal laminated rubber body according to the mass of the mounted equipment, the rigidity in the vertical direction, that is, the compression spring rigidity, can be set arbitrarily and the applicability can be expanded, and grounding can be performed Placing the horizontal laminated rubber body between the support base and the intermediate support base and the horizontal laminated rubber body, even if the adhesion between the intermediate support base is incomplete or defective, the intermediate support base does not fall off and the entire support device Can be easily assembled.
【図１】本発明に係る制御型除振台の支持装置の第１の
実施形態を示す基本的構成図で、機器が搭載され振動等
の外乱が作用していない状態の正面図である。FIG. 1 is a basic configuration diagram showing a first embodiment of a control-type anti-vibration table support device according to the present invention, and is a front view of a state where equipment is mounted and no disturbance such as vibration is acting.
【図２】同上支持装置に振動等の外乱が作用した状態の
正面図である。FIG. 2 is a front view showing a state where disturbance such as vibration acts on the support device.
【図３】同上支持装置の概略平面図である。FIG. 3 is a schematic plan view of the support device.
【図４】同上支持装置における横積層ゴム体およびアク
チュエータの配置を示す要部の平面図である。FIG. 4 is a plan view of a main part showing an arrangement of a horizontally laminated rubber body and an actuator in the support device.
【図５】同上支持装置の使用配置図である。FIG. 5 is a use layout diagram of the support device.
【図６】第１の実施形態による支持装置の効果を説明す
る除振性能図である。FIG. 6 is an anti-vibration performance diagram for explaining an effect of the support device according to the first embodiment.
【図７】本発明に係る制御型除振台の支持装置の第２の
実施形態を示す基本的構成図である。FIG. 7 is a basic configuration diagram showing a second embodiment of a support device for a control-type anti-vibration table according to the present invention.
【図８】同上支持装置における横積層ゴム体の形状およ
びアクチュエータの配置を示す要部の平面図である。FIG. 8 is a plan view of a main part showing a shape of a horizontal laminated rubber body and an arrangement of actuators in the supporting device.
【図９】本発明に係る制御型除振台の支持装置の第３の
実施形態を示す基本的構成図である。FIG. 9 is a basic configuration diagram showing a third embodiment of a supporting device for a control type anti-vibration table according to the present invention.
【図１０】第３の実施形態の変形例の一つを示す基本的
構成図である。FIG. 10 is a basic configuration diagram showing a modification of the third embodiment.
【図１１】第３の実施形態の変形例の他の一つを示す基
本的構成図である。FIG. 11 is a basic configuration diagram showing another modified example of the third embodiment.
【図１２】剪断型横積層ゴム体を三個配置した支持装置
の概略平面図である。FIG. 12 is a schematic plan view of a supporting device in which three shear-type horizontally laminated rubber bodies are arranged.
【図１３】剪断型横積層ゴム体を四個配置した支持装置
の概略平面図である。FIG. 13 is a schematic plan view of a support device in which four shear-type horizontally laminated rubber bodies are arranged.
１ 除振台 ２ 接地支持台 ３ 鉛直型縦積層ゴム体 ４ 剪断型横積層ゴム体 ３ａ，４ａ ゴム板 ３ｂ，４ｂ 金属板 ５ 中間支持台 ７ アクチュエータ ８ 直列結合体 ９ 高さ調整機構 １０ ゴム状弾性体 DESCRIPTION OF SYMBOLS 1 Vibration isolation stand 2 Ground support stand 3 Vertical type vertical laminated rubber body 4 Shear type lateral laminated rubber body 3a, 4a Rubber plate 3b, 4b Metal plate 5 Intermediate support stand 7 Actuator 8 Series combination body 9 Height adjustment mechanism 10 Rubber Elastic body
Claims (4)
に、複数枚のゴム板と金属板とを交互に積層配置してな
る鉛直型縦積層ゴム体及び複数枚のゴム板と金属板とを
交互に積層してなる剪断型横積層ゴム体との直列結合体
を介在させているとともに、 上記除振台と接地面との間に、上記直列結合体における
横積層ゴム体に並列配置させて外部より駆動制御可能な
アクチュエータをその駆動方向が鉛直方向に沿うように
介在させていることを特徴とする制御型除振台の支持装
置。1. A vertical type vertically laminated rubber body in which a plurality of rubber plates and a metal plate are alternately laminated and arranged between a vibration isolation table on which equipment is mounted and a ground plane, and a plurality of rubber plates. In addition to interposing a series-coupled body with a shear-type laterally-laminated rubber body formed by alternately laminating metal plates, between the anti-vibration table and the ground plane, A supporting device for a control-type anti-vibration table, wherein actuators that are arranged in parallel and that can be drive-controlled from the outside are interposed so that the driving direction is along the vertical direction.
は、該アクチュエータの予圧縮力を調整可能な高さ調整
機構及び／又はゴム状弾性体が直列に配置されているこ
とを特徴とする請求項１に記載の制御型除振台の支持装
置。2. A height adjusting mechanism and / or a rubber-like elastic body capable of adjusting a pre-compression force of the actuator is arranged in series at an end of the actuator in a driving direction. Item 2. A support device for a controlled vibration isolation table according to Item 1.
環状一体形に形成されているか、もしくは、複数個の横
積層ゴム体が環状に配置されており、その環状中心部に
上記アクチュエータが配置されていることを特徴とする
請求項１または２に記載の制御型除振台の支持装置。3. The horizontal laminated rubber body in the series-coupled body is formed in an annular integral shape, or a plurality of laterally laminated rubber bodies are arranged in an annular shape, and the actuator is arranged in a central portion of the annular shape. The supporting device for a control-type anti-vibration table according to claim 1, wherein the supporting device is provided.
は、それを構成するゴム板と金属板との積層面が鉛直方
向および水平方向に対して共に傾斜する面に沿う傾斜姿
勢で配置されていることを特徴とする請求項１，２また
は３に記載の制御型除振台の支持装置。4. The horizontal laminated rubber body in the series-coupled body is disposed in an inclined posture along a plane in which a laminating surface of a rubber plate and a metal plate constituting the laminated body is inclined both vertically and horizontally. 4. The supporting device for a control-type anti-vibration table according to claim 1, 2, or 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27706797A JPH11108109A (en) | 1997-10-09 | 1997-10-09 | Supporting device of controllable vibration-eliminating stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27706797A JPH11108109A (en) | 1997-10-09 | 1997-10-09 | Supporting device of controllable vibration-eliminating stand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11108109A true JPH11108109A (en) | 1999-04-20 |
Family
ID=17578330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27706797A Withdrawn JPH11108109A (en) | 1997-10-09 | 1997-10-09 | Supporting device of controllable vibration-eliminating stand |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11108109A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001271871A (en) * | 2000-03-24 | 2001-10-05 | Tokkyokiki Corp | Active vibration control device |
| JP2002035696A (en) * | 2000-07-25 | 2002-02-05 | Tokkyokiki Corp | Vibration controlling device and driving method thereof |
| JP2013149924A (en) * | 2012-01-23 | 2013-08-01 | Japan Display Central Co Ltd | Laser annealing apparatus |
| CN108253084A (en) * | 2018-01-29 | 2018-07-06 | 哈尔滨工业大学 | Six degree of freedom superlow frequency vibration isolating device and its control system of the one kind based on zero stiffness system |
| CN108980270A (en) * | 2018-08-13 | 2018-12-11 | 辽宁工程技术大学 | A kind of Power-equipment Foundation shock mount |
-
1997
- 1997-10-09 JP JP27706797A patent/JPH11108109A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001271871A (en) * | 2000-03-24 | 2001-10-05 | Tokkyokiki Corp | Active vibration control device |
| JP2002035696A (en) * | 2000-07-25 | 2002-02-05 | Tokkyokiki Corp | Vibration controlling device and driving method thereof |
| JP2013149924A (en) * | 2012-01-23 | 2013-08-01 | Japan Display Central Co Ltd | Laser annealing apparatus |
| CN108253084A (en) * | 2018-01-29 | 2018-07-06 | 哈尔滨工业大学 | Six degree of freedom superlow frequency vibration isolating device and its control system of the one kind based on zero stiffness system |
| CN108980270A (en) * | 2018-08-13 | 2018-12-11 | 辽宁工程技术大学 | A kind of Power-equipment Foundation shock mount |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20050104 |