JPH1076804A - Caster mechanism for moving casing - Google Patents
Caster mechanism for moving casingInfo
- Publication number
- JPH1076804A JPH1076804A JP23425896A JP23425896A JPH1076804A JP H1076804 A JPH1076804 A JP H1076804A JP 23425896 A JP23425896 A JP 23425896A JP 23425896 A JP23425896 A JP 23425896A JP H1076804 A JPH1076804 A JP H1076804A
- Authority
- JP
- Japan
- Prior art keywords
- caster
- foot
- casing
- housing
- casters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Casings For Electric Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造装置等
の筐体を移動させるために用いる筐体移動用キャスタ機
構に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a casing moving caster mechanism for moving a casing of a semiconductor manufacturing apparatus or the like.
【０００２】[0002]
【従来の技術】従来の構成を図９及び図１０に示す。１
は筐体フレームで、フレーム底にはキャスタ２及び足部
３が設けられる。キャスタ２はフレーム１に固定で、足
部３がネジ３２により上下に移動可能に設けられる。筐
体１を移動するときは、ネジ３２を廻すことにより足３
１を上方に引き上げ、先端をキャスタ２より引込ませる
（図１０）。これによりキャスタ２が床に接地状態とな
るからキャスタ２による筐体１の移動が可能となる。2. Description of the Related Art FIGS. 9 and 10 show a conventional structure. 1
Is a housing frame, on the bottom of which a caster 2 and a foot 3 are provided. The casters 2 are fixed to the frame 1, and the feet 3 are provided so as to be movable up and down by screws 32. When moving the housing 1, the foot 3 is turned by turning the screw 32.
1 is pulled upward, and the tip is retracted from the caster 2 (FIG. 10). As a result, since the casters 2 are brought into contact with the floor, the casing 1 can be moved by the casters 2.
【０００３】筐体１を固定するときは、ネジ３２を反対
に廻すことによって足３１を下げて接地させ、さらにキ
ャスタ２が床から浮き上る状態にする。この状態でネジ
３２を微調整しレベル調整をする。When the housing 1 is fixed, the foot 31 is lowered by turning the screw 32 in the opposite direction to ground, and the caster 2 is raised above the floor. In this state, the screw 32 is finely adjusted to adjust the level.
【０００４】一担筐体を固定し、レベル出しを行なった
筐体内に部品を組み込んでから再度移動しなければなら
ないときは、一度レベル出しを行なった足部３をキャス
タ２が地面に接地するところまで引っ込め、移動して
後、再度足３を出して固定しレベル出しを行なうという
手順をふまなければならない。[0004] When it is necessary to fix the one-piece housing, mount components in the leveled housing, and then move it again, the caster 2 grounds the foot 3 once leveled to the ground. After retreating and moving to the point, it is necessary to repeat the procedure of taking out the foot 3 again, fixing and leveling.
【０００５】[0005]
【発明が解決しようとする課題】このように、従来は筐
体を固定しただけでなくレベル出ししてある筐体の移動
を行なうためには、キャスタを使って移動させた後に足
部を出して固定すると共に、再度の微調整によるレベル
出しを行なわなければならず、しかも、一般に、この筐
体のレベル出しは非常に手間のかかる作業であった。As described above, conventionally, in order to move the housing which is not only fixed but also leveled, the caster is used to move the housing and then the foot is taken out. In addition, the leveling must be performed again by fine adjustment, and the leveling of the housing is generally a very troublesome operation.
【０００６】本発明の目的は、筐体移動後のレベル出し
の手間を省き、筐体移動を容易に短時間に行なえる筐体
移動用キャスタ機構の提供にある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a caster mechanism for moving a casing which can easily and quickly move the casing without the need for leveling after the casing is moved.
【０００７】[0007]
【課題を解決するための手段】前記の目的は、キャスタ
全長が足部全長より長く、且つキャスタ部分の長さが足
部全長より短かく形成され、筐体フレームに出入可能に
取り付けられたキャスタと、筐体移動時にキャスタを足
部先端を越えて床に接地するまで突出させ、筐体固定時
にキャスタ先端が床から浮き上がるまで引っ込めるキャ
スタを出し入れする手段とを設けたことによって達成さ
れる。SUMMARY OF THE INVENTION It is an object of the present invention to provide a caster in which a caster has a length longer than a foot and a caster portion has a length shorter than a foot. This is achieved by providing a means for projecting the casters beyond the tip of the foot when moving the housing until the casters touch the floor, and retracting the casters when the housing is fixed until the tips of the casters rise up from the floor.
【０００８】前記の手段によれば、キャスタを出し入れ
することにより筐体の移動と、固定ができ、足部は一担
レベル出しが行なわれて後は動かす必要がなくなる。し
たがって筐体の移動、固定が極めて容易にできる。According to the above-mentioned means, the housing can be moved and fixed by moving the caster in and out, and it is not necessary to move the foot after the level is set. Therefore, the case can be moved and fixed very easily.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施の形態を図面
により説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１０】図１は、本発明の一実施形態の筐体を床に
固定した状態を示し、図２は、筐体を移動させる場合を
示す。筐体フレーム１にキャスタ２が出入可能に取り付
けられ、キャスタ２と並設される足部３も上下に位置調
整が可能に設けられている。FIG. 1 shows a state in which a housing according to an embodiment of the present invention is fixed to a floor, and FIG. 2 shows a case where the housing is moved. A caster 2 is attached to the housing frame 1 so as to be able to move in and out, and a foot 3 arranged in parallel with the caster 2 is also provided so as to be vertically adjustable.
【００１１】図１のように、筐体を固定する場合は、キ
ャスタ２を引っ込めることによって筐体フレーム１は足
部３で床面に固定される。この状態で足部３の長さ調整
によりレベル出しが行なえる。また、筐体を移動すると
きは、図２のようにキャスタ２を足部３の先端を越えて
床面に接地するまで突き出すと、この状態では足部３が
床より浮き上がり、キャスタ２により容易に移動でき
る。所定位置に移動させて後、キャスタ２を引っ込ませ
れば図１の状態となって足部３が床に接地して筐体を固
定でき、この固定状態で足部３の上下移動はないからレ
ベルも同時に出き、新めてレベル出し調整する手間を省
くことができる。As shown in FIG. 1, when the housing is fixed, the caster 2 is retracted so that the housing frame 1 is fixed to the floor surface by the feet 3. In this state, the level can be set by adjusting the length of the foot 3. When moving the housing, as shown in FIG. 2, if the caster 2 is pushed out beyond the tip of the foot 3 until it comes into contact with the floor, the foot 3 is lifted off the floor in this state, and the caster 2 makes it easier. Can be moved to After moving the caster 2 to the predetermined position, the caster 2 is retracted, and the state shown in FIG. 1 is reached, the foot 3 is grounded to the floor, and the housing can be fixed. Also comes out at the same time, eliminating the need for a new level adjustment.
【００１２】図３は、本発明のキャスタ２と足部３の長
さの関係を説明するもので、キャスタ２の全長（＝キャ
スタ部分２１＋ネジ部２２）が足部３の全長（足３１＋
ネジ部３２）より長く形成され、且つキャスタ部分２１
の長さｘは足部３の全長ｙに比較し、ｘ＜＜ｙの条件を
満足するように形成され、筐体移動時には足部３が床面
から浮上し、筐体固定時に、筐体ケース１内に引っ込ま
せることができないキャスタ部分２１の長さｘより足部
３の全長ｙが余裕をもつ長さで、キャスタ２を引っ込ま
せたときキャスタ部分２１が床面から充分上に浮く状態
に引っ込ませることが可能な長さとするものである。FIG. 3 illustrates the relationship between the length of the caster 2 and the length of the foot 3 according to the present invention. The total length of the caster 2 (= caster portion 21 + screw portion 22) is equal to the total length of the foot 3 (foot 31+
The screw portion 32) is longer than the caster portion 21.
Is formed so as to satisfy the condition of x << y as compared with the total length y of the feet 3, and the feet 3 float from the floor surface when the housing is moved, and when the housing is fixed, the housing 3 When the caster 2 is retracted, the caster portion 21 floats sufficiently above the floor when the caster 2 is retracted, and the total length y of the foot portion 3 is longer than the length x of the caster portion 21 that cannot be retracted into the case 1. The length is such that it can be retracted.
【００１３】図４は、キャスタ２のネジ部２２及び足部
３のネジ部３２の上端に設けられたネジ廻し用手段を示
し、（ａ）は六角穴を形成し、六角レンチで廻すもの、
（ｂ）は四角凸部、（ｃ）は六角凸部を形成し、スパナ
で廻すものである。FIGS. 4A and 4B show screwdriver means provided at the upper ends of the screw portion 22 of the caster 2 and the screw portion 32 of the foot portion 3. FIG. 4A shows a screwdriver formed with a hexagonal hole and turned with a hexagonal wrench.
(B) forms a square convex portion, and (c) forms a hexagonal convex portion, which is turned with a spanner.
【００１４】図５は、キャスタ２を筐体フレーム１に上
下に出入可能に取り付けた詳細図を示し、筐体フレーム
１に雌ネジ部材４１を溶接等で固定し、これにキャスタ
のネジ部２２をねじ込み、ネジ２２を廻すことによって
キャスタ２の上下出し入れ調整をする。キャスタを上方
に引っ込めたときの最小長さはキャスタ部分２１の長さ
に短縮でき、下方に突き出した最大長さはキャスタ部分
２１とネジ部２２の長さの和になる。なおネジ部２２の
上端頭部には図４に示した六角穴が形成してあり、これ
に六角レンチを挿入して容易に廻すことができる。なお
キャスタ２の上下移動は雌ネジ部材４１を回転するよう
構成しても可能である。FIG. 5 is a detailed view in which the caster 2 is attached to the housing frame 1 so as to be able to move up and down, and a female screw member 41 is fixed to the housing frame 1 by welding or the like. , And turning the screw 22 to adjust the caster 2 up and down. The minimum length when the caster is retracted upward can be reduced to the length of the caster portion 21, and the maximum length protruding downward is the sum of the lengths of the caster portion 21 and the screw portion 22. A hexagonal hole shown in FIG. 4 is formed in the upper end head of the screw portion 22, and a hexagonal wrench can be inserted into this and turned easily. The caster 2 can be moved up and down by rotating the female screw member 41.
【００１５】図５のキャスタ部分２１はローラに形成し
たが、図６に示すボールキャスタ６１でもよい。The caster portion 21 shown in FIG. 5 is formed as a roller, but may be a ball caster 61 shown in FIG.
【００１６】図７は足部３を筐体フレーム１に上下に可
動に取り付けた詳細図で、筐体フレーム１に雌ネジ部材
４２を溶接し、これに足部のネジ部３２をねじ込み、ネ
ジ３２を廻すことによって足部３の上下出し入れ調整を
する。この足部３のねじ廻しもネジ部３２頭部に六角穴
が形成してあり、これを六角レンチで廻すことによって
上下長さ調整をする。筐体フレーム１から下に突出する
足部３の長さは、通常キャスタ部分２１の長さより長
く、且つ筐体移動時にキャスタ２を下方に突き出したキ
ャスタ部分２１とネジ部２２の長さの和よりも短い長さ
に設定し、レベル出しは、固定位置を中心に上下に微調
整して定める。FIG. 7 is a detailed view in which the foot portion 3 is vertically movably attached to the housing frame 1. A female screw member 42 is welded to the housing frame 1, and the foot screw portion 32 is screwed into the female screw member 42. Adjusting the vertical movement of the foot 3 by turning the knob 32. A hexagonal hole is formed in the head of the screw portion 32 also for the screwdriver of the foot portion 3, and the vertical length is adjusted by turning the screwdriver with a hexagonal wrench. The length of the foot 3 projecting downward from the housing frame 1 is usually longer than the length of the caster portion 21, and the sum of the lengths of the caster portion 21 and the screw portion 22 that protrude the caster 2 downward when the housing is moved. It is set to a shorter length, and the leveling is determined by finely adjusting the fixed position up and down.
【００１７】図８は、本発明を利用した筐体の組立方法
を説明するもので、図（ａ）は筐体固定、（ｂ）は移動
工程、（ｃ）は筐体と筐体のドックキング固定を示す。FIGS. 8A and 8B illustrate a method of assembling a housing using the present invention. FIG. 8A shows a case fixing, FIG. 8B shows a moving process, and FIG. Indicates King fixation.
【００１８】先づ（ａ）において、分割筐体Ａはキャス
タ２を引っ込め、足部３を接地して固定し、足部３の出
し入れ調整してレベル出しが行なわれ、また筐体内には
部品の組立等も行なわれる。（ｂ）ではレベル出し及び
組立の行なわれた筐体Ａの移動を行なう。移動に際して
レベル出しの行なわれた足部３はそのままにしてキャス
タ２をフレーム１から突き出しキャスタ２が地面に接触
するようにする。さらに移動の際に足部３が邪魔になら
ない程度にキャスタ２を突出させて移動させる。（ｃ）
は筐体Ａを移動させて他の分割筐体Ｂにドッキングさせ
る。分割筐体Ｂは既でに固定とレベル出しの行なわれた
ものであり、これに筐体Ａを移動してドッキングさせ
る。キャスタ２を上昇させて引っ込ませると足部３が接
地して固定される。接地固定した足部３は既でに移動前
にレベル出しが行なわれているから筐体Ａは固定と同時
にレベル出しが行なわれるが、他の筐体Ｂとのドッキン
グによる差はレベルの微調整によって容易に修正するこ
とができる。First, in (a), the split housing A retracts the caster 2, fixes the foot 3 by grounding, adjusts the foot 3 in and out, and performs leveling. Are also assembled. In (b), the housing A that has been leveled and assembled is moved. During the movement, the caster 2 is pushed out of the frame 1 so that the caster 2 comes into contact with the ground while the leveled foot 3 is kept as it is. Further, the caster 2 is protruded and moved so that the foot 3 does not interfere with the movement. (C)
Moves the housing A and docks it with another divided housing B. The divided casing B has already been fixed and leveled, and the casing A is moved and docked to this. When the caster 2 is raised and retracted, the foot 3 is grounded and fixed. Since the level of the foot 3 fixed to the ground has already been leveled before the movement, the level of the case A is leveled at the same time as the fixing of the case A, but the difference due to the docking with the other case B is fine adjustment of the level. Can be easily modified.
【００１９】このようにして筐体を分割して、それぞれ
単独にレベル出し組み立を行なうことによって組み立て
が容易になり、工数の低減ができる。また分割して組み
立てた筐体同志をドッキングした際には各々が既でにレ
ベル出しされており、ドッキングによる差は微小な調整
で済み、ドッキングする際の再度のレベル出しも非常に
容易であり、これによる工数低減の効果は極めて大き
い。In this manner, the housing is divided, and each of the housings is individually leveled and assembled, whereby the assembly is facilitated and the number of man-hours can be reduced. In addition, when docking the divided and assembled housing, each is already leveled, the difference due to docking is fine adjustment, and it is very easy to level again when docking Thus, the effect of reducing the number of steps is extremely large.
【００２０】[0020]
【発明の効果】以上のように本発明によれば、筐体の移
動後のレベル出しの手間が省け、筐体移動及び固定の作
業が極めて容易で工数削減に効果が大きい。As described above, according to the present invention, the trouble of leveling after the housing is moved can be omitted, the operation of moving and fixing the housing is extremely easy, and the effect of reducing the number of man-hours is great.
【図１】本発明の一実施形態の筐体固定状態図。FIG. 1 is a view showing a fixed state of a housing according to an embodiment of the present invention.
【図２】本発明の一実施形態の筐体移動状態図。FIG. 2 is a diagram showing a housing movement state according to an embodiment of the present invention.
【図３】本発明の一実施形態のキャスタ及び足部の長さ
説明図。FIG. 3 is an explanatory view of a length of a caster and a foot according to the embodiment of the present invention.
【図４】図３のキャスタ及び足部の頭部構造図。FIG. 4 is a structural view of a head of a caster and a foot shown in FIG. 3;
【図５】本発明の一実施形態のキャスタ取り付け状態
図。FIG. 5 is a view showing a caster mounted state according to the embodiment of the present invention.
【図６】本発明の他の実施形態のキャスタ取り付け状態
図。FIG. 6 is a caster mounted state diagram of another embodiment of the present invention.
【図７】本発明の一実施形態の足部取り付け状態図。FIG. 7 is a foot mounted state diagram of one embodiment of the present invention.
【図８】本発明の筐体組立方法の説明図。FIG. 8 is an explanatory view of a housing assembling method of the present invention.
【図９】従来の筐体固定状態図。FIG. 9 is a conventional housing fixed state diagram.
【図１０】従来の筐体移動状態図。FIG. 10 is a diagram showing a conventional housing moving state.
１…筐体フレーム、２…キャスタ、３…足部、２１…キ
ャスタ部分、２２…キャスタネジ部、３１…足、３２…
ネジ部分、４１，４２…雌ネジ部材。DESCRIPTION OF SYMBOLS 1 ... housing frame, 2 ... caster, 3 ... foot part, 21 ... caster part, 22 ... caster screw part, 31 ... foot, 32 ...
Screw part, 41, 42 ... female screw member.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 米満 修司 東京都中野区東中野三丁目14番20号 国際 電気株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Shuji Yonemitsu 3-14-20 Higashinakano Nakano-ku Tokyo
Claims (1)
移動するキャスタよりなる筐体移動用キャスタ機構にお
いて、キャスタ全長が足部全長より長く、且つキャスタ
部分の長さが足部全長より短かく形成され、筐体フレー
ムに出入可能に取り付けられたキャスタと、筐体移動時
にキャスタを足部先端を越えて床に接地するまで突出さ
せ、筐体固定時にキャスタ先端が床から浮き上がるまで
引っ込めるキャスタを出し入れする手段とを設けたこと
を特徴とする筐体移動用キャスタ機構。1. A casing moving caster mechanism comprising a caster for moving a casing arranged in parallel with a foot for fixing the casing, wherein a caster length is longer than a foot length and a caster portion is longer than a foot. The caster is formed shorter than the overall length and is attached to the housing frame so that it can enter and exit.When the housing moves, the caster projects beyond the tip of the foot until it touches the floor. A caster mechanism for moving the housing, comprising: means for taking in and out casters that can be retracted until they float.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23425896A JPH1076804A (en) | 1996-09-04 | 1996-09-04 | Caster mechanism for moving casing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23425896A JPH1076804A (en) | 1996-09-04 | 1996-09-04 | Caster mechanism for moving casing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1076804A true JPH1076804A (en) | 1998-03-24 |
Family
ID=16968160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23425896A Pending JPH1076804A (en) | 1996-09-04 | 1996-09-04 | Caster mechanism for moving casing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1076804A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6839937B2 (en) * | 2002-09-25 | 2005-01-11 | Bush Industries, Inc. | Leveling system |
| JP2012209589A (en) * | 2006-02-22 | 2012-10-25 | Ebara Corp | Substrate processing apparatus |
| JP2016181639A (en) * | 2015-03-25 | 2016-10-13 | 株式会社東京精密 | Prober |
| JP2017183495A (en) * | 2016-03-30 | 2017-10-05 | サムコ株式会社 | Wafer processing apparatus |
| JP2019109242A (en) * | 2015-03-25 | 2019-07-04 | 株式会社東京精密 | Enclosure |
| JP2021003964A (en) * | 2019-06-26 | 2021-01-14 | 株式会社Ｆｕｊｉ | Attaching/detaching tool for device movement |
-
1996
- 1996-09-04 JP JP23425896A patent/JPH1076804A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6839937B2 (en) * | 2002-09-25 | 2005-01-11 | Bush Industries, Inc. | Leveling system |
| JP2012209589A (en) * | 2006-02-22 | 2012-10-25 | Ebara Corp | Substrate processing apparatus |
| JP2016181639A (en) * | 2015-03-25 | 2016-10-13 | 株式会社東京精密 | Prober |
| JP2019109242A (en) * | 2015-03-25 | 2019-07-04 | 株式会社東京精密 | Enclosure |
| JP2017183495A (en) * | 2016-03-30 | 2017-10-05 | サムコ株式会社 | Wafer processing apparatus |
| JP2021003964A (en) * | 2019-06-26 | 2021-01-14 | 株式会社Ｆｕｊｉ | Attaching/detaching tool for device movement |
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