JPH107467A - Hot isostatic pressing by hot isostatic pressing capsule for ultrahigh temperature - Google Patents
Hot isostatic pressing by hot isostatic pressing capsule for ultrahigh temperatureInfo
- Publication number
- JPH107467A JPH107467A JP8161293A JP16129396A JPH107467A JP H107467 A JPH107467 A JP H107467A JP 8161293 A JP8161293 A JP 8161293A JP 16129396 A JP16129396 A JP 16129396A JP H107467 A JPH107467 A JP H107467A
- Authority
- JP
- Japan
- Prior art keywords
- capsule
- isostatic pressing
- hot isostatic
- melting point
- point metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、超高温で使用可能
な超高温用熱間等方加圧処理カプセルによる熱間等方加
圧処理方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot isostatic pressing method using an ultrahigh-temperature hot isostatic pressing capsule which can be used at an extremely high temperature.
【0002】[0002]
【従来の技術】従来、熱間等方加圧(HIP)処理に用
いられるカプセルの作製方法として、特開平6−345
545号公報に知られるように、セラミックスを主成分
とする粉末原料又は粉末成形体等の被処理体を、30〜
300μmの厚さのタンタル箔内に収納する第1工程
と、前記被処理体を前記タンタル箔内に、前記タンタル
箔を接合することで封入し、カプセルを作製する第2工
程とからなり、この接合は、モリブデン及びタングステ
ンの少なくともいずれか一方を90%以上含有する金属
材料で構成される電極を用いたシーム溶接手段により拡
散接合を行う熱間等方加圧処理用カプセルの製作方法が
開示されている。2. Description of the Related Art Hitherto, as a method for producing a capsule used for hot isostatic pressing (HIP) processing, Japanese Patent Application Laid-Open No. 6-345
As disclosed in JP-A-545-545, an object to be processed such as a powder raw material or a powder compact mainly composed of ceramics,
A first step of housing the object in a 300 μm-thick tantalum foil, and a second step of sealing the object to be processed in the tantalum foil by bonding the tantalum foil to produce a capsule. A method for manufacturing a capsule for hot isostatic pressing in which diffusion bonding is performed by seam welding using an electrode composed of a metal material containing at least one of molybdenum and tungsten in an amount of at least 90% is disclosed. ing.
【0003】これら従来のカプセルによる熱間等方加圧
処理工程を図2に示す。すなわち、図2は従来のカプセ
ルによる熱間等方加圧処理方法を説明するための工程図
である。この図2(a)に示すように、第1工程とし
て、タンタルよりなる箔2を、例えばセラミックスを主
体とする粉末原料又は粉末成形体等の被処理体1を30
〜300μmの厚さのタンタルよりなる箔2内に充填す
るために、タンタル箔を溶接シール3を行った箱状体よ
るなるカプセル4を形成する。FIG. 2 shows a conventional hot isostatic pressing process using these capsules. That is, FIG. 2 is a process chart for explaining a conventional hot isostatic pressing method using a capsule. As shown in FIG. 2 (a), as a first step, a foil 2 made of tantalum is treated with a target 1 such as a powder raw material or a powder compact mainly composed of ceramic for 30 minutes.
In order to fill the foil 2 made of tantalum having a thickness of about 300 μm, a capsule 4 made of a box-shaped body on which the tantalum foil is welded and sealed 3 is formed.
【0004】次いで、第2工程として図2(b)に示す
ように、シーム溶接手段等により接合された箱状体のカ
プセル4に被処理体1を収納し、箱状体のカプセル4の
上部を溶接シール3を行って完全密封する。その後箱状
体内を脱気管5より真空脱気する。完全に真空脱気を行
った後は、図2(c)に示すように、脱気管5を圧着し
て真空封入する。真空封入した後は、図2(d)に示す
ように高温下で高圧のガス圧力を作用させて被処理体1
を高密度焼結する。これがHIP処理法と言われ、例え
ば、1000〜2000kgf/cm2 といった大きな
圧力を作用させることが可能である。このHIP処理法
によって一次焼結体である被処理体1中の残留気孔6を
消滅させ、被処理体1の箱状体のタンタル箔より構成さ
れるカプセル4を機械加工によって図2(e)に示すよ
うに除去して完全緻密な焼結体10として製品化する。Then, as a second step, as shown in FIG. 2B, the object 1 is stored in a box-shaped capsule 4 joined by seam welding means or the like, and the upper part of the box-shaped capsule 4 Is completely sealed by welding seal 3. Thereafter, the inside of the box is evacuated from the deaeration tube 5. After completely performing the vacuum degassing, as shown in FIG. 2C, the degassing tube 5 is pressed and sealed in a vacuum. After the vacuum sealing, as shown in FIG. 2 (d), a high pressure
Is sintered at high density. This is called a HIP processing method, and it is possible to apply a large pressure of, for example, 1000 to 2000 kgf / cm 2 . The residual pores 6 in the processing target 1 which is the primary sintered body are eliminated by the HIP processing method, and the capsule 4 made of a box-shaped tantalum foil of the processing target 1 is machined as shown in FIG. As shown in FIG.
【0005】[0005]
【発明が解決しようとする課題】このような工程におけ
る、真空脱気工程において溶接シールを行う場合又は真
空封入工程において、脱気管5がタンタル等の高融点材
で製造される場合には高融点材であることと、酸化し易
い材料であることから、溶接シール及び圧着作業が極め
て困難であると言う問題がある。しかもタンタル等は高
価な高融点稀少金属であり、大型製品を得るためには製
造加工作業の困難なこととコスト高となる等の問題があ
る。In such a process, when welding sealing is performed in a vacuum degassing process or when the degassing tube 5 is made of a high melting point material such as tantalum in a vacuum encapsulating process, a high melting point is used. Since it is a material and a material that is easily oxidized, there is a problem that welding and crimping operations are extremely difficult. Moreover, tantalum and the like are expensive and high-melting rare metals, and there are problems such as difficulty in manufacturing processing and increase in cost in order to obtain large products.
【0006】[0006]
【課題を解決するための手段】本発明は上述のような問
題を解消するために鋭意開発を進めた結果、高融点金属
を用いたカプセル組立を行わず、しかも、極めて安価に
して被処理体を充填封入することを可能とした超高温用
熱間等方加圧処理カプセルによる熱間等方加圧処理方法
を提供するものである。その発明の要旨とするところ
は、 (1)粉末原料又は粉末成形体の被処理体を、炭素鋼又
はステンレス鋼で構成された容器内に高融点金属材を充
填した後収納し、該容器を溶接シールしたカプセルを真
空吸引して真空密封した後、第1次HIP処理すること
により、被処理体の周囲を高融点金属材で覆った後、該
カプセルを除去し、引続き高融点金属材で真空密封され
ている被処理体を第2次HIP処理することを特徴とす
る超高温用熱間等方加圧処理カプセルによる熱間等方加
圧処理方法。Means for Solving the Problems The present invention has been intensively developed to solve the above-mentioned problems, and as a result, the processing of the object to be processed has been made extremely inexpensive without assembling a capsule using a high melting point metal. The present invention provides a hot isostatic pressing method using a hot isostatic pressing capsule for ultra-high temperature, which enables filling and encapsulation. The gist of the invention is as follows: (1) A powder raw material or an object to be processed as a powder compact is stored in a container made of carbon steel or stainless steel after being filled with a high melting point metal material, and the container is After vacuum-sealing the vacuum-sealed capsule, the first HIP process is performed to cover the periphery of the object to be processed with a high-melting metal material, and then the capsule is removed. A hot isostatic pressing method using a hot isostatic pressing capsule for ultra-high temperature, wherein a second HIP process is performed on the object to be vacuum-sealed.
【0007】(2)粉末原料又は粉末成形体の被処理体
を、炭素鋼又はステンレス鋼で構成された容器内に高融
点金属材を充填した後に収納し、該容器を溶接シールし
たカプセルを真空吸引して真空密封した後、第1次HI
P処理することにより、被処理体の周囲を高融点金属層
で覆った後、該カプセルを除去し、次いで該高融点金属
層の表面を酸化・窒化させ、該高融点金属層表面に酸化
・窒化層を形成させた被処理体を第2次HIP処理する
ことを特徴とする超高温用熱間等方加圧処理カプセルに
よる熱間等方加圧処理方法にある。(2) A powder raw material or an object to be processed as a powder compact is housed in a container made of carbon steel or stainless steel after being filled with a high melting point metal material, and the capsule obtained by welding and sealing the container is evacuated. After suction and vacuum sealing, the first HI
By performing the P treatment, after surrounding the object to be processed with the high melting point metal layer, the capsule is removed, and then the surface of the high melting point metal layer is oxidized and nitrided, and the surface of the high melting point metal layer is oxidized and nitrided. An object of the present invention is to provide a hot isostatic pressing method using a hot isostatic pressing capsule for ultra-high temperature, which comprises subjecting an object to be processed on which a nitride layer is formed to a second HIP process.
【0008】[0008]
【発明の実施の形態】以下、本発明について図面に従っ
て詳細に説明する。図1は本発明に係るカプセルによる
熱間等方加圧処理方法を説明するための工程図である。
この図1(a)に示すように、炭素鋼やステンレス鋼よ
りなる薄板7に溶接シール3を行って、約3〜5mmの
炭素鋼やステンレス鋼の薄板7より成る箱状体のカプセ
ル4を形成する。このカプセル4内に、Cr,Mo等か
らなる高融点金属粉8を充填すると共に、Al2 O3 ,
WC−Co,Wなどからなる焼結原料である被処理体1
を図1(b)に示すように収納させる。収納させた後
は、従来法と同様に炭素鋼やステンレス鋼よりなる薄板
7の上部を溶接シールした後に真空脱気を行い、真空に
した後に図1(c)に示すように真空封入を行う。この
場合、溶接シール3や脱気管5が炭素鋼やステンレス鋼
より構成されていることから、従来のタンタル等の高融
点金属に比べて溶接シールや圧着が極めて容易に行うこ
とが出来る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a process diagram for explaining a hot isostatic pressing method using a capsule according to the present invention.
As shown in FIG. 1 (a), a thin plate 7 made of carbon steel or stainless steel is welded and sealed to form a box-shaped capsule 4 made of a thin plate 7 of carbon steel or stainless steel of about 3 to 5 mm. Form. The capsule 4 is filled with a high melting point metal powder 8 made of Cr, Mo, or the like, and Al 2 O 3 ,
Workpiece 1 which is a sintering raw material made of WC-Co, W, etc.
Is stored as shown in FIG. After being stored, the upper part of the thin plate 7 made of carbon steel or stainless steel is welded and sealed in the same manner as in the conventional method, vacuum degassing is performed, and after vacuuming, vacuum sealing is performed as shown in FIG. . In this case, since the welding seal 3 and the degassing pipe 5 are made of carbon steel or stainless steel, welding sealing and crimping can be performed extremely easily as compared with a conventional high melting point metal such as tantalum.
【0009】その後、図1(d)に示すように、第1次
HIP処理による、例えば、温度1400℃、圧力15
00kgf/cm2 なる条件で、約2時間の処理を行っ
た後、外周カプセル材である炭素鋼やステンレス鋼を機
械加工によって除去して図1(e)に示すような、被処
理体1と高融点金属層9からなる一体製品とする。この
場合、炭素鋼やステンレス鋼より構成されたカプセルと
被処理体間に高融点金属粉8を入れてHIP処理するこ
とにより、被処理体1の周囲を相対密度95%以上の高
融点金属層9で覆うことが出来る。従って、その後炭素
鋼やステンレス鋼より構成されるカプセルを除去した後
も被処理体1は高融点金属層9で真空密閉された状態と
なり、その状態で1400℃以上での第2次HIP処理
することが出来るため極めて優れた焼結体10を得るこ
とが出来る。Thereafter, as shown in FIG. 1D, for example, a temperature of 1400.degree.
After performing the treatment for about 2 hours under the condition of 00 kgf / cm 2 , carbon steel or stainless steel as the outer peripheral encapsulant is removed by machining, and the material 1 to be processed as shown in FIG. An integrated product consisting of the high melting point metal layer 9 is obtained. In this case, the high melting point metal powder 8 is put between the capsule made of carbon steel or stainless steel and the object to be processed, and the HIP treatment is performed. 9 can be covered. Therefore, after the capsule made of carbon steel or stainless steel is removed thereafter, the object 1 is vacuum-sealed with the high-melting point metal layer 9, and in this state, the second HIP processing is performed at 1400 ° C. or more. Therefore, a very excellent sintered body 10 can be obtained.
【0010】本実施例においては、高融点金属層カプセ
ルの原料として平均粒径250μm以下の高融点金属粉
末を用いた。粉末を用いたのはカプセル形状に影響をう
けず取扱いが容易なためである。また、平均粒径250
μm以下の粉末を用いたのは焼結性を考慮したためであ
る。粉末を使用した場合、表1に示すように、相対密度
95%以上の素材を得ることにより第2次HIP用カプ
セルとしての機能を確保でき、高融点金属層カプセルの
融点以下での超高温カプセリングHIP処理が可能とな
る。勿論、高融点金属層カプセルの原料としての板等の
バルク素材、あるいは平均粒径250μm以上の粉末を
使用しても本発明の具現化には何等支障はない。In this embodiment, a high melting point metal powder having an average particle size of 250 μm or less was used as a raw material for the high melting point metal layer capsule. The powder was used because it was easy to handle without being affected by the shape of the capsule. In addition, the average particle size is 250
The reason for using a powder having a size of not more than μm is that sinterability is taken into consideration. When powder is used, as shown in Table 1, by obtaining a material having a relative density of 95% or more, the function as a secondary HIP capsule can be ensured, and ultra-high-temperature encapsulation below the melting point of the high-melting metal layer capsule. HIP processing becomes possible. Of course, the use of a bulk material such as a plate as a raw material of the high melting point metal layer capsule or a powder having an average particle diameter of 250 μm or more does not hinder the embodiment of the present invention.
【0011】[0011]
【表1】 [Table 1]
【0012】一方、1400℃以上の高温での第2次H
IP処理を行う場合、一般的にグラファイトヒーターを
使用する関係から、この際加圧ガスとしてはAr,N2
等不活性ガスを使用するものであるが、グラファイトの
一部が粉粒化し、カプセル表面に付着する場合が生じ
る。この場合高融点金属層表面に付着したグラファイト
(カーボン)が反応して高融点金属層よりなるカプセル
の融点を低下させることがある。特に、高融点金属材が
Cr金属の場合にはクロム炭化物を生じ、高融点金属の
融点を下げ1500℃以下で溶融する。従って、高融点
金属材がCr金属の場合にはこれを防止する必要があ
り、そのために高融点金属層表面を酸化、窒化させて高
融点金属層表面に酸化層、あるいは窒化層を形成させて
安定化することにより、カーボンの拡散を防止し、融点
低下を防ぐことが出来る。On the other hand, secondary H at a high temperature of 1400 ° C. or more
In the case of performing the IP processing, since a graphite heater is generally used, Ar and N 2 are used as the pressurized gas at this time.
Although such an inert gas is used, a part of graphite may be granulated and adhere to the capsule surface. In this case, graphite (carbon) adhering to the surface of the high melting point metal layer may react to lower the melting point of the capsule formed of the high melting point metal layer. In particular, when the high melting point metal material is Cr metal, chromium carbide is generated, and the melting point of the high melting point metal is lowered to be melted at 1500 ° C. or less. Therefore, when the high melting point metal material is Cr metal, it is necessary to prevent this. For that purpose, the surface of the high melting point metal layer is oxidized and nitrided to form an oxide layer or a nitride layer on the surface of the high melting point metal layer. By stabilizing, diffusion of carbon can be prevented, and a decrease in melting point can be prevented.
【0013】すなわち、前述したように、高融点金属材
がCr金属の場合には、高融点金属層で覆われた被処理
体の表面を酸化することにより高融点金属層表面に酸化
層を形成させて、その表面の安定化を図るために、図1
(f)に示すように、大気中で温度800℃、約3時間
の加熱処理を行い、高融点金属層9の表面に酸化膜であ
るCr2 O3 層11を形成させ、高融点金属層表面の安
定化を図った後、例えば1600℃、1500kgf/
cm2 、約2時間の処理条件で第2次HIP処理を行う
と、完全に真空封入が保持された状態で容易に被処理体
1内の気泡6の消滅が可能となり、その後に高融点金属
層よりなるカプセルを機械加工により除去して高密度の
焼結体10の製品を得ることが出来た。このように、高
融点金属材を用いて1400℃以下の第1次HIP処理
条件で相対密度95%以上に焼結された高融点金属層を
用いたカプセルによって真空封入された被処理材が容易
に製造され、安定した第2次HIP処理が行われ、極め
て優れた高密度の焼結体10を得ることが出来るもので
ある。That is, as described above, when the high melting point metal material is Cr metal, an oxide layer is formed on the surface of the high melting point metal layer by oxidizing the surface of the object covered with the high melting point metal layer. In order to stabilize the surface,
As shown in (f), a heat treatment is performed in the air at a temperature of 800 ° C. for about 3 hours to form a Cr 2 O 3 layer 11 as an oxide film on the surface of the high melting point metal layer 9. After stabilizing the surface, for example, at 1600 ° C. and 1500 kgf /
When the second HIP process is performed under the processing conditions of about 2 cm 2 and about 2 hours, the bubbles 6 in the object 1 can be easily eliminated in a state where the vacuum sealing is completely maintained. The capsule consisting of the layers was removed by machining to obtain a high-density sintered body 10 product. As described above, the material to be vacuum-sealed by the capsule using the high melting point metal layer sintered at a relative density of 95% or more under the primary HIP processing condition of 1400 ° C. or less using the high melting point metal material can be easily formed. And a stable secondary HIP treatment is performed to obtain an extremely excellent high-density sintered body 10.
【0014】[0014]
【発明の効果】以上述べたように、本発明により、タン
タル等高価な高融点稀少金属を使用することなく、しか
もタンタル等の高融点金属を用いた溶接によるカプセル
組立を行わず、安価なカプセルを使用して容易に被処理
体を高融点金属内に真空封入が可能となり、作業的にも
容易でかつ安価な高密度焼結体を製造できる等、工業的
に極めて優れた効果を奏するものである。As described above, according to the present invention, an inexpensive capsule can be obtained without using expensive high melting point rare metals such as tantalum, and without performing capsule assembly by welding using a high melting point metal such as tantalum. It is possible to easily enclose the object to be processed in a high melting point metal in vacuum using, and it is possible to produce a high-density sintered body that is easy and inexpensive to work. It is.
【図1】本発明に係るカプセルによる熱間等方加圧処理
方法を説明するための工程図である。FIG. 1 is a process diagram for explaining a hot isostatic pressing method using a capsule according to the present invention.
【図2】従来のカプセルによる熱間等方加圧処理方法を
説明するための工程図である。FIG. 2 is a process chart for explaining a conventional hot isostatic pressing method using a capsule.
【符号の説明】 1 被処理体 2 箔 3 溶接シール 4 カプセル 5 脱気管 6 気泡 7 薄板 8 高融点金属粉 9 高融点金属層 10 焼結体 11 Cr2 O3 層[Description of Signs] 1 Object to be processed 2 Foil 3 Weld seal 4 Capsule 5 Deaeration tube 6 Bubbles 7 Thin plate 8 High melting point metal powder 9 High melting point metal layer 10 Sintered body 11 Cr 2 O 3 layer
Claims (2)
炭素鋼又はステンレス鋼で構成された容器内に高融点金
属材を充填した後に収納し、該容器を溶接シールしたカ
プセルを真空吸引して真空密封した後、第1次HIP処
理することにより、被処理体の周囲を高融点金属層で覆
った後、該カプセルを除去し、引続き高融点金属層で真
空密封されている被処理体を第2次HIP処理すること
を特徴とする超高温用熱間等方加圧処理カプセルによる
熱間等方加圧処理方法。1. An object to be processed of a powder raw material or a powder compact,
A container made of carbon steel or stainless steel is filled with a high melting point metal material and then housed. The capsule obtained by welding and sealing the container is vacuum-sealed and vacuum-sealed. After covering the periphery of the processing object with a high melting point metal layer, the capsule is removed, and the object to be processed, which is subsequently vacuum-sealed with the high melting point metal layer, is subjected to a second HIP process, and the heat for ultra-high temperature is used. Hot isostatic pressing method using hot isostatic pressing capsule.
炭素鋼又はステンレス鋼で構成された容器内に高融点金
属材を充填した後に収納し、該容器を溶接シールしたカ
プセルを真空吸引して真空密封した後、第1次HIP処
理することにより、被処理体の周囲を高融点金属層で覆
った後、該カプセルを除去し、次いで該高融点金属層の
表面を酸化・窒化させ、該高融点金属層表面に酸化・窒
化層を形成させた被処理体を第2次HIP処理すること
を特徴とする超高温用熱間等方加圧処理カプセルによる
熱間等方加圧処理方法。2. An object to be processed of a powder raw material or a powder compact,
A container made of carbon steel or stainless steel is filled with a high melting point metal material and then housed. The capsule obtained by welding and sealing the container is vacuum-sealed and vacuum-sealed. After covering the periphery of the treated body with the high-melting point metal layer, the capsule is removed, and then the surface of the high-melting point metal layer is oxidized and nitrided to form an oxidized and nitrided layer on the surface of the high melting point metal layer. A hot isostatic pressing method using a hot isostatic pressing capsule for ultra-high temperature, characterized in that the processed body is subjected to a second HIP process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP16129396A JP3600691B2 (en) | 1996-06-21 | 1996-06-21 | Hot isostatic pressing method with hot isostatic pressing capsule for ultra-high temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP16129396A JP3600691B2 (en) | 1996-06-21 | 1996-06-21 | Hot isostatic pressing method with hot isostatic pressing capsule for ultra-high temperature |
Publications (2)
Publication Number | Publication Date |
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JPH107467A true JPH107467A (en) | 1998-01-13 |
JP3600691B2 JP3600691B2 (en) | 2004-12-15 |
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JP16129396A Expired - Lifetime JP3600691B2 (en) | 1996-06-21 | 1996-06-21 | Hot isostatic pressing method with hot isostatic pressing capsule for ultra-high temperature |
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JP (1) | JP3600691B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005144510A (en) * | 2003-11-18 | 2005-06-09 | Japan Atom Energy Res Inst | High temperature isostatic pressure-joining method of high melting point combined metal material |
KR100810436B1 (en) | 2007-10-23 | 2008-03-04 | 이명배 | Manufacturing method of material for fuel injection nozzle using HIP processing |
GB2577788A (en) * | 2018-08-07 | 2020-04-08 | Bae Systems Plc | Hot isostatic pressing consolidation of powder derived parts |
CN114433842A (en) * | 2022-03-03 | 2022-05-06 | 宁波江丰热等静压技术有限公司 | Sheath for hot isostatic pressing |
-
1996
- 1996-06-21 JP JP16129396A patent/JP3600691B2/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005144510A (en) * | 2003-11-18 | 2005-06-09 | Japan Atom Energy Res Inst | High temperature isostatic pressure-joining method of high melting point combined metal material |
JP4533998B2 (en) * | 2003-11-18 | 2010-09-01 | 独立行政法人 日本原子力研究開発機構 | High-temperature isostatic pressing method for dissimilar metal materials with high melting points |
KR100810436B1 (en) | 2007-10-23 | 2008-03-04 | 이명배 | Manufacturing method of material for fuel injection nozzle using HIP processing |
GB2577788A (en) * | 2018-08-07 | 2020-04-08 | Bae Systems Plc | Hot isostatic pressing consolidation of powder derived parts |
GB2577788B (en) * | 2018-08-07 | 2021-09-29 | Bae Systems Plc | Hot isostatic pressing consolidation of powder derived parts |
US11638956B2 (en) | 2018-08-07 | 2023-05-02 | Bae Systems Plc | Hot isostatic pressing consolidation of powder derived parts |
CN114433842A (en) * | 2022-03-03 | 2022-05-06 | 宁波江丰热等静压技术有限公司 | Sheath for hot isostatic pressing |
Also Published As
Publication number | Publication date |
---|---|
JP3600691B2 (en) | 2004-12-15 |
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