JPH105660A - Coating apparatus - Google Patents
Coating apparatusInfo
- Publication number
- JPH105660A JPH105660A JP16179896A JP16179896A JPH105660A JP H105660 A JPH105660 A JP H105660A JP 16179896 A JP16179896 A JP 16179896A JP 16179896 A JP16179896 A JP 16179896A JP H105660 A JPH105660 A JP H105660A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- block
- pair
- taper block
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、エクストルージョ
ン型の塗布装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an extrusion type coating apparatus.
【０００２】[0002]
【発明が解決しようとする課題】従来より、エクストル
ージョン型の塗布装置は、均一な薄膜塗工が可能である
ことから広く利用されている。しかしながら、塗工量を
均一にするためには、塗工液の種類や塗工条件に応じて
塗布装置の内部形状を最適なものにする必要がある。そ
の内部形状は次のような方法で決定している。 実験による試行錯誤を行い、その都度異なる形状を試
作する方法。 数値的な近似計算（有限要素法等）を行い、の代
替、つまり仮想実験にて形状を検討する方法。 塗工量の均一化を内部形状に求めず（ドラスティック
な流量分布は省く）、スリット部をネジ等を用い、強引
に変形させスリット隙間を調節し、幅方向の流量分布を
マクロ的に均一化させる方法。Heretofore, an extrusion type coating apparatus has been widely used because it can perform uniform thin film coating. However, in order to make the coating amount uniform, it is necessary to optimize the internal shape of the coating device according to the type of the coating liquid and the coating conditions. The internal shape is determined by the following method. A method in which trial and error is performed by experiment, and a different shape is prototyped each time. A method of performing a numerical approximation calculation (finite element method, etc.) and examining the shape in an alternative, that is, a virtual experiment. The uniformity of the coating amount is not required for the internal shape (the drastic flow distribution is omitted). The slit part is forcibly deformed by using a screw or the like to adjust the slit gap, and the flow distribution in the width direction is macroscopically uniform. How to make it.
【０００３】前記した従来技術のうち、の方法は莫大
な費用と時間を必要とし、精度の良い装置ができる保証
がないという欠点がある。また、過剰加工の末、最初か
ら作り直しというリスクもあって非効率的であり、その
結果できた装置も汎用的な装置ではない。また、の方
法は形状決定までに莫大な計算時間を要するとともに、
最終的に実験による検証が必要で、塗工液、塗工条件が
変化すれば、と同様最初から試行錯誤しなければなら
ない。の方法では、スリット部を変化させるため、塗
工面の質に悪影響を及ぼすという欠点があり、またネジ
等によりガタを受けるために、精度の安定性に不安があ
る。[0003] Among the above-mentioned prior arts, the above method has a disadvantage that it requires enormous cost and time, and there is no guarantee that an accurate device can be obtained. In addition, there is a risk of re-making from the beginning after over-machining, which is inefficient, and the resulting device is not a general-purpose device. In addition, the method requires enormous calculation time to determine the shape,
Finally, verification by experiment is necessary, and if the coating liquid and coating conditions change, trial and error must be performed from the beginning as well. The method (1) has a drawback that the quality of the coated surface is adversely affected because the slit portion is changed, and there is a concern about the stability of the accuracy because of the backlash due to screws or the like.
【０００４】本発明は、上記のような事情に鑑みてなさ
れたものであり、その目的とするところは、塗工液の種
類や塗工条件の違いなどに対し、改めて作り直すことな
く、単純な部材変更のみで塗工量の均一化を図ることの
できる塗布装置を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above-described circumstances, and has as its object the purpose of providing a simple method without recreating a new type of coating liquid or a difference in coating conditions. It is an object of the present invention to provide a coating apparatus capable of achieving a uniform coating amount only by changing members.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の塗布装置は、ダイ下板とダイ上板及びそれ
らの間にセットされる一対の流路用ブロックと一つのテ
ーパ用ブロックからなり、前記一対の流路用ブロックに
よって塗工液の流入する入口が形成され、前記一対の流
路用ブロックと前記一つのテーパ用ブロックとによって
幅方向に広がる内部流路が形成され、前記テーパ用ブロ
ックと前記ダイ上板との間に前記内部流路から塗工液の
流出するスリットに到る隙間が形成されてなることを特
徴とするものである。In order to achieve the above object, a coating apparatus of the present invention comprises a die lower plate, a die upper plate, a pair of flow passage blocks set between them, and a taper plate. An inlet through which the coating liquid flows is formed by the pair of flow path blocks, and an internal flow path that extends in the width direction is formed by the pair of flow path blocks and the one taper block. A gap is formed between the taper block and the die upper plate, the gap reaching the slit from which the coating liquid flows out from the internal flow path.
【０００６】[0006]
【発明の実施の形態】図１は本発明に係る塗布装置をそ
の上板を省略した状態で示した構成図、図２は図１のＡ
−Ａに対応する断面図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a structural view showing a coating apparatus according to the present invention with its upper plate omitted, and FIG.
It is sectional drawing corresponding to -A.
【０００７】図に示されるように、塗布装置は、ダイ下
板１１とダイ上板１２の間に一対の流路用ブロック１３
と一つのテーパ用ブロック１４を収納し、両サイドが側
板１５で塞がれた構成になっている。そして、一対の流
路用ブロック１３によって塗工液の流入する入口２１が
形成され、一対の流路用ブロック１３と一つのテーパ用
ブロック１４とによって幅方向に広がる内部流路２２が
形成され、テーパ用ブロック１４とダイ上板１２との間
に内部流路２２から塗工液の流出するスリット２３に到
る隙間２４が形成されている。この構成の塗布装置は、
ダイ下板１１の上に一対の流路用ブロック１３と一つの
テーパ用ブロック１４を載置し、その上からダイ上板１
２を被せた後、両サイドを側板１５で塞ぐことで容易に
組み立てることができる。As shown in the figure, a coating apparatus comprises a pair of flow path blocks 13 between a die lower plate 11 and a die upper plate 12.
And one taper block 14 is housed, and both sides are closed by side plates 15. An inlet 21 through which the coating liquid flows is formed by the pair of flow path blocks 13, and an internal flow path 22 that extends in the width direction is formed by the pair of flow path blocks 13 and one taper block 14, A gap 24 is formed between the taper block 14 and the die upper plate 12 to reach the slit 23 from which the coating liquid flows out from the internal flow path 22. The coating device of this configuration
A pair of flow path blocks 13 and one taper block 14 are placed on the die lower plate 11, and the die upper plate 1
After the cover 2 is placed, both sides can be closed with the side plate 15 to facilitate assembly.
【０００８】上記構成の塗布装置においては、入口２１
より塗工液が流入し、流入した塗工液は液溜まりである
内部流路２２にて幅方向に広げられ、テーパ用ブロック
１４とダイ上板１２との間の隙間２４へ流入してスリッ
ト２３より流出させられる。そして、この塗布装置では
流路用ブロック１３とテーパ用ブロック１４を別のもの
と入れ替えることで内部流路２３及びテーパ部の形状を
変更することができる。したがって、内部流路２２の幅
方向に渡って増大する流動抵抗（圧力損失）の影響をキ
ャンセルするような各ブロック１３，１４を選択するこ
とにより、流量がスリット２３の幅方向に均一になるよ
うに補正することができる。In the coating apparatus having the above structure, the entrance 21
The coating liquid flows further, and the flowing coating liquid is spread in the width direction in the internal flow path 22 which is a liquid pool, flows into the gap 24 between the taper block 14 and the die upper plate 12, and is slit. 23. In this coating apparatus, the shapes of the internal flow path 23 and the tapered portion can be changed by replacing the flow path block 13 and the taper block 14 with different ones. Therefore, by selecting each of the blocks 13 and 14 so as to cancel the influence of the flow resistance (pressure loss) increasing in the width direction of the internal flow path 22, the flow rate becomes uniform in the width direction of the slit 23. Can be corrected.
【０００９】図３及び図４を参照して説明すれば、幅方
向において流量分布が凹型（真中が少ない）になるよう
なバラツキがある場合、現状寸法よりテーパ長さＬ
（ｘ）が短くなるか又は隙間ｔが大きくなるような形状
のブロック１３，１４を挿入するか、若しくは内部流路
２２の圧力損失係数を増やすような形状のブロック１
３，１４を挿入して流量が幅方向に均一になるように補
正する。逆に、幅方向において流量分布が凸型（真中が
多い）になるようなバラツキがある場合、現状寸法より
テーパ長さＬ（ｘ）が長くなるか又は隙間ｔが小さくな
るような形状のブロック１３，１４を挿入するか、若し
くは内部流路２２の圧力損失係数を減少させるような形
状のブロック１３，１４を挿入して流量が幅方向に均一
になるように補正する。Referring to FIGS. 3 and 4, if there is a variation such that the flow rate distribution becomes concave (the center is small) in the width direction, the taper length L becomes smaller than the current dimension.
(1) Blocks 13 and 14 having a shape in which (x) is shortened or the gap t is increased, or a block 1 having a shape in which the pressure loss coefficient of the internal flow path 22 is increased.
Corrections are made by inserting 3 and 14 so that the flow rate becomes uniform in the width direction. Conversely, if there is a variation in the flow direction in the width direction such that the flow rate distribution becomes convex (mostly in the middle), a block having a shape in which the taper length L (x) is longer or the gap t is smaller than the current dimension. The flow is corrected so that the flow rate becomes uniform in the width direction by inserting blocks 13 and 14 or by inserting blocks 13 and 14 having a shape that reduces the pressure loss coefficient of the internal flow path 22.
【００１０】[0010]
【実施例】まず、使用する塗工液について述べる。一般
に数十μｍの扁平な顔料を溶剤中に分散させた塗工液
は、レオロジーでいう下記のＣａｒｒｅａｕモデル式に
て表現できる粘度の物性を有している。 μ＝（μz −μf ）／（１＋（λγ）2 ）(1-m)/2 ＋μ
f ここで、μz ：ゼロシェア粘度、μf ：無限シェア粘
度、λ：特性時間、ｍ：流動指数、γ：剪断速度で、γ
以外は塗工液の物性値である。本実施例で使用する塗工
液のスペックは上式を用いれば次のようになる。 μz ＝５７５ｐ μf ＝３．８３ｐ λ＝１２．７５sec ｍ＝０．０７６４EXAMPLES First, the coating liquid to be used will be described. In general, a coating liquid in which a flat pigment of several tens of μm is dispersed in a solvent has physical properties having a viscosity that can be expressed by the following Carreau model formula in rheology. μ = (μ z −μ f ) / (1+ (λγ) 2 ) (1-m) / 2 + μ
f, where μ z : zero shear viscosity, μ f : infinite shear viscosity, λ: characteristic time, m: flow index, γ: shear rate, γ
The other values are the physical properties of the coating liquid. The specifications of the coating liquid used in this embodiment are as follows by using the above equation. μ z = 575 p μ f = 3.83 p λ = 12.75 sec m = 0.0764
【００１１】次に、本実施例で使用する塗工装置のスペ
ックは表１に示すようである（図３及び図４を参照）。Next, the specifications of the coating apparatus used in this embodiment are as shown in Table 1 (see FIGS. 3 and 4).
【００１２】[0012]
【表１】 [Table 1]
【００１３】以上のように液溜まり形状を変更（形状１
と形状２）し、内部流路での圧力損失を変更した時の幅
方向の流量分布を図５に示す。図５（ａ）が形状１、図
５（ｂ）が形状２をそれぞれ示している。縦軸の流量比
は平均値を１としている。また横軸の１〜１０はスリッ
トの全幅に対応している。これらの図を見れば分かるよ
うに、液溜まりの断面積が小、つまり液溜まり内での流
速増加による圧力損失増加により、形状１に比べ形状２
は流量分布が凸型になっている。したがって、形状２よ
りも形状１の塗布装置の方が塗工量の均一化が図れるこ
とが分かる。As described above, the shape of the liquid pool is changed (shape 1
FIG. 5 shows the flow rate distribution in the width direction when the pressure loss in the internal flow path is changed. FIG. 5A shows shape 1 and FIG. 5B shows shape 2 respectively. The average value of the flow ratio on the vertical axis is 1. 1 to 10 on the horizontal axis correspond to the entire width of the slit. As can be seen from these figures, due to the small cross-sectional area of the liquid pool, that is, an increase in pressure loss due to an increase in flow velocity in the liquid pool,
Has a convex flow rate distribution. Therefore, it can be seen that the coating device having the shape 1 can achieve more uniform coating amount than the coating device having the shape 2.
【００１４】なお、上記の例で挙げた塗布装置は所謂コ
ートハンガータイプと呼ばれるものであるが、他の方式
でも同様の考え方をすれば有効である。Although the coating apparatus described in the above-mentioned example is of a so-called coat hanger type, it is effective if other systems are used in the same way.
【００１５】[0015]
【発明の効果】以上説明したように、本発明の塗布装置
によれば、流路用ブロックとテーパ用ブロックの入替え
という簡単な部材変更により内部形状を変更して塗工量
の幅方向の均一化を図ることができる。また、ネジ等を
用いてスリット部を変化させないため精度の安定した装
置を得ることができ、したがって高品質な製品が得られ
る。また、試行錯誤を伴う塗布装置の開発費用、開発期
間を削減でき、製作に要するトータルコストを低減する
ことができる。As described above, according to the coating apparatus of the present invention, the inner shape is changed by a simple member change such as replacement of the block for the flow path and the block for the taper, so that the coating amount is uniform in the width direction. Can be achieved. Further, since the slit portion is not changed by using a screw or the like, a device with stable accuracy can be obtained, and thus a high quality product can be obtained. Further, the development cost and the development period of the coating apparatus involving trial and error can be reduced, and the total cost required for manufacturing can be reduced.
【図１】本発明に係る塗布装置をその上板を省略した状
態で示した構成図である。FIG. 1 is a configuration diagram showing a coating apparatus according to the present invention with its upper plate omitted.
【図２】図１のＡ−Ａに対応する断面図である。FIG. 2 is a sectional view corresponding to AA in FIG.
【図３】図１の図面に寸法記号を入れた説明図である。FIG. 3 is an explanatory diagram in which a dimension symbol is added to the drawing of FIG. 1;
【図４】図２の図面に寸法記号を入れた説明図である。FIG. 4 is an explanatory diagram in which a dimension symbol is added to the drawing of FIG. 2;
【図５】液溜まり形状を変更した時の幅方向の流量分布
を示すグラフである。FIG. 5 is a graph showing a flow rate distribution in the width direction when the shape of the liquid pool is changed.
１１ ダイ下板 １２ ダイ上板 １３ 流路用ブロック １４ テーパ用ブロック １５ 側板 ２１ 入口 ２２ 内部流路 ２３ スリット ２４ 隙間 Reference Signs List 11 die lower plate 12 die upper plate 13 flow path block 14 taper block 15 side plate 21 inlet 22 internal flow path 23 slit 24 gap
Claims (1)
ットされる一対の流路用ブロックと一つのテーパ用ブロ
ックからなり、前記一対の流路用ブロックによって塗工
液の流入する入口が形成され、前記一対の流路用ブロッ
クと前記一つのテーパ用ブロックとによって幅方向に広
がる内部流路が形成され、前記テーパ用ブロックと前記
ダイ上板との間に前記内部流路から塗工液の流出するス
リットに到る隙間が形成されてなることを特徴とする塗
布装置。1. An inlet through which a coating liquid flows by a lower die plate, an upper die plate, and a pair of flow path blocks and one taper block set therebetween. Is formed, and an internal flow channel that expands in the width direction is formed by the pair of flow channel blocks and the one taper block, and the internal flow channel is coated between the taper block and the die upper plate from the internal flow channel. A coating apparatus, wherein a gap reaching a slit from which a working liquid flows out is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16179896A JPH105660A (en) | 1996-06-21 | 1996-06-21 | Coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16179896A JPH105660A (en) | 1996-06-21 | 1996-06-21 | Coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH105660A true JPH105660A (en) | 1998-01-13 |
Family
ID=15742121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16179896A Pending JPH105660A (en) | 1996-06-21 | 1996-06-21 | Coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH105660A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002232151A (en) * | 2001-01-30 | 2002-08-16 | Sony Corp | System and method for processing substrate |
| EP1419827A2 (en) | 2002-11-12 | 2004-05-19 | Matsushita Electric Industrial Co., Ltd. | Extrusion type nozzle and coating apparatus using the same |
| JP2004148229A (en) * | 2002-10-31 | 2004-05-27 | Toppan Printing Co Ltd | Applicator and method for controlling die slit thickness |
| GB2362028B (en) * | 2000-05-04 | 2004-10-20 | Mitel Corp | Method of forming spacers in CMOS devices |
| KR101066370B1 (en) | 2009-02-18 | 2011-09-20 | 김형섭 | Injection apparatus for viscous fluid |
| KR101306872B1 (en) * | 2012-12-13 | 2013-09-10 | 주식회사 디씨엔 | Slot die |
-
1996
- 1996-06-21 JP JP16179896A patent/JPH105660A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2362028B (en) * | 2000-05-04 | 2004-10-20 | Mitel Corp | Method of forming spacers in CMOS devices |
| JP2002232151A (en) * | 2001-01-30 | 2002-08-16 | Sony Corp | System and method for processing substrate |
| JP4626062B2 (en) * | 2001-01-30 | 2011-02-02 | ソニー株式会社 | Substrate processing apparatus and substrate processing method |
| JP2004148229A (en) * | 2002-10-31 | 2004-05-27 | Toppan Printing Co Ltd | Applicator and method for controlling die slit thickness |
| EP1419827A2 (en) | 2002-11-12 | 2004-05-19 | Matsushita Electric Industrial Co., Ltd. | Extrusion type nozzle and coating apparatus using the same |
| KR101066370B1 (en) | 2009-02-18 | 2011-09-20 | 김형섭 | Injection apparatus for viscous fluid |
| KR101306872B1 (en) * | 2012-12-13 | 2013-09-10 | 주식회사 디씨엔 | Slot die |
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