JPH10510005A - 不動態化可能金属又は合金の基板を酸化層でコーティングするためのプロセス、及び酸化物層でコーティングされた燃料組立体被着層及び案内管及びスペーサグリッド - Google Patents
不動態化可能金属又は合金の基板を酸化層でコーティングするためのプロセス、及び酸化物層でコーティングされた燃料組立体被着層及び案内管及びスペーサグリッドInfo
- Publication number
- JPH10510005A JPH10510005A JP8518339A JP51833996A JPH10510005A JP H10510005 A JPH10510005 A JP H10510005A JP 8518339 A JP8518339 A JP 8518339A JP 51833996 A JP51833996 A JP 51833996A JP H10510005 A JPH10510005 A JP H10510005A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- process according
- oxidizing
- zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Glass Compositions (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.不動態化可能金属又はジルコニウム等の不動態化可能金属に基づく合金から 形成された基板(2)を金属酸化物層でコーティングするプロセスであって、 基板(2)を冷プラズマ内で励起された酸化気体と接触させ、該基板をプラ ズマの流通残光内に配設すると共に500°C以下の酸化温度に加熱することに より、基板(2)の表面予備酸化を行い、 気体の金属ハロゲン化物を冷プラズマ内で励起された酸化要素を含む反応気 体混合物と接触させることにより、プラズマの流通する残光内に配設された基板 上の金属ハロゲン化物の酸化により、金属酸化物の堆積物を生成する、 ことを特徴とするプロセス。 2.気体の金属ハロゲン化物を、所定の反応温度にまで加熱された分割形状の金 属(18)上のハロゲンの反応により形成する、 ことを特徴とする請求の範囲第1項に記載のプロセス。 3.基板(2)を冷プラズマの流通する遠残光内に配設する、 ことを特徴とする請求の範囲第1項及び第2項のいずれか1項に記載のプロ セス。 4.冷プラズマを、マイクロ波により生成する、 ことを特徴とする請求の範囲第1項乃至第3項のいずれか1項に記載のプロ セス。 5.ハロゲン化物を酸化するための気体混合物が、酸化成分、還元成分及び不活 性気体を含む、 ことを特徴とする請求の範囲第1項乃至第4項のいずれか1項に記載のプロ セス。 6.酸化成分が、純粋酸素、水素の還元成分及びアルゴンの不活性気体から成る 、 ことを特徴とする請求の範囲第5項に記載のプロセス。 7.基板(2)及びハロゲン化物を酸化するための気体混合物が、250乃至5 00°Cの反応温度に加熱される、 ことを特徴とする請求の範囲第6項に記載のプロセス。 8.予備酸化相中に、基板(2)と接触される酸化気体が、アルゴンと混合され た酸素から成る、 ことを特徴とする請求の範囲第1項乃至第7項のいずれか1項に記載のプロ セス。 9.予備酸化相中の基板及び酸化気体の温度が、250乃至500°Cである、 ことを特徴とする請求の範囲第8項に記載のプロセス。 10.基板がジルコニウム合金から成り、基板(2)上に堆積された酸化物が、ジ ルコニアZrO2から成る、 ことを特徴とする請求の範囲第1項乃至第3項のいずれか1項に記載のプロ セス。 11.気体の四塩化ジルコニウムZrCl4を得るために、160乃至350°C の温度まで加熱された分割形状のジルコニウム上に、塩素を含む気体が作用する 、 ことを特徴とする請求の範囲第2項に記載のプロセス。 12.塩素を含む気体が、塩素とアルゴンの混合物であり、分割形状のジルコニウ ム及び気体混合物の温度が、300°Cに近い、 ことを特徴とする請求の範囲第11項に記載のプロセス。 13.請求の範囲第1項乃至第12項のいずれか1項によるプロセスにより得た保 護コーティング層を含みジルコニウム合金から形成された、原子炉の組立体の燃 料ロッドの被着管(2)。 14.請求の範囲第1項乃至第12項のいずれか1項によるプロセスにより得た保 護コーティング層を含む、原子炉の燃料組立体用のスペーサグリッド。 15.請求の範囲第1項乃至第12項のいずれか1項によるプロセスにより得た耐 磨耗性のコーティング層をその内表面の少なくとも一部に亘り含む、原子炉の燃 料組立体用の案内管。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR94/14466 | 1994-12-01 | ||
FR9414466A FR2727691A1 (fr) | 1994-12-01 | 1994-12-01 | Procede de revetement d'un substrat en metal ou alliage passivable, par une couche d'oxyde, et tube de gainage et grille-entretoise pour assemblage combustible revetus d'une couche d'oxyde |
PCT/FR1995/001576 WO1996017105A1 (fr) | 1994-12-01 | 1995-11-29 | Procede de realisation d'une couche en oxyde |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10510005A true JPH10510005A (ja) | 1998-09-29 |
JP4097042B2 JP4097042B2 (ja) | 2008-06-04 |
Family
ID=9469386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51833996A Expired - Fee Related JP4097042B2 (ja) | 1994-12-01 | 1995-11-29 | 不動態化可能金属又は合金の基板を酸化物層でコーティングするための方法、及び酸化物層でコーティングされた燃料組立体被着層及び案内管及びスペーサグリッド |
Country Status (8)
Country | Link |
---|---|
US (1) | US6033493A (ja) |
EP (1) | EP0795042B1 (ja) |
JP (1) | JP4097042B2 (ja) |
KR (1) | KR100382689B1 (ja) |
DE (1) | DE69505842T2 (ja) |
FR (1) | FR2727691A1 (ja) |
WO (1) | WO1996017105A1 (ja) |
ZA (1) | ZA9510173B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001131752A (ja) * | 1999-11-04 | 2001-05-15 | Anelva Corp | プラズマクリーニング方法 |
JP2020510828A (ja) * | 2017-04-18 | 2020-04-09 | カチョン ユニバーシティ オブ インダストリー−アカデミック コーオペレイション ファウンデイション | 多層構造核燃料被覆管及び多層構造核燃料被覆管の製造方法 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6512806B2 (en) * | 1996-02-23 | 2003-01-28 | Westinghouse Atom Ab | Component designed for use in a light water reactor, and a method for the manufacture of such a component |
KR100407728B1 (ko) * | 2001-03-21 | 2003-12-01 | 한국원자력연구소 | 플라즈마를 이용한 사용후핵연료 산화환원 장치 |
US6488783B1 (en) * | 2001-03-30 | 2002-12-03 | Babcock & Wilcox Canada, Ltd. | High temperature gaseous oxidation for passivation of austenitic alloys |
US7601225B2 (en) * | 2002-06-17 | 2009-10-13 | Asm International N.V. | System for controlling the sublimation of reactants |
JP4585852B2 (ja) * | 2002-07-30 | 2010-11-24 | エーエスエム アメリカ インコーポレイテッド | 基板処理システム、基板処理方法及び昇華装置 |
US20040086648A1 (en) * | 2002-10-30 | 2004-05-06 | Xiangyang Zhou | Hydrothermal deposition of thin and adherent metal oxide coatings for high temperature corrosion protection |
US7156380B2 (en) * | 2003-09-29 | 2007-01-02 | Asm International, N.V. | Safe liquid source containers |
US7833353B2 (en) * | 2007-01-24 | 2010-11-16 | Asm Japan K.K. | Liquid material vaporization apparatus for semiconductor processing apparatus |
KR100804132B1 (ko) | 2007-02-21 | 2008-02-19 | 한국원자력연구원 | 반응가스의 펄스분사를 이용한 사용후핵연료 산화환원반응장치 및 그 방법 |
US20090022259A1 (en) * | 2007-07-20 | 2009-01-22 | General Electric Company | Fuel rod with wear-inhibiting coating |
US8116423B2 (en) | 2007-12-26 | 2012-02-14 | Thorium Power, Inc. | Nuclear reactor (alternatives), fuel assembly of seed-blanket subassemblies for nuclear reactor (alternatives), and fuel element for fuel assembly |
WO2009082254A1 (fr) | 2007-12-26 | 2009-07-02 | Thorium Power Inc. | Réacteur nucléaire (et variantes), assemblage de combustible constitué de modules d'allumage et de reproduction (et variantes) et crayon de combustible pour assemblage de combustible |
US8343583B2 (en) | 2008-07-10 | 2013-01-01 | Asm International N.V. | Method for vaporizing non-gaseous precursor in a fluidized bed |
US8012876B2 (en) * | 2008-12-02 | 2011-09-06 | Asm International N.V. | Delivery of vapor precursor from solid source |
CA2748367C (en) | 2008-12-25 | 2016-11-29 | Thorium Power, Inc. | A light-water reactor fuel assembly and a fuel element thereof |
US9117773B2 (en) * | 2009-08-26 | 2015-08-25 | Asm America, Inc. | High concentration water pulses for atomic layer deposition |
WO2011143172A1 (en) | 2010-05-11 | 2011-11-17 | Thorium Power, Inc. | Fuel assembly with metal fuel alloy kernel and method of manufacturing thereof |
US10192644B2 (en) | 2010-05-11 | 2019-01-29 | Lightbridge Corporation | Fuel assembly |
US10170207B2 (en) | 2013-05-10 | 2019-01-01 | Thorium Power, Inc. | Fuel assembly |
US9911511B2 (en) | 2012-12-28 | 2018-03-06 | Global Nuclear Fuel—Americas, LLC | Fuel rods with wear-inhibiting coatings and methods of making the same |
HUE051186T2 (hu) * | 2016-09-28 | 2021-03-01 | Commissariat Energie Atomique | Nukleáris komponens fém szubsztráttal, eljárás annak elõállítására DLI-MOCVD módszerrel és alkalmazásai oxidáció/hidridképzõdés szabályozására |
CN113718190A (zh) * | 2021-09-15 | 2021-11-30 | 西安稀有金属材料研究院有限公司 | 一种提升锆合金耐沸腾硝酸腐蚀性与耐磨性的方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4239819A (en) * | 1978-12-11 | 1980-12-16 | Chemetal Corporation | Deposition method and products |
US4297150A (en) * | 1979-07-07 | 1981-10-27 | The British Petroleum Company Limited | Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity |
CH654334A5 (de) * | 1982-09-02 | 1986-02-14 | Maschf Augsburg Nuernberg Ag | Verfahren zur bildung einer korrosionsbestaendigen oxidischen schicht auf einem metallischen substrat sowie verwendung dieser schicht. |
CA1329067C (en) * | 1987-01-20 | 1994-05-03 | Vinod K. Sarin | Method for depositing composite coatings |
FR2652591B1 (fr) * | 1989-10-03 | 1993-10-08 | Framatome | Procede d'oxydation superficielle d'une piece en metal passivable, et elements d'assemblage combustible en alliage metallique revetus d'une couche d'oxyde protectrice. |
JPH0614582B2 (ja) * | 1990-11-19 | 1994-02-23 | 日本シイエムケイ株式会社 | ホールマスキング装置 |
-
1994
- 1994-12-01 FR FR9414466A patent/FR2727691A1/fr active Granted
-
1995
- 1995-11-29 WO PCT/FR1995/001576 patent/WO1996017105A1/fr active IP Right Grant
- 1995-11-29 JP JP51833996A patent/JP4097042B2/ja not_active Expired - Fee Related
- 1995-11-29 EP EP95941160A patent/EP0795042B1/fr not_active Expired - Lifetime
- 1995-11-29 KR KR1019970703711A patent/KR100382689B1/ko not_active IP Right Cessation
- 1995-11-29 DE DE69505842T patent/DE69505842T2/de not_active Expired - Fee Related
- 1995-11-29 US US08/849,408 patent/US6033493A/en not_active Expired - Fee Related
- 1995-11-30 ZA ZA9510173A patent/ZA9510173B/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001131752A (ja) * | 1999-11-04 | 2001-05-15 | Anelva Corp | プラズマクリーニング方法 |
JP2020510828A (ja) * | 2017-04-18 | 2020-04-09 | カチョン ユニバーシティ オブ インダストリー−アカデミック コーオペレイション ファウンデイション | 多層構造核燃料被覆管及び多層構造核燃料被覆管の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO1996017105A1 (fr) | 1996-06-06 |
DE69505842T2 (de) | 1999-04-29 |
EP0795042A1 (fr) | 1997-09-17 |
JP4097042B2 (ja) | 2008-06-04 |
EP0795042B1 (fr) | 1998-11-04 |
FR2727691A1 (fr) | 1996-06-07 |
ZA9510173B (en) | 1997-05-30 |
US6033493A (en) | 2000-03-07 |
FR2727691B1 (ja) | 1997-02-28 |
DE69505842D1 (de) | 1998-12-10 |
KR100382689B1 (ko) | 2003-07-18 |
KR980700452A (ko) | 1998-03-30 |
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